TWI460895B - Triaxial piezoelectric sensor - Google Patents

Description

Triaxial piezoelectric sensor

The present invention relates to a piezoelectric inductor, and more particularly to a three-axis piezoelectric inductor.

The piezoelectric effect is the conversion of mechanical energy into electrical energy or the conversion of electrical energy into mechanical energy using material-type changes. Since the piezoelectric properties of barium titanate (BaTiO ₃ ) were discovered in 1942, research on various piezoelectric materials has continued to develop.

Most of the piezoelectric materials in the past are mainly inorganic ceramic materials such as barium titanate and lead zirconate titanate. In general, piezoelectric ceramic materials have the characteristics of small volume, fast response, low power consumption, etc., but there are still restrictions on their use. If the material is brittle, it can easily damage the structure of the material when it is subjected to uneven forces.

However, inorganic piezoelectric materials are relatively hard and brittle, are relatively heavy, and are difficult to process into thinned or complex-shaped films, which are expensive.

The main object of the present invention is to provide a three-axis piezoelectric sensor having high sensitivity.

Another object of the present invention is to provide a thinned three-axis piezoelectric inductor.

To achieve the above object, the present invention provides a triaxial piezoelectric inductor comprising a polyvinylidene fluoride (PVDF) layer, a first wiring layer and a second wiring layer. The PVDF layer has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface. Each first electrode and each first The two electrodes correspond to each other to form a polarization direction of the X-Y-Z triaxial direction. The first circuit layer has a plurality of first electrical connection portions on a lower surface of the first circuit layer, and a plurality of first signal lines are located on an upper surface of the first circuit layer, and each of the first electrical connection portions and each of the first electrodes are in contact with each other Corresponding. The second circuit layer has a plurality of second electrical connecting portions on an upper surface of the second circuit layer, and a plurality of second signal lines are located on a lower surface of the second circuit layer, and each of the second electrical connecting portions and each of the second electrodes Corresponding to each other. The PVDF layer is sandwiched between the first circuit layer and the second circuit layer. When the PVDF layer is deformed by an external force, the first signal line and the second signal line transmit the power signal generated by the PVDF layer due to the deformation.

The first electrode and the second electrode are deposited on the PVDF layer by physical vapor deposition (PVD), and each of the first electrodes includes a circular portion and a plurality of curved segments, and the curved segment surrounds the circular portion to generate The direction of polarization of the XY axis. Each of the second electrodes includes a corresponding circular portion corresponding to each of the circular portions to generate a polarization direction of the Z-axis. In another embodiment, the first electrode includes a polygonal portion and a plurality of line segments, each of the line segments being located outside each side of the polygonal portion to generate a polarization direction of the XY axis, and each of the second electrode positions includes A corresponding polygonal portion corresponding to each of the polygonal portions.

Preferably, the triaxial piezoelectric inductor further comprises two insulating layers respectively located above the first circuit layer and below the second circuit layer. The triaxial piezoelectric inductor further includes two rubber layers respectively above and below the insulating layer, and each rubber layer includes a plurality of protrusions, and when the PVDF layer is subjected to an external force, the plurality of protrusions can strengthen the external force to make the PVDF layer sensitive Higher degrees.

Another embodiment of the present invention is a three-axis piezoelectric inductor including a first PVDF layer, a first circuit layer, a second circuit layer, and a second PVDF. Layer and a third circuit layer. The first PVDF layer has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface, and each of the first electrodes and each of the second electrodes correspond to each other to form a polarization direction of the Z-axis. The second PVDF layer has a plurality of third electrodes on the upper surface to form a polarization direction in the X-Y axis. a first circuit layer having a plurality of first electrical connection portions on a lower surface of the first circuit layer and a plurality of first signal lines on an upper surface of the first circuit layer, and each of the first electrical connection portions and each of the first electrodes Corresponding to each other. a second circuit layer having a plurality of second electrical connection portions on an upper surface of the second circuit layer and a plurality of second signal lines on a lower surface of the second circuit layer, and each of the second electrical connection portions and each of the second electrodes are in contact with each other Corresponding. The third circuit layer has a plurality of third electrical connection portions on the lower surface of the third circuit layer and a plurality of third signal lines on the upper surface of the second circuit layer, and each of the third electrical connection portions and each of the third electrodes are in phase with each other correspond. The first PVDF layer is sandwiched between the first wiring layer and the second wiring layer, and the third wiring layer is positioned above the second PVDF layer. When the first PVDF layer and the second PVDF layer are deformed by an external force, the plurality of first signal lines, the plurality of second signal lines, and the plurality of third signal lines respectively transmit the first PVDF layer and the second PVDF layer due to deformation Power signal. In this embodiment, the first electrode, the second electrode, and the third electrode are deposited by physical vapor deposition (PVD). The first electrode and the second electrode are circular or square (or polygonal) to produce a polarization direction in the Z-axis. The third electrode includes a circular portion and a plurality of curved segments, the plurality of curved segments surrounding the circular portion to generate a polarization direction of the XY axis; or the third electrode includes a square (or polygon) and four segments ( Or a plurality of line segments), the four line segments are respectively located outside the square to produce a polarization direction of the XY axis.

