TWI856355B - Light emitting diode package structure, manufacturing method of light emitting diode package structure and light emitting panel - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 229910000679 solder Inorganic materials 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 12
- 230000000903 blocking effect Effects 0.000 claims description 12
- 238000004806 packaging method and process Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
本發明是有關於一種發光二極體封裝結構、發光二極體封裝結構的製造方法及發光面板。The present invention relates to a light-emitting diode packaging structure, a manufacturing method of the light-emitting diode packaging structure and a light-emitting panel.
發光二極體顯示面板包括驅動背板及轉置於驅動背板上的多個發光二極體元件。繼承發光二極體的特性,發光二極體顯示面板具有省電、高效率、高亮度及反應時間快等優點。此外,相較於有機發光二極體顯示面板,發光二極體顯示面板還具有色彩易調校、發光壽命長、無影像烙印等優勢。因此,發光二極體顯示面板被視為下一世代的顯示技術。The LED display panel includes a driving backplane and multiple LED elements transferred to the driving backplane. Inheriting the characteristics of LEDs, LED display panels have advantages such as power saving, high efficiency, high brightness and fast response time. In addition, compared with organic LED display panels, LED display panels also have advantages such as easy color adjustment, long luminous life and no image burn-in. Therefore, LED display panels are regarded as the next generation of display technology.
在發光二極體顯示面板的製程中,需將多個發光二極體元件轉置到驅動背板上。為提升轉置良率,可將多個發光二極體元件先封裝成一個發光二極體封裝結構,再將發光二極體封裝結構轉置到驅動背板上。在發光二極體封裝結構的製程中,需將焊料形成在發光二極體封裝結構內部的導電圖案上,以利發光二極體封裝結構與驅動背板接合。然而,一般而言,焊料是利用化學鍍膜工序形成,化學鍍膜工序中會有薄膜內應力作用在發光二極體封裝結構的導電圖案上,使得導電圖案易從發光二極體封裝結構的內部剝落,影響發光二極體封裝結構的製造良率。In the process of manufacturing LED display panels, multiple LED components need to be transferred to the driver backplane. In order to improve the transfer yield, multiple LED components can be packaged into an LED package structure first, and then the LED package structure is transferred to the driver backplane. In the process of manufacturing the LED package structure, solder needs to be formed on the conductive pattern inside the LED package structure to facilitate the bonding of the LED package structure with the driver backplane. However, generally speaking, solder is formed by a chemical plating process, and in the chemical plating process, internal stress of the film acts on the conductive pattern of the LED package structure, making it easy for the conductive pattern to peel off from the inside of the LED package structure, thereby affecting the manufacturing yield of the LED package structure.
本發明提供一種發光二極體封裝結構的製造方法,可提升發光二極體封裝結構的製造良率。The present invention provides a method for manufacturing a light-emitting diode package structure, which can improve the manufacturing yield of the light-emitting diode package structure.
本發明提供一種發光二極體封裝結構,其製造良率高。The present invention provides a light emitting diode packaging structure with high manufacturing yield.
本發明提供一種發光面板,其製造良率高。The present invention provides a light-emitting panel with high manufacturing yield.
