CN1612649A - Organic light-emitting display panel and its barrier substrate - Google Patents

Abstract

The present invention relates to an organic light emitting display panel, comprising a substrate, a plurality of protrusions, at least one barrier layer, at least one flat layer and at least one organic light emitting area, wherein the protrusions are formed on the substrate; the barrier layer is formed on the substrate and the protrusions; the flat layer is formed on the barrier layer and/or the substrate; the organic light emitting area is formed on the flat layer, and the organic light emitting area has at least one pixel.

Description

Organic light-emitting display panel and its barrier substrate

technical field

The present invention relates to a display panel and its barrier substrate, in particular to an organic light emitting display panel and its barrier substrate.

Background technique

In recent years, flat panel displays are developing toward high brightness, planarization, thinness, and energy saving. In view of this, organic light emitting (OEL) display devices have become one of the most promising development directions in the optoelectronic industry. An organic light-emitting display device is a device that uses the self-luminous properties of organic functional materials to achieve display effects. According to the molecular weight of organic functional materials, it can be divided into small molecule organic light-emitting display devices (small molecule OLED) , SM-OLED) and polymer light-emitting display (polymer light-emitting display, PLED) two categories.

Since the organic light-emitting element (organic functional material) is very sensitive to moisture and oxygen, it is easy to produce a dark spot (Dark Spot) after contact with the atmosphere. Therefore, in order to ensure the service life of the organic light-emitting element, as shown in Figure 1, the current The organic light-emitting display panel 6 is coated on the substrate 62 and the organic light-emitting region 63 by a sealing film 61 to prevent moisture and oxygen from entering the organic light-emitting region 63 .

On the other hand, with the development of portable electronic devices, traditional glass substrates have been unable to meet the requirements of light, thin, short, small needs. Therefore, it has become a current development trend to replace glass substrates with light-weight, impact-resistant, and flexible plastic substrates.

However, the permeability of water vapor to general plastic substrates (about 10 ^-1 -10g/m ² /day at room temperature) is much greater than that of glass substrates (10 ^-5 g/m ² /day at room temperature Below), the ability of plastic substrates to block water vapor and oxygen cannot provide sufficient protection for components like glass substrates. Therefore, how to strengthen the ability of plastic substrates to block water vapor and oxygen has become one of the key technologies for breakthroughs.

Contents of the invention

The object of the present invention is to overcome the deficiencies and defects of the prior art, and provide an organic light-emitting display panel and its barrier substrate that prevent the intrusion of moisture and oxygen.

To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, several protrusions, at least one barrier layer, at least one flat layer, and at least one organic light-emitting region, wherein the protrusions are formed on the substrate The blocking layer is formed on the substrate and the protrusion; the planar layer is formed on the blocking layer and/or the substrate; the organic light emitting region is formed on the planar layer, and the organic light emitting region has at least one pixel.

To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, at least one barrier layer, and at least one organic light-emitting region, wherein the barrier layer is formed on the substrate, and the barrier layer is made of an inorganic material; the organic light-emitting The region is formed on the barrier layer, and the organic light emitting region has at least one pixel.

To achieve the above object, an organic light-emitting display panel according to the present invention includes a substrate, at least one barrier layer; and at least one organic light-emitting region, wherein at least one layer of the barrier layer is formed on the substrate by photochemical vapor deposition ; The organic light emitting region is formed on the blocking layer, and the organic light emitting region has at least one pixel.

To achieve the above object, a barrier substrate according to the present invention includes a substrate, several protrusions, at least one barrier layer and at least one flat layer, wherein the protrusions are formed on the substrate; the barrier layer is formed on the protrusions and and/or on the substrate; the flat layer is formed on the barrier layer and/or the substrate.

To achieve the above object, a barrier substrate according to the present invention includes a substrate and at least one barrier layer, wherein the barrier layer is formed on the substrate, and the barrier layer is made of an inorganic material.

