JP4754730B2 - Manual open / close valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a manual open / close valve that is used in, for example, a vacuum processing apparatus in a semiconductor manufacturing process, and in which a biasing force of a spring becomes a valve closing load that causes a valve body to contact a valve seat.
[0002]
[Prior art]
Conventionally, for example, in an exhaust system of a vacuum processing apparatus in a semiconductor manufacturing process, a vacuum manual on-off valve having a built-in valve closing load spring has been used as an on-off valve for shutting off an exhaust pump and a vacuum processing tank. Yes. As this type of manual on-off valve, there is a manual on-off valve 100 whose sectional view is shown in FIG.
[0003]
In the manual on-off valve 100, a substantially cylindrical cover 102 is attached to a body 101, and a handle 103 is screwed into the inner periphery of the cover 102. Further, the rod 104 is attached so as to be movable in the axial direction through the handle 103 and the cover 102, and the distal end portion of the rod 104 is inserted into the body 101. The body 101 has two ports 105 and 106 opened to the outside, and the first port 105 is provided with a valve seat 107 on which a valve body 110 (to be described later) abuts and separates.
[0004]
The rod 104 is rotatably held by the thrust bearing 111 with respect to the handle 103, and even if the handle 103 is rotated to tighten or loosen with respect to the cover 102, the rod 104 has an axis with respect to the cover 102 of the handle 103. Only direction movement is transmitted. Further, in the lower part of the handle 103 in the figure, a spring receiver 112 and a second thrust bearing 113 are mounted on the outer periphery of the rod 104, and the rod 104 is moved to the tip by a spring 114 mounted between the spring receiver 112 and the rod 104. It is biased in the direction (downward in the figure). Further, the handle 103 has a convex portion 115 along the outer periphery of the rod 104, and the second thrust bearing 113 can be brought into and out of contact with the convex portion 115. In addition, a valve body 110 provided at the distal end portion of the rod 104 so as to be able to come into contact with and separate from the valve seat 107 is screwed to the rod 104 via a valve body cover 116.
[0005]
In this manual on-off valve 100, since a corrosive fluid such as a chemical gas is generally circulated, it is not preferable that a metal sliding member such as the spring 114 or the rod 104 is exposed in the flow path. Therefore, a bellows 120 is provided around the rod 104 in the body 101 so that the sliding portion is not exposed in the valve chamber 121. One end of the bellows 120 is fixed to the valve body cover 116, and the other end is attached between the body 101 and the cover 102 by a bellows attachment member 122.
[0006]
FIG. 6 shows a closed state of the manual on-off valve 100. The handle 103 is screwed into the cover 102, the rod 104 is pushed down, and the valve body 110 comes into contact with the valve seat 107 so that the fluid is detected. The distribution of is closed. At this time, the convex 115 pushes down the spring receiver 112 via the second thrust bearing 113, and the urging force acting on the rod 104 by the spring 114 becomes a valve closing load on the valve seat 107 of the valve body 110. Further, the handle 103 is brought into contact with the cover 102, and a tightening range of the handle 103 downward in the figure is defined.
[0007]
Here, when the handle 103 is loosened, the rod 104 is lifted upward in the drawing via the thrust bearing 111, and the valve body 110 is separated from the valve seat 107 and opened. At this time, as the rod 104 moves, the spring receiver 112 also moves, so that the spring 114 moves as a whole and does not expand or contract greatly. On the other hand, as shown in FIG. 7, the rod 104 moves greatly as the handle 103 moves, so that a sufficient stroke amount of the valve body is secured. Further, when the spring receiver 112 comes into contact with the tip of the cover 102 and the rod 104, a range of movement of the handle 103 upward is defined.
[0008]
Therefore, in this manual on-off valve 100, the movement of the handle 103 is directly transmitted to most of the movement of the rod 104. The spring 114 is only for generating a predetermined valve closing load, and its extension / contraction length may be small, so that it can be constituted by a small spring 114. Further, since the tip portion of the rod 104 is covered by the bellows 120 and the fluid does not contact the movable portion, the bellows 120 is used as an on-off valve for circulating a chemical gas or a chemical solution used in a semiconductor manufacturing process or the like.
