JP3407085B2 - Piping inspection equipment - Google Patents
Piping inspection equipmentInfo
- Publication number
- JP3407085B2 JP3407085B2 JP13221894A JP13221894A JP3407085B2 JP 3407085 B2 JP3407085 B2 JP 3407085B2 JP 13221894 A JP13221894 A JP 13221894A JP 13221894 A JP13221894 A JP 13221894A JP 3407085 B2 JP3407085 B2 JP 3407085B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- dissolved oxygen
- oxygen concentration
- pure water
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Examining Or Testing Airtightness (AREA)
- Pipeline Systems (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、配管の検査装置に関
し、特に、溶存酸素濃度の極めて低い純水を供給する配
管系の漏洩状態の検査に好適な配管の検査装置に関す
る。The present invention relates to relates to a biopsy 査装 location of the pipe, in particular, relates to detection 査装 location suitable piping inspection of leakage condition of the piping system for supplying very low pure water of dissolved oxygen concentration.
【0002】[0002]
【従来の技術】水は、多くの産業分野で使用されてお
り、要求される水の純度は、その使用目的によって異な
るが、半導体工場では、特に高純度の超純水が使用され
ている。一方、水中には、大気中の酸素が溶け込んでい
るが、前記超純水では溶存酸素も不純物とされ、半導体
の基板洗浄工程等で用いる超純水には、溶存酸素濃度1
0ppb以下のものが要求されている。このようなこと
から、超純水を製造する際には、溶存酸素低減処理工程
を行って水中の溶存酸素を低減するようにしている。2. Description of the Related Art Water is used in many industrial fields, and the required purity of water depends on the purpose of use, but in semiconductor factories, ultrapure water of particularly high purity is used. On the other hand, oxygen in the atmosphere is dissolved in the water, but dissolved oxygen is also an impurity in the ultrapure water, and the dissolved oxygen concentration is 1 in the ultrapure water used in the semiconductor substrate cleaning step and the like.
Those below 0 ppb are required. Therefore, when producing ultrapure water, a dissolved oxygen reduction treatment step is performed to reduce dissolved oxygen in water.
【0003】[0003]
【発明が解決しようとする課題】上記超純水を純水製造
装置から使用箇所に供給する配管系の材料には、従来か
ら空気の透過量が少なく、かつ、経済的な材料としてポ
リ塩化ビニルが多く用いられてきているが、ポリ塩化ビ
ニルからなる配管系では、内外の酸素分圧の差により該
ポリ塩化ビニルを透過する空気中の極僅かな酸素によっ
て水中の溶存酸素濃度が増加し、使用先での規定の溶存
酸素濃度を上回ってしまうことがある。The material of the piping system for supplying the above-mentioned ultrapure water from the pure water producing apparatus to the place of use has conventionally been polyvinyl chloride as an economical material with a low air permeation amount. However, in a piping system made of polyvinyl chloride, the concentration of dissolved oxygen in water increases due to the slightest amount of oxygen in the air that permeates the polyvinyl chloride due to the difference in oxygen partial pressure between the inside and outside, It may exceed the specified dissolved oxygen concentration at the place of use.
【0004】このため、酸素の透過係数がポリ塩化ビニ
ルよりも小さい材料、例えばポリビニリデンフルオライ
ド等を配管材料として使用することにより、酸素が配管
材料を透過して水中に溶け込む量を低減することができ
るが、配管系の製作における経済性、入手の容易さ、加
工の容易性等も考慮して適切な材料を選択する必要があ
る。Therefore, by using a material having a smaller oxygen permeability coefficient than that of polyvinyl chloride, such as polyvinylidene fluoride, as a piping material, the amount of oxygen permeating the piping material and dissolving in water can be reduced. However, it is necessary to select an appropriate material in consideration of economical efficiency in manufacturing the piping system, availability, and ease of processing.
