CN1242400C - Optical recording medium and method for manufacturing optical recording medium - Google Patents

Abstract

An optical recording medium includes a recording layer and a dielectric layer formed in the vicinity of the recording layer and the dielectric layer contains an oxide as a primary component and being added with nitrogen. The thus constituted optical recording medium can exhibit excellent optical characteristics with respect to a laser beam of desired wavelength used for recording data and reproducing data.

Description

The method of optical recording media and manufacturing optical recording media

Technical field

The present invention relates to the method for optical recording media and manufacturing optical recording media, be specifically related to setted wavelength laser beam, represent the method for the optical recording media and the manufacturing optical recording media of superior optical characteristics with respect to record data and playing data for broadcasting.

Background technology

Such as CD, optical recording medias such as DVD have been widely used as the recording medium of record numerical data.These optical recording medias can roughly be divided into the optical recording media (ROM type optical recording media) that can not write with overwriting data, for example, and CD-ROM and DVD-ROM; The optical recording media (write once optical recording medium) that can write data but can not overwriting data, for example, CD-R and DVD-R; With the optical recording media (but data rewriting type optical recording media) of energy overwriting data, for example, CD-RW and DVD-RW.

Utilize the spiral pit that forms in the substrate of manufacture process medium, record data are in ROM type optical recording media, and laser beam irradiation is by the light quantity of spiral pit and detection of reflected laser beam, can be from this medium playing data for broadcasting.

In contrast, write once optical recording medium and data rewrite type optical recording media have such record data structure, the laser beam irradiation of intensity modulated is to the medium recording layer that includes organic dye or phase-change material, spiral groove and/or the boss of transmission by forming on the medium substrate, thereby the chemical method of utilization and/or physical method change organic dyestuff or phase-change material are to form record mark, and in order to reappear data wherein, laser beam irradiation is to recording layer, and transmission is by the spiral groove of formation and/or the light quantity of boss and detection of reflected laser beam.

In write once optical recording medium or data rewrite type optical recording media; dielectric layer generally be formed on recording layer near; normally adjacent at recording layer; utilize chemical method and/or physical method protection recording layer and increase degree of modulation; that is, the recording areas reflection coefficient that forms record mark and the recording areas reflection coefficient that does not form record mark is poor.

According to the method, under the situation of the contiguous formation of recording layer dielectric layer, preferably, make dielectric layer that the high index of refraction n that increases degree of modulation be arranged, that is, the recording areas reflection coefficient of formation record mark is poor with the recording areas reflection coefficient that does not form record mark; Preferably, dielectric layer is had reduce to absorb in the dielectric layer the low extinction coefficient k of laser beam energy, thereby improve recording sensitivity and prevent reducing of reflection coefficient.

Yet, because the refractive index n and the extinction coefficient k of common dielectric layer depend on the incident light wavelength, therefore, the step-down of dielectric layer refractive index n or dielectric layer extinction coefficient k uprise the laser beam wavelength that depends on record and playing data for broadcasting, so the optical characteristics of optical recording media is degenerated sometimes.

For example, in being widely used in the oxide of making dielectric layer, the extinction coefficient k of some oxide uprises with short laser beam wavelength, so, if the dielectric layer in the type optical recording medium of new generation is to be made by this oxide, wherein utilize laser beam record and playing data for broadcasting in the blue wave band, then can not obtain good optical characteristics, that is, lofty tone system and high recording sensitivity.

Summary of the invention

So, the purpose of this invention is to provide a kind of optical recording media, with respect to the setted wavelength laser beam of record data and playing data for broadcasting, this optical recording media represents good optical characteristics, and the method for making this optical recording media.

Another object of the present invention provides a kind of optical recording media, and with respect to the laser beam in the blue wave band of record data and playing data for broadcasting, this optical recording media represents good optical characteristics, and the method for making this optical recording media.

The present inventor is devoted to realize the research of the above purpose of the present invention, and therefore, we find, by adding nitrogen to comprising in the dielectric layer of oxide as principal ingredient, can change the dependence of refractive index n and extinction coefficient k and laser beam wavelength.

The present invention is based on this discovery, and can realize above and other purpose according to a kind of optical recording media of the present invention, this optical recording media comprises: at least one recording layer and at the contiguous dielectric layer that forms of at least one recording layer, this dielectric layer comprise oxide as principal ingredient and add nitrogen.

Be widely used in making in the oxide of dielectric layer, because the refractive index n and the extinction coefficient k of some oxides depend on the incident light wavelength, therefore, dielectric layer refractive index n step-down or dielectric layer extinction coefficient k uprise the laser beam wavelength that depends on record data and playing data for broadcasting, particularly, if dielectric layer is to be made by type optical recording medium of new generation, wherein utilize laser beam record and playing data for broadcasting in the blue wave band, then can not obtain good optical characteristics.Yet, according to the present invention, add nitrogen to comprising in the dielectric layer of oxide as principal ingredient, owing to add nitrogen to comprising oxide as the dependence that can change refractive index n and extinction coefficient k and laser beam wavelength in the dielectric layer of principal ingredient, therefore, by the nitrogen content that control is added, can make the dielectric layer of high index of refraction n and low extinction coefficient k.So, with respect to the setted wavelength laser beam of record data and playing data for broadcasting, can obtain representing the optical recording media of superior optical characteristics, that is, and lofty tone system and high recording sensitivity.

In the present invention, dielectric layer preferably comprises Ta ₂O ₅Or TiO ₂As principal ingredient.Comprise Ta at dielectric layer ₂O ₅Or TiO ₂Under the situation as principal ingredient, if add nitrogen in dielectric layer, then extinction coefficient k to reduce be significant, therefore, can improve the recording sensitivity of optical recording media significantly.In addition,, can increase the refractive index n of dielectric layer significantly, and prevent the increase of dielectric layer extinction coefficient k with respect to the laser beam in the blue wave band.So, particularly when record data and playing data for broadcasting, adopt the laser beam in the blue wave band, can obtain the optical recording media of lofty tone system and high recording sensitivity.

In the present invention, the optimum nitrogen content that adds dielectric layer to changes with the laser beam wavelength of the oxide classification that comprises as principal ingredient in the dielectric layer and record and playing data for broadcasting.Laser beam in blue wave band is used to write down under the situation with playing data for broadcasting, that is, wavelength X is the laser beam of 380nm to 450nm, and dielectric layer comprises Ta ₂O ₅As principal ingredient, preferably, add atomic percent and be 1 to 12% nitrogen to dielectric layer, be more preferably, the interpolation atomic percent is that 2 to 10% nitrogen is to dielectric layer; When dielectric layer comprises TiO ₂During as principal ingredient, preferably, add atomic percent and be 1 to 5% nitrogen to dielectric layer, be more preferably, the interpolation atomic percent is that 2 to 4% nitrogen is to dielectric layer.(x-ray photoelectron spectroscopy is learned: XPS), can measure the nitrogen content that adds in the dielectric layer to utilize ESCA.

In the present invention, comprise at optical recording media under the situation of a plurality of dielectric layers, wherein each dielectric layer comprises oxide as principal ingredient, has at least a dielectric layer that adds nitrogen enough.

In the present invention, comprise at optical recording media under the situation of a plurality of dielectric layers, wherein each dielectric layer comprises oxide as principal ingredient, with respect to adding nitrogen to relevant recording layer, preferably, dielectric layer is positioned at light plane of incidence one side, be more preferably, all dielectric layers all add nitrogen.

In the present invention, preferably, utilize wavelength for the laser beam record data of 380nm to 450nm in recording layer.Comprise Ta ₂O ₅Or TiO ₂Dielectric layer as principal ingredient has high refractive index n and low extinction coefficient k.

Of the present invention one preferred aspect, this at least one recording layer has such structure, and first recording sheet comprises and is selected from Si, Ge, Sn, Mg, C, Al, Zn, In, Cu, an element among Ti and the Bi is as principal ingredient, with second recording sheet be vicinity at first recording sheet, second recording sheet comprises and is selected from Cu, Al, and an element among Zn and the Ag is as principal ingredient, this element is different from the element that comprises as principal ingredient in first recording sheet, and when laser beam irradiation, be included in the element in first recording sheet and the element that is included in second recording sheet as principal ingredient mixes mutually as principal ingredient, thereby form record mark.

In this instructions, first recording sheet comprises certain element and means as the statement of principal ingredient, this constituent content is maximum in the element that first recording sheet is comprised, and comprising certain element, second recording sheet means that as the statement of principal ingredient this constituent content is maximum in the element that second recording sheet is comprised.

Of the present invention this preferred aspect, second recording sheet contacts with first recording sheet and is not the sin qua non's, the vicinity that second recording sheet is positioned at first recording sheet is enough, in order that when utilizing laser beam irradiation to comprise the first recording sheet principal ingredient element and the second recording sheet principal ingredient element regional, this zone can form the mixed zone.In addition, one or more other layers, for example, dielectric layer can be inserted between first recording sheet and second recording sheet.

