JP3171789B2 - Flow measurement performance evaluation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate for evaluating the performance of a fluid vibration type flow meter element for detecting a flow rate from a fluid vibration generated in a jet jet from a nozzle of a fluid vibration type flow meter having a two-dimensional flow path. The present invention relates to a measurement performance evaluation device.

[0002]

2. Description of the Related Art Examples of this type of flow rate measurement performance evaluation apparatus include, for example, Transactions of the Society of Instrument and Control Engineers, Vol. 29, N
o. 5, 512/519 (1993), a gas having a predetermined reference flow rate is caused to flow through the flow meter element, and the flow rate is actually measured by the flow meter element. That is, by using a wet gas meter as a measurement standard, the flow rate flowing through the flow meter element is accurately determined, and the flow rate serving as the reference is compared with the flow rate detected by the flow meter element to thereby improve the performance of the flow meter element. I'm evaluating.

[0003]

However, in the flow rate measuring performance evaluation apparatus as described above, it is necessary to accurately measure the reference flow rate using a wet gas meter in addition to measuring the flow rate by the flow meter element. And the disadvantage that the measurement is troublesome. In addition, with such a measuring method, the performance of the entire flow meter element can be checked, but there is a problem that it is not known which part of the flow meter element has a factor that affects the performance.

SUMMARY OF THE INVENTION The present invention has been devised to solve the above-mentioned problem, and provides a flow rate measurement performance evaluation apparatus which is simple to measure and can investigate the cause of the performance of a flow meter element. The task is to do.

[0005]

Means for Solving the Problems In order to achieve the above object, the invention according to claim 1 has a two-dimensional flow path in which a cross section orthogonal to the thickness direction is formed in a constant planar shape. 2
A flow rate measurement performance evaluation device for evaluating a performance of a fluid vibration type flow meter element for detecting a flow rate from a fluid vibration generated in a jet flow jetted from a nozzle of a three-dimensional flow path, provided on a cover of the fluid vibration type flow meter element A through hole extending in the thickness direction, a probe having a speed sensor at the tip, fitted so as to be in close contact with the through hole, and inserted movably in the axial direction of the through hole; An element support for supporting the fluid vibration type flow meter element and a probe support for supporting the probe are provided.

According to a second aspect of the present invention, in the first aspect of the present invention, the probe support base is configured such that the probe is connected to the X-axis,
It is configured to be movable in each direction of the axis and the Z axis, and to be rotatable around at least one of the X, Y, and Z axes.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the element support base can move the fluid vibration type flow meter element in each of the X-axis, Y-axis, and Z-axis directions. It is characterized by comprising.

According to a fourth aspect of the present invention, in the first, second or third aspect of the invention, the probe is moved at a predetermined interval in the thickness direction of the fluid vibration type flow meter element, and each probe is moved at a different position. And a computer for controlling the flow velocity in the sample to be automatically measured.

According to a fifth aspect of the present invention, in the first, second, third or fourth aspect of the present invention, there is provided a flow control device for supplying a gas of a predetermined flow rate to a fluid vibration type flow meter element. It is characterized by having.

And, in the invention according to claim 1,
The fluid vibration type flow meter element is mounted on the element support base, the probe is mounted on the probe support base, and the tip of the probe is inserted into the fluid vibration type flow meter element through the through hole. Then, the flow rate of the fluid in the fluid vibration type flow meter element is detected by a speed sensor provided at the tip of the probe. At this time, the probe is moved at predetermined intervals in the thickness direction of the fluid vibration type flow meter element, and the flow velocity in the fluid vibration type flow meter element at each position is measured. From the above, 2
The velocity distribution can be measured, for example, between the bottom surface and the surface of the packing in the thickness direction of the dimensional flow path.