Based on the above, in the organic light-emitting display panel and the barrier substrate thereof of the present invention, a one-layer or multi-layer barrier layer is formed on the substrate. Compared with the prior art, the organic light emitting display panel and its barrier substrate of the present invention can prevent moisture and oxygen from invading into the organic light emitting region (organic light emitting element) through the substrate, thereby prolonging the service life of the organic light emitting display panel. In addition, the barrier layer of the multi-layer structure can stagger the position of the pores between the barrier layers, effectively compensate for the defects of the film layer, increase the penetration path of water vapor, and further prevent water vapor and oxygen from invading the interior of the element. Moreover, the multi-layer barrier layer in the present invention can be composed of barrier layers with different Young's modulus, and the barrier layer with lower Young's modulus is sandwiched between the barrier layers with higher Young's modulus To produce a buffering effect, thereby reducing the stress between the barrier layers. Furthermore, several protrusions are used to make the barrier layer into a wave shape, which can increase the contact area and adhesion between the barrier layer and other parts (substrate and protrusions), and at the same time reduce the stress generated during thermal expansion and contraction , when the flexible substrate is bent and deformed, the stress generated is smaller, and the barrier layer is less likely to be cracked. In addition, the barrier layer can be formed by photochemical vapor deposition. Photochemical vapor deposition can not only provide sufficient film formation rate at low temperature (below about 300°C), but also, because the film structure formed at low temperature is relatively loose, it can reduce the The internal stress of the film layer can reduce the possibility of peeling off the film layer.

Description of drawings

FIG. 1 is a schematic diagram of an existing organic light emitting display panel;

2A and 2B are a set of schematic diagrams of an organic light emitting display panel according to a first embodiment of the present invention;

3 is a schematic diagram of an organic light emitting display panel according to a second embodiment of the present invention;

4 is another schematic diagram of an organic light emitting display panel according to a second embodiment of the present invention;

5 is a schematic diagram of an organic light emitting display panel according to a third embodiment of the present invention;

6 is a schematic diagram of a barrier substrate according to a fourth embodiment of the present invention;

7 is a schematic diagram of a barrier substrate according to a fifth embodiment of the present invention;

FIG. 8 is another schematic diagram of a barrier substrate according to a fifth embodiment of the present invention.

Explanation of symbols in the figure

1 organic light emitting display panel

11 Substrate

12 protrusions

13 barrier layer

14 flat layers

15 organic light-emitting area

151 pixels

1511 first electrode

1512 organic functional layer

1513 Second electrode

16 sealing elements

17 protective layer

2 organic light emitting display panel

21 Substrate

221, 222, 223, 22 barrier layer

23 organic light-emitting area

231 pixels

2311 first electrode

2312 organic functional layer

2313 Second electrode

24 sealing elements

25 protrusion

26 flat layers

3 organic light emitting display panel

31 Substrate

32 barrier layer

33 organic light-emitting area

331 pixels

3311 first electrode

3312 organic functional layer

3313 Second Electrode

34 sealing elements

4 barrier substrate

41 Substrate

42 protrusion

43 barrier layer

44 flat layers

5 barrier substrate

51 Substrate

52 barrier layer

53 flat layers

54 protrusion

6 organic light emitting display panel

61 sealing film

62 Substrate

63 organic light-emitting area

Detailed ways

The organic light emitting display panel and its barrier substrate according to preferred embodiments of the present invention will be described below with reference to related drawings.

first embodiment

As shown in FIG. 2A and FIG. 2B , the organic light emitting display panel 1 according to the first embodiment of the present invention at least includes a substrate 11 , several protrusions 12 , a barrier layer 13 , a flat layer 14 and an organic light emitting region 15 , wherein, the protrusion 12 is formed on the substrate 11; the barrier layer 13 is formed on the substrate 11 and the protrusion 12; the flat layer 14 is formed on the barrier layer 13 and/or the substrate 11; the organic light emitting region 15 is formed on the flat On the layer 14 , and the organic light emitting region 15 has several pixels 151 .