[0009]
[Problems to be solved by the invention]
However, in the conventional manual on-off valve 100, when a part other than the body 101 is removed from the piping system for maintenance such as replacement of the bellows 120, and the bellows 120 is removed, the spring 114 is exposed to the outside. . Since a large amount of wear powder is generated around the spring 114 due to contact with other parts due to repeated expansion and contraction, the exposure of the spring 114 pollutes a clean environment such as a semiconductor manufacturing factory. There is a fear.
[0010]
Even if the bellows 120 is replaced by removing the valve portion other than the body 101 from the manual on-off valve 100 and taking it out of a clean environment, the manual operation is not possible due to dust or wear powder from the spring 114 during the replacement operation. There is a risk that the on-off valve 100 will be contaminated. Therefore, before bringing the manual on-off valve 100 into the clean environment again, it is necessary to disinfect and clean it, which is troublesome.
[0011]
Therefore, the present invention has been made to solve the above-described problems, and even when the bellows part is removed for maintenance, the spring is not exposed and the bellows can be replaced in a clean environment. An object is to provide a manual on-off valve.
[0012]
[Means for Solving the Problems]
A manual on-off valve of the present invention includes a valve seat formed on a body, a valve body that contacts or separates from the valve seat, a handle that slides the valve body through a rod, and the valve body the in manual opening and closing valve and a spring member for contact with a predetermined force against the valve seat, the handle is a hollow shape, and said spring member on the inside is accommodated, other from said body When the part is disassembled, the spring member is not exposed, and when the valve is closed, the handle presses the spring member, and the spring member pushes the valve body through the rod to a predetermined force. When the valve is in contact with the valve seat and the valve is opened, the handle directly pulls up the rod.
[0013]
According to the manual on-off valve of the present invention, the valve body is slid by the handle via the rod, and comes into contact with or separates from the valve seat formed on the body. When the valve is closed, the spring member is pressed by the handle, and the valve body is pressed by the spring member through the rod. Therefore, the valve body is pressed against the valve seat with a predetermined force by the biasing force of the spring member. Touched. When the valve is open, the rod is lifted directly by the handle, so that the valve is opened by the movement of the handle regardless of the biasing force of the spring member. Furthermore, since the spring member is housed inside the hollow portion of the handle, the spring member is not exposed even when the periphery of the valve body at the tip of the rod is exposed for maintenance or the like.
[0014]
The manual on-off valve of the present invention includes a valve seat formed on the body, a valve body that contacts or separates from the valve seat, a handle that slides the valve body through a rod, in the manual on-off valve to have a spring member for contact with a predetermined force the valve element against the valve seat, the handle is a hollow shape, wherein the spring member is accommodated in the inside, close the valve The handle presses the spring member, the spring member causes the valve body to contact the valve seat with a predetermined force via the rod, and when the valve is opened, The handle directly pulls up the rod, the spring member is a compression spring, one end of which is in contact with the rotatable lid member of the handle hollow portion, and the other end is at the end of the rod It is fixed and rotated with a thrust bearing against the handle. When the valve is closed, the urging force of the spring member is directly transmitted to the rod via the spring receiving member when the valve is closed. The moving force of the handle is transmitted to the rod through the thrust bearing and the spring receiving member.
[0015]
According to the manual on-off valve of the present invention, one end of the spring member is brought into contact with the rotatable lid member of the handle hollow portion, and the other end is fixed to the end portion of the rod and rotated by a thrust bearing with respect to the handle. Since it is in contact with the spring receiving member that is attached, only the axial position movement is transmitted to the spring member regardless of the rotation of the handle. When the valve is closed, the urging force of the spring member is directly transmitted to the rod via the spring receiving member, and this urging force becomes a valve closing load that causes the valve body to contact the valve seat. Further, when the valve is open, the moving force of the handle is transmitted to the rod through the thrust bearing and the spring receiving member, so that the moving force of the handle is transmitted to the rod regardless of the biasing force of the spring member.
[0016]
A manual on-off valve according to the present invention is the manual on-off valve according to claim 1 or 2, wherein a magnet is attached to the handle or the rod, and the magnet is attached to an outer surface of a cover into which the handle is screwed. A magnetic proximity switch that detects the magnetism of the magnet, and the magnetic proximity switch is arranged corresponding to the position of the magnet when the valve is closed or the position of the magnet when the valve is opened It is characterized by.
