JPH035176A - Electrostatic attractor - Google Patents
Electrostatic attractorInfo
- Publication number
- JPH035176A JPH035176A JP14163789A JP14163789A JPH035176A JP H035176 A JPH035176 A JP H035176A JP 14163789 A JP14163789 A JP 14163789A JP 14163789 A JP14163789 A JP 14163789A JP H035176 A JPH035176 A JP H035176A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- polarity
- conductors
- pair
- adsorption layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims abstract description 19
- 238000001179 sorption measurement Methods 0.000 claims description 38
- 239000003989 dielectric material Substances 0.000 claims description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 230000003111 delayed effect Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 24
- 230000010287 polarization Effects 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920005822 acrylic binder Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Handling Of Cut Paper (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Abstract
Description
（産業上の利用分野）
本発明は、吸着層内または吸着層の一側面側に互に電気
的に分離されて配される対の導電体を有し、この対の導
電体の導電体間に印加される直流電圧またはそれと等価
な電圧による静電的吸引力により前記吸着層の他面側に
位置される被吸着物を吸着保持する静電吸着装置に関す
るものである。
（従来の技術）
従来、この種の静電吸着装置においては、対の導電体の
導電体間への直流電圧またしＪぞれと等価な電圧の印加
除去による被吸着物の吸着層からの剥離時におりるその
剥諦を容易にすることを図って特公昭５７−５８８７２
号特許公報には、次のことが開示されている。
直流電圧またはそれと等価な電圧の印ノル除去後におい
てもその直流電圧またはそれと等価な電圧の印加により
生した吸着層内の被吸着物を吸引保持する静電荷を速や
かに消滅させるために、言い換えれば分極の緩和１１．
１間を短かくするために吸着層を構成する誘電材料の体
積電気抵抗率を１０１２Ωｃｍ以下とする。
（発明が解決Ｌ７ようとする課題）
しかしながら、前述されたものにおいては、誘電材料の
体積電気抵抗率を下げて緩和時間を短かくし、被吸着物
の吸着層からの剥離を容易にしようと図っても、誘電材
料の体積電気抵抗率を下げ得るのは被吸着物の体積電気
抵抗率までであり、緩和時ｍ１を短かくするご古にＩ′
、Ｊ、限度があるとい・う問題点がある。この理由は、
誘電材料の体積電気抵抗率を被吸着物の体積電気抵抗率
以下まで下げると、印加される直流電圧またはそれと等
価な電圧にもとつく電位差が被吸着物において生じなく
、分極が形成されなくなり、吸着層と被吸着物との間に
静電的吸引力が発生しなくなるためである。
本発明は、この問題点を根本的に解消することを目的と
し、緩和時間にかかわらずして被吸着物の吸着層からの
剥離が極めて容易にできる静電吸着装置を提供すること
にある。
（課題を解決するための手段）
前述された課題を解決するために、本発明による静電吸
着装置は、前述されたものにおいて、（ａ）前記対の導
電体の導電体間に印加する直流電圧またはそれと等価な
電圧を発生させるとよもに、静電容量を有する印加電圧
発生手段および
（ｂ）この印加電圧発生下段からの前記対の導電体の導
電体間に印加する直流電圧またはそれと等価な電圧の発
Ｌ１−停止Ｉに応じてその対の導電体の導電体間への直
流電圧またはそれと等価な電圧の印加極性を反転させる
印加極性反転手段
を具えることである。
（作 用）
吸着層内または吸着層の一側面側に配される対の導電体
の導電間に印加する直流電圧またシ、１それと等価な電
圧の印加電圧発生手段からの発生停止に応して、この直
流電圧またはそれと等価な電圧の対の導電体の導電間へ
の印加極性を印加極性反転手段により反転させる。言い
換えれば、印加電圧発生手段において蓄積された静電荷
により吸着層内の分極により注した静電荷を相殺によっ
て消滅さゼる。
（発明の効果）
したがって、印加電圧発汁手段により発生されて印加さ
れる直流電圧また６よそれと等価な電圧により吸着層内
に形成された分極も静電荷の相殺による消）威により失
くなろことになるために、緩和時間にかかわらずＵ７て
被吸着物の吸着層からの剥離が極めて容易にできる。ま
た、誘電材料の体積電気抵抗率を下げて緩和時間を短か
くすることにより被吸着物の剥離を容易にしようとする