In this embodiment, the substrate 11 may be a flexible substrate or a rigid substrate. In addition, the substrate 11 is a polymer substrate, wherein the polymer can be plastic (plastic), polycarbonate (polycarbonate, PC) substrate, polyester (polyester, PET) substrate, cyclic olefin copolymer (cyclic olefin copolymer, COC) substrate Or metal chromium substrate-cycloolefin copolymer (metallocene-based cyclic olefin copolymer, mCOC) substrate and so on.

In addition, as shown in FIG. 2A and FIG. 2B , the protrusion 12 of this embodiment is formed on the substrate 11 . In this embodiment, the protrusions 12 are connected to each other (as shown in FIG. 2A ). Of course, the protruding portion 12 can also be provided independently (as shown in FIG. 2B ).

In this embodiment, the material of the protruding portion 12 is waterproof material, such as but not limited to photosensitive material (such as photoresist) or silicon dioxide.

Furthermore, the shape of the protruding portion 12 in this embodiment may be a block shape, a long block shape, or the like. In addition, in this embodiment, as shown in FIG. 2A , the angle θ between the side surface of the protrusion 12 and the substrate 11 is greater than or equal to 90°, which is to avoid discontinuity of the barrier layer 13 formed subsequently. Situation, so that water vapor and oxygen enter through the pores.

In addition, as shown in FIG. 2A and FIG. 2B , the barrier layer 13 is formed on the substrate 11 and the protruding portion 12 . Since the barrier layer 13 is formed on the protrusion 12 and/or the substrate 11, the barrier layer 13 presents a wave-like structure, which not only increases the gap between the barrier layer 13 and other parts (the protrusion 12 and the substrate 11). The contact area and adhesion can reduce the stress of thermal expansion and contraction. In addition, when the substrate 11 is a flexible substrate, when the substrate 11 is bent and deformed, the barrier layer 13 generates less stress and is less likely to crack.

In this embodiment, the barrier layer 13 can be formed by photochemical vapor deposition, wherein the photochemical vapor deposition can be vacuum ultraviolet (Vacuum Ultra-Violet, VUV) chemical vapor deposition.

Since the photochemical vapor deposition method uses photons to decompose the excited reaction gas, the reaction can be carried out at a low temperature (below about 300° C.). In addition, in this embodiment, since the structure of the barrier layer 13 formed by the photochemical vapor deposition method is relatively loose, the internal stress of the film layer can be reduced, so the barrier layer 13 can be prevented from peeling off. Of course, the barrier layer 13 can also be formed by sputtering.

In this embodiment, the barrier layer 13 is an inorganic material, wherein the barrier layer 13 is selected from silicon oxide (SiO _x ), diamond-like carbon (DLC), silicon nitride (SiN _x ), silicon oxynitride ( At least one of SiO _x N _y ), aluminum oxide (Al ₂ O ₃ ) and metals (including but not limited to aluminum, copper, gold and silver). Here, the barrier layer 13 is waterproof, which can improve the reliability of the organic light emitting display panel 1 .

In addition, referring to FIG. 2A and FIG. 2B again, the flat layer 14 is formed on the barrier layer 13 and/or the substrate 11 . In this embodiment, the flat layer 14 is used to cover the uneven barrier layer 13 for planarization. At the same time, the planar layer 14 can cover the fine particles existing in the manufacturing process. In addition, the flat layer 14 also has waterproof and oxygen-proof functions, which can protect the subsequently formed organic light-emitting region 15 from moisture and oxygen.

In this embodiment, the flat layer 14 is made of inorganic material, and the flat layer 14 is selected from at least one of silicon oxide, diamond-like film, silicon nitride, silicon oxynitride, and aluminum oxide.

In addition, please refer to FIG. 2A and FIG. 2B again, the organic light-emitting region 15 has several pixels 151, and the pixels 151 include a first electrode 1511, at least one organic functional layer 1512 and a second electrode 1513 in sequence, and the first electrode 1511 Located on the planar layer 14.