Since the fluid vibration type flow meter element is based on a two-dimensional flow path, the flow rate measurement performance can be evaluated based on how uniform the velocity distribution in the thickness direction is. That is, it can be evaluated that the more uniform the velocity distribution, the better the flow rate measurement performance. In evaluating the flow rate measurement performance, it is only necessary to measure the flow rate, and it is not necessary to measure the reference flow rate with a wet gas meter or to actually measure the flow rate with a fluid vibration type flow meter element. In addition, the measurement for performance evaluation becomes extremely simple.

Further, it is possible to know which part of the fluid vibration type flow meter element causes the performance degradation depending on the position where the velocity distribution is measured. That is, it is possible to pursue the factors that affect the flow rate measurement performance of the fluid vibration type flow meter element.

In the invention according to the second aspect, the probe can be moved in the directions of the X, Y, and Z axes by the probe support, and can be rotated about at least one axis. Therefore, the probe can be easily inserted into the through hole of the fluid vibration type flow meter element. Therefore, since the fitting accuracy between the probe and the through hole can be improved, it is possible to prevent the fluid from leaking from the gap between the through hole and the probe.

In the invention according to claim 3, since the flow meter element can be moved in the directions of the X, Y, and Z axes by the element support, the probe is inserted into the through hole of the flow meter element. It can be easily fitted and inserted. Therefore, since the fitting accuracy between the probe and the through hole can be improved, it is possible to prevent the fluid from leaking from the gap between the through hole and the probe. Also, a packing is installed to completely prevent the fluid from leaking.

In the invention according to claim 4, the probe can be automatically moved in the thickness direction of the fluid vibration type flow meter element by the computer, and the flow velocity at each position can be automatically measured via the speed sensor. Can be detected. Therefore, the measurement for evaluating the flow measurement performance of the fluid vibration type flow meter element can be performed very easily.

In the invention according to claim 5, a constant flow rate can be supplied to the fluid vibration type flow meter element by the flow rate control device having the mass flow controller and the stop valve. Therefore, since the flow velocity does not change due to external factors, the reliability of performance evaluation based on the velocity distribution is improved.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 4 to 7 show experimental examples.

As shown in FIGS. 2 and 3, a fluid vibration type flow meter element FM in this embodiment includes a pair of nozzle members 2a, 2b in a housing 1 closed by a cover 5.
To provide the nozzle flow path 2 in the housing 1.
10 and an upstream flow path 200 and a downstream flow path 220 on the upstream and downstream sides of the nozzle flow path 210, respectively.

A target 3 is provided on the bottom surface 220 a of the downstream flow path 220 on an extension of the nozzle flow path 210, and a gas (fluid) ejected through the nozzle flow path 210 hits the target 3. The flow rate is measured based on the generated fluid vibration.

The housing 1 is constituted by a concave groove 1a. By covering the upper part of the groove 1a with the cover 5, a two-dimensional flow path including the upstream flow path 200, the nozzle flow path 210, and the downstream flow path 220 is configured. That is, the upstream flow path 2
00, the nozzle flow path 210 and the downstream flow path 220
The cross section orthogonal to the depth direction a (the thickness direction of the two-dimensional flow channel) is formed to be constant. The two-dimensional flow path includes an upstream flow path 200, a nozzle flow path 210, and a downstream flow path 220.
Each of the bottom surfaces 200a, 210a, 220a and the packing 7
Is formed at a constant distance from the surface 7a.

When the packing 7 is not provided, or when the packing 7 is provided in a shape avoiding each of the flow paths 200, 210, 220, the two-dimensional flow path is formed on each of the bottom surfaces 2 and 3.
00a, 210a, 220a and inner surface 5 of cover 5
a is formed at a constant distance.

Further, the housing 1 is configured so that it can be connected to another flow path via the inflow port 1b and the outflow port 1c. Further, the housing 1 has a downstream flow path 220.
Are provided with two pressure sensors 4 for detecting fluid vibrations on the bottom surface 220a. These pressure sensors 4
It is provided so as not to protrude from the bottom surface 220a. The pressure sensor 4 may be configured as a pressure inlet, and each pressure sensor may be connected to the pressure inlet.

