US4460841A - Ultrasonic transducer shading - Google Patents
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- US4460841A US4460841A US06/349,143 US34914382A US4460841A US 4460841 A US4460841 A US 4460841A US 34914382 A US34914382 A US 34914382A US 4460841 A US4460841 A US 4460841A
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- 230000005855 radiation Effects 0.000 claims abstract description 12
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S367/00—Communications, electrical: acoustic wave systems and devices
- Y10S367/905—Side lobe reduction or shading
Definitions
- This invention relates to improving the radiation patterns of ultrasonic transducers.
- a rectangular phased array radiative aperture with uniform acoustic emission results in a radiative diffraction pattern as sketched in FIG. 1.
- Side lobes typically start at the -13.3 dB level (one way) and contribute to a noise floor at perhaps the -26.5 dB level.
- a preferred radiation pattern is shown in FIG. 2 and represents a slightly degraded lateral resolution (the main lobe is wider) but a vastly improved reduction in diffraction side lobes.
- the medical argument of the desirability of suppressing the side lobes is seen from the following. If the diagnostician is examining a body structure like the heart that produces strong echoes and then wants to look at a nearby weak reflector, he gets an integral of the weak reflector plus the strong reflector and there are undesirable image artifacts.
- the beam profile in the perpendicular plane cannot be altered by the system electronics.
- the Y-axis beam profile is determined solely by the array architecture.
- Conventional array construction results in Y-axis beam profiles which exhibit substantial side lobe levels.
- Ultrasonic transducers are shaded by several techniques including reducing the piezoelectric conversion efficiency, changing the mechanical element length, selective piezoelectric poling, and control of electrode geometry.
- the intensity of emitted ultrasound is higher at the center of the transducer and lower at the edges, and there is a reduction in side lobe levels.
- the improved beam pattern results in improved image quality and in some cases no change in the electronics is called for.
- transducer configurations There are many possible transducer configurations and the following are illustrative (all but the last two can be linear phased array transducers).
- One embodiment has X-axis shading along the array because the polarization of the elements changes as a function of position and is reduced at the ends of the array as compared to the center. The variation of polarization depends on the selected shading function. In such an array with Y-axis shading, the polarization changes parallel to the element length.
- a second embodiment is an X- and Y-axis shaded linear array which has different length elements, the elements at the ends being shorter than central elements.
- An elliptically-shaped array has elements with different electrical impedances.
- a third major embodiment is an X- and Y-axis shaded array which has selectively poled piezoelectric material and poled regions at the center of the array and unpoled regions at the edges.
- a circular single element transducer is selectively poled such that the fraction of poled to unpoled region is high at the center and decreases toward the edge.
- the fourth embodiment has Y-axis shading via electrode geometry, specifically that one electrode covers the whole length of the element and the other electrode a fraction of the length.
- FIG. 1 shows a prior art diffraction pattern from an unshaded rectangular aperture
- FIG. 2 shows the diffraction pattern from a shaded rectangular aperture
- FIG. 3 is a perspective view of a linear transducer array shaded along the X-axis by varying the polarization
- FIG. 4 is a perspective of one of the elements in FIG. 3;
- FIG. 5 is a perspective of one element when the array in FIG. 3 has Y-axis and X-axis shading;
- FIG. 6 shows the different radiation patterns obtained from a device with reduced polarization at both ends (full lines) and uniform polarization (dashed lines);
- FIG. 7 is a partial perspective view of a shaded phased array transducer with different element lengths
- FIG. 8 depicts a perspective view of a selectively poled piezoelectric slab ready to be cut into the elements of a shaded array
- FIG. 9 depicts a single element transducer which is shaded by selectively poling in a rosette pattern
- FIG. 10 illustrates a single element transducer which is Y-axis shaded by control of electrode geometry
- FIG. 11 represents the beam profiles of shaded and unshaded transducers which have different electrode geometries.
- the linear phased array ultrasonic transducer 20 in FIG. 3 is shaded by varying the polarization of the piezoelectric material as a function of position.
- the desired reduction in diffraction side lobes is achieved such as in FIG. 2.
- each of the transducer elements 21 is excited with the same transmit waveform and received echoes are given no further electronic attenuation. Every long, narrow piezoelectric ceramic element 21 has signal and ground electrodes 22 and 23 on opposite surfaces and a thickness of one-half wavelength at the emission frequency since the element operates essentially as a half wave resonator.
- the ultrasound emission frequency is typically 2-5 MHz.
- Other features of the transducer array such as the quarter-wave impedance matching layers on the front surface, the wear plate, and the fabrication of the device, are described in detail in the inventors' U.S. Pat. No. 4,217,684, the disclosure of which is incorporated herein by reference.