ものてないために、使用される温度条件にヱｊ橘１(Industrial Application Field) The present invention has a pair of conductors arranged electrically separated from each other within an adsorption layer or on one side of the adsorption layer, and between the conductors of the pair of conductors. The present invention relates to an electrostatic adsorption device that adsorbs and holds an object located on the other side of the adsorption layer using an electrostatic attraction force caused by a DC voltage or an equivalent voltage applied to the adsorption layer. (Prior Art) Conventionally, in this type of electrostatic adsorption device, the object to be adsorbed is removed from the adsorption layer by applying and removing a DC voltage or a voltage equivalent to J between the conductors of a pair. Special Publication No. 57-58872 with the aim of facilitating the delamination that occurs during peeling.
The following is disclosed in the No. Patent Publication: In other words, in order to quickly eliminate the static charge that attracts and holds the adsorbed object in the adsorption layer, which is generated by the application of the DC voltage or the equivalent voltage, even after the application of the DC voltage or the equivalent voltage is removed. Relaxation of polarization 11.
In order to shorten the gap, the volume electrical resistivity of the dielectric material constituting the adsorption layer is set to 1012 Ωcm or less. (Problem to be Solved by the Invention L7) However, in the above-mentioned methods, attempts have been made to reduce the volume resistivity of the dielectric material to shorten the relaxation time and to facilitate the separation of the adsorbed material from the adsorption layer. However, the volume electrical resistivity of the dielectric material can only be lowered up to the volume electrical resistivity of the adsorbed material, and I' is used to shorten m1 during relaxation.
, J. There is a problem that there is a limit. The reason for this is
When the volume resistivity of the dielectric material is lowered to below the volume resistivity of the object to be attracted, a potential difference based on the applied DC voltage or an equivalent voltage will not occur in the object to be attracted, and polarization will no longer be formed. This is because no electrostatic attraction force is generated between the adsorption layer and the object to be adsorbed. The purpose of the present invention is to fundamentally solve this problem, and to provide an electrostatic adsorption device in which an object to be adsorbed can be peeled off from an adsorption layer extremely easily regardless of the relaxation time. (Means for Solving the Problems) In order to solve the above-mentioned problems, an electrostatic adsorption device according to the present invention includes: (a) a direct current applied between the conductors of the pair of conductors; an applied voltage generating means having a capacitance in addition to generating a voltage or an equivalent voltage; The present invention is to provide an application