[0017]
According to the manual open / close valve of the present invention, the magnet is attached to the handle or the rod, so that the magnet moves as the handle or the rod moves. Further, since the magnetic proximity switch for detecting the magnetism of the magnet is provided on the outer surface of the cover into which the handle is screwed, the magnetic proximity switch detects the magnet when the handle reaches a predetermined position with respect to the cover. Therefore, by arranging the magnetic proximity switch at the position of the magnet when the valve is closed or the position of the magnet when the valve is opened, the valve open state or the valve closed state can be detected.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2 are sectional views showing a manual on-off valve according to the first embodiment of the present invention. The manual on-off valve 1 has a body 10 and a substantially cylindrical cover 20 connected to each other, and a rod 30 that is slidable in the axial direction through the cover 20 has a distal end portion (lower part in the figure). ), And a handle 50 is attached to the base end (upper part in the drawing).
[0019]
The body 10 is made of a corrosion-resistant material, has a valve chamber 11 inside, and communicates with the valve chamber 11 so that the first port 12 and the second port 13 are opened to the outside. In addition, the body 10 is formed with a valve seat 14 that opens and closes a communication path between the valve chamber 11 and the first port 12. A screw portion 15 is formed on the outer periphery of the upper end portion of the body 10 in the figure, and is engaged with a screw portion 17 provided on the inner peripheral surface of the locking member 16 that locks the body 10 and the cover 20. . Further, the locking member 16 is formed with a through screw hole 18 for fitting a fixing screw (not shown).
[0020]
In the cover 20, a large-diameter portion 21 into which the handle 50 is fitted and a small-diameter portion 22 through which the rod 30 passes are integrally formed in a substantially multistage cylindrical shape. A screw portion 23 for meshing with the handle 50 is provided on the inner circumferential surface of the large diameter portion 21, and a through hole 24 for venting air is provided through the wall surface of the large diameter portion 21. A bearing 25 for sliding the rod 30 is provided on the inner peripheral surface of the small diameter portion 22. Further, a cover locking member 26 having a convex portion for locking with the locking member 16 is fixed to the cover 20 by screws.
[0021]
The rod 30 has a multistage cylindrical shape that is slidable in the vertical direction in the figure along the bearing 25 of the cover 20, and a spring receiver 31 is fixed to the base end part (upper part in the figure) by a fixing member 32. . Further, the valve body 40 provided at the distal end portion (lower part in the figure) of the rod 30 is made of rubber and an annular valve body 41 is sandwiched between a valve body presser 42 and a valve body cover 43, and the whole is a screw. It is screwed to the rod 30 by 44. Here, the valve body retainer 42, the valve body cover 43, and the heads of the screws 44 are all formed of a corrosion-resistant material. Further, the tip of the rod 30 is covered with a bellows 33 formed of a corrosion-resistant material. One end of the bellows 33 is fixed to the valve body cover 43 and moves in the vertical direction in the figure as the rod 30 and the valve body 41 move. The other end of the bellows 33 is fixed to a bellows locking member 34, and the bellows locking member 34 is sandwiched between the body 10 and the cover locking member 26 and fixed by the locking member 16. This bellows locking member 34 is also formed of a corrosion-resistant material.
[0022]
The handle 50 has a substantially cylindrical shape, and a screw part 51 is provided at the lower part of the outer peripheral surface in the drawing in order to be screwed into the large diameter part 21 of the cover 20. A slipper is formed in the upper part of the outer peripheral surface in the figure to facilitate screwing. The inner diameter of the handle 50 is formed in multiple stages, and the rod 30 penetrates the lower part of the small diameter. Further, a proximal end portion of the rod 30 and a spring receiver 31 are disposed in the hollow portion at the upper part in the inner diameter view of the handle 50, and the spring receiver 31 is arranged at the tip of the rod 30 by a spring 53 provided between the inner lid 52. It is biased in the direction (downward in the figure). The upper surface of the inner lid 52 has a substantially spherical shape, and only a very small area is in contact with the inner surface of the outer lid 54. The inner lid 52 corresponds to the rotatable lid member described in claim 2. The outer lid 54 is fixed by being screwed into a screw portion provided near the opening of the hollow portion of the handle 50. Further, a thrust bearing 55 is disposed between the spring receiver 31 of the rod 30 and the handle 50 so that the handle 50 and the rod 30 can rotate with each other, and only the axial movement of the rod 30 is transmitted. It is attached.