- FIGS. 3 and 4 relate to X-axis shading along the array and parallel to its length (the Z-axis goes into the body).
- the arrows represent polarization or the coupling coefficient k.
- the piezoelectric material is strongly poled at the center of the array and more weakly poled at the ends.
- the change in polarization from the center of the array to the ends depends on the selected shading function, such as the Hamming or raised cosine shading function, and there are many others. The choice depends on the specific requirement and the need to retain good resolution considering that a uniformly weighted aperture gives the best resolution.
- the polarization In the Y-axis direction parallel to the long dimension of the element, the polarization is uniform. All of the array elements 21 are excited by the pulser 24 with the same transmit waveform, but the electric/acoustic conversion efficiency varies along the array and the intensity of emitted radiation is greater at the center than at the ends.
- Effective non-uniform conversion efficiency may be achieved in several ways.
- the preferred technique is to pole the material by applying a relatively long high voltage pulse, then a short low voltage pulse to monitor the polarization of the element. This is done repetitively, monitoring the result after every high voltage pulse.
- a second technique is to apply a nonuniform high voltage poling field to the ceramic slab with the highest electric fields in the center of the array and reduced fields at the edges.
- the poling device may consist of a curved conductive plate with added dielectric at the edges or a flat resistive plate with high voltage applied to the middle and ground beyond the edge of the ceramic.
- Another technique is applying a thermal gradient to the piezoelectric slab, with heat at the edges and cooling in the middle, to appropriately depole a completely and uniformly poled piece of ceramic.
- a fourth technique is to coat a uniformly poled slab of piezoelectric ceramic with a continuous but porous electrode, with greater porosity at the edges. The ceramic slab is subsequently cut into array elements.
- Phased arrays may need to be shaded for the Y-axis also, to essentially yield an elliptical or circular aperture, very much like a conventional B-scan transducer.
- the polarization parallel to the length of element 21' changes and is greater at the center and decreases symmetrically toward either end.
- This array has both X-axis and Y-axis shading and the variation of polarization along the array may be as shown in FIG. 3.
- One way of poling element 21' is to cut the electrodes into segments and pole each segment by repetitively applying a high voltage pulse and monitoring the polarization. Later the cut electrode is made continuous.
- FIG. 6 The results of one experiment in which the acoustic aperture of an ultrasonic transducer was shaded by reducing the conversion efficiency at the edges is shown in FIG. 6.
- Two nominally identical pieces of Channel 5500 piezoelectric ceramic were cut to the same lateral dimensions (approximately 1/2 in ⁇ 5/8 in ) and same thickness (approximately 0.7 mm). Both pieces have electrodes on their large faces.
- One piece was selected for the reduced conversion efficiency sample, while the other remained as a control.
- the control sample had been polarized at the manufacturing facility and was assumed to be uniformly poled.
- the electrode on the other piece was cut into three equal area pieces by two parallel cuts which were just deep enough to separate the electrodes.
- the end electrodes were attached to the terminal of a high voltage source and were depolarized. Tests with a piezoelectric coupling constant meter confirmed the reduction in piezoelectric activity of the end segments compared to the center.
- FIG. 6 shows the different radiation patterns obtained from these two devices.
- the control or unshaded sample had a narrower beam caused by the wider effective aperture, but the side lobes are relatively large.
- Diffraction theory predicts -26 dB (two way) side lobes for this case.
- the shaded, reduced polarization sample has a wider main lobe but there is a significant reduction in the side lobes.
- the amplitude of the first side lobe is approximately the same as that of a second side lobe of the control sample.
- the general features of the radiation patterns are in good agreement with diffraction theory.
- the technique is applicable to any piezoelectric transducer. Because the aperture of linear and phased array transducers is rectangular, this technique produces more dramatic effects on these devices. Changes in system electronics are not required, and existing ultrasonic instruments can be improved by merely changing the transducer.
- transducer array 25 is roughly elliptical and elements 26 at the ends of the array have a reduced area and are shorter than the central elements.
- This shaded transducer array is fabricated as taught in U.S. Pat. No. 4,217,684.
- a fully and uniformly poled slab of piezoelectric is plated on all six sides, isolation slots 27 are cut into the top surface to separate the signal electrode 28 from the wrap-around ground electrode 29, and the piece is cut into individual elements.
- Inner elements have the usual length and narrow Y-axis radiation patterns while outer elements are short and have wide radiation patterns. Assuming perfect phase quantization, this device approaches a B-scan aperture. Care is taken to include amplitude shading effects on receive due to the change in element/cable capacitance ratio.
- a third major technique of shading a phased array ultrasonic transducer is by selective piezoelectric poling.
- an unpoled piezoelectric slab 33 is temporarily plated on both surfaces only over the selected ellipitcal (or circular) aperture 34 and is poled uniformly under this electrode.