The housing 1 has a screw hole 1e for fixing the cover 5, and a screw hole (not shown) for fixing the nozzle members 2a and 2b.
Are formed. A bolt 6 for fixing the cover 5 is screwed into the screw hole 1e. Further, bolts (not shown) inserted from outside the cover 5 through holes 2c and 2d formed in the nozzle members 2a and 2b are screwed into screw holes for fixing the nozzle members 2a and 2b. It has become.

On the other hand, the cover 5 is provided with a through hole 5b on an extension of the nozzle flow path 210 in the downstream flow path 220. This through hole 5b is located closer to the nozzle flow path 210 than each pressure sensor 4 and has a probe 8 to be described later.
Can be inserted. In addition, packing 7
A through hole 7b of the same size is formed at the same position as the through hole 5b.

The fluid vibration type flow meter element FM detects the frequency of the fluid vibration through the pressure sensor 4 because the frequency of the fluid vibration is proportional to the flow rate or the flow velocity of the gas. It measures the flow rate. In addition, the said fluid vibration type flowmeter element FM
This measures the flow rate of the LP gas, and measures the fluid vibration of the LP gas. However, in the fluid vibration type flow meter element FM having the above structure, it is also possible to measure the flow rate of a gas other than the LP gas or the flow rate of the liquid.

FIG. 1 shows a device for evaluating the flow measurement performance of the fluid vibration type flow meter element FM configured as described above, that is, a flow measurement performance evaluation device E.

This flow rate measurement performance evaluation device E has a through hole 5b extending in the thickness direction provided on the cover 5 of the fluid vibration type flow meter element FM, and a speed sensor 8a at the tip, and is closely connected to the through hole 5b. A probe 8 inserted so as to be movable in the axial direction of the through hole 5b, a packing 8d for preventing leakage of fluid from a fitting point of the probe 8 and the through hole 5b, and a fluid vibration type An element support 9 for supporting the flow meter element FM and a probe support 1 for supporting the probe 8
0.

The probe 8 has a probe support 8b at the base end, and is held by a bracket 10θa to be described later via the probe support 8b.

The element support 9 is provided on the base stage S, and includes an X-axis moving stage 9x, a Y-axis moving stage 9y, and a Z-axis moving stage 9z. That is, the element support base 9 is configured to be able to move the fluid vibration type flow meter element FM in each of the X-axis, Y-axis, and Z-axis directions.

The probe support 10 is mounted on a base stage S
The X-axis direction moving stage 10
An x, Y axis direction moving stage 10y, a Z axis direction moving stage 10z, and a θ direction rotating stage 10θ rotatable around the Z axis are provided. That is, the probe support 10
Is configured so that the probe 8 is movable in each of the X-axis, Y-axis, and Z-axis directions, and is configured to be rotatable in the θ direction about the Z-axis. Instead of the θ-direction rotation stage 10θ, a Y-axis rotation stage may be provided, or both the θ-direction rotation stage 10θ and the Y-axis rotation stage may be provided.

Each of the X-axis direction moving stages 9x, 10
The x and Y axis moving stages 9y and 10y and the Z axis moving stages 9z and 10z are capable of moving the fluid vibration type flow meter element FM or the probe 8 with an accuracy of 0.01 mm.

The Z-axis direction moving stage 9z is provided with a bracket 9z1 for holding the fluid vibration type flow meter element FM horizontally and vertically.
At 0θ, a bracket 10θa for holding the probe support 8b of the probe 8 is provided.

The fluid supplied to the fluid vibration type flow meter element FM is LP gas as described above, but air is used for evaluation of measurement performance. Therefore, FIG.
As shown in the figure, the air is supplied from the air compressor C through the regulator R, the air dryer D, the air filter Fi and the flow control device Fc to the fluid vibration type flow meter element FM.
Supply line.

