TWI649559B - Ultrasound imaging device - Google Patents

Abstract

In order for the ultrasonic imaging device to detect the interference between the probe and the workpiece, the probe and the workpiece are prevented from being damaged.

The ultrasonic imaging device (1) is provided with a probe (4) for imaging a planar workpiece (8) using ultrasonic waves, and a three-axis scanner (4) for scanning the surface of the workpiece (8) by the probe (4) ( 2), and a sensor (3) for detecting interference between the workpiece (8) and the probe (4).

Description

Ultrasound imaging device

The invention relates to an ultrasonic imaging device with a probe interference detection function.

Conventionally, an ultrasonic imaging device (SAT: Scanning Acoustic Tomograph) is a surface-shaped workpiece in which an object such as a semiconductor or integrated circuit is installed in water, and an ultrasonic transmitting and receiving sensor called a probe is provided along the workpiece. The surface was scanned and measured using ultrasound. This makes it possible to investigate whether there are defects (peeling, holes) in the workpiece.

The distance between the workpiece and the probe will change depending on the conditions, for example, it may be close to the millimeter level, and the probe and the workpiece may interfere. When such interference occurs, the workpiece and the probe may be damaged and cause problems.

The invention described in Patent Document 1 detects a collision of the probe and stops scanning. In summary Patent Document 1 describes one kind of ultrasonic measuring apparatus having a probe ultrasonic measurement system 1, the probe 1 of the holder 2, so that holder 3 toward the direction of movement of the scanner 3 and the _like, The ultrasonic measurement is performed by moving the probe 1 with the scanners 3 and 4 and includes: two strain sensors 31 and 32 for sensing the strain of both sides of the telescoping and the states corresponding to the sensors 31 and 32 And so on for stopping the scanner 3 _, The detection circuit 260 of the movement detection signal A; the sensors 31, 32 use the outer surface of the middle part of the holder 2, that is, the two surfaces that are approximately orthogonal to each other as the mounting surfaces, and are installed in the aforementioned installation Both sides of the surface are installed so as to be able to sense strain in a substantially parallel direction.

[Patent Document 1] Japanese Unexamined Patent Publication No. 7-103951

The invention described in Patent Document 1 uses a strain sensor to detect the strain in the lateral direction of the ultrasonic probe, thereby detecting interference between the workpiece and the probe. However, in recent years, because the scanning speed of the ultrasonic probe is extremely fast, the lateral stress caused by water must be considered. That is, when the ultrasonic probe scans, the stress caused by the water causes a strain in the lateral direction, which may be misjudged as a collision between the ultrasonic probe and the workpiece. Further, in the invention described in Patent Document 1, the ultrasonic probe is fixed to a Z-axis scanner. Therefore, a large stress will be applied when colliding with the workpiece, and the workpiece and the probe may be damaged.

Therefore, an object of the present invention is to allow an ultrasonic imaging device to detect interference between a probe and a workpiece and prevent damage to the probe and the workpiece.

In order to solve the aforementioned problems, the ultrasonic imaging apparatus of the first invention includes a scanning means for imaging a planar workpiece using ultrasonic waves, a scanning means for scanning the surface of the workpiece in a two-dimensional manner, and An interference detection means for detecting the interference between the workpiece and the probe by moving the probe upward, a flange portion provided on the upper portion of the probe to be integrated with the probe, and a means for holding the probe Holder. In addition, the interference detection means is embedded in the holder so that a part of the holder can protrude from the upper surface of the holder. When no interference occurs between the probe and the workpiece, the protruding portion is subjected to the flange portion. When the probe and the workpiece interfere with each other, as the probe moves upward, the flange portion also moves upward, thereby allowing the buried in the holder to move. The protruding portion is restored, and the interference between the workpiece and the probe is detected.

A second aspect of the ultrasonic imaging device includes a probe for imaging a planar workpiece using ultrasonic waves through a liquid, a scanning means for scanning the surface of the workpiece, and a non-contact scanning method. An interference detection method for detecting the proximity between the workpiece and the probe in a manner.