【0005】また、工場等の配管設備では、材料の劣化
による変質や微小なクラックの発生、弁や継手部分等、
様々な漏洩要因があるが、従来は、配管各部からの水の
滲出を目視により観察して漏洩を検知するのみであっ
た。しかし、配管内への酸素の透過による水中の溶存酸
素濃度の増加は、水が外部に滲出する以前に発生するの
で、定期的に配管系の漏洩状態を検査する必要がある。Further, in piping equipment such as factories, deterioration due to material deterioration, generation of minute cracks, valves and joints, etc.
Although there are various leak factors, conventionally, the leak was detected only by visually observing the seepage of water from each part of the pipe. However, the increase in the dissolved oxygen concentration in water due to the permeation of oxygen into the pipe occurs before the water leaks to the outside, so it is necessary to regularly inspect the leakage state of the pipe system.
【0006】さらに、他の各種液体を供給する配管系に
おいても、配管材料の漏洩状態を検査することによって
最適な配管材料を選択できるとともに、液体中の成分の
濃度変動や外部への漏洩等を未然に防止することができ
る。Further, also in the piping system for supplying various other liquids, the optimum piping material can be selected by inspecting the leakage state of the piping material, and the concentration fluctuation of the component in the liquid and the leakage to the outside can be prevented. It can be prevented.
【0007】なお、合成樹脂等の材料中の分子透過量に
ついては、材料の両側が気体の場合は各種文献に記載さ
れているが、一方が液体の場合に付いての透過に関する
特性値はほとんど記載されておらず、経験等により判定
しているのが実情である。The molecular permeation amount in a material such as synthetic resin is described in various documents when both sides of the material are gas, but most of the characteristic values relating to permeation when one side is liquid are almost the same. The fact is that it is not listed, but is judged based on experience and other factors.
【0008】そこで本発明は、液体を供給する配管系の
設計や設備管理を効率よく行え、特に溶存酸素濃度が1
0ppb以下の超純水を供給する配管系における純水中
の溶存酸素濃度の増加を確実に防止することができる配
管の検査装置を提供することを目的としている。Therefore, the present invention enables efficient design and facility management of a piping system for supplying a liquid, and particularly when the dissolved oxygen concentration is 1.
And its object is to provide a test 査装 location of the pipe that can reliably prevent an increase in dissolved oxygen concentration in the pure water in the pipe system for supplying following ultrapure water 0 ppb.
【0009】[0009]
【課題を解決するための手段】上記した目的を達成する
ため、本発明の配管の検査装置は、配管の一方から所定
の溶存酸素濃度の純水を導入する純水供給手段と、前記
純水の流量を測定する流量測定手段と、前記配管の他方
における前記純水中の溶存酸素濃度を測定する溶存酸素
濃度測定手段とを備えたことを特徴としている。In order to achieve the above-mentioned object, the pipe inspection apparatus of the present invention is provided with a predetermined pipe from one side.
A pure water supply means for introducing pure water having a dissolved oxygen concentration of
Flow rate measuring means for measuring the flow rate of pure water, and the other of the pipes
Oxygen for measuring the dissolved oxygen concentration in the pure water in
And a concentration measuring means .
【0010】また、当該検査装置は、前記純水供給手段
と前記流量測定手段との間に、純水の導入量を変動させ
るための流量制御手段を設けたことを特徴としている。Further, the inspection apparatus is the pure water supply means.
Between the flow rate measuring means and the flow rate measuring means.
It is characterized by providing a flow rate control means for the purpose .
【0011】[0011]
【作 用】配管材料を透過して水中に溶け込んだ酸素量
を測定することにより、例えば、該配管材料が超純水の
供給配管として適切かどうかを判断することができる。
すなわち、水の流量だけでなく、配管の長さや口径、配
管途中の継手や弁等も含めて酸素透過量を測定すること
により、純水製造装置から使用先に至る配管材料として
適切な材料を選択することができる。[Operation] By measuring the amount of oxygen that has penetrated through the pipe material and dissolved in water, it is possible to determine whether or not the pipe material is suitable as a supply pipe for ultrapure water, for example.