The flow control device Fc connects the mass flow controller Fc1 and the stop valve Fc2 in series,
Those connected in series are further connected in parallel in four rows. Therefore, the open stop valve F
By selecting c2, the fluid oscillating flow meter element F
It is possible to set the flow rate supplied to M.
Each mass flow controller Fc1 supplies a constant mass flow of air to the fluid vibration type flow meter element FM.

The speed sensor 8a is made of, for example, a tungsten wire or a platinum wire.
The heater is heated by the supply of electric current, and is cooled by contact with air, and the flow velocity is detected by utilizing a change in resistance (temperature) at that time.

This speed sensor 8a is connected to a hot wire anemometer An. The hot wire anemometer An is further connected to a computer Co via an AD converter Ad, and a printer P is connected to the computer Co.

Further, a temperature sensor 8c is provided near the speed sensor 8a. The temperature sensor 8c is connected to the hot-wire anemometer An, and corrects the speed detected by the speed sensor 8a by measuring a reference temperature of zero wind speed.

That is, the temperature sensor 8c detects the temperature of the supply air that changes every moment, thereby compensating the temperature of the speed detected by the speed sensor 8a.

The temperature compensation is performed by the hot wire anemometer An
May be configured to be performed at the computer Co.
May be performed.

The computer Co operates the stages 9x, 9y, 9z, 10x, 10y, 10z, 1
Although not configured to control 0θ, these stages 9x, 9y, 9z, 10x, 10y, 10z,
It may be configured to control 10θ. That is, the probe 8 is inserted into the through hole 5b of the fluid vibration type flow meter element FM, the apparatus is reset after the origin is determined, and the probe 8 is moved in a predetermined direction in the thickness direction in the fluid vibration type flow meter element FM. The computer Co may be configured to automatically control the movement at intervals and the measurement of the flow velocity at each position via the speed sensor 8a, the hot-wire anemometer An, and the AD converter Ad.

In the flow rate measuring performance evaluation apparatus E configured as described above, first, the fluid vibration type flow meter element FM is placed upright and horizontally on the bracket 9z1 of the element support base 9. Then, the fluid vibration type flow meter element FM is moved to a position where the probe 8 can be easily inserted into the through hole 5b using each of the stages 9x, 9y, 9z.

Next, the probe 8 mounted on the bracket 10θa of the probe support 10 is
The probe 8 is moved using x, 10y, 10z, and 10θ, and the probe 8 is inserted into the through hole 5b of the fluid vibration type flow meter element FM. At this time, each stage 9x, 9y of the element support base 9,
By adjusting the position of the fluid vibration type flow meter element FM using 9z, the probe 8 can easily enter the through hole 5b. Then, each stage 9x, 9 of the element support 9
y, 9z are also the respective stages 10 of the probe support 10.
Since x, 10y, 10z, and 10θ can also be moved with an accuracy of 0.01 mm, if the diameter of the through hole 5b is, for example, 4 mm, the diameter of the probe 8 is 3.99 mm.
If so, the probe 8 can be inserted into the through hole 5b.

That is, if there is a clearance of about 0.01 mm between the through hole 5b and the probe 8, the probe 8 can be inserted into the through hole 5b. However, considering the ease of insertion, the diameter of the probe 8 is set to 3.90.
mm, it is preferable to provide a clearance of about 0.1 mm. Even with such a clearance of 0.1 mm, air can be prevented from leaking from the gap between the through hole 5b and the probe 8, but can be completely prevented by the air leakage waterproof packing 8d.

Next, the probe 8 is moved in the X-axis direction, and when the speed sensor 8a reaches a position, for example, 0.5 mm from the bottom surface 220a of the downstream flow path 220, the movement of the probe 8 is stopped. Then, the flow velocity is measured by the hot-wire anemometer An, and the measured analog signal is taken into the computer Co via the AD converter Ad. Thereafter, for example, 0.5 m
The position of the speed sensor 8a is moved in a direction away from the bottom surface 220a (plus direction of the X axis) every m, the flow velocity at each point is measured, and the data is stored in the computer Co.