本發明的發光二極體封裝結構的製造方法,包括下列步驟:於基板上形成離形層;於離形層上形成第一絕緣層,其中第一絕緣層具有貫孔;於第一絕緣層上形成第一導電圖案,其中第一導電圖案的第一部分填入第一絕緣層的貫孔,第一導電圖案的第二部分設置於第一絕緣層上且與第一部分連接;於第一絕緣層上形成第二絕緣層,以覆蓋第一導電圖案,其中第一導電圖案的第二部分夾設於第一絕緣層與第二絕緣層之間;於第二絕緣層上形成第二導電圖案,其中第二導電圖案電性連接至第一導電圖案;令發光二極體元件與第二導電圖案接合;分離離形層與第一絕緣層,並露出填入第一絕緣層之貫孔的第一導電圖案的第一部分;以及,於第一導電圖案的第一部分上形成焊料。The manufacturing method of the light-emitting diode package structure of the present invention comprises the following steps: forming a release layer on a substrate; forming a first insulating layer on the release layer, wherein the first insulating layer has a through hole; forming a first conductive pattern on the first insulating layer, wherein a first portion of the first conductive pattern is filled into the through hole of the first insulating layer, and a second portion of the first conductive pattern is disposed on the first insulating layer and connected to the first portion; forming a second insulating layer on the first insulating layer to cover the first conductive pattern; A conductive pattern, wherein the second portion of the first conductive pattern is sandwiched between the first insulating layer and the second insulating layer; forming a second conductive pattern on the second insulating layer, wherein the second conductive pattern is electrically connected to the first conductive pattern; bonding a light-emitting diode element to the second conductive pattern; separating the release layer from the first insulating layer and exposing the first portion of the first conductive pattern filled in the through hole of the first insulating layer; and forming solder on the first portion of the first conductive pattern.
本發明的發光二極體封裝結構包括第一絕緣層、第一導電圖案、第二絕緣層、第二導電圖案、發光二極體元件及焊料。第一絕緣層具有貫孔。第一導電圖案具有第一部分及第二部分,第一部分填入第一絕緣層的貫孔,且第二部分設置於第一絕緣層上且與第一部分連接。第二絕緣層設置於第一絕緣層上,且覆蓋第一導電圖案。第一導電圖案的第二部分夾設於第一絕緣層與第二絕緣層之間。第二導電圖案設置於第二絕緣層上,且電性連接至第一導電圖案。發光二極體元件與第二導電圖案接合。焊料設置於第一導電圖案的第一部分上。焊料與第二導電圖案分別位於第一導電圖案的相對兩側。The light-emitting diode package structure of the present invention includes a first insulating layer, a first conductive pattern, a second insulating layer, a second conductive pattern, a light-emitting diode element and solder. The first insulating layer has a through hole. The first conductive pattern has a first part and a second part, the first part fills the through hole of the first insulating layer, and the second part is arranged on the first insulating layer and connected to the first part. The second insulating layer is arranged on the first insulating layer and covers the first conductive pattern. The second part of the first conductive pattern is sandwiched between the first insulating layer and the second insulating layer. The second conductive pattern is arranged on the second insulating layer and electrically connected to the first conductive pattern. The light-emitting diode element is connected to the second conductive pattern. The solder is arranged on the first part of the first conductive pattern. The solder and the second conductive pattern are respectively located on two opposite sides of the first conductive pattern.
本發明的發光面板包括上述的發光二極體封裝結構及驅動背板,其中發光二極體封裝結構接合至驅動背板。The light-emitting panel of the present invention comprises the above-mentioned light-emitting diode packaging structure and a driving back plate, wherein the light-emitting diode packaging structure is connected to the driving back plate.
在本發明的一實施例中,上述的發光二極體封裝結構的製造方法,更包括:在形成離形層之後及形成第一絕緣層之前,於離形層上形成雷射阻擋層;以及,在分離離形層與第一絕緣層之後,移除雷射阻擋層,以露出填入第一絕緣層之貫孔的第一導電圖案的第一部分。In one embodiment of the present invention, the manufacturing method of the light-emitting diode package structure further includes: forming a laser blocking layer on the release layer after forming the release layer and before forming the first insulating layer; and, after separating the release layer and the first insulating layer, removing the laser blocking layer to expose the first portion of the first conductive pattern filled in the through hole of the first insulating layer.
在本發明的一實施例中,上述的第一導電圖案的投影面積大於第一絕緣層的貫孔的投影面積,且第一絕緣層的貫孔的投影面積落在第一導電圖案的投影面積以內。In one embodiment of the present invention, the projection area of the first conductive pattern is larger than the projection area of the through hole of the first insulating layer, and the projection area of the through hole of the first insulating layer falls within the projection area of the first conductive pattern.