Of the present invention one preferred aspect, second recording sheet of formation is to contact with first recording sheet.

Of the present invention one preferred aspect, optical recording media comprises: the element that comprises as principal ingredient in the one or more recording sheets, the element that comprises as principal ingredient in this recording sheet and first recording sheet is identical; Or the element that comprises as principal ingredient in the element that comprises as principal ingredient in this recording sheet and second recording sheet is identical.

When utilizing laser beam irradiation, can form the mixed zone that comprises the first recording sheet principal ingredient element and the second recording sheet principal ingredient element, though reason wherein is not very clear, but draw such conclusion is rational: the principal ingredient element of first recording sheet and second recording sheet is partly or entirely fusion or diffusion, thereby forms the mutual zone of mixing of principal ingredient element of first recording sheet and second recording sheet.

Therefore, according to this preferred aspect of the present invention, when utilizing the laser beam irradiation optical recording media, because the element that comprises as principal ingredient in the element that comprises as principal ingredient in first recording sheet and second recording sheet mixes mutually, thereby formation record mark, laser beam with respect to playing data for broadcasting, its reflection coefficient is different from other regional reflection coefficients in first recording sheet and second recording sheet, form crystal with the contacted subregion at least of this at least one dielectric layer record mark, thereby form a crystalline region, with respect to the laser beam of playing data for broadcasting, its reflection coefficient is different from other regional reflection coefficients in this at least one dielectric layer; Laser beam with respect to playing data for broadcasting, it is very big forming the reflection coefficient in record mark zone and the difference of other regional reflection coefficients, so, utilize the difference of this very big reflection coefficient can reappear the data of record, thereby obtain improving the reproducing signal of C/N ratio.

Of the present invention another preferred aspect, first dielectric layer of formation is to contact with first recording sheet, and second dielectric layer that forms is to contact with second recording sheet.

Of the present invention one preferred aspect, first recording sheet comprises and is selected from Si, an element among Ge and the Sn is as principal ingredient.

Of the present invention one preferred aspect, second recording sheet adds and to be selected from Cu, Al, Zn, Ag, Mg, Sn, Au, an element among Ti and the Pd, and this element is different from the element that comprises as principal ingredient in first recording sheet.

Of the present invention another preferred aspect, first recording sheet comprises and is selected from Si, Ge, Sn, Mg, In, Zn, an element among Bi and the Al is as principal ingredient, and second recording sheet comprises Cu as principal ingredient.

Of the present invention another preferred aspect, first recording sheet comprises and is selected from Si, Ge, Sn, an element among Mg and the Al is as principal ingredient.

Of the present invention another preferred aspect, be selected from Al, Si, Zn, Mg, Au, Sn, Ge, Ag, P, Cr, an element among Fe and the Ti add to and comprise in second recording sheet of Cu as principal ingredient.

Be selected from Al, Si, Zn, Mg, Au, Sn, Ge, Ag, P, Cr, an element among Fe and the Ti adds to and comprises under the situation of Cu as second recording sheet of principal ingredient, can further reduce the noise level of reproducing signal and improve the stability of longer-term storage, and since the heat conductance of second recording sheet reduce, the heat that laser beam produces in first recording sheet and second recording sheet can be transferred in this at least one dielectric layer effectively, thereby can impel this at least one dielectric layer to form crystal.

Of the present invention another preferred aspect, be selected from Al, Zn, an element among Sn and the Au add to and comprise in second recording sheet of Cu as principal ingredient.

Of the present invention another preferred aspect, first recording sheet comprises and is selected from Si, Ge, C, Sn, an element among Zn and the Cu is as principal ingredient, and second recording sheet comprises Al as principal ingredient.

Of the present invention another preferred aspect, be selected from Mg, Au, an element among Ti and the Cu add to and comprise in second recording sheet of Al as principal ingredient.

Be selected from Mg, Au, an element among Ti and the Cu adds to and comprises under the second recording sheet situation of Al as principal ingredient, can further reduce the noise level of reproducing signal and the stability of raising longer-term storage, and owing to reducing of the second recording sheet heat conductance, the heat that laser beam produces in first recording sheet and second recording sheet can be transferred in this at least one dielectric layer effectively, thereby can impel this at least one dielectric layer to form crystal.

Of the present invention another preferred aspect, first recording sheet comprises and is selected from Si, Ge, an element among C and the Al is as principal ingredient, and second recording sheet comprises Zn as principal ingredient.

Of the present invention another preferred aspect, be selected from Mg, an element among Cu and the Al adds to and comprises in second recording sheet of Zn as principal ingredient.

Be selected from Mg, an element among Cu and the Al adds to and comprises under the second recording sheet situation of Zn as principal ingredient, can further reduce the noise level of reproducing signal and the stability of raising longer-term storage, and owing to reducing of the second recording sheet heat conductance, the heat that laser beam produces in first recording sheet and second recording sheet can be transferred in this at least one dielectric layer effectively, thereby can impel this at least one dielectric layer to form crystal.

Of the present invention another preferred aspect, first recording sheet comprises and is selected from Si, an element among Ge and the Sn is as principal ingredient, and second recording sheet comprises Ag as principal ingredient.

Of the present invention another preferred aspect, be selected from a element among Cu and the Pd and add to and comprise in second recording sheet of Ag as principal ingredient.

An element in being selected from Cu and Pd adds to and comprises under the second recording sheet situation of Ag as principal ingredient, can further reduce the noise level of reproducing signal and the stability of raising longer-term storage, and owing to reducing of the second recording sheet heat conductance, the heat that laser beam produces in first recording sheet and second recording sheet can be transferred in this at least one dielectric layer effectively, thereby can impel this at least one dielectric layer to form crystal.

Of the present invention another preferred aspect, preferably make the first such recording sheet and second recording sheet, its gross thickness is between 2nm to 40nm, is more preferably between 2nm to 30nm, preferably between 2nm to 15nm.

Of the present invention one preferred aspect, optical recording media comprises: spaced-apart two or more recording layers and dielectric layer, each dielectric layer is formed on the vicinity of a recording layer, at least the contiguous dielectric layer that forms of the recording layer that approaches most the light plane of incidence comprise oxide as principal ingredient and nitrogen as adjuvant.

According to this preferred aspect of the present invention, since at least the contiguous dielectric layer that forms of the recording layer that approaches most the light plane of incidence comprise oxide as principal ingredient and nitrogen as adjuvant, at the contiguous dielectric layer that forms of the recording layer that approaches most the light plane of incidence high refractive index and low extinction coefficient are arranged, therefore, can improve the data recording performance and the data reproduction characteristic thereof of recording layer except the recording layer that approaches most the light plane of incidence significantly.

Of the present invention one preferred aspect, with respect at the contiguous dielectric layer that forms of the recording layer that approaches most the light plane of incidence, the dielectric layer that is positioned at light plane of incidence one side comprise oxide as principal ingredient and nitrogen as adjuvant.

Utilize the method for making optical recording media, this optical recording media comprises: at least one recording layer and the dielectric layer that forms at least one recording layer vicinity, also can realize above and other purpose of the present invention, the method of making optical recording media comprises step: in comprising the mixed-gas environment of nitrogen, utilize the vapour growth oxide process to make dielectric layer.

According to the present invention, by the nitrogen content in the control mixed gas, can make the dielectric layer that comprises required nitrogen content, therefore, the dielectric layer of high index of refraction n and low extinction coefficient k can be made, and, the optical recording media of superior optical characteristics can be obtained representing with respect to the setted wavelength laser beam of record data and playing data for broadcasting, that is, lofty tone system and high recording sensitivity.

Of the present invention one preferred aspect, utilize sputter procedure to make dielectric layer, make this dielectric layer comprise oxide as principal ingredient and nitrogen as adjuvant.

With reference to the detailed description below in conjunction with accompanying drawing, above and other purpose of the present invention and feature are conspicuous.

Description of drawings

Fig. 1 is the perspective diagram of a preferred embodiment of the invention optical recording media.

Fig. 2 is the amplification profile synoptic diagram of the part optical recording media shown in the A among Fig. 1.

Fig. 3 is the amplification profile synoptic diagram of optical recording media among Fig. 2 after record data.

Fig. 4 is the layer structure amplification profile synoptic diagram of another preferred embodiment of the present invention optical recording media.

Fig. 5 is the layer section of structure of another preferred embodiment of the present invention optical recording media.

Fig. 6 is the amplification profile synoptic diagram of optical recording media among Fig. 5 after laser beam irradiation L1 layer.

Fig. 7 is the nitrogen content of dielectric layer interpolation in the worked example 1 and the relation curve between the dielectric layer refractive index n.