Another embodiment of the present invention is a three-axis piezoelectric inductor including a first a PVDF layer, a second PVDF layer, a third PVDF layer, a first circuit layer, a second circuit layer, a third circuit layer and a fifth circuit layer. The first PVDF layer has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface, and each of the first electrodes and each of the second electrodes correspond to each other to form a polarization direction of the Z-axis. The second PVDF layer has a plurality of third electrodes on the upper surface, and the third electrode has a shape of a fork to form a polarization direction in the X-axis direction. The third PVDF layer has a plurality of fourth electrodes on the upper surface, and the shape of the fourth electrode refers to a fork shape to form a polarization direction in the Y-axis direction. The first circuit layer has a plurality of first electrical connection portions on a lower surface of the first circuit layer, and a plurality of first signal lines are located on an upper surface of the first circuit layer, and each of the first electrical connection portions and each of the first electrodes are opposite to each other correspond. The second circuit layer has a plurality of second electrical connection portions on the upper surface of the second circuit layer and a plurality of second signal lines on the lower surface of the second circuit layer, and each of the second electrical connection portions and each of the second electrodes are in contact with each other Corresponding. The third circuit layer has a plurality of third electrical connection portions on a lower surface of the third circuit layer and a plurality of third signal lines on an upper surface of the third circuit layer. The fifth circuit layer has a plurality of fifth electrical connection portions on a lower surface of the fifth circuit layer and a plurality of fifth signal lines on an upper surface of the fifth circuit layer. The first PVDF layer is sandwiched between the first circuit layer and the second circuit layer, the third circuit layer is above the second PVDF layer, and the fifth circuit layer is above the third PVDF layer, when the first PVDF layer, When the second PVDF layer and the third PVDF layer are deformed by an external force, the first signal line, the second signal line, the third signal line, and the fifth signal line respectively transmit the first PVDF layer, the second PVDF layer, and the third PVDF layer The power signal generated by the deformation. In this embodiment, each of the third electrical connection portions and each of the fifth electrical connection portions are elongated and correspond to each other.

In a different embodiment, a triaxial piezoelectric inductor includes a first PVDF layer, a second PVDF layer, a third PVDF layer, a first circuit layer, a second circuit layer, and a third line. a layer, a fourth circuit layer, a fifth circuit layer and a sixth circuit layer. The first PVDF layer has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface, and each of the first electrodes and each of the second electrodes correspond to each other to form a polarization direction of the Z-axis. The second PVDF layer has a plurality of third electrodes on the upper surface, and the third electrode has a shape of a fork to form a polarization direction in the X-axis direction. The third PVDF layer has a plurality of fourth electrodes on the upper surface, and the shape of the fourth electrode refers to a fork shape to form a polarization direction in the Y-axis direction. The first circuit layer has a plurality of first electrical connection portions on a lower surface of the first circuit layer, and a plurality of first signal lines are located on an upper surface of the first circuit layer, and each of the first electrical connection portions and each of the first electrodes are opposite to each other correspond. The second circuit layer has a plurality of second electrical connection portions on the upper surface of the second circuit layer and a plurality of second signal lines on the lower surface of the second circuit layer, and each of the second electrical connection portions and each of the second electrodes are in contact with each other Corresponding. The third circuit layer has a plurality of third electrical connection portions on a lower surface of the third circuit layer and a plurality of third signal lines on an upper surface of the third circuit layer. The fourth circuit layer has a plurality of fourth electrical connection portions on the upper surface of the fourth circuit layer and a plurality of fourth signal lines on the lower surface of the fourth circuit layer. In this embodiment, each of the third electrical connection portions and each of the fourth electrical connection portions are square or circular and correspond to each other. The fifth circuit layer has a plurality of fifth electrical connection portions on a lower surface of the fifth circuit layer and a plurality of fifth signal lines on an upper surface of the fifth circuit layer. The sixth circuit layer has a plurality of sixth electrical connection portions on the upper surface of the sixth circuit layer and a plurality of sixth signal lines on the lower surface of the sixth circuit layer. In this embodiment, each of the fifth electrical connection portions and each of the sixth electrical connection portions are square or circular, and are opposite to each other. should. The first PVDF layer is sandwiched between the first circuit layer and the second circuit layer, the second PVDF layer is sandwiched between the third circuit layer and the fourth circuit layer, and the third PVDF layer is sandwiched between the fifth circuit layer Between the sixth circuit layer. When the first PVDF layer, the second PVDF layer and the third PVDF layer are deformed by an external force, the first signal line, the second signal line, the third signal line, the fourth signal line, the fifth signal line, and the sixth signal line The power signals generated by the deformation of the first PVDF layer, the second PVDF layer and the third PVDF layer are respectively transmitted.