[0023]
FIG. 1 shows a closed state of the manual on-off valve 1, in which the valve body 41 contacts the valve seat 14 and the first port 12 is closed. In this valve-closed state, as shown in FIG. 1, the spring 53 is compressed by the inner lid 52 and the spring receiver 31 to urge the spring receiver 31 downward in the figure. Since the spring receiver 31 is fixed to the rod 30, the urging force of the spring 53 is directly transmitted to the rod 30, and the valve body 41 is brought into contact with the valve seat 14 by this urging force. At this time, the handle 50 abuts on the upper end portion of the cover 20 in the drawing to define the range of movement, and an excessive force is prevented from being applied to the rod 30.
[0024]
When the handle 50 is rotated little by little toward the opening of the valve from this closed state and begins to be pulled out from the cover 20, first, the spring 53 extends and the spring receiver 31 contacts the thrust bearing 55. At this time, since only a very small area of the inner lid 52 is in contact with the outer lid 54, the inner lid 52 can rotate with respect to the outer lid 54, and the rotation of the handle 50 is not transmitted to the spring 53 or the spring receiver 31. . Subsequently, when the handle 50 is further rotated and moved upward in the figure, the moving force becomes a force for moving the spring receiver 31 via the thrust bearing 55. Since the rotational force of the handle 50 is absorbed by the thrust bearing 55, only the axial moving force is transmitted to the spring receiver 31. Accordingly, the moving force of the handle 50 is transmitted to the rod 30 via the thrust bearing 55 and the spring receiver 31. Then, as shown in FIG. 2, the stepped portion of the rod 30 abuts on the small diameter portion 22 of the cover 20, the movement range is defined, and the valve is opened.
[0025]
Thus, in this manual on-off valve 1, the amount of change in the length of the spring 53 is very small as compared with the stroke amount of the valve body 41. Therefore, for example, even in a valve that requires a large valve opening amount, such as a shut-off on-off valve used in an exhaust system of a vacuum processing apparatus, the spring 53 having a short length can be used. It is easy to incorporate into.
[0026]
Next, when the bellows 33 is exposed for maintenance of the manual open / close valve 1, the first port 12 and the second port 13 are generally connected to other devices. Will be removed. When a fixing screw is attached to the through screw hole 18, it is loosened, the locking member 16 is rotated to release the screw into the body 10, and the cover 20, the rod 30, etc. are removed from the body 10. As a result, the bellows 33 is exposed, and the bellows 33 can be replaced by removing the screw 44. Here, even when the bellows 33 is removed for replacement, only the rod 30 is exposed, and the spring 53 that causes wear powder is not exposed because it is covered with the handle 50. Therefore, even if the bellows 33 is replaced in a clean environment, there is no risk of contaminating the environment.
[0027]
Therefore, according to the manual on-off valve 1 of the first embodiment, since the spring 53 is accommodated in the hollow portion of the handle 50, the other part is taken out from the body 10 for maintenance or the like, and the bellows 33 is removed. Even when the rod 30 around the valve body 41 is removed and exposed, the spring 53 is not exposed. Accordingly, the bellows 33 can be replaced in a clean environment.
[0028]
Further, according to the manual on-off valve 1 of the first embodiment, one end of the spring 53 is in contact with the rotatable inner lid 52 and the other end is in contact with the spring receiver 31. The spring receiver 31 is fixed to the end of the rod 30 and is rotatably attached to the handle 50 by a thrust bearing 55. Therefore, only the axial position movement is transmitted to the spring 53 regardless of the rotation of the handle 50. When the valve is closed, the urging force of the spring 53 is directly transmitted to the rod 30 via the spring receiver 31, so that the valve body 41 is brought into contact with the valve seat 14 by the urging force of the spring 53. Further, when the valve is open, the moving force of the handle 50 is transmitted to the rod 30 via the thrust bearing 55 and the spring receiver 31, so that the moving force of the handle 50 is not influenced by the biasing force of the spring 53. To be told. Therefore, even if the stroke of the valve body is required to be large, the amount of expansion and contraction of the spring 53 can be very small, and the small spring 53 can be used. Therefore, the spring 53 is accommodated in the hollow portion of the handle 50. Is easy.