- the piezoelectric ceramic slab 33 is fully plated to provide signal and ground electrodes 35 and 36 by the standard array fabrication process and cut into individual elements 37. Even though electrodes cover the full rectangular aperture, electric/acoustic conversion occurs only in the selectively poled region. All elements now also have approximately the same capacitance to alleviate the element/cable capacitance variation problem.
- This embodiment of the shaded linear array has X- and Y-axis shading and reduced side lobe levels, and changing the geometry of the poled region changes the shading function.
- the shaded single element circular transducer 38 in FIG. 9 is selectively poled.
- the top and bottom surfaces of the unpoled piezoelectric slab 39 are provided with rosette electrodes 40 which are aligned and have many petals extending from the center to the edge.
- the material under the rosette electrode is poled by applying a high voltage; the material outside of the electrodes remains unpoled. Thereafter the slab is fully plated on on both sides. If one looks at concentric annuli starting at the center, the fraction of poled area is high at the center and decreases toward the edges. Electric/acoustic conversion occurs only in the selectively poled region, and the intensity of the emitted ultrasound is largest at the center and decreases toward the edges.
- a fourth technique of shading an ultrasonic transducer is by electrode geometry. This is not suitable for phased array transducers but does realize Y-axis shading of large slab single element transducers and linear array transducers in which groups of elements are excited in sequence.
- the basic principle of Y-axis shading via electrode geometry is illustrated in FIG. 10.
- the piezoelectric slab 43 is uniformly polarized and the front surface of the element has a continuous electrode 44 extending over its entire length.
- the back surface however, has a continuous electrode 45 extending over only a fraction of the length of the element. This electrode geometry results in non-uniform electric field lines 46 across the ceramic.
- Test data was taken on a transducer which had a continuous front electrode and a discontinuous back electrode which was segmented into five electrodes of approximately equal area. By shorting an appropriate number of the segments together, a number of electrode geometries were tested. The results of beam pattern measurements for two different geometries are presented in FIG. 11. The solid curve represents the beam profile obtained when the center three electrodes were shorted together (the electrode is over 60 percent of the back surface). and the dashed curve is the beam profile obtained when the entire back electrode was shorted together. The side lobe level is greatly reduced and the main lobe resolution is slightly reduced for three electrodes as compared to five electrodes. The partial electrode does not merely reduce the size of the effective aperture, but also serves to shade the aperture.
- transducer configurations discriminate against information from the outer edge of the aperture, and lead to better side lobe reduction throughout the imaged area at the expense of somewhat poorer resolution at longer range.
- Clinical experience is that side lobe reduction and high sensitivity are often more important than good resolution for diagnostic ultrasound.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
The radiation pattern of shaded single element piezoelectric transducers and transducer arrays has reduced side lobe levels. Shading to reduce the intensity of emitted ultrasound at the edges of the transducer relative to the center is realized by varying the electric/acoustic conversion efficiency or polarization of the piezoelectric material, by having different mechanical element lengths, by selectively poling the piezoelectric material to produce poled and unpoled regions, and by control of electrode geometry. The shading of a phased array ultrasonic transducer is described in both lateral dimensions.
Description
This invention relates to improving the radiation patterns of ultrasonic transducers.
A rectangular phased array radiative aperture with uniform acoustic emission results in a radiative diffraction pattern as sketched in FIG. 1. Side lobes typically start at the -13.3 dB level (one way) and contribute to a noise floor at perhaps the -26.5 dB level. A preferred radiation pattern is shown in FIG. 2 and represents a slightly degraded lateral resolution (the main lobe is wider) but a vastly improved reduction in diffraction side lobes. The medical argument of the desirability of suppressing the side lobes is seen from the following. If the diagnostician is examining a body structure like the heart that produces strong echoes and then wants to look at a nearby weak reflector, he gets an integral of the weak reflector plus the strong reflector and there are undesirable image artifacts.
It has been shown that the desired improvement in diffraction side lobes is achieved by an electronic amplitude technique, by attenuating the transmit and receive electrical signals to and from the piezoelectric ceramic elements. In the X-axis along the array, elements near the center are unattenuated while elements toward the ends of the array suffer strong attenuations. Specific attenuation functions are described as raised cosine, Hamming, and trapezoid; the latter has been used in various clincal evaluations of the phased array imaging system in U.S. Pat. No. 4,155,260 and other patents assigned to this assignee. Adding appropriate attenuators to the transmit and receive circuits, however, increases the electronics complexity and cost. The beam profile in the perpendicular plane (Y-axis) cannot be altered by the system electronics. As a consequence, the Y-axis beam profile is determined solely by the array architecture. Conventional array construction results in Y-axis beam profiles which exhibit substantial side lobe levels.