Other means will be described in the embodiment.

According to the invention, the ultrasonic imaging device can detect the interference between the probe and the workpiece and prevent the probe and the workpiece from being damaged.

1‧‧‧ Ultrasound Imaging Device

2‧‧‧ three-axis scanner (scanning means)

21‧‧‧X-axis actuator (scanning means)

22‧‧‧Y-axis actuator (scanning means)

23‧‧‧Z-axis actuator

24‧‧‧ holder

241‧‧‧ knob

243‧‧‧Hole

244‧‧‧Slit

25‧‧‧ base

3, 3A, 3L, 3R‧‧‧ sensors (interference detection means)

4, 4A, 4B‧‧‧ Probe

41‧‧‧Front end

42‧‧‧ flange

56‧‧‧Control

7‧‧‧ sensor mechanism

75‧‧‧ limit switch

8‧‧‧ Workpiece

81‧‧‧Measurement surface

FIG. 1 is an overall structural diagram of an ultrasonic imaging device.

Fig. 2 (a) (b) is an explanatory diagram for measuring a workpiece using a probe.

Figure 3 shows the positional relationship between the probe and the workpiece.

4 (a) and 4 (b) are explanatory views showing the operation of the holder of the first embodiment.

Fig. 5 shows a holder structure of the first embodiment.

Fig. 6 is an exploded view showing a structure of a holder according to the first embodiment.

Fig. 7 is a flowchart showing the ultrasonic scanning process of the first embodiment.

Fig. 8 shows the structure of a probe according to the second embodiment.

Fig. 9 shows the structure of a probe according to a third embodiment.

Fig. 10 shows the structure of a probe of a comparative example.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Fig. 1 is an overall configuration diagram of an ultrasonic imaging device.

The ultrasonic imaging device 1 is provided with a function for detecting interference between the probe 4 and the workpiece 8. The ultrasonic imaging device 1 can prevent the probe 4 and the workpiece 8 from being damaged.

The ultrasound imaging device 1 is equipped with a three-axis scanner 2 (scanning Means) and probe 4. The three-axis scanner 2 scans a flat workpiece 8 in a two-dimensional manner with a probe 4. The ultrasonic imaging device 1 can image a planar workpiece 8 using an ultrasonic wave.

The probe 4 is immersed in a water tank 91 filled with water, and is arranged so that the tip of the probe 4 faces the workpiece 8. The probe 4 is attached to the triaxial scanner 2 by a holder 24. The three-axis scanner 2 allows the probe 4 to perform two-dimensional scanning and detect its scanning position. Thereby, the ultrasonic imaging apparatus 1 can two-dimensionally image the relationship between each scanning position and the echo. The water tank 91 is placed on the table 92.

The three-axis scanner 2 includes an X-axis actuator 21 and a Y-axis actuator 22 for scanning the probe 4, a Z-axis actuator 23 for changing the distance between the probe 4 and the workpiece 8, and a grip for the probe 4 的 住 具 24。 4 of the holder. The holder 24 supports a flange portion 42 provided on an upper portion of the probe 4, and when the probe 4 is applied with an upward force, the probe 4 can be smoothly moved upward. The holder 24 is provided with a sensor 3 to detect the upward movement of the probe 4.

Before the inspection, the height of the probe 4 is adjusted by the stage 92, and the distance between the probe 4 and the workpiece 8 is adjusted by the Z-axis actuator 23.

The ultrasound imaging device 1 further includes a probe 4 and a transmitter 52, an amplifier 53, a receiver 54 and an A / D converter 55 for processing an output signal of the probe 4, a control device 56, a data processing device 57, and a display. 58.

The transmitter 52 outputs a signal at each predetermined scanning position. This signal is, for example, an electrical signal of a pulse wave or a burst wave.

After the probe 4 outputs an ultrasonic wave using the signal of the transmitter 52, the amplifier 53 amplifies the signal received by the probe 4 and outputs the signal to the receiver 54. The receiver 54 further amplifies the received signal and outputs it to the A / D converter 55.

