JPS5390773A - Silcon semiconductor device on sapphire - Google Patents

Silcon semiconductor device on sapphire

Info

Publication number
JPS5390773A
JPS5390773A JP487277A JP487277A JPS5390773A JP S5390773 A JPS5390773 A JP S5390773A JP 487277 A JP487277 A JP 487277A JP 487277 A JP487277 A JP 487277A JP S5390773 A JPS5390773 A JP S5390773A
Authority
JP
Japan
Prior art keywords
sapphire
silcon
semiconductor device
sosmos
isolating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP487277A
Other languages
Japanese (ja)
Other versions
JPS5837993B2 (en
Inventor
Shinji Onga
Kazumichi Omura
Yukio Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP487277A priority Critical patent/JPS5837993B2/en
Publication of JPS5390773A publication Critical patent/JPS5390773A/en
Publication of JPS5837993B2 publication Critical patent/JPS5837993B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve mobility by designing the channel direction on a(111) Si layer in the [1-100] direction of sapphire faces and isolating between elements with a thermal oxide film in a SOSMOS element.
COPYRIGHT: (C)1978,JPO&Japio
JP487277A 1977-01-21 1977-01-21 Silicon-on-sapphire semiconductor device Expired JPS5837993B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP487277A JPS5837993B2 (en) 1977-01-21 1977-01-21 Silicon-on-sapphire semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP487277A JPS5837993B2 (en) 1977-01-21 1977-01-21 Silicon-on-sapphire semiconductor device

Publications (2)

Publication Number Publication Date
JPS5390773A true JPS5390773A (en) 1978-08-09
JPS5837993B2 JPS5837993B2 (en) 1983-08-19

Family

ID=11595752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP487277A Expired JPS5837993B2 (en) 1977-01-21 1977-01-21 Silicon-on-sapphire semiconductor device

Country Status (1)

Country Link
JP (1) JPS5837993B2 (en)

Also Published As

Publication number Publication date
JPS5837993B2 (en) 1983-08-19

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