Ultrasonic transducers are shaded by several techniques including reducing the piezoelectric conversion efficiency, changing the mechanical element length, selective piezoelectric poling, and control of electrode geometry. The intensity of emitted ultrasound is higher at the center of the transducer and lower at the edges, and there is a reduction in side lobe levels. The improved beam pattern results in improved image quality and in some cases no change in the electronics is called for. There are many possible transducer configurations and the following are illustrative (all but the last two can be linear phased array transducers).
One embodiment has X-axis shading along the array because the polarization of the elements changes as a function of position and is reduced at the ends of the array as compared to the center. The variation of polarization depends on the selected shading function. In such an array with Y-axis shading, the polarization changes parallel to the element length. A second embodiment is an X- and Y-axis shaded linear array which has different length elements, the elements at the ends being shorter than central elements. An elliptically-shaped array has elements with different electrical impedances. A third major embodiment is an X- and Y-axis shaded array which has selectively poled piezoelectric material and poled regions at the center of the array and unpoled regions at the edges. A circular single element transducer is selectively poled such that the fraction of poled to unpoled region is high at the center and decreases toward the edge. The fourth embodiment has Y-axis shading via electrode geometry, specifically that one electrode covers the whole length of the element and the other electrode a fraction of the length.
The side lobe reduction and high sensitivity of such shaded transducers has proven to be more important than optimum resolution for diagnostic ultrasound.
FIG. 1 shows a prior art diffraction pattern from an unshaded rectangular aperture;
FIG. 2 shows the diffraction pattern from a shaded rectangular aperture;
FIG. 3 is a perspective view of a linear transducer array shaded along the X-axis by varying the polarization;
FIG. 4 is a perspective of one of the elements in FIG. 3;
FIG. 5 is a perspective of one element when the array in FIG. 3 has Y-axis and X-axis shading;
FIG. 6 shows the different radiation patterns obtained from a device with reduced polarization at both ends (full lines) and uniform polarization (dashed lines);
FIG. 7 is a partial perspective view of a shaded phased array transducer with different element lengths;
FIG. 8 depicts a perspective view of a selectively poled piezoelectric slab ready to be cut into the elements of a shaded array;
FIG. 9 depicts a single element transducer which is shaded by selectively poling in a rosette pattern;
FIG. 10 illustrates a single element transducer which is Y-axis shaded by control of electrode geometry; and
FIG. 11 represents the beam profiles of shaded and unshaded transducers which have different electrode geometries.
The linear phased array ultrasonic transducer 20 in FIG. 3 is shaded by varying the polarization of the piezoelectric material as a function of position. The desired reduction in diffraction side lobes is achieved such as in FIG. 2. Unlike the electronic amplitude technique of shading, in which the rectangular aperture of the transducer is shaded by attenuating the transmit and receive electrical signals to and from the elements, each of the transducer elements 21 is excited with the same transmit waveform and received echoes are given no further electronic attenuation. Every long, narrow piezoelectric ceramic element 21 has signal and ground electrodes 22 and 23 on opposite surfaces and a thickness of one-half wavelength at the emission frequency since the element operates essentially as a half wave resonator. For medical diagnostics, the ultrasound emission frequency is typically 2-5 MHz. Other features of the transducer array, such as the quarter-wave impedance matching layers on the front surface, the wear plate, and the fabrication of the device, are described in detail in the inventors' U.S. Pat. No. 4,217,684, the disclosure of which is incorporated herein by reference.
FIGS. 3 and 4 relate to X-axis shading along the array and parallel to its length (the Z-axis goes into the body). The arrows represent polarization or the coupling coefficient k. The piezoelectric material is strongly poled at the center of the array and more weakly poled at the ends. The change in polarization from the center of the array to the ends depends on the selected shading function, such as the Hamming or raised cosine shading function, and there are many others. The choice depends on the specific requirement and the need to retain good resolution considering that a uniformly weighted aperture gives the best resolution. In the Y-axis direction parallel to the long dimension of the element, the polarization is uniform. All of the array elements 21 are excited by the pulser 24 with the same transmit waveform, but the electric/acoustic conversion efficiency varies along the array and the intensity of emitted radiation is greater at the center than at the ends.
Effective non-uniform conversion efficiency may be achieved in several ways. The preferred technique is to pole the material by applying a relatively long high voltage pulse, then a short low voltage pulse to monitor the polarization of the element. This is done repetitively, monitoring the result after every high voltage pulse. A second technique is to apply a nonuniform high voltage poling field to the ceramic slab with the highest electric fields in the center of the array and reduced fields at the edges. The poling device may consist of a curved conductive plate with added dielectric at the edges or a flat resistive plate with high voltage applied to the middle and ground beyond the edge of the ceramic. Another technique is applying a thermal gradient to the piezoelectric slab, with heat at the edges and cooling in the middle, to appropriately depole a completely and uniformly poled piece of ceramic. A fourth technique is to coat a uniformly poled slab of piezoelectric ceramic with a continuous but porous electrode, with greater porosity at the edges. The ceramic slab is subsequently cut into array elements.