polarity reversing means for reversing the application polarity of a DC voltage or an equivalent voltage between the conductors of the pair in response to the generation L1-stop I of the equivalent voltage. (Function) A direct current voltage applied between the conductors of a pair of conductors disposed within the adsorption layer or on one side of the adsorption layer, or 1, in response to the stop of generation of an equivalent voltage from the applied voltage generation means. Then, the polarity of this DC voltage or a voltage equivalent thereto applied between the conductors of the pair of conductors is reversed by the applied polarity reversing means. In other words, the electrostatic charge accumulated in the applied voltage generating means cancels out the electrostatic charge applied due to polarization in the adsorption layer. (Effect of the invention) Therefore, the polarization formed in the adsorption layer by the DC voltage generated and applied by the applied voltage generating means or the voltage equivalent to 6 is also lost due to cancellation due to the cancellation of static charges. Therefore, regardless of the relaxation time, the adsorbed substance can be peeled off from the adsorption layer extremely easily in U7. In addition, since there is no attempt to make the separation of the adsorbed object easier by lowering the volume resistivity of the dielectric material and shortening the relaxation time,
【の
容易性、さらには剥離後の吸着性か影宙されることがな
い。
しかも、被吸着物の剥離の容易性が誘電材料の体積電気
抵抗率に直接に関係しないために誘電材料の体積電気抵
抗率を上げて、好ましくは１０１３Ωｃｍ以」−にして
吸着保持作用の立」二がりを遅らすことにより、吸着保
持される被吸着物の吸着保持時の位置合わせがし易くな
る。
さらに、印加極性反転手段による印加１つ１性の反転を
遅延手段によって遅延させることにより、印加電圧発生
手段からの直流電圧またはそれと等価な電圧の発生停止
後におｉＪる時間とともに減少する静電容量にもとづく
電圧の適宜値においてその印加極性を反転さゼることが
できる。
したかって、印加極性反転手段を高電圧で作動させる必
要がなく、低電圧で作動させればよいことから信頼性が
良く、またｉ１圧容早が小さくて済む。
（実施例）
次に、本発明による静電吸着装置の具体的一実施例につ
き、図面を参照しつつ説明する。なお、本実施例におり
る体積電気抵抗率およびＩＬ誘電率ばＪＩＳ Ｋ６９１
１５−１３項および５−１４項に惟する試験にもとづく
ものである。
第１図および第２図において、吸着層１の上面には、静
電的吸引力により吸着保持されろ紙シー１−等の被吸着
物２が載置されている。この吸着層１は、厚めが約３０
０７１ｍであって体積電気抵抗率は約１０１４〜１０′
５ΩＣｍ、また比誘電率は約５．０〜７．０であるとと
もに、アクリル酸エステル、ポリ塩化ヒニル、ポリエチ
レンテレフタ−］・等またはそれらの複数種の混合物に
導電性物質（カーボンブラック、ニッケル）を配合する
ごとにより構成されている。また、この吸着層］の下面
には、各々が厚み約１５μｍ、１１Ｊ約１０ｍｍであっ
て間隙１１］を約３ｍｍとして配された一対の本発明に
おける導電体の一例であるカーホン電極３ａ、３ｂか設
りられている。このカーホン電極３ａ、３ｂは、オレフ
ィン系またはアクリル系のバインダーに導電性カーホン
を配合することにより導電性を持だ−Ｕたカーホン導電
インクをシルクスクリーン法等によって印刷することで
形成されている。
また、吸着層１、さらにはカーボン電極３ａ３ｂの下面
側には、体積電気抵抗率が約１０１″′Ωｃｍのアクリ
ル系、オレフィン系またばエポキシ系等の合成樹脂粘着
剤を印刷することにより形成される厚みが約３０〜５０
μｍの絶縁性粘着層４を介して支持シート５が接着によ
り積層されている。この支持シート５は、厚Ｃ口が約２
５０μｍあってポリカーホ不−ト材、ポリエステル利ま
たはアクリル材シート等のプラスチック材より構成され
ている。
前記カーホン電極３ａ、３ｂ夫々は、前述したように厚
み約１５μｍ、１１１約１．０ ｍｍであるとともに、
互いの間隙ＩＪを約３ ｍａｎとして第１図に示されて
いるように平行間隔を保ちながら蛇行するような櫛形パ
ターンに配されている。これらカーボン電極３ａ、３ｂ
間には、被吸着物を静電的吸引力により吸着保持するた
めに、高電圧、本実施例においては約２０００ Ｖの直
流電圧またはそれと等価な半波整流波電圧（以下、単に