In this embodiment, the first electrode 1511 is formed on the flat layer 14 by sputtering or ion plating. Here, the first electrode 1511 is usually used as an anode and its material is usually a transparent conductive metal oxide, such as indium tin oxide (ITO), aluminum zinc oxide (AlZnO) or indium zinc oxide (IZO).

In addition, the organic functional layer 1512 generally includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer (not shown in the figure). Wherein, the organic functional layer 1512 is formed on the first electrode 1511 by evaporation, spin coating, ink jet printing or printing. In addition, the light emitted by the organic functional layer 1512 may be blue light, green light, red light, white light, other monochromatic light or a color light formed by combining monochromatic light.

Referring to FIG. 2A and FIG. 2B again, the second electrode 1513 is located on the organic functional layer 1512 . Here, the second electrode 1513 is formed on the organic functional layer 1512 by evaporation or sputtering. In addition, the material of the second electrode 1513 can be selected from but not limited to aluminum (Al), calcium (Ca), magnesium (Mg), indium (In), tin (Sn), manganese (Mn), silver (Ag), Gold (Au) and alloys containing magnesium (such as magnesium silver (Mg:Ag) alloy, magnesium indium (Mg:In) alloy, magnesium tin (Mg:Sn) alloy, magnesium antimony (Mg:Sb) alloy and magnesium tellurium ( Mg:Te) alloy), etc.

Referring to FIG. 2A again, the organic light emitting display panel 1 of this embodiment further includes a sealing element 16 disposed on the planar layer 14 . Here, the sealing element 16 can be a cover plate, which is bonded to the flat layer 14 with an adhesive. Since the organic light-emitting region 15 (organic light-emitting element) is very sensitive to moisture and oxygen, dark spots are likely to occur after contact with the atmosphere, so the sealing element 16 is added to prevent the organic light-emitting region 15 from being affected by moisture and oxygen.

In addition, referring to FIG. 2B again, the organic light emitting display panel 1 of this embodiment further includes a protective layer 17 covering the organic light emitting region 15 and the flat layer 14 . Here, the protective layer 17 is also used to prevent the organic light-emitting region 15 from being affected by moisture and oxygen.

second embodiment

As shown in FIG. 3, the organic light emitting display panel 2 according to the second embodiment of the present invention at least includes a substrate 21, several barrier layers 22 and an organic light emitting region 23, wherein the barrier layer 22 is formed on the substrate 21, and The barrier layer is made of inorganic material; the organic light emitting region 23 is formed on the barrier layer 22 , and the organic light emitting region 23 has several pixels 231 .

In this embodiment, at least one of the barrier layers 22 can be formed by photochemical vapor deposition. Of course, at least one of the barrier layers 22 can also be formed by sputtering.

As mentioned above, the structure of the barrier layer 22 formed by the photochemical vapor deposition method is relatively loose, which can reduce the internal stress of the film layer, so that the barrier layer 22 can be prevented from peeling off.

In this embodiment, the barrier layer 22 is an inorganic material, wherein the barrier layer 22 is selected from silicon oxide, diamond-like film, silicon nitride, silicon oxynitride, aluminum oxide and metals (including but not limited to aluminum, copper, gold and silver) at least one of them. Here, the barrier layer 22 is waterproof, which can further improve the reliability of the organic light emitting display panel 2 .

Furthermore, the barrier layer 22 of this embodiment can also have waterproof and cushioning functions at the same time. For example: as shown in Figure 3, barrier layers 221, 223 (materials such as silicon nitride, silicon oxynitride, diamond-like film, aluminum oxide and metals (such as aluminum, copper, gold and silver)) have extremely high Water resistance can effectively prevent the intrusion of water vapor and oxygen; and the barrier layer 222 (material such as silicon oxide) sandwiched between the barrier layers 221 and 223 has a small mechanical strength, so that it has a buffer function and can effectively The internal stress of the barrier layer 22 is reduced as much as possible. This kind of multi-layer structure can stagger the positions of the pores between the barrier layers 22, effectively compensate for the defects of the film layer, and also increase the penetration path of water vapor, further enhancing the waterproof effect.