So far side lobe reduction only in the X-direction has been described. Phased arrays may need to be shaded for the Y-axis also, to essentially yield an elliptical or circular aperture, very much like a conventional B-scan transducer. In FIG. 5 the polarization parallel to the length of element 21' changes and is greater at the center and decreases symmetrically toward either end. This array has both X-axis and Y-axis shading and the variation of polarization along the array may be as shown in FIG. 3. One way of poling element 21' is to cut the electrodes into segments and pole each segment by repetitively applying a high voltage pulse and monitoring the polarization. Later the cut electrode is made continuous.
The results of one experiment in which the acoustic aperture of an ultrasonic transducer was shaded by reducing the conversion efficiency at the edges is shown in FIG. 6. Two nominally identical pieces of Channel 5500 piezoelectric ceramic were cut to the same lateral dimensions (approximately 1/2 in×5/8 in ) and same thickness (approximately 0.7 mm). Both pieces have electrodes on their large faces. One piece was selected for the reduced conversion efficiency sample, while the other remained as a control. The control sample had been polarized at the manufacturing facility and was assumed to be uniformly poled. The electrode on the other piece was cut into three equal area pieces by two parallel cuts which were just deep enough to separate the electrodes. The end electrodes were attached to the terminal of a high voltage source and were depolarized. Tests with a piezoelectric coupling constant meter confirmed the reduction in piezoelectric activity of the end segments compared to the center.
FIG. 6 shows the different radiation patterns obtained from these two devices. The control or unshaded sample had a narrower beam caused by the wider effective aperture, but the side lobes are relatively large. Diffraction theory predicts -26 dB (two way) side lobes for this case. The shaded, reduced polarization sample has a wider main lobe but there is a significant reduction in the side lobes. The amplitude of the first side lobe is approximately the same as that of a second side lobe of the control sample. The general features of the radiation patterns are in good agreement with diffraction theory.
The technique is applicable to any piezoelectric transducer. Because the aperture of linear and phased array transducers is rectangular, this technique produces more dramatic effects on these devices. Changes in system electronics are not required, and existing ultrasonic instruments can be improved by merely changing the transducer.
Another way of shading a linear phased array ultrasonic transducer is by having different mechanical element lengths. In FIG. 7, transducer array 25 is roughly elliptical and elements 26 at the ends of the array have a reduced area and are shorter than the central elements. This shaded transducer array is fabricated as taught in U.S. Pat. No. 4,217,684. A fully and uniformly poled slab of piezoelectric is plated on all six sides, isolation slots 27 are cut into the top surface to separate the signal electrode 28 from the wrap-around ground electrode 29, and the piece is cut into individual elements. Inner elements have the usual length and narrow Y-axis radiation patterns while outer elements are short and have wide radiation patterns. Assuming perfect phase quantization, this device approaches a B-scan aperture. Care is taken to include amplitude shading effects on receive due to the change in element/cable capacitance ratio.
A third major technique of shading a phased array ultrasonic transducer is by selective piezoelectric poling. Referring to FIG. 8, an unpoled piezoelectric slab 33 is temporarily plated on both surfaces only over the selected ellipitcal (or circular) aperture 34 and is poled uniformly under this electrode. The piezoelectric ceramic slab 33 is fully plated to provide signal and ground electrodes 35 and 36 by the standard array fabrication process and cut into individual elements 37. Even though electrodes cover the full rectangular aperture, electric/acoustic conversion occurs only in the selectively poled region. All elements now also have approximately the same capacitance to alleviate the element/cable capacitance variation problem. This embodiment of the shaded linear array has X- and Y-axis shading and reduced side lobe levels, and changing the geometry of the poled region changes the shading function.
The shaded single element circular transducer 38 in FIG. 9 is selectively poled. The top and bottom surfaces of the unpoled piezoelectric slab 39 are provided with rosette electrodes 40 which are aligned and have many petals extending from the center to the edge. The material under the rosette electrode is poled by applying a high voltage; the material outside of the electrodes remains unpoled. Thereafter the slab is fully plated on on both sides. If one looks at concentric annuli starting at the center, the fraction of poled area is high at the center and decreases toward the edges. Electric/acoustic conversion occurs only in the selectively poled region, and the intensity of the emitted ultrasound is largest at the center and decreases toward the edges.