Fig. 8 is the nitrogen content of dielectric layer interpolation in the worked example 1 and the relation curve between the dielectric layer extinction coefficient k.

Fig. 9 is the relation curve between laser beam wavelength and the dielectric layer refractive index n in the worked example 1.

Figure 10 is the relation curve between laser beam wavelength and the dielectric layer extinction coefficient k in the worked example 1.

Figure 11 is the nitrogen content of dielectric layer interpolation in the worked example 2 and the relation curve between the dielectric layer refractive index n.

Figure 12 is the nitrogen content of dielectric layer interpolation in the worked example 2 and the relation curve between the dielectric layer extinction coefficient k.

Figure 13 is the relation curve between laser beam wavelength and the dielectric layer refractive index n in the worked example 2.

Figure 14 is the laser beam wavelength of worked example 2 and the relation curve between the dielectric layer extinction coefficient k.

Embodiment

Fig. 1 is the perspective diagram of a preferred embodiment of the invention optical recording media, and Fig. 2 is the amplification profile synoptic diagram shown in the A among Fig. 1.

Structure according to this embodiment optical recording media 10 is a write once optical recording medium, as shown in Figure 2, it comprises: support base 11, the reflection horizon 12 that forms is gone up on support base 11 surfaces, second dielectric layer 13 that forms is gone up on 12 surfaces, reflection horizon, the recording layer 14 that forms is gone up on second dielectric layer, 13 surfaces, and recording layer 14 surfaces are gone up first dielectric layer 15 and first dielectric layer, 15 surfaces that form and gone up the optical transport layer 16 that forms.

As shown in Figure 2, the structure of recording layer 14 is that second recording sheet 22 and second recording layer, 22 surperficial first recording sheets 21 that form of going up that form are gone up on second dielectric layer, 13 surfaces.

In this embodiment, as shown in Figure 2, laser beam L shines on the light plane of incidence 16a of optical transport layer 16, thereby record data are to optical recording media 10 or from optical recording media 10 playing data for broadcasting.

The effect of support base 11 is in the substrate that guarantees optical recording media 10 physical strengths.

The material that is used to make support base 11 does not have concrete restriction, as long as support base 11 can be used as the substrate of optical recording media 10.Support base 11 can be by glass, pottery, and resins etc. are made.In these materials, resin is to be preferred for making support base 11, because resin can easily be shaped.The typical resins example that is suitable for making support base 11 comprises: polycarbonate resin, polyolefin resin, acrylic resin, epoxy resin, polystyrene resin, polyvinyl resin, acrylic resin, silicones, fluoropolymer, acrylonitrile-butadiene styrene resin, urethane resin, or the like.In these materials, from easy processing, viewpoints such as optical characteristics consider that polycarbonate resin and polyolefin resin are the most preferably materials of making support base 11.

In this embodiment, the thickness of support base 11 is about 1.2mm.

The shape of support base 11 does not have concrete restriction, but plate-like normally, card shape or laminar.

In this embodiment, when record data or playing data for broadcasting,, therefore, do not require that support base 11 has high optical transparency because laser beam L does not transmit by support base 11.

As shown in Figure 2, groove 11a and boss 11b alternately are formed on support base 11 surfaces.When record data or playing data for broadcasting, the effect of groove 11a and/or boss 11b is the guide rail of laser beam L.

The effect in reflection horizon 12 is the laser beam L that reflect into into optical transport layer 16, in order that from optical transport layer 16 emission of lasering beam L.

The thickness in reflection horizon 12 does not have concrete restriction, but preferably between 5nm to 300nm, is more preferably between 20nm to 200nm.

The material that is used to make reflection horizon 12 does not have concrete restriction, as long as it can reflection lasering beam L, and reflection horizon 12 can be by Mg, Al, and Ti, Cr, Fe, Co, Ni, Cu, Zn, Ge, Ag, Pt, materials such as Au are made.In these materials, preferably utilizing has the metal material of high reflection characteristic to make reflection horizon 12, for example, Al, Au, Ag, Cu or comprise the alloy of a kind of metal in these metals at least, for example, Al and Ti.

When laser beam L was used for reappearing the data of recording layer 14 records, the effect in reflection horizon 12 was increase multiple interference effect causes between recording areas and the non-recording areas reflection coefficient poor, thereby obtains higher reproducing signal (C/N ratio).

The effect of first dielectric layer 15 and second dielectric layer 13 is recording layers 14 that protection is made of first recording sheet 21 and second recording sheet 22.First dielectric layer 15 and second dielectric layer 13 can prevent the degeneration of record data in the recording layer 14 a segment length in the time.

Each dielectric layer in first dielectric layer 15 and second dielectric layer 13 comprises Ta ₂O ₅Or TiO ₂And interpolation nitrogen.

Because Ta ₂O ₅Or TiO ₂Refractive index n and extinction coefficient k depend on the incident light wavelength, be by Ta at dielectric layer ₂O ₅Or TiO ₂Under the situation about making, dielectric layer refractive index n step-down or dielectric layer extinction coefficient k uprise the laser beam wavelength that depends on record and playing data for broadcasting, thereby reduce the optical characteristics of optical recording media; Particularly,, wherein utilize the laser beam record and the playing data for broadcasting of blue wave band, then can not obtain good optical characteristics if dielectric layer is to be made by the oxide in the type optical recording medium of new generation.

Yet, what the present inventor carried out studies show that, by adding nitrogen to comprising in the dielectric layer of oxide as principal ingredient, can change the dependence of refractive index n and extinction coefficient k and laser beam wavelength, and add the nitrogen content of dielectric layer to by control, can make the dielectric layer that laser beam with respect to setted wavelength has enough high index of refraction n and enough hangs down extinction coefficient k.

More particularly, we find, if comprise Ta ₂O ₅Or TiO ₂As principal ingredient with there is not nitrogen to be n0 and to comprise Ta as the dielectric layer refractive index of adjuvant ₂O ₅Or TiO ₂Is n as principal ingredient and nitrogen as the dielectric layer refractive index of adjuvant, and then poor (n0-n) of the two refractive index shortens with the laser beam L wavelength of record and playing data for broadcasting and diminish; If comprise Ta ₂O ₅Or TiO ₂As principal ingredient with there is not nitrogen to be k0 and to comprise Ta as the dielectric layer extinction coefficient of adjuvant ₂O ₅Or TiO ₂Is k as principal ingredient and nitrogen as the dielectric layer extinction coefficient of adjuvant, and then poor (k0-k) of the two extinction coefficient shortens with the laser beam L wavelength of record and playing data for broadcasting and become big.Particularly, we find, even in blue wave band under the situation of laser beam record and playing data for broadcasting, promptly, wavelength X is the laser beam of 380nm to 450nm, by choosing the nitrogen content that adds in the dielectric layer, can set the refractive index n and the extinction coefficient k of dielectric layer, make the dielectric layer refractive index n greater than n0 and dielectric layer extinction coefficient k less than k0.

The present inventor further studies show that, comprises Ta ₂O ₅As principal ingredient and do not have nitrogen as the dielectric layer refractive index n 0 of adjuvant with the shortening and reduce widely of laser beam L wavelength, and comprise Ta ₂O ₅As principal ingredient and scheduled volume nitrogen as the dielectric layer refractive index n of adjuvant shortening and increase widely with laser beam L wavelength; And comprise Ta ₂O ₅As principal ingredient and scheduled volume nitrogen as the dielectric layer extinction coefficient k of adjuvant less than comprising Ta ₂O ₅As principal ingredient with there be not the dielectric layer extinction coefficient k0 of nitrogen as adjuvant, and shortening and diminish with laser beam L wavelength.The present inventor also finds, even the big wavelength of laser beam L shortens, comprises TiO ₂As principal ingredient with there is not nitrogen almost to keep constant, and comprise TiO as the dielectric layer refractive index n 0 of adjuvant ₂As principal ingredient and scheduled volume nitrogen as the dielectric layer refractive index n of adjuvant shortening and increase with laser beam L wavelength; And comprise TiO ₂As principal ingredient and scheduled volume nitrogen as the dielectric layer extinction coefficient k of adjuvant less than comprising TiO ₂As principal ingredient with there be not the dielectric layer extinction coefficient k0 of nitrogen as adjuvant, and shortening and diminish with laser beam L wavelength.

So, in this embodiment, determine to add to the nitrogen content of first dielectric layer 15 and second dielectric layer 13, therefore, when wavelength was the laser beam record of 405nm and playing data for broadcasting, the refractive index n of first dielectric layer 15 and second dielectric layer 13 was enough height, and its extinction coefficient k is enough low.

First dielectric layer 15 can be made by identical materials or different materials with second dielectric layer 13.

