CH512675A - Cryopompe - Google Patents

Cryopompe

Info

Publication number
CH512675A
CH512675A CH1144369A CH1144369A CH512675A CH 512675 A CH512675 A CH 512675A CH 1144369 A CH1144369 A CH 1144369A CH 1144369 A CH1144369 A CH 1144369A CH 512675 A CH512675 A CH 512675A
Authority
CH
Switzerland
Prior art keywords
cryopump
Prior art date
Application number
CH1144369A
Other languages
English (en)
Inventor
Rapinat Michel
A Croizat
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of CH512675A publication Critical patent/CH512675A/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH1144369A 1968-07-30 1969-07-25 Cryopompe CH512675A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR161161 1968-07-30

Publications (1)

Publication Number Publication Date
CH512675A true CH512675A (fr) 1971-09-15

Family

ID=8653206

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1144369A CH512675A (fr) 1968-07-30 1969-07-25 Cryopompe

Country Status (9)

Country Link
US (1) US3579997A (fr)
BE (1) BE736646A (fr)
CH (1) CH512675A (fr)
DE (1) DE1937821A1 (fr)
FR (1) FR1584067A (fr)
GB (1) GB1216448A (fr)
LU (1) LU59124A1 (fr)
NL (1) NL161573C (fr)
SE (1) SE353944B (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2830943C2 (de) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpenanordnung
US4336690A (en) * 1979-09-28 1982-06-29 Varian Associates, Inc. Cryogenic pump with radiation shield
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
JPS60161702A (ja) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd 真空用冷却トラツプ
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
KR930702618A (ko) * 1990-11-19 1993-09-09 하랄트 고트하르트 . 페터 좀머캄프 저온펌프를 재생시키는 방법 및 이 방법을 수행하기 위한 저온펌프
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
DE9111236U1 (de) * 1991-09-10 1992-07-09 Leybold AG, 6450 Hanau Kryopumpe
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
US5901558A (en) * 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
DE102005039795B4 (de) * 2005-08-22 2007-07-26 Bruker Biospin Ag Kühlvorrichtung zur Erzeugung eines kalten Gasstromes
JP5748682B2 (ja) * 2012-01-31 2015-07-15 住友重機械工業株式会社 コールドトラップおよびコールドトラップの制御方法
JP6871751B2 (ja) * 2017-02-07 2021-05-12 住友重機械工業株式会社 クライオポンプ
CN115324868A (zh) * 2022-09-20 2022-11-11 安徽万瑞冷电科技有限公司 抽水汽低温泵及水汽抽速测试方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703673A (en) * 1950-04-08 1955-03-08 Alois Vogt Vacuum pump
US2934257A (en) * 1956-01-25 1960-04-26 Edwards High Vacuum Ltd Vapour vacuum pumps
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3296810A (en) * 1964-08-24 1967-01-10 Nat Res Corp High conductance cold trap for vacuum systems
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus

Also Published As

Publication number Publication date
LU59124A1 (fr) 1969-11-25
BE736646A (fr) 1970-01-28
NL161573B (nl) 1979-09-17
NL6911437A (fr) 1970-02-03
SE353944B (fr) 1973-02-19
DE1937821A1 (de) 1970-02-12
FR1584067A (fr) 1969-12-12
GB1216448A (en) 1970-12-23
US3579997A (en) 1971-05-25
NL161573C (nl) 1980-02-15

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Legal Events

Date Code Title Description
PL Patent ceased