A fourth technique of shading an ultrasonic transducer is by electrode geometry. This is not suitable for phased array transducers but does realize Y-axis shading of large slab single element transducers and linear array transducers in which groups of elements are excited in sequence. The basic principle of Y-axis shading via electrode geometry is illustrated in FIG. 10. The piezoelectric slab 43 is uniformly polarized and the front surface of the element has a continuous electrode 44 extending over its entire length. The back surface, however, has a continuous electrode 45 extending over only a fraction of the length of the element. This electrode geometry results in non-uniform electric field lines 46 across the ceramic.
Test data was taken on a transducer which had a continuous front electrode and a discontinuous back electrode which was segmented into five electrodes of approximately equal area. By shorting an appropriate number of the segments together, a number of electrode geometries were tested. The results of beam pattern measurements for two different geometries are presented in FIG. 11. The solid curve represents the beam profile obtained when the center three electrodes were shorted together (the electrode is over 60 percent of the back surface). and the dashed curve is the beam profile obtained when the entire back electrode was shorted together. The side lobe level is greatly reduced and the main lobe resolution is slightly reduced for three electrodes as compared to five electrodes. The partial electrode does not merely reduce the size of the effective aperture, but also serves to shade the aperture.
The foregoing transducer configurations discriminate against information from the outer edge of the aperture, and lead to better side lobe reduction throughout the imaged area at the expense of somewhat poorer resolution at longer range. Clinical experience is that side lobe reduction and high sensitivity are often more important than good resolution for diagnostic ultrasound.
The concurrently filed application Ser. No. 349,146, now U.S. Pat. No. 4,425,525 "Ultrasonic Transducer Array Shading", L. S. Smith, A. F. Brisken, and M. S. Horner, describes an array with generally diamond-shaped transducer elements for Y-axis shading. This is the presently known best mode for real time imaging using a phased array system. The two inventions are commonly assigned.
While the invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (5)
1. A linear phased array ultrasonic transducer having X-axis and Y-axis shading comprising: a plurality of long, narrow piezoelectric ceramic transducer elements each having electrodes on opposite surfaces, the polarization of said elements varying as a function of position in the X-axis direction along the array depending on a selected shading function, and varying in the Y-axis direction parallel to the long dimension of every element such that the polarization is greater at the center and decreases symmetrically toward either end, whereby the radiation pattern of said shaded array has reduced side lobe levels.
2. The ultrasonic transducer of claim 1 wherein said selected shading function is the raised cosine or Hamming.
3. A linear phased array ultrasonic transducer having X-axis and Y-axis shading along the array and perpendicular thereto comprising: a plurality of piezoelectric ceramic transducer elements each having electrodes on opposite surfaces, said array being generally elliptical and said elements having different mechanical lengths and elements at the ends are shorter than central elements, whereby the radiation pattern of said shaded array has reduced side lobe levels.
4. A linear phased array ultrasonic transducer having X-axis and Y-axis shading along the array and perpendicular thereto comprising: a plurality of long, narrow transducer elements of piezoelectric ceramic material each having electrodes on opposite surfaces, said piezoelectric material being selectively poled such that there is a uniformly poled region at the center of the array and unpoled regions at the edges of the array, whereby electric/acoustic conversion occurs only in the selectively poled region and the radiation pattern of the array has reduced side lobe levels.
5. The ultrasonic transducer of claim 4 wherein said uniformly poled region is elliptical.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/349,143 US4460841A (en) | 1982-02-16 | 1982-02-16 | Ultrasonic transducer shading |
DE3304666A DE3304666C2 (en) | 1982-02-16 | 1983-02-11 | Ultrasonic transducer with gradation |