As described above, when the flow velocity at each point between the bottom surface 220a of the downstream flow path 220 and the surface 7a of the packing 7 is measured, the computer Co sends the data to the printer P as shown in FIGS. Output organized data. 5 and 6, the velocity distribution of the space from the bottom surface 220a of the two-dimensional flow path at the nozzle outlet to the surface 7a of the packing 7 can be grasped.

Since the fluid vibration type flow meter element FM is configured so that the fluid flows through the two-dimensional flow path, the more uniform the velocity distribution in the thickness direction, the better the measurement accuracy. In order to evaluate the measurement accuracy, it is only necessary to measure the flow velocity, and it is not necessary to measure the reference flow rate with a wet gas meter or to actually measure the flow rate with a fluid vibration type flow meter element FM. The measurement for evaluation becomes very simple.

Further, it is possible to know which part of the fluid vibration type flow meter element FM has a cause of deterioration of the measurement performance depending on the position where the velocity distribution is measured. For example, in the case of this embodiment, since the velocity distribution at the outlet of the nozzle flow path 210 is measured, there may be a cause in the structure on the upstream side of the nozzle flow path 210, the structure of the nozzle flow path 210, and the like. I understand.
By examining the relationship between the actual reference flow rate and the fluid vibration frequency, the structure of the downstream flow path 220 and the structure of the target 3 can be examined. Also, when the velocity distribution at the inlet of the nozzle flow path 210 is measured, it can be seen that the cause of the performance degradation is due to the structure upstream of the nozzle flow path 210.

The probe 8 is mounted on the probe support 1.
0, the probe 8 can be accurately moved in the directions of the X, Y, and Z axes, and can be rotated about the Z axis.
M can be easily inserted into the through hole 5b. Therefore, the fitting accuracy between the probe 8 and the through-hole 5b can be improved, so that leakage of fluid from the gap between the through-hole 5b and the probe 8 can be prevented.
Air leakage can be completely prevented by the leak-proof packing 8d.

Moreover, the fluid vibration type flow meter element FM can be moved in the X, Y, and Z directions by the element support 9, so that only the probe 8 is moved in the X, Y, and Z directions. The probe 8 is more easily inserted into the through hole 5b than in the case of moving. Therefore, the fitting accuracy between the probe 8 and the through hole 5b can be set higher. In addition, the relative movement distance in each axis direction is increased, and measurement in a wide range is possible.

Further, since the data can be stored by the computer Co and output to the printer P so that the speed distribution can be checked at a glance, it is possible to save labor in analyzing the data after measurement.

If the movement of the probe 8 is controlled by the computer Co, the operation for evaluating the performance of the fluid vibration type flow meter element FM can be further simplified.

Further, since a constant mass flow rate can be supplied to the fluid vibration type flow meter element FM by the flow control device Fc, the flow velocity does not change due to external factors. Therefore, the reliability of the performance evaluation based on the speed distribution can be improved.

Next, examples of the experimental results of the present invention are shown in FIGS.
This will be described with reference to FIG. In this experimental example, FIG.
As shown in the figure, a gas feeder Gf is connected to the inlet 1b of the housing 1. This gas feeder Gf
Is a cylindrical pipe Gf connected to the flow control device Fc.
1 and a flange Gf2 for fixing the pipe Gf1 to the housing 1. Chamber part Gf7
The inside is a two-dimensional channel formed to have the same thickness as the upstream channel 200.

The pipe Gf1 is provided with a honeycomb Gf3 as a rectifying member and a flow path having a circular cross section,
and a contraction member Gf4 for converting into a two-dimensional flow path in f2. In the chamber section Gf7, there is a pipe Gf1.
There is provided an enlarged flow member Gf5 that forms a two-dimensional flow path that smoothly expands from the outlet of the nozzle flow path, and a semi-cylindrical column Gf6 that is located on an extension of the nozzle flow path 210. In this experimental example, the velocity distribution is compared between the case where the semi-cylindrical column Gf6 is present and the case where the semi-cylindrical column Gf6 is not present.