In order to enable the reviewing committee to better understand the technical contents of the present invention, specific embodiments are described below.

Please refer to Figure 1 to Figure 3 first. 1 is a first embodiment of a three-axis piezoelectric inductor 1. The main sensing portion of the triaxial piezoelectric sensor 1 is that the inductor body 10 generates electric power due to deformation. Referring to FIG. 3, the inductor body 10 includes a polyvinylidene fluoride (PVDF) layer 101, a first wiring layer 102, and a second wiring layer 103.

Please refer to FIG. 4A to FIG. 4D simultaneously, which detail the PVDF layer 101. 4A shows the upper surface of the PVDF layer 101, FIG. 4B shows the side of the PVDF layer 101, FIG. 4C shows the lower surface of the PVDF layer 101, and FIG. 4D shows the polarization direction of the broken line portion of FIG. 4B. As shown in FIG. 4A, the plurality of first electrodes 1011 are located on the upper surface of the PVDF layer 101, and FIG. 4C shows that the plurality of second electrodes 1012 are located on the lower surface of the PVDF layer 101. The positions of the respective first electrodes 1011 and the respective second electrodes 1012 correspond to each other to form a polarization direction of the X-Y-Z triaxial direction (as shown in FIG. 4D). In the first embodiment, the first electrode 1011 and the second electrode 1012 are deposited on the PVDF layer 101 by physical vapor deposition (PVD), and each of the first electrodes 1011 includes a circular portion and a plurality of curved segments. An arcuate segment surrounds the circular portion to create a polarization direction in the XY axial direction. Each of the second electrodes 1012 includes a corresponding circular portion corresponding to each of the circular portions to generate a polarization direction of the Z-axis. However, in a variant embodiment of the first embodiment, the first electrode may be changed to a square or the like (not shown) and the plurality of line segments, for example, each line segment is located outside each side of the square (similar to FIG. 4A). Position) to produce a polarization direction of the XY axis, and each of the second electrode positions is square, which corresponds to a square (or the like) of the first electrode, respectively, to generate a polarization direction of the Z axis. . In the first embodiment, the PVDF layer 101 is first polarized in the X-Y direction and then polarized in the Z direction. Since the polarization mode of PVDF using voltage pressurization is a known technique, it will not be described again. In the first embodiment, the PVDF layer 101 is designed to have piezoelectric constants d33 and d31 at the same time.

5A to 5C show the upper surface, the side surface, and the lower surface of the first wiring layer 102, respectively. In the first embodiment, the first circuit layer 102 has a plurality of first electrical connection portions 1021 located on a lower surface of the first circuit layer 102 and a plurality of first signal lines 1022 located on an upper surface of the first circuit layer 102. Each of the first electrical connection portions 1021 and each of the first electrodes 1011 correspond to each other. In this embodiment, the first electrical connecting portion 1021 is also composed of a circular portion and a plurality of curved segments, and the curved portion surrounds the circular portion. In a variant embodiment, the circular portion and the curved segment may be varied into square and line segments or the like (not shown).

6A to 6C show the upper surface, the side surface, and the lower surface of the second wiring layer 103, respectively. The second circuit layer 103 has a plurality of second electrical connections 1031 The upper surface of the second circuit layer 103 and the plurality of second signal lines 1032 are located on the lower surface of the second circuit layer 103. Each of the second electrical connection portions 1031 and each of the second electrodes 1012 correspond to each other. In the embodiment, the second electrical connection portion 1031 is also circular. However, in a variant embodiment, the circle can be changed to a square or the like (not shown).