The thickness of first dielectric layer 15 and second dielectric layer 13 does not have concrete restriction, but preferably between 3nm and 200nm.If the thickness of first dielectric layer 15 or second dielectric layer 13 then is difficult to obtain above-mentioned advantage less than 3nm.On the other hand, if the thickness of first dielectric layer 15 or second dielectric layer 13 is greater than 200nm, then need long time to make first dielectric layer 15 and second dielectric layer 13, thereby reduce the throughput rate of optical recording media 10, and, in optical recording media 10, can crack owing to have stress in first dielectric layer 15 and/or second dielectric layer 13.

Recording layer 14 is applicable to record data therein.

In this embodiment, recording layer 14 is to be made of first recording sheet 21 and second recording sheet 22, and first recording sheet 21 is arranged on optical transport layer 16 1 sides, and second recording sheet 22 is arranged on support base 11 1 sides.

In this embodiment, first recording sheet 21 comprises and is selected from Si, and an element among Ge and the Sn is as principal ingredient, and second recording sheet 22 comprises Cu as principal ingredient.

When utilizing laser beam L when irradiation, be included in second recording sheet 22 as the element rapid mixing that comprises in the Cu of principal ingredient and first recording sheet 21, thereby energy fast recording data are to first recording sheet 21 and second recording sheet 22.

In order to improve the recording sensitivity of first recording sheet 21, be selected from Mg, Al, Cu, the one or more elements among Ag and the Au also can add first recording sheet 21 to.

Memory reliability and recording sensitivity in order to improve second recording sheet 22 are selected from Al, Si, and Zn, at least one element among Mg and the Au also can add second recording sheet 22 to.Add that element (a plurality of element) content in second recording sheet 22 preferably is equal to or greater than atomic percent 1% to and less than atomic percent 50%.

If the gross thickness of first recording sheet 21 and second recording sheet 22 increases, then utilize the surface smoothness of first recording layer 31 of laser beam L irradiation just to worsen.Therefore, the noise level of reproducing signal becomes higher, and recording sensitivity descends.On the other hand, under the too little situation of the gross thickness of first recording sheet 21 and second recording sheet 22, it is very little changing with irradiation reflection coefficient afterwards before the laser beam L irradiation, therefore, can not obtain the reproducing signal of high strength (C/N ratio).In addition, be difficult to the thickness of control first recording sheet 21 and second recording sheet 22.

So in this embodiment, first recording sheet of making 21 and second recording sheet, 22 gross thickness are between 2nm to 40nm.For the reproducing signal that obtains higher-strength (C/N ratio) with further reduce the noise level of reproducing signal, the gross thickness of first recording sheet 21 and second recording sheet 22 and is more preferably between 2nm to 15nm preferably between 2nm to 20nm.

The thickness separately of first recording sheet 21 and second recording sheet 22 does not have concrete restriction, but before improving recording sensitivity significantly and increasing laser beam L irradiation greatly, change with irradiation reflection coefficient afterwards, the thickness of first recording sheet 21 is preferably between 1nm to 30nm, and the thickness of second recording sheet 22 is preferably between 1nm to 30nm.In addition, determine that preferably ratio (thickness of the thickness of first recording sheet 21/second recording sheet 22) is between 0.2 and 5.0 between the thickness of the thickness of first recording sheet 21 and second recording sheet 22.

The effect of optical transport layer 16 is transmission laser beam L, and its thickness is preferably between 10 μ m to 300 μ m.Be more preferably, the thickness of optical transport layer 16 is between 50 μ m to 150 μ m.

The material that is used to make optical transport layer 16 does not have concrete restriction, but is to utilize under the situation that whirl coating etc. makes at optical transport layer 16, preferably uses ultraviolet curable resin, materials such as electron beam curing resin.Be more preferably, optical transport layer 16 is to be made by ultraviolet curable resin.

Use bonding agent, on first dielectric layer, 15 surfaces, paste a slice transmittance resin, can make optical transport layer 16.

For example, can make the optical recording media 10 of said structure according to following method.

Use the stamping machine (not shown), at first, utilize injection molding method is made groove 11a and boss 11b on its surface support base 11.

On the surface of support base 11, make reflection horizon 12 again.

Use comprises the chemical substance that is used to make reflection horizon 12 elements, utilizes the vapor phase growth process can make reflection horizon 12.The exemplary of vapor phase growth process comprises: vacuum deposition process, and sputter procedure, or the like.

Then, on the surface in reflection horizon 12, make second dielectric layer 13.

In this embodiment, use the mixed gas of argon gas and nitrogen as sputter gas with such as Ta ₂O ₅Or TiO ₂Oxide as target, utilize sputter procedure to make second dielectric layer 13.Therefore, second dielectric layer 13 comprises Ta ₂O ₅Or TiO ₂As principal ingredient and add nitrogen.Determine the nitrogen content in second dielectric layer 13, by the nitrogen content in the control sputter procedure, can control the nitrogen content in second dielectric layer 13, therefore, second dielectric layer 13 has high refractive index n and low extinction coefficient k.

On second dielectric layer 13, make second recording sheet 22 again.The chemical substance of contained element in second recording sheet 22 is made in use, utilizes the vapor phase growth process also can make second recording sheet 22.

Then, on second recording sheet 22, make first recording sheet 21.The chemical substance of contained element in first recording sheet 21 is made in use, utilizes the vapor phase growth process also can make first recording sheet 21.

In this embodiment, because first recording sheet of making 21 and the gross thickness of second recording sheet 22 are between 2nm to 40nm, can improve the surface smoothness of first recording sheet 21.

On first recording sheet 21, make first dielectric layer 15 again.

In this embodiment, use the mixed gas of argon gas and nitrogen as sputter gas with such as Ta ₂O ₅Or TiO ₂Oxide as target, utilize sputter procedure to make first dielectric layer 15.Therefore, first dielectric layer 15 comprises Ta ₂O ₅Or TiO ₂As principal ingredient and add nitrogen.Determine the nitrogen content in first dielectric layer 15, by the nitrogen content in the control sputter procedure, can control the nitrogen content in first dielectric layer 15, therefore, first dielectric layer 15 has high refractive index n and low extinction coefficient k,

At last, on first dielectric layer 15, make optical transport layer 16.Optical transport layer 16 can be made like this, for example, propylene ultraviolet curable resin or the epoxy ultraviolet curable resin of adjusting to suitable viscosity are added on first dielectric layer, 15 surfaces, forming coating, and utilize ultraviolet ray irradiation coating to solidify this coating by the spin coated process.

Therefore, make optical recording media 10.

For example, in the following way, record data are to the optical recording media 10 of said structure.

As shown in Figure 2, at first utilize the laser beam L that predetermined power is arranged to shine first recording sheet 21 and second recording sheets 22 through optical transport layer 16.

For with the high record density record data, preferably, the laser beam L that wavelength X is equal to or less than 450nm is equal to or greater than 0 through numerical aperture NA.7 object lens (not shown) shines optical recording media 10; Be more preferably, λ/NA is equal to or less than 640nm.

In this embodiment, wavelength X is that the laser beam L of 405nm is that 0.85 object lens shine optical recording media 10 through numerical aperture NA.

Therefore, in the zone of laser beam L irradiation, the element that comprises as principal ingredient in the element that comprises as principal ingredient in first recording sheet 21 and second recording sheet 22 mixes, as shown in Figure 3, the mixed zone that generation is made of the principal ingredient element of the principal ingredient element of first recording sheet 21 and second recording sheet 22, and form record mark M.

When the principal ingredient element of first recording sheet 21 and second recording sheet 22 mixes mutually, form record mark M, the regional reflex coefficient that forms record mark M changes significantly.Be very different with the regional reflex coefficient that centers on mixed zone M owing to form the reflection coefficient of record mark M, when reappearing the information of optical recording, can obtain high reproducing signal (C/N ratio).

According to this embodiment, owing to determined to add to the nitrogen content of first recording layer 15 and second recording layer 13, with respect to wavelength is the laser beam L of 405nm, the refractive index n of first recording layer 15 and second recording layer 13 is enough height, and their extinction coefficient is enough low, when record data are in optical recording media 10, can reduce laser beam L energy that absorbs in first recording layer 15 and second recording layer 13 and the recording sensitivity that improves optical recording media 10.On the other hand, when playing data for broadcasting from optical recording media 10, can increase degree of modulation, that is, form recording layer 14 zones of record mark and do not have the reflection coefficient between the zone of record mark poor, and prevent reducing of recording layer 14 reflection coefficients.

Fig. 4 is the diagrammatic cross-section of the optical recording dielectric layer structure of another preferred embodiment of the present invention.

Structure according to this embodiment optical recording media 10 is a data rewrite type optical recording media, as shown in Figure 4, it comprises: support base 11, the reflection horizon 12 that forms is gone up on support base 11 surfaces, second dielectric layer 13 that forms is gone up on 12 surfaces, reflection horizon, the recording layer 14 that forms is gone up on second dielectric layer, 13 surfaces, and recording layer 14 surfaces are gone up first dielectric layer 15 and first dielectric layer, 15 surfaces that form and gone up the optical transport layer 16 that forms.