Referring to FIG. 3 again, the organic light-emitting region 23 has several pixels 231, the pixels 231 sequentially include a first electrode 2311, at least one organic functional layer 2312 and a second electrode 2313, and the first electrode 2311 is located on the barrier layer 22 superior.

The features and functions of the substrate 21, the organic light emitting region 23, the pixel 231, the first electrode 2311, the organic functional layer 2312, and the second electrode 2313 in this embodiment are the same as those in the first embodiment, and will not be repeated here. .

Referring to FIG. 3 again, the organic light emitting display panel 2 of this embodiment further includes a sealing element 24 .

In addition, the organic light emitting display panel 2 of this embodiment further includes a protection layer (not shown in the figure) covering the organic light emitting region 23 and the blocking layer 22 .

In this embodiment, the features and functions of the sealing element 24 and the protective layer are the same as those of the same elements in the first embodiment, and will not be repeated here.

In addition, referring to FIG. 4 again, the organic light emitting display panel 2 of this embodiment further includes a plurality of protrusions 25 formed on the substrate 21 . Here, the features and functions of the protruding portion 25 are the same as those of the protruding portion 12 in the first embodiment, and will not be repeated here.

In addition, referring to FIG. 4 again, the organic light-emitting display panel 2 of this embodiment further includes a flat layer 26, which is formed between the barrier layer 22 and/or between the substrate 21 and the organic light-emitting region 23. Here, the flat layer The features and functions of 26 are the same as those of the flat layer 14 in the first embodiment, and will not be repeated here.

third embodiment

Please refer to FIG. 5 again. The organic light-emitting display panel 3 according to the third embodiment of the present invention includes at least a substrate 31, a barrier layer 32 and an organic light-emitting region 33, wherein the barrier layer 32 is formed on the substrate 31 by photochemical vapor deposition. top; the organic light emitting region 33 is formed on the blocking layer 32 , and the organic light emitting region 33 has several pixels 331 .

Here, the pixel 331 sequentially includes a first electrode 3311 , at least one organic functional layer 3312 and a second electrode 3313 , and the first electrode 3311 is located on the barrier layer 32 .

In addition, as shown in FIG. 5 , the barrier layer 32 is formed on the substrate 31 by photochemical vapor deposition. Herein, the photochemical vapor deposition method may be vacuum ultraviolet (Vacuum Ultra-Violet, VUV) chemical vapor deposition method. As mentioned above, the structure of the barrier layer 32 formed by the photochemical vapor deposition method is relatively loose, which can reduce the internal stress of the film layer, so the barrier layer 32 can be prevented from peeling off. Furthermore, the material of the barrier layer 32 is the same as that of the barrier layer 13 in the first embodiment, and will not be repeated here.

Furthermore, the features and functions of the substrate 31, the organic light emitting region 33, the pixel 331, the first electrode 3311, the organic functional layer 3312, and the second electrode 3313 in this embodiment are the same as those in the first embodiment. This will not be repeated here.

Referring to FIG. 5 again, the organic light emitting display panel 3 of this embodiment further includes a sealing element 34 .

In addition, the organic light emitting display panel 3 of this embodiment further includes a protection layer (not shown in the figure) covering the organic light emitting region 33 and the blocking layer 32 .

In this embodiment, the features and functions of the sealing element 34 and the protective layer are the same as those of the same elements in the first embodiment, and will not be repeated here.

Fourth embodiment

As shown in FIG. 6, the barrier substrate 4 of the fourth embodiment of the present invention at least includes a substrate 41, several protrusions 42, a barrier layer 43 and a flat layer 44, wherein the protrusions 42 are formed on the substrate 41; The barrier layer 43 is formed on the protrusion 42 and/or the substrate 41 ; the flat layer 44 is formed on the barrier layer 43 and/or the substrate 41 .