Returning to FIG. 3, the PVDF layer 101 is sandwiched between the first wiring layer 102 and the second wiring layer 103. When the inductor body 10 is deformed by an external force, that is, the PVDF layer 101 is deformed by an external force, the first signal line 1022 and the second signal line 1032 can transmit the power signal generated by the PVDF layer 101 due to the deformation. The positive piezoelectric effect on PVDF is a known technique and therefore will not be described here.

Referring back to FIG. 2, in the preferred embodiment of the first embodiment, the triaxial piezoelectric inductor 1 further includes two insulating layers 11 respectively located above the first circuit layer 102 and below the second circuit layer 103, and further includes The two rubber layers 12 are respectively positioned above and below the insulating layer 11. Each rubber layer 12 includes a plurality of protrusions 120. When the triaxial piezoelectric sensor 1 is subjected to an external force, the protrusion 120 can strengthen the external force to make the PVDF layer 101 more sensitive.

Fig. 7 is a view showing a second embodiment of the triaxial piezoelectric inductor of the present invention and a modified embodiment thereof. As shown in Fig. 7, the triaxial piezoelectric inductor 7 includes a first inductor body 70 and a second inductor body 70'. Referring first to FIG. 8, the first inductor body 70 is composed of a first PVDF layer 701, a first wiring layer 702, and a second wiring layer 703. The first PVDF layer 701 is sandwiched between the first wiring layer 702 and the second wiring layer 703. 9A and 9B show the upper surface and the side surface of the first PVDF layer 701, respectively. The first PVDF layer 701 has a plurality of first electrodes 7011 on the upper surface and a plurality of second electrodes 7012 on the lower surface. Fig. 9C shows the polarization direction of the broken line portion of Fig. 9B. Each of the first electrodes 7011 and each of the second electrodes 7012 correspond to each other to form a polarization direction in the Z-axis direction. In the second embodiment, the first PVDF layer 701 is designed to have a piezoelectric constant d33.

In the second embodiment, the first wiring layer 702 is substantially the same as the second wiring layer 703 except that the upper and lower surfaces are opposite, so that the process can be simplified. 10A-10C show the upper surface, the side surface, and the lower surface of the first wiring layer, respectively. The first circuit layer 702 has a plurality of first electrical connections 7021 located on a lower surface of the first circuit layer 702 and a plurality of first signal lines 7022 located on an upper surface of the first circuit layer 702.

Since the first wiring layer 702 and the second wiring layer 703 are substantially identical, only the upper and lower surfaces are opposite, the second wiring layer 703 can also be represented by FIGS. 10A-10C. To simplify the description, the lower surface, the side surface, and the upper surface of the second wiring layer 703 are respectively shown in FIGS. 10A-10C. The second circuit layer 703 has a plurality of second electrical connection portions 7031 on the upper surface of the second circuit layer 703 and a plurality of second signal lines 7032 on the lower surface of the second circuit layer 703.

In the second embodiment, each of the first electrical connection portions 7021 and the respective first electrodes 7011 correspond to each other; each of the second electrical connection portions 7031 and each of the second electrodes 7012 correspond to each other. In the present embodiment, the first electrode 7011 and the second electrode 7012 are deposited in a circular shape by physical vapor deposition (PVD) to generate a polarization direction of the Z-axis. However, in a variant embodiment, the first electrode and the second electrode may also be square or polygonal or similar (not shown).

Referring to Fig. 11, the second inductor body 70' is composed of a second PVDF layer 701' and a third wiring layer 702'. The third circuit layer 702' is located at the Above the two PVDF layers 701'. 12A-12B show the upper surface and side surfaces of the second PVDF layer of Fig. 11, respectively. The second PVDF layer 701' has a plurality of third electrodes 7011' on the upper surface to form a polarization direction in the X-Y axis (as shown in Fig. 12C). In the present embodiment, the third electrode 7011' is also deposited by physical vapor deposition (PVD). The third electrode 7011' includes a circular portion and a plurality of curved segments, and the plurality of curved segments surround the circular portion to generate a polarization direction of the X-Y axis. Or in a variant embodiment, the figure does not show that the third electrode may comprise a square (or polygon) and four line segments (or a plurality of line segments), each outside the square to produce a polarization direction in the X-Y axis. In the second embodiment, the second PVDF layer 701' is designed to have a piezoelectric constant d31.

Since the third electrode 7011' has the same shape as the first electrode 1011 of the first embodiment, the third wiring layer 702' of the second embodiment is substantially the same as the first wiring layer 102 of the first embodiment, and thus is not present. This repeats the illustration. Similarly, the third circuit layer has a plurality of third electrical connection portions on a lower surface of the third circuit layer, and a plurality of third signal lines are located on an upper surface of the second circuit layer, and each of the third electrical connection portions and each of the third The three electrodes correspond to each other.