In this embodiment, laser beam L also shines the light incident surface 16a of optical transport layer 16, thereby record data are to optical recording media 10, or from optical recording media 10 playing data for broadcasting.

Support base 11 according to this embodiment optical recording media 10, effect of each and similar be in the support base 11 of previous embodiment optical recording media 10 shown in Figure 2 in reflection horizon 12 and the optical transport layer 16, corresponding one effect and structure in reflection horizon 12 and the optical transport layer 16.

The structure of the similar of each dielectric layer each dielectric layer in previous embodiment optical recording media 10 shown in Figure 2 in first dielectric layer 15 and second dielectric layer 13, different is that their effect is a protection recording layer 14.

So, in this embodiment, also determine to add to the nitrogen content in first dielectric layer 15 and second dielectric layer 13, therefore, when wavelength is the laser beam L record of 405nm and playing data for broadcasting, the refractive index n of first dielectric layer 15 and second dielectric layer 13 is enough height, and their extinction coefficient k is enough low.

Recording layer 14 is suitable for record data therein.

In this embodiment, recording layer 14 is to be made by phase-change material.Utilize recording layer 14 to be in crystal and to be in noncrystal reflection coefficient between mutually poor, record data are to recording layer 14 with from recording layer 14 playing data for broadcasting.

The material of making recording layer 14 does not have concrete restriction, but can be preferred from the noncrystal material that changes over the crystal phase mutually at short notice, in order that can be in rewrite data under the high speed.Typical material example with this specific character comprises: the SbTe system material.

As the SbTe system material, can use SbTe maybe can use the SbTe system material that adds adjuvant separately, in order that shorten the longer-term storage reliability that forms the required time of crystal and improve optical recording media 10.

Specifically, preferably make the recording layer 14:(Sb of the SbTe system material of representing by following combinatorial formula _xTe _1-x) _1-yM _y, wherein M is the element that is different from Sb and Te, x is equal to or greater than 0.55 and be equal to or less than 0.9, and y is equal to or greater than 0 and be equal to or less than 0.25; Be more preferably, make the recording layer 14 by the SbTe system material of combinations thereof formula representative, wherein x is equal to or greater than 0.65 and be equal to or less than 0.85, and y is equal to or greater than 0 and be equal to or less than 0.25.

Though M does not have concrete restriction, preferably, element M is to be selected from In, Ag, Au, Bi, Se, Al, P, Ge, H, Si, C, V, W, Ta, Zn, Mn, Ti, Sn, Pd, N, the one or more elements in O and the rare earth element are in order that shorten the longer-term storage reliability that forms the required time of crystal and improve optical recording media 10.Be more preferably, element M is to be selected from Ag, In, and the one or more elements in Ge and the rare earth element are used to improve the memory reliability of optical recording media 10.

For example, can make the optical recording media 10 of said structure in accordance with the following methods.

Be similar to optical recording media shown in Figure 2 10, at first, make support base 11, and on support base 11 surfaces, form reflection horizon 12.

Then, be similar to optical recording media shown in Figure 2 10, on 12 surfaces, reflection horizon, form second dielectric layer 13.

On second dielectric layer 13, form recording layer 14 again.Use comprises the chemical substance of making recording layer 14 elements, also utilizes the vapor phase growth process to make recording layer 14.

Be similar to the method that forms first dielectric layer 15 in embodiment illustrated in fig. 2 on first recording sheet 31, on recording layer 14, form first dielectric layer 15.

At last, on first dielectric layer 15, make optical transport layer 16.For example, propylene ultraviolet curable resin or the epoxy ultraviolet curable resin of adjusting to suitable viscosity is added on the surface of first dielectric layer 15, forming coating, and utilizes ultraviolet ray irradiation coating to solidify this coating by the spin coated process.

Therefore, make optical recording media shown in Figure 4 10.

For example, according to the optical recording media 10 of following method record data to said structure.

As shown in Figure 2, at first, utilize the laser beam L that predetermined power is arranged through optical transport layer 16 irradiation recording layers 14.

Be similar to previous embodiment shown in Figure 2, in this embodiment, wavelength is that the laser beam L of 405nm is that 0.85 object lens shine optical recording media 10 through numerical aperture NA.

Utilize the irradiation of laser beam L, temperature is equal to or higher than the fusing point of phase-change material and fast during cooling, this zone presents amorphous state when the presumptive area of recording layer 14 is heated to.On the other hand, utilize the irradiation of laser beam L, temperature is equal to or higher than the Tc of phase-change material and when cooling off gradually, this zone presents crystalline state when the presumptive area of recording layer 14 is heated to.

In the amorphous areas of recording layer 14, form record mark.The length of record mark and record mark and along on the guide rail direction between the adjacent record mark length of white space constitute the data of record in the recording layer 14.

In this embodiment, owing to determined to add to the nitrogen content of first dielectric layer 15 and second dielectric layer 13, with respect to wavelength is the laser beam L of 405nm, the refractive index of first dielectric layer 15 and second dielectric layer 13 is enough height, and their extinction coefficient k is enough low, therefore, can reduce laser beam L energy that absorbs in first dielectric layer 15 and second dielectric layer 13 and the recording sensitivity that improves optical recording media 10.

On the other hand, in reappearing optical recording media 10, during the data of record, utilize the light plane of incidence 16a of the laser beam L irradiates light transport layer 16 of intensity modulated, and the focus of adjusting laser beam L is to recording layer 14.

Because the reflection coefficient of recording layer 14 is different on amorphous areas and crystalline state zone, by detecting from recording layer 14 laser light reflected bundle L light quantities, can reappear the data that write down in the recording layer 14.

In this embodiment, owing to determined to add to the nitrogen content in first recording layer 15 and second recording layer 13, with respect to wavelength is the laser beam L of 405nm, the refractive index n of first recording layer 15 and second recording layer 13 is enough height, and its extinction coefficient k is enough low, therefore, can increase degree of modulation, that is, form the recording layer zone of record mark and the reflection coefficient that do not form between the recording layer zone of record mark poor, and prevent reducing of recording layer 14 reflection coefficients.

According to this embodiment, owing to determined to add to the nitrogen content in first recording layer 15 and second recording layer 13, with respect to wavelength is the laser beam L of 405nm, the refractive index n of first recording layer 15 and second recording layer 13 is enough height, and its extinction coefficient k is enough low, therefore, and when record data are in optical recording media 10, can reduce laser beam L energy that absorbs in first recording layer 15 and second recording layer 13 and the recording sensitivity that improves optical recording media 10.On the other hand, when from optical recording media 10 playing data for broadcasting, can increase degree of modulation, that is, form recording layer 14 zones of record mark and the reflection coefficient that do not form between recording layer 14 zones of record mark poor, and prevent reducing of recording layer 14 reflection coefficients.

Fig. 5 is the sectional view of another embodiment of the present invention optical recording dielectric layer structure.

Structure according to this embodiment optical recording media 30 is a write once optical recording medium, as shown in Figure 5, it comprises: support base 31, transparent intermediate layer 32, optical transport layer 33, the L0 layer 40 that forms between support base 31 and the transparent intermediate layer 32, and the L1 layer 50 that forms between hyaline layer 32 and the optical transport layer 33.

L0 layer 40 and L1 layer 50 are recording layers of record data,, comprise two recording layers according to the optical recording media 30 of this embodiment that is.

As shown in Figure 5, the recording layer that L0 layer 40 constitutes away from light plane of incidence 33a, it is reflective film 41, the four dielectric films 42, the two L0 recording sheet 43a by support base 31 1 sides, the lamination of a L0 recording sheet 43b and the 3rd dielectric film 44 constitutes.

On the other hand, L1 layer 50 constitutes the recording layer that approaches light plane of incidence 33a, and it is reflective film 51, the second dielectric films 52, the two L1 recording sheet 53a by support base 31 1 sides, and the lamination of a L1 recording sheet 53b and the first dielectric film 53b constitutes.

To L0 layer 40 with under the situation of L0 layer 40 playing data for broadcasting, laser beam L shines on the L0 layer 40 by being positioned at optical transport layer 33 contiguous L1 layers 50 at record data.

The effect of support base 31 is the substrates that guarantee optical recording media 30 required physical strengths, and its similar is in the support base 11 of optical recording media 10 shown in Figure 2.

The effect of transparent intermediate layer 32 is to make between L0 layer 40 and the L1 layer 50 to separate enough distances on the physics and optics.

As shown in Figure 5, groove 32a and boss 32b alternately are formed on transparent intermediate layer 32 surfaces, corresponding to the groove 31a and the boss 31b that form on the support base 31.When record data to L0 layer 40 or from the time to L0 layer 40 playing data for broadcasting, the groove 32a that form are gone up on transparent intermediate layer 32 surfaces and/or the effect of boss 32b is the guide rail of laser beam L.

