SE399628B - Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar - Google Patents

Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Info

Publication number: SE399628B
Authority: SE; Sweden
Prior art keywords: scream; specifically; drive device; machine manufacturer; manufacturer
Prior art date: 1975-02-13

Application number

SE7501605A

Other languages

English (en)

Other versions

SE7501605L (sv

Inventor

Sok

Original Assignee

Westerberg Erik Gerhard Natana

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-02-13

Filing date

1975-02-13

Publication date

1978-02-20

1975-02-13 Application filed by Westerberg Erik Gerhard Natana filed Critical Westerberg Erik Gerhard Natana

1975-02-13 Priority to SE7501605A priority Critical patent/SE399628B/sv

1976-01-27 Priority to GB3119/76A priority patent/GB1532301A/en

1976-02-09 Priority to US05/656,282 priority patent/US4060816A/en

1976-02-10 Priority to FR7603649A priority patent/FR2301025A1/fr

1976-02-11 Priority to CH167176A priority patent/CH607329A5/xx

1976-02-12 Priority to DE2605659A priority patent/DE2605659C2/de

1976-02-12 Priority to JP51014333A priority patent/JPS5936820B2/ja

1976-02-12 Priority to NO760460A priority patent/NO141028C/no

1976-02-12 Priority to CA245,879A priority patent/CA1060124A/en

1976-08-16 Publication of SE7501605L publication Critical patent/SE7501605L/sv

1978-02-20 Publication of SE399628B publication Critical patent/SE399628B/sv

Links

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Apparatuses For Generation Of Mechanical Vibrations (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Preparing Plates And Mask In Photomechanical Process (AREA)
Apparatuses And Processes For Manufacturing Resistors (AREA)
Electron Beam Exposure (AREA)
Control Of Position Or Direction (AREA)
Lasers (AREA)

SE7501605A 1975-02-13 1975-02-13 Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar SE399628B (sv)

Priority Applications (9)

Application Number	Priority Date	Filing Date	Title
SE7501605A SE399628B (sv)	1975-02-13	1975-02-13	Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar
GB3119/76A GB1532301A (en)	1975-02-13	1976-01-27	Scanning apparatus
US05/656,282 US4060816A (en)	1975-02-13	1976-02-09	Scanning apparatus, for producing masks for micro circuits
FR7603649A FR2301025A1 (fr)	1975-02-13	1976-02-10	Appareil de balayage destine en particulier a la fabrication de masques pour micro-circuits
CH167176A CH607329A5 (sv)	1975-02-13	1976-02-11
DE2605659A DE2605659C2 (de)	1975-02-13	1976-02-12	Belichtungsvorrichtung, insbesondere zur Herstellung von Masken für Mikroschaltungen
JP51014333A JPS5936820B2 (ja)	1975-02-13	1976-02-12	走査装置
NO760460A NO141028C (no)	1975-02-13	1976-02-12	Avsoekningsanordning, saerlig for anvendelse ved fremstilling av masker for elektriske mikrokretser
CA245,879A CA1060124A (en)	1975-02-13	1976-02-12	Scanning apparatus, particularly to be used in producing masks for micro circuits

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
SE7501605A SE399628B (sv)	1975-02-13	1975-02-13	Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Publications (2)

Publication Number	Publication Date
SE7501605L SE7501605L (sv)	1976-08-16
SE399628B true SE399628B (sv)	1978-02-20

Family

ID=20323677

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
SE7501605A SE399628B (sv)	1975-02-13	1975-02-13	Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Country Status (9)

Country	Link
US (1)	US4060816A (sv)
JP (1)	JPS5936820B2 (sv)
CA (1)	CA1060124A (sv)
CH (1)	CH607329A5 (sv)
DE (1)	DE2605659C2 (sv)
FR (1)	FR2301025A1 (sv)
GB (1)	GB1532301A (sv)
NO (1)	NO141028C (sv)
SE (1)	SE399628B (sv)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE449531B (sv) *	1980-12-11	1987-05-04	Gerhard Westerberg	Forfarande och anordning for kontroll av mikromasker
US4608578A (en) *	1983-11-14	1986-08-26	Matrix Instruments Inc.	Braked media transport for laser scanners
NL8401476A (nl) *	1984-05-09	1985-12-02	Philips Nv	Inrichting voor het wisselen van maskers.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH436751A (de) *	1966-05-31	1967-05-31	Contraves Ag	Koordinatograph
FR2030468A5 (sv) *	1969-01-29	1970-11-13	Thomson Brandt Csf
US3573849A (en) *	1969-02-04	1971-04-06	Bell Telephone Labor Inc	Pattern generating apparatus
US3903536A (en) *	1973-11-19	1975-09-02	Gerhard Westerberg	Device for generating masks for microcircuits
US3925785A (en) *	1974-08-09	1975-12-09	Bell Telephone Labor Inc	Pattern generating apparatus