The features and functions of the substrate 41 , the protruding portion 42 , the barrier layer 43 and the flat layer 44 in this embodiment are the same as those in the first embodiment, and will not be repeated here.

fifth embodiment

As shown in FIG. 7 , the barrier substrate 5 of the fifth embodiment of the present invention includes at least one substrate 51 and several barrier layers 52 , wherein the barrier layer 52 is formed on the substrate 51 and the barrier layer 52 is made of inorganic material.

The features and functions of the substrate 51 and the barrier layer 52 in this embodiment are the same as those in the second embodiment, and will not be repeated here.

As shown in FIG. 8 , the barrier substrate 5 of this embodiment further includes several protrusions 54 formed on the substrate 51 .

As shown in FIG. 8 , the barrier substrate 5 of this embodiment further includes a flat layer 53 formed on the substrate 51 and/or the barrier layer 52 .

The features and functions of the protruding portion 54 and the flat layer 53 in this embodiment are the same as those in the second embodiment, and will not be repeated here.

In the organic light-emitting display panel and its barrier substrate of the present invention, a one-layer or multi-layer barrier layer is formed on the substrate. Compared with the prior art, the organic light emitting display panel and its barrier substrate of the present invention can prevent moisture and oxygen from invading into the organic light emitting region (organic light emitting element) through the substrate, thereby prolonging the service life of the organic light emitting display panel. In addition, the barrier layer of the multi-layer structure can stagger the position of the pores between the barrier layers, effectively compensate for the defects of the film layer, increase the penetration path of water vapor, and further prevent water vapor and oxygen from invading the interior of the element. Moreover, the multi-layer barrier layer in the present invention can be composed of barrier layers with different Young's modulus, and the barrier layer with lower Young's modulus is sandwiched between the barrier layers with higher Young's modulus To produce a buffering effect, thereby reducing the stress between the barrier layers. Furthermore, several protrusions are used to make the barrier layer into a wave shape, which can increase the contact area and adhesion between the barrier layer and other parts (substrate and protrusions), and at the same time reduce the stress generated during thermal expansion and contraction , when the flexible substrate is bent and deformed, the stress generated is smaller, and the barrier layer is less likely to be cracked. In addition, the barrier layer can be formed by photochemical vapor deposition. Photochemical vapor deposition can not only provide sufficient film formation rate at low temperature (below about 300°C), but also, because the film structure formed at low temperature is relatively loose, it can reduce the The internal stress of the film layer can reduce the possibility of peeling off the film layer.

The above descriptions are illustrative only, not restrictive. Any equivalent modification or change without departing from the spirit and scope of the present invention shall be included in the scope of the claims.

Claims (36)

1. an organic electroluminescence display panel is characterized in that, comprises:

One substrate;

Several teats are formed on the substrate;

At least one barrier layer is formed on substrate and the teat;

At least one flatness layer is formed on barrier layer and/or the substrate; And

At least one organic luminous zone, it is formed on the flatness layer, and organic luminous zone has at least one pixel.

2. organic electroluminescence display panel as claimed in claim 1, wherein, substrate be selected from rigid substrates, flexible base plate and polymeric substrate at least one of them.

3. organic electroluminescence display panel as claimed in claim 1, wherein, the material of teat is a waterproof material.

4. organic electroluminescence display panel as claimed in claim 1, wherein, barrier layer and flatness layer are inorganic.

5. organic electroluminescence display panel as claimed in claim 4, wherein, barrier layer be selected from silica, silicon nitride, class diamond film, silicon oxynitride, alundum (Al and metal at least one of them.

6. organic electroluminescence display panel as claimed in claim 4, wherein, flatness layer be selected from silica, class diamond film, silicon nitride, silicon oxynitride and alundum (Al at least one of them.

7. organic electroluminescence display panel as claimed in claim 1, wherein, barrier layer has water proofing property.

8. organic electroluminescence display panel as claimed in claim 1, wherein, so one deck at least of barrier layer forms with photo chemical vapor deposition method or sputtering method.