Returning to FIG. 7, in an preferred case, an insulating layer 71 is located between the first inductor body 70 and the second inductor body 70', and another insulating layer 71 is located under the first inductor body 70, and then An insulating layer 71 is located above the second inductor body 70'. Two rubber layers 72 are respectively located on the outermost side, sandwiching all the components therein. Similarly, each rubber layer 72 includes a plurality of protrusions 120. When the triaxial piezoelectric inductor 7 is subjected to an external force, the protrusion 720 can strengthen the external force, making the PVDF layers 701, 701' more sensitive. When the first inductor body 70 and the second inductor body 70' are subjected to an external force, that is, the first PVDF layer 701 and the second PVDF layer 701' are deformed by an external force, the first signal The line 7022, the second signal line 7023, and the third signal line 7022' respectively transmit power signals generated by the deformation of the first PVDF layer 701 and the second PVDF layer 701'.

Fig. 13 is a view showing a third embodiment of the triaxial piezoelectric inductor of the present invention and a modified embodiment thereof. As shown in FIG. 13, the triaxial piezoelectric sensor 13 includes a first inductor body 130, a second inductor body 13a, and a third inductor body 13b. In the present embodiment, the first inductor body 130 is substantially the same as the first inductor body 70 of the second embodiment, and thus the structure thereof will not be repeatedly described. Similar to the first inductor body 70 of the second embodiment, the first PVDF layer of the first inductor body 130 has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface, each of the first electrodes and each of the first electrodes The two electrodes correspond to each other to form a polarization direction of the Z-axis. In the third embodiment, the first PVDF layer is designed to have a piezoelectric constant d33.

The second inductor body 13a is substantially identical to the third inductor body 13b, so only the structure of the second inductor body 13a will be described below.

Referring to FIG. 14, the second inductor body 13a of the third embodiment is composed of a second PVDF layer 131a, a third wiring layer 132a, and a fourth wiring layer 133a. The second PVDF layer 131a is sandwiched between the third wiring layer 132a and the fourth wiring layer 133a. 15A and 15B show the upper surface and the side surface of the second PVDF layer 131a, respectively. The second PVDF layer 131a has a plurality of third electrodes 1311a on the upper surface. The shape of the third electrode 1311a is a fork type to form a polarization direction in the X-axis direction. As shown in FIG. 13, the arrangement of the third PVDF layer (refer to the third inductor body 13b) is rotated by 90 degrees according to the direction of the second PVDF layer (refer to the second inductor body 13a) to form a pole in the Y-axis. Direction. In a third embodiment, the second PVDF layer and the third PVDF layer It is designed to have a piezoelectric constant d31.

In the third embodiment, the third wiring layer 132a and the fourth wiring layer 133a of the second inductor body 13a are substantially identical except that the upper and lower surfaces are opposite. 16A-16C show the upper surface, the side surface, and the lower surface of the third wiring layer, respectively. The third circuit layer 132a has a plurality of third electrical connection portions 1321a on the lower surface of the third circuit layer 1321a and a plurality of third signal lines 1322a on the upper surface of the third circuit layer 1321a.

Since the third wiring layer 132a of the third embodiment is substantially identical to the fourth wiring layer 133a, only the upper and lower surfaces are opposite, the fourth wiring layer 133a can also be represented by FIGS. 16A-16C. To simplify the description, the lower surface, the side surface, and the upper surface of the fourth wiring layer 133a are respectively shown in FIGS. 16A-16C. The fourth wiring layer 133a has a plurality of fourth electrical connection portions 1331a on the upper surface of the fourth wiring layer 133a and a plurality of fourth signal lines 1332a on the lower surface of the fourth wiring layer 133a. In the embodiment, the fourth electrical connection portion 1331a is designed to be square. However, it may also be other such as a circle or the like.

Referring back to FIG. 13, similar to the first embodiment and the second embodiment, in the third embodiment, the triaxial piezoelectric inductor 13 may further include a plurality of insulating layers 131 respectively located between different elements, and two The rubber layer 132 is located at the uppermost layer and the lowermost layer, respectively, to enhance external force and sensitivity.