That is, by measuring not only the flow rate of water but also the length and diameter of the pipe, the amount of oxygen permeation including the joints and valves in the middle of the pipe, a suitable material for the pipe from the pure water production device to the place of use can be selected. You can choose.
【0012】また、配管設備の酸素透過量を定期的に測
定して監視することにより、配管系の異常を早期に発見
することができ、超純水使用箇所での溶存酸素濃度の増
加による事故や水漏れ等の事故を未然に防止することが
できる。Further, by periodically measuring and monitoring the oxygen permeation amount of the piping equipment, it is possible to detect abnormalities in the piping system at an early stage, and an accident due to an increase in the dissolved oxygen concentration at the place where ultrapure water is used. It is possible to prevent accidents such as water leaks.
【0013】さらに、所定濃度の二酸化炭素が溶存した
液体を用いて配管系両端部での二酸化炭素濃度の変化を
測定することによっても、配管材料等を透過するガス量
を測定することができる。Further, by measuring the change in carbon dioxide concentration at both ends of the piping system using a liquid in which a predetermined concentration of carbon dioxide is dissolved, the amount of gas passing through the piping material and the like can be measured.
【0014】[0014]
【実施例】以下、本発明を、図面に示す実施例に基づい
てさらに詳細に説明する。 図1乃至図4は、本発明装
置に係る検査方法の原理を説明する。図1は、実験装置
の構成を示すものである。この実験装置は、検査対象と
なる配管サンプル(以下、単に配管という)1の一端に
溶存酸素低減装置2を設け、該配管1の途中に、水中の
溶存酸素濃度を測定する分析器3を設けたものである。
なお、配管1の他端には流出する水を受けるタンク4を
設けている。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail below with reference to the embodiments shown in the drawings. 1 to 4 show the device of the present invention.
The principle of the inspection method according to the apparatus will be described. FIG. 1 shows the configuration of the experimental apparatus. In this experimental apparatus, a dissolved oxygen reduction device 2 is provided at one end of a pipe sample (hereinafter, simply referred to as a pipe) 1 to be inspected, and an analyzer 3 for measuring a dissolved oxygen concentration in water is provided in the middle of the pipe 1. It is a thing.
A tank 4 for receiving the outflowing water is provided at the other end of the pipe 1.
【0015】上記分析器3には、溶存酸素の検出下限が
0.1ppbのOrbisphere製MOCA360
0を用いた。また、分析器3は、配管1に弁31を介し
て接続されており、測定セル32を流れる水量を測定す
るための流量計33と、分析器本体である制御部34
と、検出した溶存酸素濃度を出力するレコーダー35と
を備えている。The analyzer 3 has a lower detection limit of dissolved oxygen of 0.1 ppb by MOBI 360 manufactured by Orbissphere.
0 was used. Further, the analyzer 3 is connected to the pipe 1 via a valve 31, and has a flow meter 33 for measuring the amount of water flowing through the measurement cell 32 and a control unit 34 which is an analyzer body.
And a recorder 35 for outputting the detected dissolved oxygen concentration.
【0016】まず、配管1として、外径16mm,内径
13mm,長さ200mm(溶存酸素低減装置取付部か
ら分析器までの長さ)のポリ塩化ビニル(PVC)製の
直管を使用し、溶存酸素低減装置2から溶存酸素濃度を
1ppb以下まで低減した純水を導入して分析器3で溶
存酸素濃度を測定した。First, a straight pipe made of polyvinyl chloride (PVC) having an outer diameter of 16 mm, an inner diameter of 13 mm, and a length of 200 mm (the length from the dissolved oxygen reduction device mounting portion to the analyzer) is used as the pipe 1. Pure water having a dissolved oxygen concentration reduced to 1 ppb or less was introduced from the oxygen reduction device 2, and the dissolved oxygen concentration was measured by the analyzer 3.