在本發明的一實施例中,上述的第一導電圖案的第一部分及第二部分定義出第一導電圖案的凹陷,第二絕緣層具有重疊於凹陷的貫孔,且第二導電圖案透過第二絕緣層的貫孔電性連接至第一導電圖案。In one embodiment of the present invention, the first portion and the second portion of the first conductive pattern define a depression of the first conductive pattern, the second insulating layer has a through hole overlapping the depression, and the second conductive pattern is electrically connected to the first conductive pattern through the through hole of the second insulating layer.
現將詳細地參考本發明的示範性實施例,示範性實施例的實例說明於附圖中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and description to represent the same or similar parts.
應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件“上”或“連接到”另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或“直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電性連接。再者,“電性連接”或“耦合”可以是二元件間存在其它元件。It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it may be directly on or connected to another element, or an intermediate element may also exist. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intermediate elements. As used herein, "connected" may refer to physical and/or electrical connections. Furthermore, "electrically connected" or "coupled" may mean that there are other elements between two elements.
本文使用的“約”、“近似”、或“實質上”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。再者,本文使用的“約”、“近似”或“實質上”可依光學性質、蝕刻性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, "about," "approximately," or "substantially" includes the stated value and the average value within an acceptable deviation range of a particular value determined by a person of ordinary skill in the art, taking into account the measurement in question and the particular amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, as used herein, "about," "approximately," or "substantially" can select a more acceptable deviation range or standard deviation depending on the optical property, etching property, or other property, and can apply to all properties without using one standard deviation.
除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by ordinary technicians in the field to which the present invention belongs. It will be further understood that those terms as defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and the present invention, and will not be interpreted as an idealized or overly formal meaning unless expressly defined as such in this document.
圖1A至圖1M為本發明一實施例之發光面板的製造流程的剖面示意圖。1A to 1M are cross-sectional schematic diagrams of a manufacturing process of a light-emitting panel according to an embodiment of the present invention.