Figure 17 is a view showing a fourth embodiment of the triaxial piezoelectric inductor of the present invention and a modified embodiment thereof. As shown in FIG. 17, the triaxial piezoelectric inductor 17 includes a first inductor body 170, a second inductor body 17a, and a third inductor body 17b. In the present embodiment, the first inductor body 170 is also substantially the same as the first inductor body 70 of the second embodiment, and thus the structure thereof will not be repeatedly described. Similar to the first inductor body 70 of the second embodiment, the first PVDF layer of the first inductor body 170 has a plurality of first electrodes on the upper surface and a plurality of second electrodes on the lower surface, each of the first electrodes and each of the first electrodes The two electrodes correspond to each other to form a polarization direction of the Z-axis. In the fourth embodiment, the first PVDF layer is designed to have a piezoelectric constant d33.

The second inductor body 17a of the fourth embodiment is substantially identical to the third inductor body 17b, so that only the structure of the second inductor body 17a will be described below.

Referring to FIG. 18, the second inductor body 17a of the third embodiment is composed of a second PVDF layer 171a and a third wiring layer 172a. The third wiring layer 172a is located above the second PVDF layer 171a. The second PVDF layer 171a is substantially the same as the PVDF layer 131a of FIG. The shape of the third electrode 1711a of the second PVDF layer 171a is a fork type to form a polarization direction in the X-axis direction.

As shown in FIG. 17, the arrangement of the third PVDF layer (refer to the third inductor body 17b) is rotated by 90 degrees in accordance with the direction of the second PVDF layer (refer to the second inductor body 17a) to form a pole in the Y-axis. Direction. In the fourth embodiment, the second PVDF layer is designed to have a piezoelectric constant d33.

19A-19C show the upper surface, the side surface, and the lower surface of the third wiring layer of the fourth embodiment, respectively. The third circuit layer 172a has a plurality of third electrical connection portions 1721a on the lower surface of the third circuit layer 1321a and a plurality of third signal lines 1722a on the upper surface of the third circuit layer 172a. In the present embodiment, the third electrical connection portion 1721a is designed to be elongated. However, it may also be other such as an ellipse or the like.

Returning to FIG. 17, similar to the first embodiment and the second embodiment, in the third embodiment, the triaxial piezoelectric inductor 17 may further include a plurality of insulating layers 171. They are located between different components, and the two rubber layers 172 are respectively located at the uppermost layer and the lowermost layer to enhance external force and sensitivity.

The circuit layer of the present invention may be a metal plated with a Polymer as an electrical connection and a signal line. Since this technology is a known technique, it will not be described again. Since each of the PVDF layers of the present invention is approximately 10 μm, the height of the triaxial piezoelectric inductor can be greatly reduced, thereby achieving miniaturization. Furthermore, the insulating layer of the present invention not only isolates the components, but also protects the circuitry in a further step. The rubber layer of the present invention can further increase the sensitivity.

To sum up, the present invention, regardless of its purpose, means and efficacy, shows its distinctive features of the prior art. You are requested to review the examination and express the patent as soon as possible. It should be noted that the various embodiments described above are merely illustrative for ease of explanation, and the scope of the invention is intended to be limited by the scope of the claims.

1, 7‧‧‧Three-axis piezoelectric sensor

10, 70, 70', 130, 13a, 13b‧‧‧ sensor body

11, 71, 131, 171‧‧ ‧ insulation

12, 72, 132, 172‧‧ ‧ rubber layer

120, 720‧‧ ‧ protruding parts

101, 701, 701'‧‧‧PVDF layer

102, 103, 702, 703, 702', 132a, 133a, 172a‧‧‧ circuit layer

1011, 1012, 7011, 7012, 7011', 1311a, 1711a‧‧‧ electrodes

1021, 1031, 7021, 7031, 1321a, 1331a, 1721a‧‧‧ Electrical connection

1022, 1032, 7022, 7032, 7022', 1322a, 1332a, 1722a‧‧‧ signal lines

1 is a first embodiment of a three-axis piezoelectric inductor of the present invention.

Fig. 2 is a schematic view showing the development according to Fig. 1.

3 is a schematic exploded view of the inductor body of FIG. 2.

4A-4C show the upper surface, side and lower surfaces of the PVDF layer of Fig. 2, respectively.

Fig. 4D is a polarization direction of a broken line portion of Fig. 4B.

5A-5C respectively show the upper surface, the side surface, and the lower surface of the first circuit layer of FIG. 2.

6A-6C show the upper surface, the side surface, and the lower surface of the second wiring layer of FIG. 2, respectively.

Figure 7 is a second embodiment of a three-axis piezoelectric inductor of the present invention.

FIG. 8 is a developed perspective view of the first inductor body of FIG. 7. FIG.

9A-9B show the upper surface and sides of the first PVDF layer of Fig. 8, respectively.