「直流電圧」と称する）が印加される。
次に、カーボン電極３ａ、３ｂ間に直流電圧を印加する
電気回路を第３図にもとづき、この電気回路の各部ａ
−ｄにおける動作波形を示す第４図のタイムチャート図
を参照しながら説明する。なお、第３図および第４図に
おける符号ａ〜ｄは対応している。
カーボン電極３ａ、３ｂ間には、このカーボン電極３ａ
、３ｂ間に印加される直流電圧の極性を反転させる本発
明におりる印加極性反転手段の一例である電磁リレー６
を介して、本発明におりる印加電圧発生手段の一例であ
る、整流器とコンデンサとより構成される倍電圧整流回
路７において発生される２０００ Ｖの直流電圧が印加
されろ。この４＞’ｒ電圧整流回路７の２０００ Ｖの
直流電圧の発生および発生停止は０Ｎ１０ＦＦ動作の高
圧発生指示スイッチ８によって行なわれるとともに、こ
の高圧発生指示スイッチ８の０Ｉ７Ｆ動作により１桁の
２進カウンタとしての機能を有するノリツブフロップ（
Ｆ、Ｆ、）回路９の状態が反転される。ごのＦ、Ｆ、回
路９からのリレー切換え信号としての出力信号は本発明
における遅延手段の一例である遅延線より構成される時
間遅延回路１０によって所定時間Ｔに亘って遅延された
後に電磁リレー６に与えられる。この遅延された出力信
号により電磁リレー６は切換えられて、カーボン電極３
ａ、３ｂ間への印加極性は反転される。なお、１１は静
電容量を有する倍電圧整流回路４に蓄積された静電荷を
所定時定数でもって放電させる例えば７０ＭΩの高抵抗
であって、ごの高抵抗１１の抵抗値を選択することによ
り高圧発生指示スイッチ８のＯＦＦ動作後における倍電
圧整’ＩＮ、回路７の出力電位の時間とともに減衰する
波形を調節できる。
０
本実施例によれば、高圧発生指示スイッチε３のＯＦＦ
動作から所定遅延時間Ｔ後のＡ時点において、カーホン
電極３ａ、３ｂ間への印加極性が反転され、倍電圧整流
回＋？８７に蓄積された１１′ｒ電荷により吸着層１内
の分極により生じた静電荷が相殺により一瞬に消滅され
て分極が失くなり、被吸着物が速やかに剥離される。な
お、倍電圧整流回路７の出力電位が下がってから電磁リ
レー６を切換えるために電磁リレー６の耐圧容量が小さ
くて済む。
本実施例においては、印加極性反転手段として電磁リレ
ー６を用いたが、静電リレー、熱リレー、圧電リレー等
を用いてもよい。また、印加電圧発生手段として倍電圧
整流回路７を用いたが、半導体、シリコン１ｌｒｊ制御
素子または昇圧トランス等より構成される高圧発生回路
を用いてもよい。さらに、遅延手段として遅延線より構
成される時間遅延回路１０を用いたが、コンデンサまた
はディジタル方式による時間遅延回路を用いてもよい。
また、本実施例においては、吸着層１を体積電気抵抗率
約１０′４〜１０′５Ωｃｍ、また比誘電率５．０〜７
．０としたが、同様の静電的吸引力および剥２ｉの作用
・効果を得るにその数値範囲に限定される必要はなく体
積電気抵抗率約１０°〜１０′７Ωｃｍ、比誘電率３．
０〜１２．０の範囲内であればよい。
しかし、体積電気抵抗率は】ＯＩ３Ω（ｍ以」−にすれ
ば、吸着層１の吸着保持作用の立上がりの遅れにより被
吸着物１の吸着保持時の位置合わせがし易くなる。さら
に、高抵抗１１を倍電圧整流回路７に対して外部抵抗と
したが内部抵抗であってもよい。[Easy to remove, and even more adsorbent after peeling. Furthermore, since the ease of peeling off the adsorbed material is not directly related to the volume electrical resistivity of the dielectric material, the volume electrical resistivity of the dielectric material is increased, preferably to 1013 Ωcm or higher, to enhance the adsorption and retention effect. By delaying the splitting, positioning of the object to be sucked and held when it is sucked and held becomes easier. Furthermore, by delaying the reversal of the applied polarity by the application polarity reversing means by the delay means, the capacitance decreases with time after the generation of the DC voltage or voltage equivalent thereto from the applied voltage generating means stops. The applied polarity can be reversed at an appropriate value of the voltage based on the voltage. Therefore, it is not necessary to operate the applied polarity reversing means at a high voltage, and it is sufficient to operate it at a low voltage, resulting in good reliability and a small i1 pressure ratio. (Example) Next, a specific example of the electrostatic adsorption device according to the present invention will be described with reference to the drawings. In addition, the volume electrical resistivity and IL dielectric constant in this example are JIS K691.