The dimensions of each part of the fluid vibration type flow meter element FM are as follows: the width W of the nozzle flow path 210 is 2.5 mm; the length Ln of the nozzle flow path 210 is 20 mm; S) H (see FIG. 3) is 7.5 mm, the nozzle flow path 21
The distance Lj from the exit 0 to the target 3 is 14 mm. The probe 8 is connected to the fluid vibration type flow meter element F
M, and is inserted into the speed sensor 8a.
Is located 1 mm downstream from the outlet of the nozzle flow path 210.

Then, the flow rate Q1 = 0.123 m ³ / h
Is supplied from the mass flow controller Fc1 to the fluid vibration type flow meter element FM, and the velocity distribution is measured with and without the semi-cylindrical column Gf6. The flow velocity is 0.5 mm from the bottom surface 220a along the Z-axis direction which is the thickness direction of the element.
Is measured every 0.5 mm from the position to the position 0.5 mm before the surface 7 a of the packing 7.

The results measured by the above method are shown in FIGS.
Shown in From these figures, if there is a semi-cylinder Gf6,
It can be seen that the velocity distribution is more uniform than when there is no semi-column Gf6. Therefore, by providing the semi-circular column Gf6, it can be evaluated that the rectification effect on the upstream side from the nozzle outlet is increased, and the flow measurement performance of the fluid vibration type flow meter element FM is improved.

FIG. 7 shows the results of an experiment in which the reference flow rate Q was measured with a wet gas meter, and the fluid vibration frequency F of the fluid vibration type flow meter element FM was measured via the pressure sensors 4 and 4. From the results of this experiment, it was found that
6, the linearity is better and the measurement accuracy is higher than when there is no semi-column Gf6. This result agrees with the result evaluated by the velocity distribution using the apparatus of the present application. Therefore, it is understood that the measurement performance of the fluid vibration type flow meter element FM can be evaluated by examining the velocity distribution.

[0059]

According to the first aspect of the present invention, the fluid vibration type flow meter element is mounted on the element support, the probe is mounted on the probe support, and the tip of the probe is vibrated through the through hole. Insert into the flow meter element. Then, the speed of the fluid in the fluid vibration type flow meter element is detected by a speed sensor provided at the tip of the probe.
At this time, the probe is moved at predetermined intervals in the thickness direction of the fluid vibration type flow meter element, and the flow velocity at each position is measured. As described above, the velocity distribution in the thickness direction of the two-dimensional flow path, for example, between the bottom surface and the surface of the packing in the thickness direction can be grasped.

Since the fluid vibration type flow meter element is premised on a two-dimensional flow path, the measurement performance can be evaluated based on how uniform the velocity distribution in the thickness direction is. That is, it can be evaluated that the more uniform the velocity distribution, the better the measurement performance. In evaluating the measurement performance, it is only necessary to measure the flow rate, and it is not necessary to measure the reference flow rate with a wet gas meter or to actually measure the flow rate with a fluid vibration type flow meter element, Measurement for performance evaluation becomes extremely simple.

Further, it is possible to know which part of the fluid vibration type flow meter element has a cause of performance degradation depending on the position where the velocity distribution is measured. That is, it is possible to pursue causes that affect the performance of the fluid vibration type flow meter element.

In the invention according to claim 2, the probe can be moved in the directions of the X, Y, and Z axes by the probe support, and can be rotated about at least one axis. Therefore, the probe can be easily inserted into the through hole of the fluid vibration type flow meter element. Therefore, since the fitting accuracy between the probe and the through hole can be improved, it is possible to prevent the fluid from leaking from the gap between the through hole and the probe.

According to the third aspect of the present invention, since the fluid vibration type flow meter element can be moved in the directions of the X, Y, and Z axes by the support for the element, the probe can be moved in the fluid vibration type flow meter. It can be easily fitted and inserted into the through hole of the measuring element. Therefore, since the fitting accuracy between the probe and the through hole can be improved, it is possible to prevent the fluid from leaking from the gap between the through hole and the probe.