Fig. 9C shows the polarization direction of the broken line portion of Fig. 9B.

10A-10C show the upper surface, side and lower surfaces of the first circuit layer of Fig. 8, respectively.

11 is a developed perspective view of the second inductor body of FIG. 7.

12A-12B show the upper surface and side surfaces of the second PVDF layer of Fig. 11, respectively.

Fig. 12C shows the polarization direction of the broken line portion of Fig. 12B.

Figure 13 is a third embodiment of the triaxial piezoelectric inductor of the present invention.

14 is a developed perspective view of the second inductor body of FIG.

15A and 15B show the upper surface and the side surface of the second PVDF layer of the third embodiment, respectively.

16A-16C show the upper surface, the side surface, and the lower surface of the third wiring layer of the third embodiment, respectively.

Figure 17 is a view showing a fourth embodiment of the triaxial piezoelectric inductor of the present invention.

18 is a developed perspective view of the second inductor body of FIG. 17.

19A-19C show the upper surface, the side surface, and the lower surface of the third wiring layer of the fourth embodiment, respectively.

10‧‧‧ sensor body

101‧‧‧PVDF layer

102, 103‧‧‧ circuit layer

Claims (10)

A triaxial piezoelectric inductor comprising: a polyvinylidene fluoride (PVDF) layer having a plurality of first electrodes on an upper surface and a plurality of second electrodes on a lower surface, each of the first electrodes and each of the second electrodes Corresponding to each other to form a polarization direction of the XYZ triaxial direction; a first circuit layer having a plurality of first electrical connection portions on a lower surface of the first circuit layer and a plurality of first signal lines on the first line An upper surface of the layer, wherein each of the first electrical connection portions and each of the first electrodes correspond to each other; and a second circuit layer having a plurality of second electrical connection portions on an upper surface of the second circuit layer and a plurality of The second signal line is located on the lower surface of the second circuit layer, and each of the second electrical connection portions and the second electrode correspond to each other; the PVDF layer is sandwiched between the first circuit layer and the second circuit layer, When the PVDF layer is deformed by an external force, the plurality of first signal lines and the plurality of second signal lines transmit the power signal generated by the PVDF layer due to deformation. The triaxial piezoelectric inductor according to claim 1, wherein the plurality of first electrodes and the plurality of second electrodes are deposited on the PVDF layer by physical vapor deposition (PVD), and each of the first The electrode includes a circular portion and a plurality of curved segments, the plurality of curved segments surrounding the circular portion to generate a polarization direction of the XY axis; and each of the second electrodes includes a corresponding circular portion, which respectively correspond to Each circular portion is formed to generate a polarization direction in the Z-axis direction. The triaxial piezoelectric inductor according to claim 1, wherein the plurality of first electrodes are deposited on the PVDF layer by physical vapor deposition (PVD), and each of the first electrodes includes a polygonal portion and Multiple line segments, each line segment Outside the sides of the polygonal portion, a polarization direction of the X-Y axis is generated, and each of the second electrode sites includes a corresponding polygonal portion corresponding to each of the polygonal portions. The triaxial piezoelectric inductor according to claim 1, further comprising a second rubber layer respectively located above the first circuit layer and below the second circuit layer, and each rubber layer comprises a plurality of protrusions, when When the PVDF layer is subjected to an external force, the plurality of protrusions can strengthen the external force. A triaxial piezoelectric inductor includes: a first PVDF layer having a plurality of first electrodes on an upper surface and a plurality of second electrodes on a lower surface, each of the first electrodes and each of the second electrodes corresponding to each other to form a polarization direction of the Z-axis; a first circuit layer having a plurality of first electrical connection portions on a lower surface of the first circuit layer; and a plurality of first signal lines on an upper surface of the first circuit layer, and each The first electrical connection portion and the first electrodes correspond to each other; a second circuit layer having a plurality of second electrical connection portions on the upper surface of the second circuit layer and a plurality of second signal lines on the second line a lower surface of the layer, and each of the second electrical connection portions and each of the second electrodes correspond to each other; a second PVDF layer having a plurality of third electrodes on the upper surface to form a polarization direction of the XY axis; and a third circuit layer having a plurality of third electrical connection portions on a lower surface of the third circuit layer and a plurality of third signal lines on an upper surface of the third circuit layer, and each of the third electrical connection portions and each of the third Three electrodes Wherein the first PVDF layer is sandwiched between the first circuit layer and the second circuit layer, and the third circuit layer is above the second PVDF layer, when the first PVDF layer and the second PVDF When the layer is deformed by an external force, the plural first The signal line, the plurality of second signal