Preferably, transparent intermediate layer 32 thickness of making are between 10 μ m to 50 μ m, are more preferably, and its thickness is between 15 μ m to 40 μ m.

Transparent intermediate layer 32 must have sufficiently high light transmission because when record data to L0 layer 40 or during from L0 layer 40 playing data for broadcasting, laser beam L transmission is by transparent intermediate layer 32.

The material of making transparent intermediate layer 32 does not have concrete restriction, but the preferred material that is used to make transparent intermediate layer 32 is the ultraviolet curing acrylic resin.

The effect of optical transport layer 33 is transmission laser beam L, and light plane of incidence 33a is made of one of them surface.The optical transport layer 16 of the similar of optical transport layer 33 in optical recording media 10 shown in Figure 2.

L0 layer 40 comprises: a L0 recording sheet 43b and the 2nd L0 recording sheet 43a, recording sheet 43b comprise and are selected from Si, and an element among Ge and the Sn is as principal ingredient, and recording sheet 43a comprises Cu as principal ingredient.

For noise level that reduces reproducing signal and the memory reliability that improves optical recording media 30, preferably, add being selected from Al, Zn, Sn, one or more elements to the two L0 recording sheet 43a among Mg and the Au.

L1 layer 50 comprises: a L1 recording sheet 53b and the 2nd L1 recording sheet 53a, and recording sheet 53b comprises Si as principal ingredient, and recording sheet 53a comprises Cu as principal ingredient.

For noise level that reduces reproducing signal and the memory reliability that improves optical recording media 30, preferably, add being selected from Al, Zn, Sn, one or more elements to the two L1 recording sheet 53a among Mg and the Au.

In this embodiment, be included in the 4th dielectric film 42 in the L0 layer 40 and each dielectric film in the 3rd dielectric film 44 and second dielectric film 52 and first dielectric film 54 and comprise Ta ₂O ₅Or TiO ₂As principal ingredient and nitrogen as adjuvant, and determine to add to first dielectric film 54, second dielectric film 52, nitrogen content in each dielectric film of the 3rd dielectric film 44 and the 4th dielectric film 42, therefore, with respect to wavelength is the laser beam L of 405nm, and their refractive index n is enough height, and their extinction coefficient k is enough low.

Fig. 6 utilizes the laser beam L irradiation L1 layer amplification profile synoptic diagram of optical recording media 30 shown in Figure 5 afterwards.

As shown in Figure 6, when utilizing laser beam L when light plane of incidence 33a shines the L1 layer 50 of optical recording media 30, be included among the 2nd L1 recording sheet 53a as the Cu of principal ingredient and be included among the L1 recording sheet 53b Si fusion or diffusion apace as principal ingredient, form the regional M that Cu and Si mix, thereby form record mark M.

Similar to the above, when utilizing laser beam L when light plane of incidence 33a shines the L0 layer 40 of optical recording media 30, be included among the 2nd L0 recording sheet 43a as the Cu of principal ingredient and be included among the L0 recording sheet 43b Si fusion or diffusion apace as principal ingredient, form the regional M that Cu and Si mix, thereby form record mark M.

According to the method, because forming the regional reflex coefficient of record mark M in L0 layer 40 or L1 layer 50 is very different with the L0 layer 40 that centers on formation record mark M or the regional reflex coefficient of L1 layer 50, shine on L0 layer 40 or the L1 layer 50 by laser beam L, and detect from L0 layer 40 or L1 layer 50 laser light reflected bundle L light quantity, can obtain high reproducing signal (C/N ratio).

According to this embodiment, owing to determined to add to the 4th dielectric film 42 that L0 layer 40 comprises and the nitrogen content in the 3rd dielectric film 44, therefore, with respect to wavelength is the laser beam L of 405nm, the refractive index n of the 4th dielectric film 42 and the 3rd dielectric film 44 is enough height, and their extinction coefficient k is enough low.When record data are in the L0 layer 40 of optical recording media 10, can reduce the laser beam L energy of absorption in the 4th dielectric film 42 and the 3rd dielectric film 44, and improve the recording sensitivity of L0 layer 40 in the optical recording media 10.On the other hand, when from L0 layer 40 playing data for broadcasting of optical recording media 10, can increase degree of modulation, promptly, it is poor to form L0 layer 40 zone of record mark and do not form between L0 layer 40 zone of record mark reflection coefficient, and prevents reducing of L0 layer 40 regional reflex coefficient.

In addition, according to this embodiment, owing to determined to add to second dielectric film 52 that L1 layer 50 comprises and the nitrogen content in first dielectric film 54, therefore, with respect to wavelength is the laser beam L of 405nm, the refractive index n of second dielectric film 52 and first dielectric film 54 is enough height, and their extinction coefficient k is enough low.When record data are in the L1 layer 50 of optical recording media 10, can reduce the laser beam L energy of absorption in second dielectric film 52 and first dielectric film 54, and improve the recording sensitivity of L1 layer 50 in the optical recording media 10.On the other hand, when from L1 layer 50 playing data for broadcasting of optical recording media 10, can increase degree of modulation, promptly, it is poor to form L1 layer 50 zone of record mark and do not form between L1 layer 50 zone of record mark reflection coefficient, and prevents reducing of L1 layer 50 regional reflex coefficient.

In addition, according to this embodiment, owing to determined to add to second dielectric film 52 that L1 layer 50 comprises and the nitrogen content in first dielectric film 54, therefore, be the laser beam L of 405nm with respect to wavelength, the refractive index n of second dielectric film 52 and first dielectric film 54 is enough height, and their extinction coefficient k is enough low, can increase the transmissivity of L1 layer 50, so, can improve significantly in the L0 layer 40 data recording performance and from the data reproduction characteristic of L0 layer 40.

Worked example and comparative example

The a few thing example is below described so that further specify advantage of the present invention.

Worked example 1

At first, utilize injection molding method to make thickness and be 1.1mm and diameter discoid polycarbonate substrate for 120mm.

Then, the polycarbonate substrate of so making is put into sputtering equipment, and be to utilize Ta under the 800W at power ₂O ₅Target is finished sputter procedure, thereby to make thickness on the polycarbonate-base basal surface be 30nm and comprise Ta ₂O ₅Dielectric layer as principal ingredient.

The mixed gas that adopts argon gas and nitrogen is as sputter gas, and the flow velocity by changing nitrogen is made the dielectric layer sample #1-1 to #1-6 that nitrogen content has nothing in common with each other from 0 to 35SCCM.

Measure institute's nitrogen content in the dielectric layer of each sample #1-1 to #1-6, and measure between the nitrogen content that adds in the dielectric layer as the mixed gas composition of sputter gas and sample #1-1 to #1-6 and concern.

Table 1 is showed this measurement result.

Utilize ESCA (chemical analysis electron spectroscopy), promptly, XPS (x-ray photoelectron spectroscopy), record the peak area (peak: about 28.2 to 37.4eV) of 4f tantalum peak value, the peak area of 1s oxygen peak value (peak: about 523 to 543eV), peak area (peak: about 390 to 410eV) with 1s nitrogen peak value, the sensitivity factor corresponding with each peak value these peak areas multiplies each other, can obtain the nitrogen content that adds in each dielectric layer, wherein 4f tantalum peak value is 0.956,1s oxygen peak value be 2.994 and 1s nitrogen peak value be 4.505.

Table 1

	The flow velocity of Ar gas (sccm)	N 2The flow velocity of gas (sccm)	Nitrogen content (atom %)
				Sample #1-1	55	0	0
Sample #1-2	50	5	3.3
				Sample #1-3	45	10	6.1
Sample #1-4	40	15	8.4
				Sample #1-5	30	25	11.3
Sample #1-6	20	35	12.1

Then, wavelength is that the laser beam of 405nm and laser beam irradiation that wavelength is 680nm are to each sample #1-1 to #1-6, measure their refractive index n and extinction coefficient k, concern between the nitrogen content (atomic percent) that adds in relation and the dielectric layer between the refractive index n of nitrogen content that can obtain adding in the dielectric layer (atomic percent) and dielectric layer and the extinction coefficient k of dielectric layer.

Concern between nitrogen content that adds in the dielectric layer that Fig. 7 represents so to obtain (atomic percent) and the dielectric layer refractive index n, and Fig. 8 represents to concern between the nitrogen content (atomic percent) that adds in the dielectric layer and the dielectric layer extinction coefficient k.

As shown in Figure 7, we find, are the laser beam of 680nm with respect to wavelength, and the dielectric layer refractive index n reduces with the increase of adding nitrogen content in the dielectric layer (atomic percent) to, and this dielectric layer comprises Ta ₂O ₅As principal ingredient.