The echo reflected by the measurement surface 81 of the workpiece 8 is transmitted to the A / D converter 55 through the receiver 54. The A / D converter 55 performs gate processing on the analog signal of the echo, converts the analog signal into a digital signal, and outputs the digital signal to the control device 56.

The control device 56 controls the three-axis scanner 2 so that the probe 4 performs two-dimensional scanning, and the workpiece 8 is measured by ultrasonic waves while acquiring each scanning position of the probe 4. The control device 56 moves, for example, the X-axis as the main scanning direction and the Y-axis as the sub-scanning direction, and initially moves the probe 4 to the starting position of the Y-axis. Next, the control device 56 moves the probe 4 toward the main scanning direction and the outbound direction to obtain ultrasonic information of the odd-numbered scanning lines, and moves it in the sub scanning direction by one step. The control device 56 further moves the probe 4 toward the main scanning direction and the return direction to obtain ultrasonic information of the even-numbered scanning lines, and moves it to the sub-scanning direction by one step.

When the control device 56 detects that the probe 4 moves upward by the sensor 3 during scanning, it stops the operation of the triaxial scanner 2. In this way, damage to the probe 4 and the work 8 can be prevented.

Each scanning position of the workpiece 8 from the control device 56 and an ultrasonic signal corresponding thereto are input to the data processing device 57. The data processing device 57 is used for image processing the ultrasonic measurement results corresponding to each scanning position of the workpiece 8, and displays the ultrasonic image of the processed workpiece 8 on the Display 58.

2 (a) and 2 (b) are explanatory diagrams of measuring a workpiece 8 using a probe 4. FIG.

In FIG. 2 (a), the front end portion 41 of the probe 4 is located at a distance Z ₀ from the surface of the workpiece 8. At this time, the ultrasonic wave output from the probe 4 is focused on the measurement surface 81 of the work 8. Therefore, the ultrasonic image at this time is clear. The distal end portion 41 of the probe 4 is tapered.

In FIG. 2 (b), the front end portion 41 of the probe 4 is located at a distance Z ₁ farther from the surface of the workpiece 8 than in the case of FIG. 2 (a). At this time, the ultrasonic wave output from the probe 4 is focused on the upper side of the measurement surface 81 of the work 8. Therefore, the ultrasonic image at this time is not as clear as in the case of FIG. 2 (a). Therefore, the distance between the probe 4 and the workpiece 8 should be the distance Z ₀ shown in Fig. 2 (a).

FIG. 3 shows the positional relationship between the probe 4 and the workpiece 8.

When observing the workpiece 8 by the ultrasonic imaging device 1, a table 94 is set in the water tank 91, the workpiece 8 is placed on the table 94, and the water tank 91 is filled with water, and then the Z-axis actuator 23 is used. To adjust the distance between the probe 4 and the workpiece 8. In the example shown in FIG. 3, the probe 4 and the workpiece 8 are spaced apart from each other by a distance Z ₂ , and must be adjusted to the distance Z ₀ shown in FIG. 2 (a).

This distance Z ₀ will change depending on the conditions, and may approach below the millimeter level, at which time interference may occur between the probe 4 and the workpiece 8. When such interference occurs, the probe 4 and the work 8 may be damaged. Therefore, the structure of the holder 24 for fixing the probe 4 of the ultrasonic imaging device 1 is improved, and a function of detecting the contact between the probe 4 and the workpiece 8 is provided.

Comparative Example

FIG. 10 is a three-dimensional view showing the structure of the probe 4 of the comparative example. The upper part of FIG. 10 is a plan view, and the lower side of the plan view is a front view. The right side of the front view is a side view.

As shown in the plan view, the probe 4 is fixed to the base 25. A sensor mechanism 7 is arranged near the probe 4.

As shown in the front view and the side view, the sensor mechanism 7 includes a protection portion 71 protruding below the front end portion 41 of the probe 4, a support portion 76, a limit switch 75, and a pressing portion 74.