[0029]
Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a cross-sectional view of the second embodiment of the present invention. This manual on-off valve 60 is the manual on-off valve 1 of the first embodiment except that a magnet 61 is provided at the lower part of the handle 50 in the figure and a position detecting means 70 is provided on the outer surface of the cover 20. The same parts are denoted by the same reference numerals, and the description thereof is omitted.
[0030]
In the manual on-off valve 60, an annular magnet 61 is provided at the lower part of the handle 50. The magnet 61 is sandwiched between the upper holding member 62 and the lower holding member 63, and the upper holding member 62 and the lower holding member 63 are locked to the rod 30 by the locking member 64. Thus, the magnet 61 is disposed near the inner peripheral surface of the large diameter portion 21 of the cover 20. Further, since the magnet 61 is locked to the rod 30, it moves in the vertical direction in the figure as the rod 30 moves in the axial direction.
[0031]
Further, as shown in FIG. 4, a closed position detecting switch 71 and an open position detecting switch 72 which are position detecting means 70 are provided on the outer surface of the cover 20. The closed position detection switch 71 and the open position detection switch 72 have the same configuration, and include magnetic proximity switches 73 and 74, LED lamps 75 and 76, and cables 77 and 78, respectively. The cables 77 and 78 are connected to a remote processing device, and the detection results of the closed position detection switch 71 and the open position detection switch 72 can be obtained at a remote location. The closed position detecting switch 71 and the open position detecting switch 72 are fitted into a groove (not shown) provided on the outer surface of the cover 20 and can be positioned by sliding along the groove and fixing. Has been.
[0032]
3 and 4 show the closed state of the manual on-off valve 60. In this state, the magnetic proximity switch 73 of the closed position detection switch 71 is at a position corresponding to the magnet 61. FIG. Therefore, the LED lamp 75 is turned on, and the detection signal is detected via the cable 77 even in a remote place. Here, when the manual on-off valve 60 is opened, the handle 50 and the rod 30 move upward in the figure with respect to the cover 20, and the magnet 61 also moves accordingly. When the magnet 61 reaches a position corresponding to the magnetic proximity switch 74, the magnetic proximity switch 74 detects the magnet 61. Accordingly, the LED lamp 76 is lit and a detection signal is detected via the cable 78.
[0033]
Therefore, according to the manual on-off valve 60 of the second embodiment, in addition to the effects of the first embodiment, the magnetic proximity switches 73 and 74 detect the closed state and the opened state, respectively. Since the LED lamps 75 and 76 are turned on, it can be easily determined whether the manual open / close valve 60 at that time is in the open state, the closed state, or neither. Further, since the detection signals of the magnetic proximity switches 73 and 74 are transmitted by the cables 77 and 78, the state of the manual on-off valve 60 can be obtained even in a remote place. Furthermore, since the magnet 61 is fixed to the rod 30, the movement position of the rod 30 can be directly detected, and therefore the position of the valve body 41 can be detected.
[0034]
Next, a third embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a cross-sectional view of a third embodiment of the present invention. The manual open / close valve 80 is different from the manual open / close valve 60 of the second embodiment only in the way of attaching the magnet 81, and the other parts are denoted by the same reference numerals and the description thereof is omitted.
[0035]
In the manual on-off valve 80, the magnet 81 is attached to the lower portion of the handle 50 in the figure by a locking member 82 and an attachment screw 83. That is, since the magnet 81 is fixed to the handle 50, the position detection unit 70 detects the axial position of the handle 50.
[0036]
Therefore, according to the manual on-off valve 80 of the third embodiment, the same effect as that of the manual on-off valve 60 of the second embodiment can be obtained. Furthermore, since the magnet 81 is attached to the handle 50, the replacement is easy, and the magnet 81 can be used for a manual open / close valve of a different type of the rod 30.
[0037]
In addition, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the meaning.
For example, in the manual on-off valves 60 and 80 of the second and third embodiments, the cover 20 is provided with two position detection means 70 including a closed position detection switch 71 and an open position detection switch 72. If necessary, only one of them may be used, or only the magnets 61 and 81 may be built in, and the position detecting means 70 may not be provided. Since it is easy to attach the position detecting means 70 later, it may be attached if necessary.