請參照圖1A,首先,於基板110上形成離形層120。在本實施例中,基板110係透光且可被雷射穿透;離形層120可被雷射解離。舉例而言,在本實施例中,基板110的材質可為玻璃、石英、有機聚合物、或是其它可適用的材料,但本發明不以此為限。Referring to FIG. 1A , first, a
請參照圖1B,接著,在本實施例中,可選擇性地於離形層120上形成雷射阻擋層130。雷射阻擋層130可阻擋雷射,以防止雷射損傷於後續製程中形成在雷射阻擋層130上的構件。舉例而言,在本實施例中,雷射阻擋層130的材質可為金屬,但本發明不以此為限。1B , in this embodiment, a
請參照圖1C,接著,在離形層120上形成第一絕緣層140,其中第一絕緣層140具有貫孔142。具體而言,在本實施例中,可在雷射阻擋層130上直接形成第一絕緣層140。然而,本發明不以此為限,在另一實施例中,也可省略雷射阻擋層130的設置,而在離形層120上直接形成第一絕緣層140。第一絕緣層140的材質可為有機材料、無機材料或其組合。舉例而言,在本實施例中,第一絕緣層140的材質可為聚醯亞胺(polyimide;PI),但本發明不以此為限。Referring to FIG. 1C , a first
請參照圖1D,接著,於第一絕緣層140上形成第一導電圖案150,其中第一導電圖案150的第一部分151填入第一絕緣層140的貫孔142,第一導電圖案150的第二部分152設置於第一絕緣層140上且與第一部分151連接。在本實施例中,第一導電圖案150的投影面積大於第一絕緣層140的貫孔142的投影面積,且第一絕緣層140的貫孔142的投影面積落在第一導電圖案150的投影面積以內。舉例而言,在本實施例中,第一導電圖案150的材質可為金屬,但本發明不以此為限。1D , then, a first
在本實施例中,第一導電圖案150的膜厚T150可選擇性地較薄,而第一導電圖案150的第一部分151及第二部分152可選擇性定義出第一導電圖案150的凹陷150a,其中第一導電圖案150的凹陷150a可重疊於第一絕緣層140的貫孔142。然而,本發明不以此為限,在其它實施例中,第一導電圖案150的膜厚T150也可較厚,而第一導電圖案150也可不具有凹陷150a。In the present embodiment, the film thickness T150 of the first
請參照圖1E,接著,於第一絕緣層140上形成第二絕緣層160,以覆蓋第一導電圖案150。第二絕緣層160設置於第一絕緣層140上,且覆蓋第一導電圖案150。特別是,第一導電圖案150的第二部分152夾設於第一絕緣層140與第二絕緣層160之間。第二絕緣層160的膜厚T160大於第一導電圖案150的膜厚T150,而第二絕緣層160與第一絕緣層140可共同且良好地
夾住第一導電圖案150。第二絕緣層160的材質可為有機材料、無機材料或其組合。舉例而言,在本實施例中,第二絕緣層160的材質可為聚醯亞胺(polyimide;PI),但本發明不以此為限。
Referring to FIG. 1E , a second
請參照圖1F,接著,於第二絕緣層160上形成第二導電圖案170。第二導電圖案170設置於第二絕緣層160上,且第二導電圖案170電性連接至第一導電圖案150。具體而言,在本實施例中,第二絕緣層160具有貫孔162,而第二導電圖案170是透過第二絕緣層160的貫孔162電性連接至第一導電圖案150。在本實施例中,第二絕緣層160的貫孔162可重疊於第一導電圖案150的凹陷150a,但本發明不以此為限。在本實施例中,第二導電圖案170的材質例如是金屬,但本發明不以此為限。Referring to FIG. 1F , a second
請參照圖1G,接著,在本實施例中,可選擇性地在第二絕緣層160形成吸光層180,以覆蓋第二導電圖案170的至少一部分。具體而言,在本實施例中。第二導電圖案170可包括接墊部171及接墊部171外的導電部172,其中吸光層180覆蓋第二導電圖案170的導電部172且暴露第二導電圖案170的接墊部171。舉例而言,在本實施例中,吸光層180的材質可為黑色樹脂,但本發明不以此為限。Please refer to FIG. 1G , then, in this embodiment, a
請參照圖1H,接著,令發光二極體元件190與第二導電圖案170接合。詳細而言,在本實施例中,是令發光二極體元件190與被吸光層180暴露出的第二導電圖案170的接墊部171接合。舉例而言,在本實施例中,發光二極體元件190例如是微型發光二極體(μLED),但本發明不以此為限。Referring to FIG. 1H , the light emitting
請參照圖1I,接著,在本實施例中,在第二絕緣層160上形成透明封裝層192,以覆蓋並保護發光二極體元件190及第二導電圖案170。1I , then, in this embodiment, a
請參照圖1I、圖1J及圖1K,接著,分離離形層120與第一絕緣層140,並露出填入第一絕緣層140之貫孔142的第一導電圖案150的第一部分151。詳細而言,在本實施例中,可先採用雷射剝離(laser de-bonding)工序,使離形層120與基板110分離;之後,再移除離形層120與雷射阻擋層130,以露出填入第一絕緣層140之貫孔142的第一導電圖案150的第一部分151。舉例而言,在本實施例中,可利用蝕刻工序移除離形層120與雷射阻擋層130,但本發明不以此為限。1I, 1J and 1K, the