【0017】図2は、配管1への導入水量を変動させた
ときの溶存酸素濃度測定値を示すもので、図から明らか
なように、配管1を通過する純水の流量の変動に伴って
水中の溶存酸素濃度も変化し、純水の流量が増加すると
溶存酸素濃度の増加量が少なくなることが判る。FIG. 2 shows measured values of dissolved oxygen concentration when the amount of water introduced into the pipe 1 is changed. As is clear from the figure, the flow rate of pure water passing through the pipe 1 is changed. It can be seen that the dissolved oxygen concentration in water also changes, and the increase in the dissolved oxygen concentration decreases as the flow rate of pure water increases.
【0018】図3は、純水の流量と溶存酸素濃度測定値
との関係を示すもので、上述のように、純水の流量の増
加に伴って溶存酸素濃度測定値が低くなっていること、
すなわち、溶存酸素濃度の増加量が少なくなっているこ
とが判る。また、配管1として上記ポリ塩化ビニルに代
えて同一寸法のポリビニリデンフルオライド(PVD
F)製の管を用いた場合の純水の流量と溶存酸素濃度測
定値との関係を、同じく図3に示す。両者の溶存酸素濃
度測定値を比較すると、酸素の透過係数が小さいポリビ
ニリデンフルオライドからなる配管は、従来のポリ塩化
ビニル製の配管に比べて溶存酸素濃度の増加量が少ない
ことが判る。FIG. 3 shows the relationship between the pure water flow rate and the dissolved oxygen concentration measurement value. As described above, the dissolved oxygen concentration measurement value decreases as the pure water flow rate increases. ,
That is, it can be seen that the increase in the dissolved oxygen concentration is small. Further, as the pipe 1, instead of the above polyvinyl chloride, polyvinylidene fluoride (PVD) having the same size is used.
Similarly, FIG. 3 shows the relationship between the flow rate of pure water and the measured dissolved oxygen concentration when a tube made of F) is used. Comparing the measured values of the dissolved oxygen concentration of both, it is found that the pipe made of polyvinylidene fluoride having a small oxygen permeability coefficient has a smaller increase in the dissolved oxygen concentration as compared with the pipe made of conventional polyvinyl chloride.
【0019】ここで、溶存酸素低減装置2から配管1に
導入する純水の溶存酸素濃度をC0[ppb]、分析器
3での溶存酸素濃度測定値をC[ppb]とし、配管1
の酸素透過速度をF[g/sec]、通水量をV[g/
sec]とすれば、C=C0+F/Vの関係が成り立
つ。この式に基づいて前記図3を書換えると図4に示す
図となり、水量の逆数と溶存酸素濃度増加量とに直線関
係があることが判る。そして、この直線の傾きがそれぞ
れの配管材料の酸素透過速度(漏洩速度)を表してお
り、図から、ポリ塩化ビニルの酸素の漏洩速度は1.3
×10-8[g/s]、ポリビニリデンフルオライドの酸
素の漏洩速度は1.2×10-9[g/s]と算出でき、
ポリ塩化ビニル製配管は、ポリビニリデンフルオライド
製配管に比べて酸素の漏洩速度が高いことが判る。Here, the dissolved oxygen concentration of pure water introduced into the pipe 1 from the dissolved oxygen reducing device 2 is C 0 [ppb], and the measured dissolved oxygen concentration in the analyzer 3 is C [ppb], and the pipe 1
Of oxygen permeation rate of F [g / sec] and water flow rate of V [g / sec]
sec], the relationship of C = C 0 + F / V is established. When FIG. 3 is rewritten based on this equation, the figure is shown in FIG. 4, and it can be seen that there is a linear relationship between the reciprocal of the water amount and the dissolved oxygen concentration increase amount. The slope of this straight line represents the oxygen permeation rate (leak rate) of each pipe material, and from the figure, the oxygen leak rate of polyvinyl chloride is 1.3.
X10 -8 [g / s], the leakage rate of oxygen of polyvinylidene fluoride can be calculated as 1.2 x 10 -9 [g / s],
It can be seen that the polyvinyl chloride piping has a higher oxygen leakage rate than the polyvinylidene fluoride piping.
