AU4728193A - Furnace and control method therefor - Google Patents

Furnace and control method therefor

Info

Publication number
AU4728193A
AU4728193A AU47281/93A AU4728193A AU4728193A AU 4728193 A AU4728193 A AU 4728193A AU 47281/93 A AU47281/93 A AU 47281/93A AU 4728193 A AU4728193 A AU 4728193A AU 4728193 A AU4728193 A AU 4728193A
Authority
AU
Australia
Prior art keywords
furnace
control method
method therefor
therefor
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU47281/93A
Inventor
Martin Fallon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU4728193A publication Critical patent/AU4728193A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Control Of Heat Treatment Processes (AREA)
AU47281/93A 1992-08-19 1993-08-18 Furnace and control method therefor Abandoned AU4728193A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB929217607A GB9217607D0 (en) 1992-08-19 1992-08-19 Improved furnace and control method therefor
GB9217607 1992-08-19
PCT/GB1993/001752 WO1994004723A2 (en) 1992-08-19 1993-08-18 Furnace and control method therefor

Publications (1)

Publication Number Publication Date
AU4728193A true AU4728193A (en) 1994-03-15

Family

ID=10720597

Family Applications (1)

Application Number Title Priority Date Filing Date
AU47281/93A Abandoned AU4728193A (en) 1992-08-19 1993-08-18 Furnace and control method therefor

Country Status (6)

Country Link
EP (1) EP0656076A1 (en)
KR (1) KR950703078A (en)
AU (1) AU4728193A (en)
CA (1) CA2142829A1 (en)
GB (1) GB9217607D0 (en)
WO (1) WO1994004723A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2747402B1 (en) * 1996-04-15 1998-05-22 Sgs Thomson Microelectronics BROADCASTING OVEN
CN117855393B (en) * 2023-12-08 2025-01-07 江苏益佳通新能源科技有限公司 A method and device for preparing a positive electrode of an aluminum-titanium bimetallic co-doped sodium ion battery

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351805A (en) * 1981-04-06 1982-09-28 International Business Machines Corporation Single gas flow elevated pressure reactor
US4992044A (en) * 1989-06-28 1991-02-12 Digital Equipment Corporation Reactant exhaust system for a thermal processing furnace
US5174745A (en) * 1990-12-03 1992-12-29 Samsung Electronics Co., Ltd. Impurity diffusing furnace
US5118286A (en) * 1991-01-17 1992-06-02 Amtech Systems Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers

Also Published As

Publication number Publication date
EP0656076A1 (en) 1995-06-07
WO1994004723A3 (en) 1994-03-31
WO1994004723A2 (en) 1994-03-03
CA2142829A1 (en) 1994-03-03
KR950703078A (en) 1995-08-23
GB9217607D0 (en) 1992-09-30

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