The support portions 72 and 73 support the pillar portion 76 so as to be movable in the vertical direction. The pressing portion 74 is used to press the limit switch 75 and maintain the sensor mechanism 7 at a predetermined height. If the protection portion 71 interferes with (contacts with) the work 8, the support pillar portion 76 and the pressing portion 74 will move upward, and the pressing portion 74 will no longer press the limit switch 75.

The control device 56 uses the limit switch 75 to detect the contact between the sensor mechanism 7 and the workpiece 8, thereby detecting the approach of the workpiece 8 before the probe 4 and the workpiece 8 interfere. The sensor mechanism 7 constitutes an interference detection means capable of detecting interference between the probe 4 and the workpiece 8. The control device 56 stops scanning of the probe 4 when interference between the probe 4 and the workpiece 8 is detected, thereby preventing damage to the workpiece 8 and the probe 4 beforehand. In particular, it is effective in that scanning can be stopped before the probe 4 and the workpiece 8 interfere with each other.

In the comparative example, a sensor mechanism 7 is installed near the probe 4 to detect the contact between the sensor mechanism 7 and the workpiece 8. When the sensor mechanism 7 contacts the workpiece 8, the limit switch 75 is operated, thereby enabling the Stop the motion before the workpiece 8 and the probe 4 come into contact. In this way, the probe 4 and the work 8 can be prevented from being damaged, and the added value of the ultrasonic imaging device 1 can be improved.

However, in the comparative example, since the probe 4 and the sensor mechanism 7 are separated, when the protection portion 71 of the sensor mechanism 7 does not contact the workpiece 8, the probe 4 may interfere with the workpiece 8. In addition, since the sensor mechanism 7 must be scanned together with the probe 4, it must have a predetermined rigidity.

"First Embodiment"

4 (a) and 4 (b) are explanatory diagrams showing the operation of the holder 24 of the first embodiment.

FIG. 4 (a) shows a state where the flange portion 42 of the probe 4 is seated on the holder 24.

The general holder 24 holds the probe 4 in a close state. However, the holder 24 of this embodiment supports the flange portion 42 of the probe 4 and holds the probe 4 with a predetermined tightening force so that it can move upward. The sensor 3 is used to detect the probe 4 Seat status. The sensor 3 is, for example, a short-stroke touch switch protruding from the upper portion of the holder 24, and is turned on when the flange portion 42 of the detection probe 4 is pressed.

FIG. 4 (b) shows a state where the flange portion 42 of the probe 4 is not seated on the holder 24.

If the probe 4 and the workpiece 8 physically interfere and move upward, the probe The flange portion 42 of the head 4 is not seated on the holder 24. In this way, the sensor 3 cannot detect the pressing of the flange portion 42. That is, the sensor 3 can detect the interference between the probe 4 and the workpiece 8. The tip of the probe 4 has a tapered shape, and when it interferes with the work 8, it can apply a spring pressure to the probe 4 in an upward direction. The probe 4 is not fixed to the holder, and when it collides with the workpiece, it can be moved upward to prevent damage to the workpiece and the probe.

The sensor 3 is not limited to a touch switch, and an arbitrary sensor such as a distance sensor can be used to detect the seating state of the probe 4, and is not particularly limited.

FIG. 5 shows the structure of the holder 24 of the first embodiment. The top view is a plan view, and the bottom view is a side view.

The holder 24 is formed with a slit 244 and a hole portion 243 into which the probe 4 is inserted. The holder 24 includes a knob 241, a spring 245, and a collar 246. A male thread is tapped at the front end of the knob 241, thereby tightening and screwing with the female thread of the holder 24. By turning the knob 241, the knob 241 can apply a tightening force to the holder 24 through the spring 245. With the slit 244, the knob 241, and the spring 245, any operator can hold the probe 4 in the hole 243 with a certain tightening force.

The collar 246 restricts the movable range of the knob 241, thereby restricting the tightening force given to the holder 24 by the knob 241. The structure of the knob 241 will be described in detail later with reference to FIG. 6.