Further, for example, in the manual on-off valves 1, 60, 80 of the first to third embodiments, the upper surface of the inner lid 52 is substantially spherical, but the inner lid 52 is in relation to the outer lid 54. What is necessary is just to be able to rotate, and it is also possible to provide a thrust bearing between the inner lid 52 and the outer lid 54 to make it rotatable.
[0038]
【The invention's effect】
According to the manual open / close valve of the present invention, the spring member is housed in the hollow portion of the handle, and therefore the spring member is not exposed even when the rod portion around the valve body is exposed for maintenance or the like. Accordingly, it is possible to provide a manual on-off valve that can perform an operation of exposing the rod portion such as a bellows replacement operation in a clean environment.
[0039]
Further, according to the manual on-off valve of the present invention, when the valve is closed, the urging force of the spring member is directly transmitted to the rod through the spring receiving member. It contacts the valve seat. Further, when the valve is open, the moving force of the handle is transmitted to the rod through the thrust bearing and the spring receiving member, so that the moving force of the handle is transmitted to the rod regardless of the biasing force of the spring member. Therefore, even if the stroke amount of the valve body is increased, the amount of expansion and contraction of the spring member is small, and a small spring can be used. Therefore, it is easy to store the spring member in the hollow portion of the handle.
[0040]
Furthermore, according to the manual on-off valve of the present invention, the magnet is attached to the handle or the rod, and the magnetic proximity switch for detecting the magnetism of the magnet is provided on the outer surface of the cover into which the handle is screwed. Is placed at the position of the magnet when the valve is closed or the position of the magnet when the valve is opened, so that the valve open state or the valve closed state can be detected. Therefore, the state of the manual on-off valve at that time can be easily detected.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a manual on-off valve according to a first embodiment of the present invention in a closed state.
FIG. 2 is a cross-sectional view of the valve opened state.
FIG. 3 is a cross-sectional view of a manual on-off valve according to a second embodiment of the present invention in a closed state.
FIG. 4 is an external view of a cover portion.
FIG. 5 is a sectional view of a manual on-off valve according to a third embodiment of the present invention in a closed state.
FIG. 6 is a sectional view showing a closed state of a conventional manual on-off valve.
FIG. 7 is a cross-sectional view of a conventional manual on-off valve in an open state.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Manual type on-off valve 10 Body 14 Valve seat 20 Cover 30 Rod 31 Spring receiver 41 Valve body 50 Handle 52 Middle lid 53 Spring 55 Thrust bearing 60 Manual on-off valve 61 Magnet 73 Magnetic proximity switch 74 Magnetic proximity switch 80 Manual on-off valve 81 magnet

Claims (3)

A valve seat formed on the body; a valve body that comes into contact with or separates from the valve seat; a handle that slides the valve body through a rod; In a manual on-off valve having a spring member to be contacted by force,
The handle has a hollow shape, the spring member is housed therein , and the spring member is not exposed when the other part is disassembled from the body ;
When the valve is closed, the handle presses the spring member, the spring member abuts the valve body against the valve seat with a predetermined force via the rod,
A manual on-off valve, wherein the handle directly lifts the rod when the valve is open. A valve seat formed on the body; a valve body that comes into contact with or separates from the valve seat; a handle that slides the valve body through a rod; in the manual on-off valve to have a spring member for contact with a force,
The handle has a hollow shape, and the spring member is housed inside thereof.
When the valve is closed, the handle presses the spring member, the spring member abuts the valve body against the valve seat with a predetermined force via the rod,
When the valve is open, the handle directly pulls up the rod;
The spring member is a compression spring, one end of which is in contact with a rotatable lid member of the handle hollow portion, and the other end is fixed to the end portion of the rod and is a thrust bearing with respect to the handle. It is in contact with the spring receiving member that was attached rotatably in the
When the valve is closed, the urging force of the spring member is transmitted directly to the rod via the spring receiving member,
A manual on-off valve that transmits the moving force of the handle to the rod through the thrust bearing and the spring receiving member when the valve is open. In the manual on-off valve according to claim 1 or 2,
A magnet is attached to the handle or the rod,
A magnetic proximity switch for detecting the magnetism of the magnet on the outer surface of the cover into which the handle is screwed;
The manually operated on-off valve, wherein the magnetic proximity switch is arranged corresponding to a position of the magnet when the valve is closed or a position of the magnet when the valve is opened.

Images