JP58022215A JPS58161492A (en) | 1982-02-16 | 1983-02-15 | Shaded supersonic converter |
GB08304240A GB2114857B (en) | 1982-02-16 | 1983-02-16 | Ultrasonic transducer shading |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/349,143 US4460841A (en) | 1982-02-16 | 1982-02-16 | Ultrasonic transducer shading |
Publications (1)
Publication Number | Publication Date |
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US4460841A true US4460841A (en) | 1984-07-17 |
Family
ID=23371086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06/349,143 Expired - Lifetime US4460841A (en) | 1982-02-16 | 1982-02-16 | Ultrasonic transducer shading |
Country Status (4)
Country | Link |
---|---|
US (1) | US4460841A (en) |
JP (1) | JPS58161492A (en) |
DE (1) | DE3304666C2 (en) |
GB (1) | GB2114857B (en) |
Cited By (49)
Publication number | Priority date | Publication date | Assignee | Title |
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US4518889A (en) * | 1982-09-22 | 1985-05-21 | North American Philips Corporation | Piezoelectric apodized ultrasound transducers |
US4868447A (en) * | 1987-09-11 | 1989-09-19 | Cornell Research Foundation, Inc. | Piezoelectric polymer laminates for torsional and bending modal control |
US4910838A (en) * | 1986-05-07 | 1990-03-27 | Aktieselskabet Bruel & Kjaer | Method for providing a desired sound field as well as an ultrasonic transducer for carrying out the method |
US4961252A (en) * | 1989-12-08 | 1990-10-09 | Iowa State University Research Foundation, Inc. | Means and method for nonuniform poling of piezoelectric transducers |
US5101133A (en) * | 1990-01-09 | 1992-03-31 | Richard Wolf Gmbh | Ultrasonic transducer having piezoelectric transducer elements |
US5155708A (en) * | 1991-02-26 | 1992-10-13 | Bedi Ram L | Acoustic wave sensor and method of making same |
US5191796A (en) * | 1990-08-10 | 1993-03-09 | Sekisui Kaseihin Koygo Kabushiki Kaisha | Acoustic-emission sensor |
US5212667A (en) * | 1992-02-03 | 1993-05-18 | General Electric Company | Light imaging in a scattering medium, using ultrasonic probing and speckle image differencing |
US5226422A (en) * | 1991-05-08 | 1993-07-13 | Advanced Technology Laboratories, Inc. | Transesophageal echocardiography scanner with rotating image plane |
DE4209374A1 (en) * | 1992-03-23 | 1993-09-30 | Siemens Ag | Air ultrasonic transducer |
US5250869A (en) * | 1990-03-14 | 1993-10-05 | Fujitsu Limited | Ultrasonic transducer |
US5283497A (en) * | 1992-02-10 | 1994-02-01 | Rockwell International Corporation | Electrotiltable material (tilter) |
US5285789A (en) * | 1992-04-21 | 1994-02-15 | Hewlett-Packard Company | Ultrasonic transducer apodization using acoustic blocking layer |
US5320104A (en) * | 1991-04-17 | 1994-06-14 | Hewlett-Packard Company | Transesophageal ultrasound probe |
US5327397A (en) * | 1991-03-29 | 1994-07-05 | The Charles Stark Draper Laboratories, Inc. | Wideband, derivative-matched, continuous aperture acoustic transducer |
US5329202A (en) * | 1991-11-22 | 1994-07-12 | Advanced Imaging Systems | Large area ultrasonic transducer |
US5349262A (en) * | 1994-02-22 | 1994-09-20 | Hewlett-Packard Company | Phased array ultrasound imaging system with dynamic elevation focusing |
US5350964A (en) * | 1990-02-28 | 1994-09-27 | Fujitsu Limited | Ultrasonic transducer and method of manufacturing the same |
US5371717A (en) * | 1993-06-15 | 1994-12-06 | Hewlett-Packard Company | Microgrooves for apodization and focussing of wideband clinical ultrasonic transducers |
US5373483A (en) * | 1991-03-29 | 1994-12-13 | The Charles Stark Draper Laboratory, Inc. | Curvilinear wideband, projected derivative-matched, continuous aperture acoustic transducer |
US5381067A (en) * | 1993-03-10 | 1995-01-10 | Hewlett-Packard Company | Electrical impedance normalization for an ultrasonic transducer array |
US5410208A (en) * | 1993-04-12 | 1995-04-25 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
US5423319A (en) * | 1994-06-15 | 1995-06-13 | Hewlett-Packard Company | Integrated impedance matching layer to acoustic boundary problems for clinical ultrasonic transducers |
US5511550A (en) * | 1994-10-14 | 1996-04-30 | Parallel Design, Inc. | Ultrasonic transducer array with apodized elevation focus |
US5542426A (en) * | 1993-06-08 | 1996-08-06 | Fujitsu Limited | Method of fabricating ultrasonic probe |
US5706820A (en) * | 1995-06-07 | 1998-01-13 | Acuson Corporation | Ultrasonic transducer with reduced elevation sidelobes and method for the manufacture thereof |