When the tip of the probe 4 is not in contact (interference) with the workpiece 8, the flange portion 42 of the probe 4 is in a state of being seated on the holder 24. When the tip of the probe 4 comes into contact (interference) with the workpiece 8, the probe 4 will be smooth The flange portion 42 is moved upward so that the flange portion 42 is not seated on the holder 24. The sensor 3 detects the pressure caused by the flange portion 42, thereby detecting whether the flange portion 42 is seated on the holder 24.

When the front end of the probe 4 comes into contact with the workpiece 8, it moves relative to the holder 24. This movement is detected by the sensor 3, whereby interference (contact) between the probe 4 and the workpiece 8 can be detected. When the interference is detected, scanning of the probe 4 is stopped, thereby preventing damage to the probe 4 and the work 8.

FIG. 6 is an exploded view showing the structure of the holder 24 of the first embodiment.

A male screw is formed at the tip of the knob 241, and a spring 245 and a collar 246 are attached to the shaft of the knob 241. The male screw formed at the front end of the knob 241 is fastened and screwed with the female screw of the holder 24. The position where the knob 241 is fastened is the inner side of the holder 24 divided by the slit 244.

If the knob 241 is screwed into the holder 24, the spring 245, which is an elastic body, will press the side of the holder 24 before it is divided by the slit 244 toward the inside. That is, the fastening force corresponding to the amount of screwing of the knob 241 is elastically pressed against the front side and the back side of the holder 24, and any operator can hold the probe 4 in the hole portion 243 with a certain fastening force. In addition, the collar 246 limits the movable range of the knob 241. In this way, the tightening force by the knob 241 can be made below a predetermined value, and the probe 4 can be prevented from being broken.

Fig. 7 shows a flowchart of the ultrasonic scanning process of the first embodiment.

The ultrasound imaging device 1 implements an ultrasound using the control device 56 Scan processing.

If the control device 56 starts scanning the probe 4 (step S10), it is first determined whether an interference between the probe 4 and the workpiece 8 is detected (step S11). If the control device 56 detects the interference between the probe 4 and the workpiece 8 (step S11 → YES), the scanning of the probe 4 is stopped (step S17) and the process ends abnormally. In this way, the probe 4 and the work 8 can be prevented from being damaged, and the added value of the ultrasonic imaging device 1 can be improved.

If the control device 56 does not detect the interference between the probe 4 and the workpiece 8 (step S11 → No), it sends an ultrasonic pulse to the probe 4 (step S12), and then receives the ultrasonic wave (step S13). The data processing device 57 performs data processing of the received wave (step S14). The control device 56 repeatedly performs a series of processes from steps S11 to S14 until the scanning is completed (step S15 → No).

When the control device 56 finishes scanning (step S15 → No), the data processing device 57 generates an ultrasonic image based on the data processing result of the received wave, and ends the processing of FIG. 7.

"Second Embodiment"

FIG. 8 shows the structure of a probe 4A according to the second embodiment.

A sensor 3A is provided at the front end of the probe 4A to detect the approach of the workpiece 8. The sensor 3A is, for example, a proximity sensor using a high-frequency oscillation type of electromagnetic induction, and therefore can detect the workpiece 8 in a non-contact manner without causing damage to the workpiece 8 and the sensor 3A. Thereby, interference between the probe 4A and the workpiece 8 can be prevented beforehand. Sensor 3A has fast response time and no electrical Contacts for longer life.

If the workpiece 8 approaches the probe 4A, the control device 56 can detect the approach using the sensor 3A. At this time, the scanning of the probe 4A is stopped, thereby preventing damage to the probe 4A and the work 8 in advance. Thereby, the added value of the ultrasonic imaging device 1 can be improved.

"Third Embodiment"

FIG. 9 shows the structure of the probe 4B according to the third embodiment. The left and right directions in FIG. 9 are the forward and backward directions in the scanning direction.