In contrast, as shown in Figure 7, we find, are the laser beam of 405nm with respect to wavelength, and the dielectric layer refractive index n increases with the increase of adding nitrogen content in the dielectric layer (atomic percent) to, and this dielectric layer comprises Ta ₂O ₅As principal ingredient; But when the nitrogen content atomic percent that adds in the dielectric layer surpasses approximately 6% the time, it reduces with the increase of adding nitrogen content in the dielectric layer (atomic percent) to, and this dielectric layer comprises Ta ₂O ₅As principal ingredient.

On the other hand, as shown in Figure 8, we find, when adding nitrogen to comprising Ta ₂O ₅As in the dielectric layer of principal ingredient the time, be the dielectric layer extinction coefficient k of 405nm laser beam and be that the dielectric layer extinction coefficient k of 680nm laser beam increases with respect to wavelength, and further increase along with the increase of adding nitrogen content in the dielectric layer to respect to wavelength.

In addition, as shown in Figure 8, we find, when the nitrogen content atomic percent that adds in the dielectric layer is about 6% to 10%, be the dielectric layer extinction coefficient k of 405nm laser beam and be that the dielectric layer extinction coefficient k of 680nm laser beam equals zero with respect to wavelength with respect to wavelength, but when the nitrogen content atomic percent that adds in the dielectric layer surpassed 10%, extinction coefficient k increased with the increase of nitrogen content.

In addition, as shown in Figure 8, we find that if interpolation nitrogen is the 405nm laser beam with respect to wavelength then, dielectric layer extinction coefficient k reduces significantly in dielectric layer.

Then, laser beam irradiation is to sample #1-1 to #1-2, in the scope of wavelength 350nm to 800nm, change in the laser beam wavelength, measure the refractive index n and the extinction coefficient k of each dielectric layer, thereby obtain concerning between the extinction coefficient k of relation and laser beam wavelength and dielectric layer between laser beam wavelength and the dielectric layer refractive index n.

Fig. 9 represents the measurement result that concerns between laser beam wavelength and the dielectric layer refractive index n, and Figure 10 represents the measurement result that concerns between laser beam wavelength and the dielectric layer extinction coefficient k.

As shown in Figure 9, we find that sample #1-1 comprises Ta ₂O ₅As principal ingredient but there be not the dielectric layer of nitrogen as adjuvant, its refractive index n shortens and reduces with laser beam wavelength; Sample #1-2 comprises Ta ₂O ₅As principal ingredient and atomic percent be 3.3% nitrogen as adjuvant, its refractive index n shortens and increases with laser beam wavelength, and is equal to or less than the laser beam of 470nm with respect to wavelength, the refractive index n of sample #1-2 is higher than the refractive index n of sample #1-1.

In addition, as shown in figure 10, we find that sample #1-1 comprises Ta ₂O ₅As principal ingredient but there be not the dielectric layer of nitrogen as adjuvant, its extinction coefficient k is shortening and increase linearly with laser beam wavelength basically; Sample #1-2 comprises Ta ₂O ₅As principal ingredient and atomic percent be 3.3% nitrogen as adjuvant, even the wavelength of laser beam changes, its extinction coefficient k is constant basically; With respect to the laser beam in wavelength 350nm to the 800nm scope, the extinction coefficient k of sample #1-1 is higher than the extinction coefficient k of sample #1-2, and the difference of the two extinction coefficient k shortening and become big with laser beam wavelength.

Worked example 2

At first, utilize injection molding method to make thickness and be 1.1mm and diameter discoid polycarbonate substrate for 120mm.

Then, the polycarbonate substrate of so making is put into sputtering equipment, and be to utilize Ta under the 800W at power ₂O ₅Target is finished sputter procedure, thereby to make thickness on the polycarbonate-base basal surface be 30nm and comprise Ta ₂O ₅Dielectric layer as principal ingredient.

The mixed gas that adopts argon gas and nitrogen is as sputter gas, and the flow velocity by changing nitrogen is made the dielectric layer sample #2-1 to #2-8 that nitrogen content has nothing in common with each other from 0 to 35SCCM.

Measure the nitrogen content of sample #2-1 each sample dielectric layer to the sample #2-6, and measure between the nitrogen content that adds to the dielectric layer of sample #2-6 as the mixed gas composition of sputter gas and sample #2-1 and concern.

Table 2 is showed this measurement result.

Utilize ESCA (chemical analysis electron spectroscopy), promptly, XPS (x-ray photoelectron spectroscopy), record the peak area (peak: about 443.8 to 473.8eV) of 2p tantalum peak value, the peak area of 1s oxygen peak value (peak: about 523 to 543eV), peak area (peak: about 390 to 410eV) with 1s nitrogen peak value, the sensitivity factor corresponding with each peak value these peak areas multiplies each other, can obtain the nitrogen content that adds in each dielectric layer, wherein 2p tantalum peak value is 1.703,1s oxygen peak value be 2.994 and 1s nitrogen peak value be 4.505.

Table 2

	The flow velocity of Ar gas (sccm)	N 2The flow velocity of gas (sccm)	Nitrogen content (atom %)
				Sample #2-1	55	0	0
Sample #2-2	52	3	1.7
				Sample #2-3	50	5	2.9
Sample #2-4	47	8	3.1
				Sample #2-5	45	10	3.3
Sample #2-6	40	15	3.9
				Sample #2-7	30	25	5.1
Sample #2-8	20	35	5.7

Then, wavelength is that the laser beam of 405nm and laser beam irradiation that wavelength is 680nm are to each sample #2-1 to #2-8, measure their refractive index n and extinction coefficient k, concern between nitrogen content (atomic percent) that adds in relation and the dielectric layer between nitrogen content that can obtain adding in the dielectric layer (atomic percent) and the dielectric layer refractive index n and the dielectric layer extinction coefficient k.

Concern between nitrogen content that adds in the dielectric layer that Figure 11 represents so to obtain (atomic percent) and the dielectric layer refractive index n, and Figure 12 represents to concern between the nitrogen content (atomic percent) that adds in the dielectric layer and the dielectric layer extinction coefficient k.

As shown in figure 11, we find, are the laser beam of 405nm with respect to wavelength, and the dielectric layer refractive index n comprises TiO with adding to ₂Increase as the increase of nitrogen content (atomic percent) in the dielectric layer of principal ingredient, but to surpass atomic percent about 4.5% the time when the nitrogen content in the dielectric layer, the dielectric layer refractive index n comprises TiO with adding to ₂As the increase of nitrogen content (atomic percent) in the dielectric layer of principal ingredient and reduce gradually.

In contrast, as shown in figure 11, we find, are the laser beam of 680nm with respect to wavelength, even add nitrogen to comprising TiO ₂In the dielectric layer as principal ingredient, it is constant that the dielectric layer refractive index n keeps substantially.

On the other hand, as shown in figure 12, we find, with respect to wavelength is the laser beam of 405nm, the increase of nitrogen content reduces dielectric layer extinction coefficient k in the dielectric layer with adding to, but to surpass atomic percent about 2.7% the time when nitrogen content, and dielectric layer extinction coefficient k just increases.

In addition, as shown in figure 12, we find, are the laser beam of 680nm with respect to wavelength, and the increase of nitrogen content reduces dielectric layer extinction coefficient k in the dielectric layer with adding to, but to surpass atomic percent about 3% the time when nitrogen content, and dielectric layer extinction coefficient k is increase just.

Then, laser beam irradiation is to sample #2-1 to #2-3, in 350nm to 800nm scope, change in the laser beam wavelength, measure dielectric layer refractive index n and dielectric layer extinction coefficient k, thereby determine to concern between the relation and laser beam wavelength and dielectric layer extinction coefficient k between the refractive index n of laser beam wavelength and dielectric layer.

Figure 13 represents the measurement result that concerns between laser beam wavelength and the dielectric layer refractive index n, and Figure 14 represents the measurement result that concerns between laser beam wavelength and the dielectric layer extinction coefficient k.

As shown in figure 13, we find, even the wavelength of laser beam shortens, comprise TiO ₂As principal ingredient but there is not nitrogen not have very big variation as the refractive index n of the dielectric layer sample #2-1 of adjuvant; And comprise TiO ₂As principal ingredient and atomic percent is 2.9% nitrogen as the refractive index n of the dielectric layer sample #2-3 of adjuvant with the shortening and increase of laser beam wavelength, and with respect to the laser beam in the blue wave band, the refractive index n of dielectric layer sample #2-3 is very big.

In addition, as shown in figure 14, we find, comprise TiO ₂As principal ingredient but do not have nitrogen as the extinction coefficient k of the dielectric layer sample #2-1 of adjuvant with comprise TiO ₂As principal ingredient and atomic percent is 2.9% nitrogen as the extinction coefficient k of the dielectric layer sample #2-3 of adjuvant shortening and increase with laser beam wavelength all, and the extinction coefficient k of sample #2-1 is greater than the extinction coefficient k of sample #2-3, the Wavelength-independent of it and laser beam.