1975
- 1975-02-13 SE SE7501605A patent/SE399628B/sv unknown
1976
- 1976-01-27 GB GB3119/76A patent/GB1532301A/en not_active Expired
- 1976-02-09 US US05/656,282 patent/US4060816A/en not_active Expired - Lifetime
- 1976-02-10 FR FR7603649A patent/FR2301025A1/fr active Granted
- 1976-02-11 CH CH167176A patent/CH607329A5/xx not_active IP Right Cessation
- 1976-02-12 JP JP51014333A patent/JPS5936820B2/ja not_active Expired
- 1976-02-12 CA CA245,879A patent/CA1060124A/en not_active Expired
- 1976-02-12 NO NO760460A patent/NO141028C/no unknown
- 1976-02-12 DE DE2605659A patent/DE2605659C2/de not_active Expired

Also Published As

Publication number	Publication date
DE2605659C2 (de)	1984-07-05
US4060816A (en)	1977-11-29
NO141028B (no)	1979-09-17
FR2301025B1 (sv)	1979-08-10
DE2605659A1 (de)	1976-08-26
CH607329A5 (sv)	1978-12-15
JPS5936820B2 (ja)	1984-09-06
SE7501605L (sv)	1976-08-16
NO141028C (no)	1979-12-27
JPS51135370A (en)	1976-11-24
NO760460L (sv)	1976-08-16
GB1532301A (en)	1978-11-15
FR2301025A1 (fr)	1976-09-10
CA1060124A (en)	1979-08-07

Publication	Publication Date	Title
DK143543C (da)	1982-01-18	Arkspoergeanordning for rotationstrykmaskine
SE7510118L (sv)	1976-03-15	Overvakningsanordning for spelautomater
SE414162B (sv)	1980-07-14	Arkavleggningsapparat for rotationstryckmaskiner
FR2295472A1 (fr)	1976-07-16	Machine automatique
SE411195B (sv)	1979-12-10	Hallarremsa for maskinapplicering pa atminstone tre rader behallare
SE7606309L (sv)	1976-12-04	Drivanordning for slattermaskiner
SE7607238L (sv)	1976-12-26	Anordning vid verktygsmaskiner
SE419045B (sv)	1981-07-13	Rengoringsanordning for maskinelement
SE410896B (sv)	1979-11-12	Anordning for overvakning av livslengden hos en maskindel
SE7605079L (sv)	1976-11-07	Anordning vid verktygsmaskiner
SE434031B (sv)	1984-07-02	Tillforseltrumma vid tryckmaskiner
DK293477A (da)	1978-02-22	Drivanordning for rotationstrykmaskiner
SE7705551L (sv)	1977-12-03	Anordning vid verktygsmaskiner
SE7612191L (sv)	1977-07-16	Drivanordning for en trumma, serskilt en lintrumma
IT1080114B (it)	1985-05-16	Macchina rotante
SE412774B (sv)	1980-03-17	Anordning vid pappersmaskiner
AT341324B (de)	1978-02-10	Saugvorrichtung fur papiermaschinen
SE7513484L (sv)	1976-06-22	Anordning vid saningsmaskiner
IT1061345B (it)	1983-02-28	Macchina motrice a turboreattore a monoasse
SE399628B (sv)	1978-02-20	Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar
SE7502134L (sv)	1976-08-27	Anordning vid plastsvetsmaskin
SE7600385L (sv)	1976-07-19	Anordning vid en tvettmaskin
FR2290996A1 (fr)	1976-06-11	Machine a polir automatique perfectionnee
SE7511015L (sv)	1976-04-20	Arkileggningsanordning for rotationstryckmaskiner
FR2309451A1 (fr)	1976-11-26	Pelotonneuse