請參照圖1L,接著,於第一導電圖案150的第一部分151上形成焊料194。焊料194設置於第一導電圖案150的第一部分151上,且焊料194與第二導電圖案170分別位於第一導電圖案150的相對兩側。於此,便完成了本實施例的發光二極體封裝結構100。舉例而言,在本實施例中,可使用化學鍍膜的方式於第一導電圖案150的第一部分151上形成焊料194;焊料194的材質例如可包括鎳及金;但本發明不以此為限。Referring to FIG. 1L ,
值得一提的是,由於第一導電圖案150的第二部分152被夾設在第一絕緣層140與第二絕緣層160之間,因此,即便焊料194與第一導電圖案150的厚度差異大而第一導電圖案150的薄膜內部應力大,第一導電圖案150仍不易自第一絕緣層140及第二絕緣層160上剝落。藉此,發光二極體封裝結構100的製造良率可提升。It is worth mentioning that, since the
圖2為本發明一實施例之發光二極體封裝結構的俯視示意圖。圖2省略發光二極體封裝結構100之焊料194的繪示。Fig. 2 is a top view of a LED package structure according to an embodiment of the present invention. Fig. 2 omits the
請參著圖1L及圖2,在本實施例中,同一個發光二極體封裝結構100可包括多個發光二極體元件190,所述多個發光二極體元件190可被同一透明封裝層192包覆。舉例而言,在本實施例中,同一個發光二極體封裝結構100的多個發光二極體元件190可分別是用以發出紅光、綠光及藍光的多個發光二極體元件190,但本發明不以此為限。1L and 2 , in this embodiment, the same
請參照圖1L及圖1M,接著,將發光二極體封裝結構100轉置到驅動背板200上,且令發光二極體封裝結構100接合至驅動背板200。於此,便完成本實施例的發光面板10。1L and 1M , the
在本實施例中,驅動背板200可包括多個子畫素驅動電路(未繪示),每一發光二極體元件190電性連接至對應的一個子畫素驅動電路(未繪示)。舉例而言,在本實施例中,每一子畫素驅動電路可包括資料線(未繪示)、掃描線(未繪示)、電源線(未繪示)、共通線(未繪示)、第一電晶體(未繪示)、第二電晶體(未繪示)及電容(未繪示),其中第一電晶體的第一端電性連接至資料線,第一電晶體的控制端電性連接至掃描線,第一電晶體的第二端電性連接至第二電晶體的控制端,第二電晶體的第一端電性連接至電源線,電容電性連接於第一電晶體的第二端及第二電晶體的第一端,發光二極體元件190的第一電極(未繪示)及第二電極(未繪示)可分別電性連接至第二電晶體的第二端及共通線,但本發明不以此為限。In this embodiment, the driving
10:發光面板
100:發光二極體封裝結構
110:基板
120:離形層
130:雷射阻擋層
140:第一絕緣層
142、162:貫孔
150:第一導電圖案
150a:凹陷
151:第一部分
152:第二部分
160:第二絕緣層
170:第二導電圖案
171:接墊部
172:導電部
180:吸光層
190:發光二極體元件
192:透明封裝層
194:焊料
200:驅動背板
T150、T160:膜厚
10: Light-emitting panel
100: LED package structure
110: Substrate
120: Release layer
130: Laser blocking layer
140:
圖1A至圖1M為本發明一實施例之發光面板的製造流程的剖面示意圖。 圖2為本發明一實施例之發光二極體封裝結構的俯視示意圖。 Figures 1A to 1M are cross-sectional schematic diagrams of the manufacturing process of the light-emitting panel of an embodiment of the present invention. Figure 2 is a top view schematic diagram of the light-emitting diode packaging structure of an embodiment of the present invention.
100:發光二極體封裝結構 100: LED packaging structure
140:第一絕緣層 140: First insulation layer
142、162:貫孔 142, 162: Through hole
150:第一導電圖案 150: First conductive pattern
150a:凹陷 150a: Depression
151:第一部分 151: Part 1
152:第二部分 152: Part 2
160:第二絕緣層 160: Second insulation layer
170:第二導電圖案 170: Second conductive pattern
171:接墊部 171:Pad part
172:導電部 172: Conductive part
180:吸光層 180: light-absorbing layer
190:發光二極體元件 190: LED element
192:透明封裝層 192: Transparent packaging layer
194:焊料 194: Solder
T150、T160:膜厚 T150, T160: film thickness
Claims (8)
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