【0020】このようにして、任意の材料からなる配管
の酸素透過速度を求めることにより、該材料を超純水の
供給配管系に使用したときの溶存酸素濃度の増加量を推
定することができる。このとき、配管に導入する純水中
の溶存酸素濃度は、該配管の導入側と酸素濃度測定側と
で溶存酸素濃度の変化量を求められる濃度ならばよい
が、導入する純水中の溶存酸素濃度を10ppb以下、
特に1ppb以下にすることにより、溶存酸素濃度の増
加量を確実に知ることができ、測定精度を大幅に向上さ
せることができる。In this way, by obtaining the oxygen permeation rate of the pipe made of any material, it is possible to estimate the increase amount of the dissolved oxygen concentration when the material is used for the ultrapure water supply pipe system. . At this time, the dissolved oxygen concentration in the pure water to be introduced into the pipe may be a concentration at which the amount of change in the dissolved oxygen concentration between the introduction side of the pipe and the oxygen concentration measurement side can be obtained, but the dissolved oxygen concentration in the pure water to be introduced Oxygen concentration below 10 ppb,
In particular, by setting it to 1 ppb or less, the increase amount of the dissolved oxygen concentration can be surely known, and the measurement accuracy can be significantly improved.
【0021】したがって、このような検査方法を実施す
ることにより、超純水の使用先における溶存酸素許容量
や配管の長さなどに応じて配管として用いることができ
る材料を特定することができる。また、通水量と溶存酸
素濃度増加量との関係から、通水量が多い場合には、酸
素透過速度が比較的高い配管を用いても溶存酸素の増加
量が少ないため、超純水の使用量が多い場所に超純水を
供給する配管には、酸素透過速度が比較的高くても、安
価で入手の容易な材料からなる配管を使用できることが
判る。Therefore, by carrying out such an inspection method, a material that can be used as a pipe is specified according to the allowable amount of dissolved oxygen in the destination of the ultrapure water and the length of the pipe. can do. In addition, from the relationship between the water flow rate and the dissolved oxygen concentration increase amount, when the water flow rate is high, the amount of increase in dissolved oxygen is small even if a pipe with a relatively high oxygen permeation rate is used. It can be seen that a pipe made of an inexpensive and easily available material can be used as a pipe for supplying ultrapure water to a place where there is a lot of oxygen even if the oxygen permeation rate is relatively high.
【0022】さらに、合成樹脂のような物質中を分子拡
散する現象においては、該物質中の通路径が拡散する分
子の平均自由行程よりも小さいときには、分子の拡散は
クヌーセンの拡散過程によるため、分子の拡散速度は、
分子量の逆数の平方根に比例することになる。すなわ
ち、酸素(分子量32)の透過速度に対して、例えば水
分子(分子量18)の透過速度は、酸素の透過速度の約
1.3倍となる。これにより、酸素の透過速度が判れ
ば、他の分子、例えば二酸化炭素やアンモニアなどの透
過速度も求めることが可能となる。Further, in the phenomenon of molecular diffusion in a substance such as a synthetic resin, when the passage diameter in the substance is smaller than the mean free path of the diffusing molecule, the diffusion of the molecule is due to the Knudsen diffusion process. The diffusion rate of molecules is
It will be proportional to the square root of the reciprocal of the molecular weight. That is, for example, the permeation rate of water molecules (molecular weight 18) is about 1.3 times the permeation rate of oxygen (molecular weight 32). Thus, if the oxygen permeation rate is known, the permeation rates of other molecules such as carbon dioxide and ammonia can be obtained.