In the invention according to claim 4, the probe can be automatically moved in the thickness direction of the fluid vibration type flow meter element by the computer, and the flow velocity at each position can be automatically measured via the speed sensor. Can be detected. Therefore, the measurement for evaluating the performance of the fluid vibration type flow meter element becomes extremely simple.

In the invention according to claim 5, a constant mass flow rate can be supplied to the fluid vibration type flow meter element by the flow rate control device. Therefore, since the flow velocity does not change due to external factors, the reliability of performance evaluation based on the velocity distribution is improved.

[Brief description of the drawings]

FIG. 1 is a block diagram of a flow rate measurement performance evaluation device shown as an embodiment of the present invention.

FIG. 2 is a sectional view showing a fluid vibration type flow meter element whose performance is evaluated by the flow measurement performance evaluation device.

FIG. 3 is a cross-sectional view of the fluid vibration type flow meter element whose performance is evaluated by the flow rate measurement performance evaluation device, and is a cross-sectional view along the line III-III in FIG.

FIG. 4 is a cross-sectional view showing a fluid vibration type flow meter element and a gas feeder used in an experimental example of the flow rate measurement performance evaluation device.

FIG. 5 is a view showing an experimental result of a nozzle outlet portion of the flow rate measurement performance evaluation device.

FIG. 6 is a view showing an experimental result of a nozzle outlet portion of the flow rate measurement performance evaluation device.

FIG. 7 is a diagram showing a relationship between a reference flow rate and a fluid vibration frequency of the fluid vibration type flow meter.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Housing 3 Target 4 Pressure sensor 5 Cover 5b Through-hole 8 Probe 8a Speed sensor 9 Element support 9x X-axis movement stage 9y Y-axis movement stage 9z Z-axis movement stage 10 Probe support 10x X-axis movement Stage 10y Y axis moving stage 10z Z axis moving stage 10θ θ direction rotating stage An Hot wire anemometer Ad A / D converter Co Computer E Flow measurement performance evaluation device Fc Flow control device FM Fluid vibration type flow meter element P Printer

Claims (5)

(57) [Claims] 1. A two-dimensional flow path having a cross section orthogonal to a thickness direction and having a constant planar shape, and a flow rate is determined from a fluid vibration generated at a position where a jet collides with a target in the two-dimensional flow path. A flow measurement performance evaluation device for evaluating the performance of a fluid vibration type flow meter element to be detected, comprising: a through hole extending in the thickness direction provided in a cover of the fluid vibration type flow meter element; and a speed sensor at a tip. A probe, which is fitted so as to be in close contact with the through-hole and is inserted so as to be movable in the axial direction of the through-hole, a probe for measuring a gas temperature of the fluid vibration type flow meter element, and the fluid vibration A flow measurement performance evaluation device comprising: an element support for supporting a flow meter element; and a probe support for supporting the probe. 2. The probe supporter according to claim 1, wherein the probe is arranged on the X-axis,
2. The apparatus according to claim 1, wherein the apparatus is configured to be movable in each direction of a Y axis and a Z axis, and is configured to be rotatable around at least one of the X axis, the Y axis, and the Z axis. The flow rate measurement performance evaluation device as described. 3. The element support base according to claim 1, wherein the fluid vibration type flow meter element is configured to be movable in each of X-axis, Y-axis and Z-axis directions. Flow measurement performance evaluation device. 4. A computer which controls the probe to move at predetermined intervals in the thickness direction of the fluid vibration type flow meter element and to automatically measure the flow velocity at each position. , Claim 2 or Claim 3
The flow rate measurement performance evaluation device as described. 5. The flow rate measuring device according to claim 1, further comprising a flow rate control device for supplying a gas having a predetermined flow rate to the fluid vibration type flow meter element. Performance evaluation device.