AT307844B - Acid galvanic copper bath - Google Patents
Acid galvanic copper bathInfo
- Publication number
- AT307844B AT307844B AT912871A AT912871A AT307844B AT 307844 B AT307844 B AT 307844B AT 912871 A AT912871 A AT 912871A AT 912871 A AT912871 A AT 912871A AT 307844 B AT307844 B AT 307844B
- Authority
- AT
- Austria
- Prior art keywords
- copper bath
- galvanic copper
- acid galvanic
- acid
- bath
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Conductive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2053860A DE2053860C3 (en) | 1970-10-29 | 1970-10-29 | Acid aqueous bath for the galvanic deposition of shiny copper coatings |
Publications (1)
Publication Number | Publication Date |
---|---|
AT307844B true AT307844B (en) | 1973-06-12 |
Family
ID=5786940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT912871A AT307844B (en) | 1970-10-29 | 1971-10-21 | Acid galvanic copper bath |
Country Status (18)
Country | Link |
---|---|
US (1) | US3767539A (en) |
JP (1) | JPS5126893B1 (en) |
AT (1) | AT307844B (en) |
AU (1) | AU450638B2 (en) |
BE (1) | BE774697A (en) |
BR (1) | BR7107116D0 (en) |
CA (1) | CA967110A (en) |
CH (1) | CH563466A5 (en) |
DE (1) | DE2053860C3 (en) |
ES (1) | ES395741A1 (en) |
FR (1) | FR2111926B1 (en) |
GB (1) | GB1372850A (en) |
IE (1) | IE35774B1 (en) |
NL (1) | NL169353C (en) |
SE (1) | SE364737B (en) |
SU (1) | SU452107A3 (en) |
YU (1) | YU34721B (en) |
ZA (1) | ZA716879B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4417956A (en) * | 1980-07-17 | 1983-11-29 | Electrochemical Products, Inc. | Alkaline plating baths and electroplating process |
US4540473A (en) * | 1983-11-22 | 1985-09-10 | International Business Machines Corporation | Copper plating bath having increased plating rate, and method |
US6024857A (en) | 1997-10-08 | 2000-02-15 | Novellus Systems, Inc. | Electroplating additive for filling sub-micron features |
KR100659544B1 (en) * | 1999-11-12 | 2006-12-19 | 에바라 유지라이토 코포레이션 리미티드 | Via-filling process |
US6676823B1 (en) * | 2002-03-18 | 2004-01-13 | Taskem, Inc. | High speed acid copper plating |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE322956B (en) * | 1966-08-20 | 1970-04-20 | Schering Ag | |
US3492135A (en) * | 1967-02-01 | 1970-01-27 | Schering Ag | Stabilized bath for deposition of copper by chemical reduction |
BE759316A (en) * | 1969-12-30 | 1971-04-30 | Parker Ste Continentale | COMPOSITION AND METHOD FOR FORMING A COPPER DEPOSIT ON FERROUS METAL SURFACES |
-
1970
- 1970-10-29 DE DE2053860A patent/DE2053860C3/en not_active Expired
-
1971
- 1971-10-04 YU YU2509/71A patent/YU34721B/en unknown
- 1971-10-04 US US00186548A patent/US3767539A/en not_active Expired - Lifetime
- 1971-10-05 ES ES71395741A patent/ES395741A1/en not_active Expired
- 1971-10-11 SU SU1704167A patent/SU452107A3/en active
- 1971-10-14 ZA ZA716879A patent/ZA716879B/en unknown
- 1971-10-18 CH CH1519671A patent/CH563466A5/xx not_active IP Right Cessation
- 1971-10-19 AU AU34734/71A patent/AU450638B2/en not_active Expired
- 1971-10-21 SE SE13374/71A patent/SE364737B/xx unknown
- 1971-10-21 AT AT912871A patent/AT307844B/en not_active IP Right Cessation
- 1971-10-25 BR BR7116/71A patent/BR7107116D0/en unknown
- 1971-10-25 GB GB4938671A patent/GB1372850A/en not_active Expired
- 1971-10-26 IE IE1352/71A patent/IE35774B1/en unknown
- 1971-10-29 FR FR7138993A patent/FR2111926B1/fr not_active Expired
- 1971-10-29 JP JP46086144A patent/JPS5126893B1/ja active Pending
- 1971-10-29 NL NLAANVRAGE7114979,A patent/NL169353C/en not_active IP Right Cessation
- 1971-10-29 CA CA126,465A patent/CA967110A/en not_active Expired
- 1971-10-29 BE BE774697A patent/BE774697A/en unknown
Also Published As
Publication number | Publication date |
---|---|
NL7114979A (en) | 1972-05-03 |
FR2111926A1 (en) | 1972-06-09 |
AU450638B2 (en) | 1974-07-18 |
ES395741A1 (en) | 1974-09-16 |
BE774697A (en) | 1972-05-02 |
AU3473471A (en) | 1973-05-03 |
US3767539A (en) | 1973-10-23 |
CA967110A (en) | 1975-05-06 |
YU250971A (en) | 1979-04-30 |
SU452107A3 (en) | 1974-11-30 |
CH563466A5 (en) | 1975-06-30 |
NL169353C (en) | 1982-07-01 |
JPS5126893B1 (en) | 1976-08-09 |
IE35774B1 (en) | 1976-05-12 |
GB1372850A (en) | 1974-11-06 |
DE2053860A1 (en) | 1972-06-08 |
NL169353B (en) | 1982-02-01 |
IE35774L (en) | 1972-04-29 |
SE364737B (en) | 1974-03-04 |
ZA716879B (en) | 1972-06-28 |
BR7107116D0 (en) | 1973-03-29 |
DE2053860C3 (en) | 1980-11-06 |
YU34721B (en) | 1979-12-31 |
FR2111926B1 (en) | 1974-10-11 |
DE2053860B2 (en) | 1980-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |