JPH084226Y2 - Room temperature solid state bonding equipment - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a room temperature solid-state bonding apparatus capable of bonding in a solid state at room temperature (temperature at which materials are not altered).
A metal, a non-metal, a superconducting material, or the like is provided so that a high bonding strength can be obtained without changing or deforming the material.

[Prior Art] The solid phase joining method joins the solid state without melting the joined part, and generally, fusion welding that melts a wide range of the welded part or brazing with addition of molten metal is performed. Compared with this, it is suitable for joining dissimilar materials in which the welded portion has few materially deteriorated parts such as solidified structure and heat-affected zone, and is particularly apt to be weak welded by fusion welding.

The pressure welding method and the diffusion bonding method are mainly used as the solid-phase bonding method.

Of these, the pressure welding method is a method of applying mechanical pressure to the joint to cause plastic deformation and joining, and is characterized in that the device is inexpensive and the operation is simple.

The diffusion bonding method is a method in which smooth surfaces are brought into contact with each other and kept at a high temperature to bond them by mutual diffusion of atoms. ing.

However, the pressure welding method has a problem that it is not suitable for joining the materials to be joined which are not susceptible to the deformation of the materials, because it is necessary to apply a large force that causes plastic deformation in the joined portions.

On the other hand, in the diffusion bonding method, only a slight pressure is applied by bringing the bonding surfaces into contact with each other and no large deformation occurs, but the bonding part is heated to a high temperature of about 800 to 1200 ° C (70 to 90% of the melting point). In addition, there is a problem in that the material must be held for a long time in order to cause mutual diffusion of atoms, which causes deterioration of the material due to thermal influence.

 Therefore, the room temperature solid-state bonding method has been proposed in recent years.

The room temperature solid-state bonding method is performed at room temperature (a temperature that does not change the quality of the material,
For example, at 350 ° C or lower), high or ultra high vacuum (10
^-4 Pa or less), or in an inert atmosphere containing an inert gas or oxygen of 10 ppm or less, a mechanical activation method such as rotating friction that rubs the joining surfaces of the joining materials while rotating them, or between the joining surfaces. This is a method of performing cleaning and activation by a physical property activation method such as discharging, and joining the surfaces by bringing them into contact with each other.

[Problems to be Solved by the Invention] However, when a room temperature solid-state bonding apparatus using a mechanical activation method such as the above-mentioned rotary friction or a physical activation method such as electric discharge is manufactured, mechanical contact such as rotational friction is generated. In the room temperature solid-state bonding apparatus using the activation method, there are problems that the bonding surface is limited to a circle and that it becomes difficult to give uniform rotational friction to the bonding surface as the bonding surface is enlarged, Further, in a room temperature solid-state bonding apparatus using a physical property activation method such as discharge, if the bonding surface is large, local discharge is likely to occur on the bonding surface, so that there is a problem that the bonding surface is not uniformly activated. It is not suitable for stably and uniformly activating a large joint surface having an arbitrary shape.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a room-temperature solid-state bonding apparatus capable of stably and uniformly activating a large bonding surface having an arbitrary shape.

[Means for Solving the Problems] According to the invention of claim 1, the inside of an airtight container which is in a high or ultra-high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less, A pair of materials to be joined are arranged so that the joining surfaces face each other so as to be able to approach and separate from each other, and an activation device is provided between the pair of materials, in which a sheet-like abrasive material is radially implanted on a rotating shaft. In addition, the present invention relates to a room temperature solid-state bonding apparatus characterized by using Teflon paper as a sheet-shaped abrasive.

A second aspect of the present invention is to join a pair of materials to be joined inside a hermetic container in a high or ultra high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less. A pair of rollers, which are arranged so as to face each other so as to be able to approach and separate from each other, and at least one of which is rotationally driven between the pair of materials and which is parallel to the joint surface and mutually parallel, and the pair of rollers. An activating device consisting of a loop-shaped sheet-shaped abrasive suspended between
In addition, the present invention relates to a room temperature solid-state bonding apparatus characterized by using Teflon paper as a sheet-shaped abrasive.

A third aspect of the present invention is to bond a pair of materials to be bonded to the inside of a hermetic container in a high or ultra-high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less. A container-shaped activation device, which is arranged so as to face each other so as to be close to and away from each other and capable of accommodating a joining-assisting metal piece and capable of generating heat, is provided between the pair of materials. The present invention relates to a room-temperature solid-state bonding apparatus, characterized in that the heater wire is wound in a container shape.

[Operation] At room temperature, in a high or ultra-high vacuum state, or in an airtight container capable of holding an inert gas or an inert atmosphere containing 10 ppm or less of oxygen, the bonding surfaces are opposed to each other to support the materials, and the activation device Is used to activate the bonding surface of the material. After that, if the materials are brought close to each other in the atmosphere and the bonding surfaces are pressed against each other, it becomes possible to bond the materials with high bonding strength.

Further, according to the invention of claim 1, by rotating the rotary shaft of the activation device, the joint surface of the material is activated by the sheet-shaped abrasive made of Teflon paper radially implanted in the rotary shaft. .

According to the invention of claim 2, by rotating at least one of the pair of rollers, the loop-shaped sheet-shaped abrasive material made of Teflon paper of the activation device is displaced, and the loop-shaped sheet-shaped abrasive material is displaced. Activates the bonding surface of the material.

According to the invention of claim 3, when the materials are of the same kind, only the activation device formed by winding the heater wire in a container shape is heated to activate the joint surface of the materials by low temperature heating, and In the case of the same type, by heating the container-shaped activation device containing the joining-assisting metal piece, the joining surface of the material is activated by low-temperature heating, and at the same time, it is melted and evaporated on the joining surface. The particles of the joining-assisting metal piece are deposited to form an activated joining-assisting metal layer on the joining surface.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

 1 to 3 show a first embodiment of the present invention.

In the figure, reference numeral 1 denotes an airtight container, and one material 4 is attached to an inner bottom portion of the airtight container 1 via a fixed base 2 and a fixed material holder 3.
Is supported.

Further, above the fixed table 2 in the airtight container 1,
The other material 8 is supported so as to face the one material 4 via a pressure reducing device 5 such as a hydraulic ram provided outside the airtight container 1, an elevating body 6 and a moving material holder 7.

The shapes of the materials 4 and 8 may be arbitrary, and the joint surfaces 9 and 10 (having a rectangular shape in this embodiment) of the same size and shape are arranged to face each other in the same phase.

A fixed frame 12 is provided outside one side of the airtight container 1 located in the longitudinal direction 11 of the materials 4 and 8, and both ends of a guide rod 13 parallel to the longitudinal direction 11 are supported and fixed to the fixed frame 12. Screw rod 14 parallel to guide rod 13
Both ends of which are rotatably supported, and the end of the screw rod 14 on the anti-airtight container 1 side is extended, and the bevel gears 16, 1
A handle 18 is connected via 7 and a moving table 21 having a guide portion 19 movable along the guide rod 13 and a nut portion 20 screwed to the screw rod 14 is provided, and the activation device traverse mechanism 22 is provided. Make up.

On the other hand, a large number of sheet-shaped abrasives 24 made of Teflon paper are radially planted around the outer periphery of the tip end of the rotary shaft 23 extending in the longitudinal direction 11 so that the activation device 27 has a diameter 25 larger than the width dimension 26 of the materials 4 and 8. And the activation device 27 is arranged at a position between the materials 4 and 8 inside the airtight container 1, and between the moving table 21 and the through hole 28 formed at one side of the airtight container 1. A seal cylinder (30) having an expandable bellows (29) is provided, and a rear end of the rotation shaft (23) of the activation device (27) and an activation device rotation mechanism (31) such as a motor attached to the movable table (21) is connected via a connecting sleeve (32). To connect.

Reference numeral 33 denotes an internal atmosphere adjusting port connected to the airtight container 1. When the airtight container 1 is to be evacuated, a vacuum suction device (not shown) is connected so that the airtight container 1 has an inert gas atmosphere. In that case, an inert gas supply source (not shown) is connected. Reference numeral 34 is a valve provided in the internal atmosphere adjusting port 33.

 Next, the operation will be described.

In joining, the airtight container 1 is left open to the atmosphere, the lifting device 5 raises the lifting body 6 and separates it from the fixed base 2, and the fixed-side material holder 3 and the moving-side material holder 7 respectively. Material where the joint surfaces 9 and 10 are rectangular, for example
4, 8 are mounted such that the longitudinal direction 11 of the material 4, 8 is parallel to the axis of rotation 23 of the activation device 27.

Subsequently, the operator manually rotates the handle 18 of the activating device traverse mechanism 22 to rotate the screw rod 14 via the bevel gears 17 and 16 to move the nut portion 20 screwed to the screw rod 14. The pedestal 21 is moved along the guide rod 13, and the activating device 27 is moved so as to come into contact with the upper part of the lower material 4 via the activating device rotating mechanism 31 and the connecting sleeve 32 which are integrated with the moving table 21. After this, the lifting device 6 is lowered by the reduction device 5 to bring the upper material 8 into contact with the activation device 27.

In this state, a vacuum suction device (not shown) is connected to the internal atmosphere adjusting port 33, and the inside of the airtight container 1 is sucked by the vacuum suction device to maintain a required degree of vacuum, or the internal atmosphere adjusting port 33 An inert gas supply source or the like (not shown) is connected to make the inside of the airtight container 1 an atmosphere of the inert gas or the inert gas containing oxygen of 10 ppm or less by the inert gas supply source or the like.

Subsequently, the activation device rotating mechanism 31 causes the connecting sleeve 32.
The activation device 27 is rotated via.

Then, the activation device 27 is configured such that a large number of sheet-shaped abrasives 24 (abrasives) are radially implanted on the outer periphery of the tip end of the rotary shaft 23 and have a diameter 25 larger than the width dimension 26 of the materials 4 and 8. Therefore, each of the sheet-like abrasives 24 is deformed so as to follow the joining surfaces 9 and 10, so that the joining surfaces 9 and 10 in contact with the activation device 27 of the materials 4 and 8 are The entire width direction is uniformly activated.

Then, the worker handles the handle 18 of the activation device traverse mechanism 22.
As described above, the activator 27 is moved in the longitudinal direction 11 of the materials 4 and 8 by manually rotating, and the joining surfaces 9 and 10 of the materials 4 and 8 are moved.
Activate the entire surface.

Then, the elevating body 6 is lowered by the pressing device 5 to bring the materials 4 and 8 into contact with each other and press them with a required force.

As a result, the materials 4 and 8 are kept at room temperature (a temperature that does not change the material, for example, 350 ° C, only by pressing the joining surfaces 9 and 10).
In the following), the atoms on the bonding surfaces 9 and 10 are bonded to each other and are bonded together. The crimping force at the time of pressure contact may be in the range of 1/3 to 1 times the yield point y of the materials 4 and 8.

By using Teflon paper as the sheet-like abrasive material 24 of the activation device 27, when the bonding surfaces 9 and 10 are activated, dust and the like are generated from the Teflon paper and the airtight container 1
It is possible to prevent the internal vacuum state or atmosphere from being lowered.

Further, since the activation device 27 in which the sheet-like abrasive material 24 is planted is used, it becomes possible to activate the joint surfaces 9 and 10 having irregularities as shown in FIG.

FIG. 4 and FIG. 5 show a second embodiment of the present invention, in which the activating device rotating mechanism 31 and the connecting sleeve are attached to the moving base 21.
A sheet in which a driving roller 35 connected to 32 and a driven roller 37 rotatably supported by a support shaft 36 parallel to the connecting sleeve 32 are provided, and a Teflon paper is looped between the driving roller 35 and the driven roller 37. Except that the activation device 39 is configured by straddling the shaped abrasive 38, it has the same configuration as that of the above-described embodiment, and when the joint surfaces 9 and 10 are flat, more than in the above-described embodiment. It is possible to obtain the effect that the large joint surfaces 9 and 10 can be uniformly and stably activated.

FIGS. 6 to 8 show a third embodiment of the present invention, in which a heater wire is formed into a container shape on a moving table 21 via an activation device holder 40 extending in the longitudinal direction 11 of the materials 4 and 8. The structure is the same as that of each of the above-described embodiments except that the activation device 42 capable of accommodating the joining-assisting metal piece 41 by winding and capable of generating heat is attached.

 Incidentally, 43 is a wiring for supplying a current to the activation device 42.

According to this example, when the materials 4 and 8 are of the same type,
By heating only the activating device 42 without accommodating the metal piece 41 for joining assistance, the heat of the activating device 42 causes the joining surfaces 9, 10
Can be heated at a low temperature to activate the joint surfaces 9 and 10.

When the materials 4 and 8 are different from each other, the activation device 42 containing the joining-assisting metal piece 41 is caused to generate heat,
The joint surface 9, 10 is heated to a low temperature by the heat of the activation device 42, and the joint surface 9,
While activating 10, the particles of the bonding aid metal piece 41 melted and evaporated by the heat of the activation device 42 are vapor-deposited on the bonding surfaces 9 and 10 to form an activated bonding auxiliary layer on the bonding surfaces 9 and 10. can do.

As a result, similar to each of the above embodiments, the large joint surfaces 9 and 10
It is possible to obtain the function and effect that the activation can be performed uniformly and stably, and it is possible to join different materials 4 and 8.

The present invention is not limited to the above-described embodiment, and may be applied to a room temperature solid-state bonding apparatus that applies rotational friction to the joining surface of the material when the joining surface is circular. Similarly, it may be applied to a room-temperature solid-state bonding apparatus in which ultrasonic vibration is similarly applied to the bonding surface, and other various modifications may be made without departing from the scope of the present invention. is there.

[Effects of the Invention] As described above, according to the inventions of claims 1, 2, and 3,
A large joint surface having an arbitrary shape can be activated stably and uniformly, and according to the invention of claim 1, it is possible to activate a joint surface having irregularities, and according to the invention of claim 2. For example, it is possible to activate a particularly large joint surface, and since Teflon paper is used as the sheet-shaped abrasive in both claims 1 and 2, when the joint surface is activated, dust is generated from the sheet-shaped abrasive. It is possible to prevent the vacuum state or the atmosphere inside the airtight container from being lowered due to the occurrence of such as the above. According to the invention of claim 3, the activation device including the heater wire wound in a container shape is used. Therefore, it is possible to obtain an excellent effect that it is possible to easily set the joining-assisting metal piece and form the activated joining-assisting layer on the joining surface of different materials.

[Brief description of drawings]

FIG. 1 is an overall schematic front view of the first embodiment of the present invention, and FIG.
Fig. 1 is a plan view of Fig. 1 seen from the direction of the arrow II-II, Fig. 3 is a schematic front view of activating a joint surface having irregularities using the apparatus of Fig. 1, and Fig. 4 is a book. FIG. 5 is a schematic front view of the second embodiment of the invention, FIG. 5 is a plan view of FIG. 4 seen from the direction of the arrow VV, and FIG. 6 is a schematic front view of the third embodiment of the invention. 7
6 is a side view of FIG. 6 viewed from the direction of arrow VII-VII, and FIG. 8 is an enlarged plan view of the activation device portion of FIG. In the figure, 1 is an airtight container, 4 and 8 are materials, 9 and 10 are bonding surfaces, 23 is a rotary shaft, 24 and 38 are sheet-like abrasives, 27, 39 and 42 are activation devices, 35 is a drive roller, 37 Is a driven roller, and 41 is a metal piece for joining assistance.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-2-224882 (JP, A) JP-A-63-286288 (JP, A) JP-B-49-11136 (JP, B1)

Claims (3)

[Scope of utility model registration request] 1. A pair of materials to be bonded are bonded to the inside of a hermetic container in a high or ultra-high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less. The activating device is provided so as to face each other so as to be able to approach and separate from each other, and between the pair of materials, an activating device formed by radially arranging a sheet-shaped abrasive on a rotating shaft is provided, and Teflon paper is used as the sheet-shaped abrasive. A room temperature solid-state bonding apparatus characterized by being used. 2. A pair of materials to be bonded are bonded to the inside of a hermetic container in a high or ultra-high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less. Between the pair of materials, at least one of which is rotatably driven and is parallel to the joint surface and between the pair of rollers, the rollers being opposed to each other and capable of approaching and separating from each other. An activating device comprising a looped sheet-like abrasive material that has been suspended is provided, and
A room temperature solid-state bonding apparatus using Teflon paper as a sheet-shaped abrasive. 3. A pair of materials to be joined are bonded to the inside of a hermetic container in a high or ultra-high vacuum state at room temperature or in an atmosphere of an inert gas or an inert gas containing oxygen of 10 ppm or less. A container-shaped activation device, which is arranged so as to face each other and is capable of approaching and separated from each other, is capable of accommodating the joining-assisting metal piece and capable of generating heat, and which is provided in a container-shape. A room-temperature solid-state bonding apparatus characterized in that it is composed of a heater wire wound around.