It is based on the tests described in Sections 15-13 and 5-14. In FIGS. 1 and 2, an object 2 to be attracted, such as a filter paper sheet 1-, is placed on the upper surface of an adsorption layer 1, and is attracted and held by an electrostatic attraction force. This adsorption layer 1 has a thickness of approximately 30 mm.
071m and the volume electrical resistivity is approximately 1014~10'
5ΩCm, and the dielectric constant is about 5.0 to 7.0, and conductive substances (carbon black, nickel ). Further, on the lower surface of this adsorption layer, a pair of carphone electrodes 3a and 3b, which are an example of the conductor of the present invention, are arranged, each having a thickness of about 15 μm and a gap of about 10 mm, with a gap of about 3 mm. It is set up. The carphone electrodes 3a, 3b are formed by printing a carphone conductive ink, which has conductivity by blending a conductive carphone with an olefinic or acrylic binder, by a silk screen method or the like. Further, on the lower surface side of the adsorption layer 1 and furthermore on the carbon electrode 3a3b, it is formed by printing a synthetic resin adhesive such as acrylic, olefin or epoxy having a volume electrical resistivity of approximately 101'''Ωcm. The thickness is about 30~50mm
A support sheet 5 is laminated by adhesion with an insulating adhesive layer 4 having a thickness of .mu.m interposed therebetween. This support sheet 5 has a thickness C of approximately 2
It has a diameter of 50 μm and is made of a plastic material such as polycarbonate, polyester, or acrylic sheet. As described above, each of the carphone electrodes 3a and 3b has a thickness of about 15 μm and a thickness of about 1.0 mm, and
They are arranged in a meandering comb-shaped pattern while maintaining parallel spacing, as shown in FIG. 1, with a gap IJ of about 3 man. These carbon electrodes 3a, 3b
In order to attract and hold the object by electrostatic attraction, a high voltage, in this example, a DC voltage of approximately 2000 V or an equivalent half-wave rectified wave voltage (hereinafter simply referred to as "DC voltage") is applied between the parts. ) is applied. Next, an electric circuit for applying a DC voltage between the carbon electrodes 3a and 3b is constructed based on FIG.
This will be explained with reference to the time chart of FIG. 4 showing the operating waveforms at -d. Note that the symbols a to d in FIGS. 3 and 4 correspond. This carbon electrode 3a is placed between the carbon electrodes 3a and 3b.
, 3b, which is an example of an applied polarity inverting means according to the present invention, which inverts the polarity of the DC voltage applied between 3b and 3b.