lines, and the plurality of third signal lines respectively transmit power signals generated by the deformation of the first PVDF layer and the second PVDF layer. The triaxial piezoelectric inductor according to claim 5, wherein the plurality of first electrodes, the plurality of second electrodes, and the plurality of third electrodes are respectively deposited by physical vapor deposition (PVD). a first PVDF layer and the second PVDF layer, and each of the first electrodes includes a first circular portion, and each of the second electrodes includes a corresponding circular portion corresponding to each of the first circular portions to generate a Z-axis The direction of polarization of the direction, and each of the third electrodes includes a second circular portion and a plurality of curved segments surrounding the second circular portion to produce a polarization direction in the XY axis. The triaxial piezoelectric inductor according to claim 5, wherein the plurality of first electrodes, the plurality of second electrodes, and the plurality of third electrodes are respectively deposited by physical vapor deposition (PVD). a first PVDF layer and the second PVDF layer, and each of the first electrodes includes a first polygonal portion, and each of the second electrodes includes a corresponding polygonal portion corresponding to each of the first polygonal portions to generate a Z-axis The polarization direction of the direction, and each of the third electrodes includes a second polygonal portion and a plurality of line segments, each of the line segments being located outside each side of the second polygonal portion to generate a polarization direction in the XY axis. A triaxial piezoelectric inductor includes: a first PVDF layer having a plurality of first electrodes on an upper surface and a plurality of second electrodes on a lower surface, each of the first electrodes and each of the second electrodes corresponding to each other to form a polarization direction of the Z-axis; a first circuit layer having a plurality of first electrical connection portions on a lower surface of the first circuit layer; and a plurality of first signal lines located on the first circuit layer The upper surface of the first electrical connection portion and each of the first electrodes correspond to each other; a second circuit layer having a plurality of second electrical connection portions on the upper surface of the second circuit layer and the plurality of second signals The circuit is located on the lower surface of the second circuit layer, and each of the second electrical connection portions and the second electrode correspond to each other; a second PVDF layer having a plurality of third electrodes on the upper surface, the plurality of third electrodes The shape is a fork type to form a polarization direction of the X-axis; a third circuit layer having a plurality of third electrical connection portions on a lower surface of the third circuit layer and a plurality of third signal lines at the third An upper surface of the circuit layer; a third PVDF layer having a plurality of fourth electrodes on the upper surface, the shape of the plurality of fourth electrodes being a fork type to form a polarization direction of the Y axis; and a fifth circuit layer The plurality of fifth electrical connection portions are located on the lower surface of the fifth circuit layer and the plurality of fifth signal lines are located on the upper surface of the fifth circuit layer; wherein the first PVDF layer is sandwiched between the first circuit layer and the Between the second circuit layers, the first a circuit layer is located above the second PVDF layer, and the fifth circuit layer is located above the third PVDF layer, when the first PVDF layer, the second PVDF layer and the third PVDF layer are deformed by an external force, The plurality of first signal lines, the plurality of second signal lines, the plurality of third signal lines, and the plurality of fifth signal lines respectively transmit the first PVDF layer, the second PVDF layer and the third PVDF layer due to deformation Power signal. The three-axis piezoelectric inductor according to claim 8, wherein each of the third electrical connection portions and each of the fifth electrical connection portions are elongated and correspond to each other. The three-axis piezoelectric inductor of claim 8, further comprising: a fourth circuit layer having a plurality of fourth electrical connection portions on an upper surface of the fourth circuit layer and a plurality of fourth signal lines The third electrical connection portion and each of the fourth electrical connection portions are square or circular and correspond to each other; and a sixth circuit layer having a plurality of sixth electrical properties. The connecting portion is located on the upper surface of the sixth circuit layer, and the plurality of sixth signal lines are located on the lower surface of the sixth circuit layer, and each of the fifth electrical connecting portions and each of the sixth electrical connecting portions is square or circular, and Corresponding to each other; wherein the second PVDF layer is sandwiched between the third circuit layer and the fourth circuit layer, and the third PVDF layer is sandwiched between the fifth circuit layer and the sixth circuit layer When the first PVDF layer, the second PVDF layer and the third PVDF layer are deformed by an external force, the plurality of first signal lines, the plurality of second signal lines, the plurality of third signal lines, and the fourth number Signal line, the fifth signal line and the sixth number The first transmission line respectively PVDF layer, the power of the second signal and the third layer PVDF PVDF layer generated due to deformation.