Sensors 3L, 3R are provided on both sides in the main scanning direction of the holder 24B. The sensors 3L and 3R are laser distance meters, which can detect the workpiece 8 in a non-contact manner, so the workpiece 8 and the sensor 3A can be prevented from being damaged. For example, in the main scanning direction, the distance from the workpiece 8 is measured by the sensor 3L, and in the main scanning direction, the distance from the workpiece 8 is measured by the sensor 3R. In this way, interference between the probe 4A and the workpiece 8 can be prevented beforehand. The sensor 3L includes a light guide 31L, and the sensor 3R includes a light guide 31R. The operator can immerse the light guide portions 31L and 31R in water, thereby preventing random reflection of laser light on the water surface, and can measure the distance from the workpiece 8.

If the workpiece 8 approaches the probe 4B, the control device 56 may detect the approach using the sensors 3L and 3R. At this time, the scanning of the probe 4B is stopped, thereby preventing damage to the probe 4B and the work 8 in advance. In this way, the added value of the ultrasonic imaging device 1 can be increased.

(Modification)

The present invention is not limited to the embodiments described above, and may include various modifications. For example, the above-mentioned embodiment is described in detail in order to facilitate understanding of the present invention, but it is not necessary to have all the structures described. A part of the structure of one embodiment may be replaced with a structure of another embodiment, and a structure of another embodiment may be added to the structure of one embodiment. In addition, a part of the structure of each embodiment can be added, deleted, or replaced with another structure.

In each embodiment, the control lines and information lines are displayed as required in the description, and not all control lines and information lines on the product are displayed. In fact, it can also be imagined that almost all structures are connected to each other.

As a modification of the present invention, for example, the following (a) to (c) are included.

(a) In the first embodiment, a switch is used to detect interference between the probe 4 and the workpiece 8. However, the present invention is not limited to this, and it is also possible to determine whether the flange portion 42 of the probe 4 is seated on the holder 24 using an arbitrary sensor, for example, a press detection sensor.

(b) In the first embodiment, if interference between the probe 4 and the workpiece 8 is detected, scanning of the probe 4 is stopped. However, it is not limited to this, and the height of the probe 4 may be changed to scan the workpiece 8 again.

(c) In the second embodiment, interference between the probe 4 and the workpiece 8 is detected by a proximity sensor using a high-frequency oscillation type of electromagnetic induction. However, it is not limited to this, and a proximity sensor of a capacitance type or a proximity sensor of a magnetic type may be used. When a magnetic proximity sensor is used, for example, the stage 94 or the like can be made a magnetic body.

Claims (8)

An ultrasonic imaging device, comprising: a probe for imaging a planar workpiece using ultrasonic waves through a liquid; a scanning means for scanning the probe surface of the workpiece; and an upper part of the probe is provided. A flange portion integrated with the probe, a holder for holding the probe, and an interference detection means embedded in the holder so that a part of the flange protrudes from the upper surface of the holder; the interference detection When there is no interference between the probe and the workpiece, the protruding portion is buried in the holder by the pressing of the flange portion; when interference occurs between the probe and the workpiece, the probe moves toward the probe. Moving upward causes the flange portion to also move upward, thereby restoring the protruding portion buried in the holder, and detecting interference between the workpiece and the probe. The ultrasonic imaging device according to item 1 of the scope of patent application, wherein the tip of the probe is tapered. The ultrasonic imaging device according to item 1 or 2 of the scope of patent application, wherein if the scanning means detects interference by the interference detecting means, the scanning of the probe is stopped. The ultrasonic imaging device according to item 1 or 2 of the scope of patent application, wherein, if the scanning means detects interference by the interference detecting means, the height of the probe is changed to perform scanning again. The ultrasonic imaging device according to item 1 or 2 of the scope of patent application, wherein the holder is used to hold the probe with a predetermined tightening force. The ultrasonic imaging device according to item 5 of the scope of patent application, wherein the holder is provided with a hole and a slit for holding and holding the probe, and is provided with a knob and an elastic portion, and the knob and the elastic portion The debt is used to adjust the force applied to the two parts divided by the slit. The ultrasonic imaging device according to item 6 of the scope of patent application, wherein the holder is provided with a restricting member for restricting a movable range of the knob. The ultrasonic imaging device according to item 1 or 2 of the scope of patent application, wherein the interference detection means is a sensor that detects the sitting state of the probe.