A DC voltage of 2000 V generated in a voltage doubler rectifier circuit 7 comprising a rectifier and a capacitor, which is an example of applied voltage generating means according to the present invention, is applied through the voltage converter. Generation and stopping of the 2000 V DC voltage of this 4>'r voltage rectifier circuit 7 is performed by the high voltage generation instruction switch 8 of 0N10FF operation, and the 0I7F operation of this high voltage generation instruction switch 8 causes the 1-digit binary counter to Noritsubu flop (
F,F,) The state of circuit 9 is inverted. The output signal as a relay switching signal from the F, F, circuit 9 is delayed for a predetermined time T by a time delay circuit 10 constituted by a delay line, which is an example of delay means in the present invention, and then the electromagnetic relay is switched. given to 6. The electromagnetic relay 6 is switched by this delayed output signal, and the carbon electrode 3
The polarity applied between a and 3b is reversed. Note that 11 is a high resistor, for example, 70 MΩ, which discharges the static charge accumulated in the voltage doubler rectifier circuit 4 having a capacitance with a predetermined time constant, and by selecting the resistance value of each high resistor 11, After the high voltage generation instruction switch 8 is turned off, the voltage doubler 'IN' can be used to adjust the waveform of the output potential of the circuit 7 that attenuates over time. 0 According to this embodiment, when the high voltage generation instruction switch ε3 is turned OFF
At time A after a predetermined delay time T from the operation, the polarity of the voltage applied between the carphone electrodes 3a and 3b is reversed, and the voltage doubler rectifier circuit +? The 11'r charge accumulated in the adsorption layer 1 cancels out the static charge generated by the polarization in the adsorption layer 1, causing the polarization to be lost and the adsorbed object to be quickly peeled off. Note that since the electromagnetic relay 6 is switched after the output potential of the voltage doubler rectifier circuit 7 has decreased, the withstand voltage capacity of the electromagnetic relay 6 may be small. In this embodiment, the electromagnetic relay 6 is used as the applied polarity reversing means, but an electrostatic relay, a thermal relay, a piezoelectric relay, etc. may also be used. Further, although the voltage doubler rectifier circuit 7 is used as the applied voltage generating means, a high voltage generating circuit composed of a semiconductor, a silicon 1lrj control element, a step-up transformer, or the like may be used. Furthermore, although the time delay circuit 10 composed of a delay line is used as the delay means, a capacitor or a digital time delay circuit may be used. In this embodiment, the adsorption layer 1 has a volume electrical resistivity of approximately 10'4 to 10'5 Ωcm, and a relative permittivity of 5.0 to 7.
．． 0, but in order to obtain the same electrostatic attraction force and the action and effect of peeling 2i, it is not necessary to be limited to this numerical range, and the volume electrical resistivity is approximately 10° to 10'7 Ωcm, and the relative permittivity is 3.
It may be within the range of 0 to 12.0. However, if the volume electrical resistivity is set to OI3Ω (m or more), the positioning of the object to be attracted 1 during attraction and holding becomes easier due to the delay in the rise of the attraction and holding action of the adsorption layer 1. Although 11 is an external resistance for the voltage doubler rectifier circuit 7, it may be an internal resistance.
第１図乃至第４図は本発明による静電吸着装置の具体的
一実施例を説明するための図面であって・
第１図および第２図夫々は分解斜視図および断面図、
第３図は電気回路図および
第４図は第３図に示されている電気回路における各部の
波形のタイムチャート図である。
１・・・吸着層 ２・・・被吸着物３ａ、３ｂ
・・・カーボン電極
４・・・絶縁性粘着層 ５・・・支持シート６・・・
電磁リレー ７・・・倍電圧整流回路８・・・高圧
発生指示スイッチ
９・・・フリップフロップ回路
１０・・・時間遅延回路 １１・・・高抵抗３1 to 4 are drawings for explaining a specific embodiment of the electrostatic adsorption device according to the present invention. FIGS. 1 and 2 are an exploded perspective view and a sectional view, respectively, and is an electric circuit diagram, and FIG. 4 is a time chart of waveforms of various parts in the electric circuit shown in FIG. 3. 1... Adsorption layer 2... Adsorbed objects 3a, 3b
...Carbon electrode 4...Insulating adhesive layer 5...Support sheet 6...