【0023】なお、上記説明は、大気中に設置される超
純水供給用の配管系、すなわち、配管外部側の対象ガス
の分圧が高い場合を対象として説明したが、配管内部側
の対象ガスの分圧が高い場合でも同様にして配管の漏洩
状態を求めることができる。例えば、配管中に所定濃度
の二酸化炭素を溶存した液体を導入するとともに、配管
の他方で液体中の二酸化炭素濃度を測定し、両者の二酸
化炭素濃度を比較することにより、配管内から外部に漏
洩する二酸化炭素量を求めることができる。そして、前
述のように、該二酸化炭素の漏洩状態から水等の他の成
分の漏洩状態も知ることができ、配管の設計や設備管理
を効率よく行うことができる。In the above description, the pipe system for supplying ultrapure water installed in the atmosphere, that is, the case where the partial pressure of the target gas on the outside of the pipe is high, has been described. Even if the partial pressure of the gas is high, the leak state of the pipe can be similarly obtained. For example, while introducing a liquid in which a predetermined concentration of carbon dioxide is dissolved into the pipe, measuring the carbon dioxide concentration in the liquid on the other side of the pipe, and comparing the carbon dioxide concentrations of the two, leakage from the inside of the pipe to the outside The amount of carbon dioxide to be consumed can be calculated. Then, as described above, the leakage state of other components such as water can be known from the leakage state of the carbon dioxide, and the piping design and facility management can be efficiently performed.
【0024】図5は、上記検査原理が適用可能な本発明
装置の一実施例を示す概略系統図であって、純水中の溶
存酸素濃度を低減する溶存酸素低減装置11から純水使
用部門12に純水を供給する配管13の漏洩状態を検査
するための装置構成の一例を示すものである。前記配管
13の純水導入側には、純水流量を制御するための流量
制御弁14と純水の流量を測定する流量計15とが設け
られており、配管13の出口側には、弁16を備えたサ
ンプリング管17を介して溶存酸素濃度測定手段である
分析器18が接続されている。FIG . 5 is a schematic system diagram showing one embodiment of the apparatus of the present invention to which the above-mentioned inspection principle can be applied . The apparatus for reducing dissolved oxygen 11 for reducing the concentration of dissolved oxygen in pure water to the pure water use section. 1 shows an example of an apparatus configuration for inspecting a leak state of a pipe 13 that supplies pure water to 12. A flow control valve 14 for controlling the flow rate of pure water and a flow meter 15 for measuring the flow rate of pure water are provided on the pure water introduction side of the pipe 13, and a valve is provided on the outlet side of the pipe 13. An analyzer 18, which is a dissolved oxygen concentration measuring means, is connected via a sampling pipe 17 provided with 16.
【0025】このように構成して連続的に、あるいは定
期的に配管13出口側の溶存酸素濃度を測定することに
より、その変動状態から配管13の異常、例えば疲労に
よる極微小なクラックの発生等を早期に発見することが
でき、純水使用部門12における溶存酸素濃度増加によ
る製品への影響、例えば歩留まりの低下を防止できると
ともに、水漏れ等の事故も未然に防止でき、配管13の
保守、交換時期を適確に知ることができる。With such a configuration, the dissolved oxygen concentration at the outlet side of the pipe 13 is measured continuously or periodically, so that the fluctuation of the pipe 13 causes abnormalities in the pipe 13, for example, generation of minute cracks due to fatigue. Can be detected early, the influence on the product due to the increase in the dissolved oxygen concentration in the pure water use section 12, for example, the decrease in yield can be prevented, and accidents such as water leakage can be prevented in advance, and maintenance of the pipe 13 can be performed. You can know exactly when to replace.
【0026】なお、溶存酸素濃度測定手段は、通常は、
純水使用部門の近傍に設ければよいが、配管系の長さや
系統数等に応じて複数箇所に設けてもよく、配管入口側
と出口側の両端部に設けて両者の測定値の比較を行うよ
うにしてもよい。The dissolved oxygen concentration measuring means is usually
It may be installed in the vicinity of the department using pure water, but it may be installed in multiple locations depending on the length of the piping system, the number of systems, etc. May be performed.
【0027】[0027]
【0028】[0028]
【発明の効果】以上説明したように、本発明の配管の検
査装置によれば、配管を通して供給される純水中の溶存
酸素濃度の増加から配管系の異常を早期に発見すること
ができ、超純水使用箇所での溶存酸素濃度の増加による
事故や水漏れ等の事故を未然に防止することができる。As described above , according to the pipe inspection apparatus of the present invention, an abnormality in the pipe system can be detected early from an increase in the concentration of dissolved oxygen in pure water supplied through the pipe, It is possible to prevent accidents due to an increase in dissolved oxygen concentration and water leaks in places where ultrapure water is used.