9. organic electroluminescence display panel as claimed in claim 1, wherein, pixel comprises one first electrode, at least one organic functional layer and one second electrode in regular turn.

10. an organic electroluminescence display panel is characterized in that, comprises:

One substrate;

At least one barrier layer is formed on the substrate, and barrier layer is an inorganic; And

At least one organic luminous zone, it is formed on the barrier layer, and organic luminous zone has at least one pixel.

11. organic electroluminescence display panel as claimed in claim 10, wherein, substrate be selected from rigid substrates, flexible base plate and polymeric substrate at least one of them.

12. organic electroluminescence display panel as claimed in claim 10, wherein, barrier layer be selected from silica, silicon nitride, class diamond film, silicon oxynitride, alundum (Al and metal at least one of them.

13. organic electroluminescence display panel as claimed in claim 10, wherein, barrier layer has water proofing property.

14. organic electroluminescence display panel as claimed in claim 10, wherein, one deck at least of barrier layer has resiliency.

15. organic electroluminescence display panel as claimed in claim 10, wherein, so one deck at least of barrier layer forms with photo chemical vapor deposition method or sputtering method.

16. organic electroluminescence display panel as claimed in claim 10, wherein, pixel comprises one first electrode, at least one organic functional layer and one second electrode in regular turn.

17. organic electroluminescence display panel as claimed in claim 10 more comprises:

Several teats are formed between substrate and the barrier layer.

18. organic electroluminescence display panel as claimed in claim 17, wherein, the material of teat is a waterproof material.

19. organic electroluminescence display panel as claimed in claim 17 more comprises:

At least one flatness layer is formed between barrier layer and/or substrate and the organic luminous zone.

20. an isolating substrate is characterized in that, comprises:

One substrate;

Several teats are formed on the substrate;

At least one barrier layer is formed on teat and the substrate; And

At least one flatness layer is formed on barrier layer and/or the substrate.

21. isolating substrate as claimed in claim 20, wherein, substrate be selected from rigid substrates, flexible base plate, glass substrate and polymeric substrate at least one of them.

22. isolating substrate as claimed in claim 20, wherein, the material of teat is a waterproof material.

23. isolating substrate as claimed in claim 20, wherein, barrier layer and flatness layer are inorganic.

24. isolating substrate as claimed in claim 23, wherein, barrier layer be selected from silica, class diamond film, silicon nitride, silicon oxynitride, alundum (Al and metal at least one of them.

25. isolating substrate as claimed in claim 23, wherein, flatness layer be selected from silica, class diamond film, silicon nitride, silicon oxynitride and alundum (Al at least one of them.

26. isolating substrate as claimed in claim 20, wherein, barrier layer has water proofing property.

27. isolating substrate as claimed in claim 20, wherein, so one deck at least of barrier layer forms with photo chemical vapor deposition method or sputtering method.

28. an isolating substrate comprises:

One substrate; And

At least one barrier layer is formed on the substrate, and barrier layer is an inorganic.

29. isolating substrate as claimed in claim 28, wherein, substrate be selected from rigid substrates, flexible base plate, glass substrate and polymeric substrate at least one of them.

30. isolating substrate as claimed in claim 28, wherein, barrier layer be selected from silica, class diamond film, silicon nitride, silicon oxynitride, alundum (Al and metal at least one of them.

31. isolating substrate as claimed in claim 28, wherein, barrier layer has water proofing property.

32. isolating substrate as claimed in claim 28, wherein, one deck at least of barrier layer has resiliency.

33. isolating substrate as claimed in claim 28, wherein, so one deck at least of barrier layer forms with photo chemical vapor deposition method or sputtering method.

34. isolating substrate as claimed in claim 28 more comprises:

Several teats are formed between substrate and the barrier layer.

35. isolating substrate as claimed in claim 34, wherein, the material of teat is a waterproof material.

36. isolating substrate as claimed in claim 34 more comprises:

At least one flatness layer is formed on substrate and/or the barrier layer.

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