Electromagnetic relay 7... Voltage doubler rectifier circuit 8... High voltage generation instruction switch 9... Flip-flop circuit 10... Time delay circuit 11... High resistance 3
Claims (1)
離されて配される対の導電体を有し、この対の導電体の
導電体間に印加される直流電圧またはそれと等価な電圧
による静電的吸引力により前記吸着層の他面側に位置さ
れる被吸着物を吸着保持する静電吸着装置において、 （ａ）前記対の導電体の導電体間に印加する直流電圧ま
たはそれと等価な電圧を発生させるとともに、静電容量
を有する印加電圧発生手段および （ｂ）この印加電圧発生手段からの前記対の導電体の導
電体間に印加する直流電圧またはそれと等価な電圧の発
生停止に応じてその対の導電体の導電体間への直流電圧
またはそれと等価な電圧の印加極性を反転させる印加極
性反転手段 を具えることを特徴とする静電吸着装置。 ２ 前記印加極性反転手段による印加極性の反転を遅延
させる遅延手段を具えることを特徴とする請求項１に記
載の静電吸着装置。 ３ 前記吸着層が体積電気抵抗率１０＾１＾３Ωｃｍ以
上（ＪＩＳ Ｋ６９１１ ５−１３項に準する試験にも
とづく）の誘電材料より構成されることを特徴とする請
求項１または２に記載の静電吸着装置。[Claims] 1. A device having a pair of conductors arranged electrically separated from each other within the adsorption layer or on one side of the adsorption layer, and an electric voltage applied between the pair of conductors. In an electrostatic adsorption device that adsorbs and holds an object located on the other side of the adsorption layer by an electrostatic attraction force caused by a DC voltage or an equivalent voltage, (a) between the conductors of the pair of conductors; (b) an applied voltage generating means that generates a DC voltage or a voltage equivalent thereto and has a capacitance; An electrostatic adsorption device characterized by comprising an applied polarity reversing means for reversing the applied polarity of the direct current voltage or the equivalent voltage between the conductors of the pair in response to the stoppage of generation of the equivalent voltage. . 2. The electrostatic adsorption device according to claim 1, further comprising a delay means for delaying the reversal of the applied polarity by the applied polarity reversing means. 3. The electrostatic device according to claim 1 or 2, wherein the adsorption layer is made of a dielectric material having a volume electrical resistivity of 10^1^3 Ωcm or more (based on a test according to JIS K6911 Section 5-13). Electroadsorption device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14163789A JPH0771859B2 (en) | 1989-06-02 | 1989-06-02 | Electrostatic adsorption device |
| US07/531,108 US5173834A (en) | 1989-06-02 | 1990-05-31 | Electrostatic attraction apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14163789A JPH0771859B2 (en) | 1989-06-02 | 1989-06-02 | Electrostatic adsorption device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH035176A true JPH035176A (en) | 1991-01-10 |
| JPH0771859B2 JPH0771859B2 (en) | 1995-08-02 |
Family
ID=15296676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14163789A Expired - Lifetime JPH0771859B2 (en) | 1989-06-02 | 1989-06-02 | Electrostatic adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0771859B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5681840A (en) * | 1991-08-15 | 1997-10-28 | Zeneca Limited | Tricyclic antipsychotic compounds |
| US7008129B2 (en) * | 2004-04-14 | 2006-03-07 | Hewlett-Packard Development Company, Lp. | Capacitive mat control |
| JP2007142456A (en) * | 2007-02-05 | 2007-06-07 | Fujitsu Ltd | Electrostatic chuck |
-
1989
- 1989-06-02 JP JP14163789A patent/JPH0771859B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5681840A (en) * | 1991-08-15 | 1997-10-28 | Zeneca Limited | Tricyclic antipsychotic compounds |
| US7008129B2 (en) * | 2004-04-14 | 2006-03-07 | Hewlett-Packard Development Company, Lp. | Capacitive mat control |
| JP2007142456A (en) * | 2007-02-05 | 2007-06-07 | Fujitsu Ltd | Electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0771859B2 (en) | 1995-08-02 |
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