【図1】 本発明装置に係る検査方法の原理を説明する
実験装置の一例を示す系統図である。FIG. 1 is a system diagram showing an example of an experimental device for explaining the principle of the inspection method according to the device of the present invention.
【図2】 流量変化に対する溶存酸素濃度測定値の変化
を示す図である。FIG. 2 is a diagram showing a change in a measured value of a dissolved oxygen concentration with respect to a change in a flow rate.
【図3】 流量と溶存酸素濃度との関係を示す図であ
る。FIG. 3 is a diagram showing a relationship between a flow rate and a dissolved oxygen concentration.
【図4】 流量の逆数と溶存酸素濃度との関係を示す図
である。FIG. 4 is a diagram showing the relationship between the reciprocal of the flow rate and the dissolved oxygen concentration.
【図5】 本発明装置の一実施例を示す概略系統図であ
る。FIG. 5 is a schematic system diagram showing an embodiment of the device of the present invention.
1…配管、2…溶存酸素低減装置、3…分析器、32…
測定セル、33…流量計、34…制御部、35…レコー
ダー、4…タンク
11…溶存酸素低減装置、12…純水使用部門、13…
配管、14…流量制御弁、15…流量計、18…分析器1 ... Piping, 2 ... Dissolved oxygen reduction device, 3 ... Analyzer, 32 ...
Measuring cell, 33 ... Flowmeter, 34 ... Control section, 35 ... Recorder, 4 ... Tank 11 ... Dissolved oxygen reduction device, 12 ... Pure water use section, 13 ...
Piping, 14 ... Flow control valve, 15 ... Flow meter, 18 ... Analyzer
フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01M 3/04 F17D 5/02 G01N 1/10 G01N 33/18 Front page continuation (58) Fields surveyed (Int.Cl. 7 , DB name) G01M 3/04 F17D 5/02 G01N 1/10 G01N 33/18
Claims (2)
水を導入する純水供給手段と、前記純水の流量を測定す
る流量測定手段と、前記配管の他方における前記純水中
の溶存酸素濃度を測定する溶存酸素濃度測定手段とを備
えたことを特徴とする配管の検査装置。1. A pipe having a predetermined dissolved oxygen concentration from one side of a pipe.
The pure water supply means for introducing water and the flow rate of the pure water are measured.
In the pure water in the other side of the pipe
Equipped with a dissolved oxygen concentration measuring means for measuring the dissolved oxygen concentration of
Pipe inspection device characterized by the above .
の間に、純水の導入量を変動させるための流量制御手段
を設けたことを特徴とする請求項1記載の配管の検査装
置。2. The pure water supply means and the flow rate measurement means
Flow control means for varying the amount of pure water introduced during
Characterized in that the provided claims 1 test instrumentation piping according
Place
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13221894A JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13221894A JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07333096A JPH07333096A (en) | 1995-12-22 |
JP3407085B2 true JP3407085B2 (en) | 2003-05-19 |
Family
ID=15076155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13221894A Expired - Fee Related JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3407085B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4507659B2 (en) * | 2004-03-25 | 2010-07-21 | 栗田工業株式会社 | Evaluation method of ultrapure water |
CN102564713A (en) * | 2012-02-09 | 2012-07-11 | 昆明川金诺化工股份有限公司 | Method for detecting leakage of tube nest of sulfuric acid heat exchanger |
DE102015219250A1 (en) * | 2015-10-06 | 2017-04-06 | Inficon Gmbh | Detection of test gas fluctuations during sniffing leak detection |
CN111128417B (en) * | 2020-01-14 | 2022-03-04 | 长沙理工大学 | Method for diagnosing leakage of steam generator of nuclear power plant |
-
1994
- 1994-06-14 JP JP13221894A patent/JP3407085B2/en not_active Expired - Fee Related
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Publication number | Publication date |
---|---|
JPH07333096A (en) | 1995-12-22 |
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