Worked example 3

Make optical recording medium sample #3-1. according to following method

At first, utilize injection molding method to make thickness and be 1.1mm and diameter discoid polycarbonate substrate for 120mm.

Then, polycarbonate substrate is put into sputtering equipment, utilize sputter procedure on the polycarbonate substrate of so making, to make in succession to comprise Ag as principal ingredient and thickness for the reflective film of 100nm, comprise TiO ₂As principal ingredient and atomic percent is that 2.9% nitrogen is second dielectric film of 17nm as adjuvant and thickness, comprising Cu is that 23% Al and atomic percent are that 13% Au is second recording sheet of 5nm as adjuvant and thickness as principal ingredient and atomic percent, comprising Si is first recording sheet of 5nm as principal ingredient and thickness, comprises TiO ₂As principal ingredient and atomic percent is that 2.9% nitrogen is first dielectric film of 17nm as adjuvant and thickness.

In addition, dissolving propylene ultraviolet-curing resin utilizes whirl coating to apply first dielectric film with the formation coating, and utilizes ultraviolet ray irradiation coating with the preparation resin solution in solvent, is the protective seam of 100 μ m thereby solidify propylene ultraviolet resin with formation thickness.

In addition, make optical recording medium sample #3-2 according to following method.

At first, utilize injection molding method to make thickness and be 1.1mm and diameter discoid polycarbonate substrate for 120mm.

Then, polycarbonate substrate is put into sputtering equipment, utilize sputter procedure on the polycarbonate substrate of so making, to make in succession to comprise Ag as principal ingredient and thickness for the reflective film of 100nm, comprise TiO ₂As principal ingredient and thickness is second dielectric film of 20nm, comprising Cu is that 23% Al and atomic percent are that 13% Au is second recording sheet of 5nm as adjuvant and thickness as principal ingredient and atomic percent, comprising Si is first recording sheet of 5nm as principal ingredient and thickness, comprises TiO ₂As principal ingredient and atomic percent is that 2.9% nitrogen is first dielectric film of 23nm as adjuvant and thickness.

In addition, dissolving propylene ultraviolet-curing resin utilizes whirl coating to apply first dielectric film with the formation coating, and utilizes this coating of ultraviolet ray irradiation with the preparation resin solution in solvent, is the protective seam of 100 μ m thereby solidify propylene ultraviolet resin with formation thickness.

Then, can obtain under the record condition of system the most to a high-profile, laser beam irradiation writes down data wherein and measures degree of modulation to optical recording medium sample #3-1 and #3-2.

Table 3 is showed the most to a high-profile system and is obtained the measurement result of the laser beam power of system the most to a high-profile.

Table 3

	Degree of modulation (%)	Laser beam power (mW)
			Sample #3-1	60	8.2
Sample #3-2	52	11.0

As shown in table 3, we find, with do not add nitrogen relatively to the optical recording medium sample #3-2 of first dielectric film and second dielectric film, adding nitrogen in the optical recording medium sample #3-1 of first dielectric film and second dielectric film, utilize the laser beam of lower-wattage can obtain higher degree of modulation.

Therefore, we find, by adding nitrogen to first dielectric film and second dielectric film, can improve the degree of modulation and the recording sensitivity of optical recording media.

So far, with reference to several specific embodiments and worked example displaying and description the present invention.Yet, should be noted that the present invention never is subjected to the restriction of institute's tracing device details, can make various variations and change in the scope that does not depart from appended claims.

For example, Fig. 2 and embodiment illustrated in fig. 3 and embodiment illustrated in fig. 4 in, each dielectric layer in first dielectric layer 15 and second dielectric layer 13 comprises nitrogen as adjuvant, and is included in the 4th dielectric film 42 in the L0 layer and each dielectric film in the 3rd dielectric film 44 and second dielectric film 52 and first dielectric film 54 comprises nitrogen as adjuvant.Yet, preferably, but not the sin qua non, all dielectric layers or the dielectric film that form in the optical recording media comprise nitrogen as adjuvant.At least light plane of incidence one side upper dielectric layer or the dielectric film with respect to recording layer comprises nitrogen as adjuvant; Preferably, light plane of incidence one side upper dielectric layer or the dielectric film with respect to the relative recording layer comprises nitrogen as adjuvant.

In addition, in Fig. 2 and embodiment shown in Figure 3, though first recording sheet 21 and second recording sheet 22 that form contact with each other, but forming first recording sheet 21 and second recording sheet 22 that contact with each other is not the sin qua non, the vicinity that second recording sheet 22 is positioned at first recording sheet 21 is enough, in order that when utilizing the laser beam irradiation mixed zone, the mixed zone of formation comprises the principal ingredient element of first recording sheet 21 and the principal ingredient element of second recording sheet 22.In addition, one or more dielectric layers can be inserted between first recording sheet 21 and second recording sheet 22.

In addition, Fig. 2 and embodiment illustrated in fig. 3 and embodiment illustrated in fig. 4 in each optical recording media 10 comprise: reflection horizon 12, and L0 layer 40 and L1 layer 50 comprise respectively: reflective film 41 and reflective film 51.Yet, be under sizable situation in the laser beam level and the difference that does not form the white space laser light reflected bundle level of record mark M of the regional reflex that forms record mark M, can omit reflection horizon 12, reflective film 41 and reflective film 51.

According to the present invention, the method for a kind of optical recording media and manufacturing optical recording media can be provided, with respect to the setted wavelength laser beam of record data and playing data for broadcasting, this optical recording media can represent good optical characteristics.

In addition, according to the present invention, can provide the method for a kind of optical recording media and manufacturing optical recording media, with respect to laser beam in the blue wave band of record data and playing data for broadcasting, this optical recording media can represent good optical characteristics.

Claims (10)

1. optical recording media comprises: at least one recording layer and at the contiguous dielectric layer that forms of this at least one recording layer, this dielectric layer comprise and are selected from by Ta ₂O ₅And TiO ₂Oxide in the group that constitutes is as principal ingredient and add 1 to 12atomic% nitrogen.

2. according to the optical recording media of claim 1, wherein this at least one recording layer is such structure, utilize wavelength for the laser beam between the 380nm to 450nm can record data in this recording layer.

3. according to the optical recording media of claim 1, wherein this at least one recording layer comprises: first recording sheet and second recording sheet, first recording sheet comprise and are selected from Si, Ge, Sn, Mg, C, Al, Zn, In, Cu, the element in the group that Ti and Bi constitute is as principal ingredient, and second recording sheet comprises and is selected from Cu, Al, the element in the group that Zn and Ag constitute is as principal ingredient, and this element is different from the element that comprises as principal ingredient in first recording sheet.

4. according to the optical recording media of claim 3, wherein second recording sheet of Xing Chenging contacts with first recording sheet.

5. according to the optical recording media of claim 3, wherein first recording sheet comprises and is selected from Si, and the element in the group that Ge and Sn constitute is as principal ingredient.

6. according to the optical recording media of claim 3, wherein second recording sheet comprises Cu as principal ingredient.

7. according to the optical recording media of claim 3, wherein the interpolation of second recording sheet is selected from Cu, Al, and Zn, Ag, Mg, Sn, Au, the element in the group that Ti and Pd constitute, this element is different from the element that comprises as principal ingredient in first recording sheet.

8. according to the optical recording media of claim 1, comprise: two or more spaced-apart recording layers, and dielectric layer, each dielectric layer is formed on the vicinity of a recording layer, is formed on the contiguous dielectric layer of recording layer that approaches the light plane of incidence most at least and comprises and be selected from by Ta ₂O ₅And TiO ₂Oxide in the group that constitutes as the nitrogen of principal ingredient and 1 to 12atomic% as adjuvant.

9. according to the optical recording media of claim 8, wherein each recording layer comprises: first recording sheet and second recording sheet, first recording sheet comprise and are selected from Si, Ge, Sn, Mg, C, Al, Zn, In, Cu, the element in the group that Ti and Bi constitute is as principal ingredient, and second recording sheet comprises and is selected from Cu, Al, the element in the group that Zn and Ag constitute is as principal ingredient, and this element is different from the element that comprises as principal ingredient in first recording sheet.

10. method of making optical recording media, this optical recording media comprises: at least one recording layer and the dielectric layer that is close at this at least one recording layer, the method of this manufacturing optical recording media comprises step: in comprising the mixed-gas atmosphere of nitrogen, utilize the method for vapour growth oxide to make dielectric layer, this dielectric layer is comprised be selected from by Ta ₂O ₅And TiO ₂Oxide in the group that constitutes is as principal ingredient and add 1 to 12atomic% nitrogen.

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