US5789846A (en) * | 1995-12-13 | 1998-08-04 | The Whitaker Corporation | Capacitively coupled ground electrode for piezo-electric film |
US6027448A (en) * | 1995-03-02 | 2000-02-22 | Acuson Corporation | Ultrasonic transducer and method for harmonic imaging |
US6217151B1 (en) * | 1998-06-18 | 2001-04-17 | Xerox Corporation | Controlling AIP print uniformity by adjusting row electrode area and shape |
US6634071B2 (en) * | 1999-10-04 | 2003-10-21 | The United States Of America As Represented By The Secretary Of The Navy | Method of making shaped piezoelectric composite transducer |
US6822374B1 (en) * | 2000-11-15 | 2004-11-23 | General Electric Company | Multilayer piezoelectric structure with uniform electric field |
US20050023934A1 (en) * | 2003-07-08 | 2005-02-03 | Kabushiki Kaisha Toshiba | Piezoelectric transducer including a plurality of piezoelectric members |
US20050099097A1 (en) * | 2003-11-11 | 2005-05-12 | Baumgartner Charles E. | Method for making multi-layer ceramic acoustic transducer |
US20050099096A1 (en) * | 2003-11-11 | 2005-05-12 | Baumgartner Charles E. | Method for making multi-layer ceramic acoustic transducer |
US6929608B1 (en) * | 1995-11-09 | 2005-08-16 | Brigham And Women's Hospital, Inc. | Apparatus for deposition of ultrasound energy in body tissue |
DE102005032212B3 (en) * | 2005-07-09 | 2006-10-19 | Atlas Elektronik Gmbh | Antenna for underwater has an electro-acoustic modulator system having a composite body with ceramic elements embedded in a polymer and made from piezoelectric/electrostrictive ceramic material |
US20070049837A1 (en) * | 2005-06-21 | 2007-03-01 | Shertukde Hemchandra M | Acoustic sensor |
US7443081B2 (en) * | 2001-04-13 | 2008-10-28 | Furuno Electric Company, Limited | Multi-frequency transmission/reception apparatus |
US20090256447A1 (en) * | 2006-07-31 | 2009-10-15 | Loki Incorporated | Ferroelectric energy generator, system, and method |
US20100160837A1 (en) * | 2008-12-22 | 2010-06-24 | Cutera, Inc. | Broad-area irradiation of small near-field targets using ultrasound |
US20110006642A1 (en) * | 2009-07-13 | 2011-01-13 | Loki Incorporated | Ferroelectric energy generator with voltage-controlled switch |
US20140257145A1 (en) * | 2013-03-08 | 2014-09-11 | Ulthera, Inc. | Devices and methods for multi-focus ultrasound therapy |
US9404782B2 (en) * | 2014-10-21 | 2016-08-02 | Honeywell International, Inc. | Use of transducers with a piezo ceramic array to improve the accuracy of ultra sonic meters |
US20170133994A1 (en) * | 2005-04-11 | 2017-05-11 | St. Jude Medical, Atrial Fibrillation Division, Inc. | High intensity ultrasound transducers and methods and devices for manufacturing high intensity ultrasound transducers |
US9683971B2 (en) | 2013-04-25 | 2017-06-20 | Canon Kabushiki Kaisha | Object information acquiring apparatus and control method thereof |
US10189049B2 (en) | 2013-04-25 | 2019-01-29 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing same |
CN109782260A (en) * | 2019-03-13 | 2019-05-21 | 海鹰企业集团有限责任公司 | A method of reducing linear array secondary lobe |
US10293374B2 (en) | 2013-04-25 | 2019-05-21 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing same |
EP3646956A1 (en) * | 2018-11-02 | 2020-05-06 | IMEC vzw | A phased array ultrasound apparatus, a system for user interaction and a method for forming a combined ultrasonic wave based on a phased array ultrasound apparatus |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS62224199A (en) * | 1986-03-25 | 1987-10-02 | Ngk Spark Plug Co Ltd | Piezoelectric element for sound wave transmission and reception |
FR2596269A1 (en) * | 1986-03-28 | 1987-10-02 | Labo Electronique Physique | APODIZED ULTRASONIC ULTRASONIC ECHOGRAPH WITH LINEAR BARRIER OF PIEZOELECTRIC TRANSDUCERS AND METHOD FOR PRODUCING SAID BARREL |
JP2559708B2 (en) * | 1986-07-08 | 1996-12-04 | 日立金属株式会社 | Piezoelectric vibrator |
JPS63250999A (en) * | 1987-04-07 | 1988-10-18 | Japan Radio Co Ltd | piezoelectric vibrator |
JPS63250997A (en) * | 1987-04-07 | 1988-10-18 | Japan Radio Co Ltd | piezoelectric vibrator |
NL8801776A (en) * | 1988-07-13 | 1990-02-01 | Optische Ind De Oude Delft Nv | ULTRASONIC TRANSDUCER INCLUDING AT LEAST ONE ROW OF ULTRASONIC ELEMENTS. |
US4890268A (en) * | 1988-12-27 | 1989-12-26 | General Electric Company | Two-dimensional phased array of ultrasonic transducers |
GB8912782D0 (en) * | 1989-06-02 | 1989-07-19 | Udi Group Ltd | An acoustic transducer |
FR2730375B1 (en) * | 1995-02-07 | 1997-04-25 | Centre Nat Rech Scient | ULTRASONIC TRANSDUCER |
JP5963253B2 (en) * | 2011-09-29 | 2016-08-03 | 日立Geニュークリア・エナジー株式会社 | Ultrasonic sensor |
WO2021210151A1 (en) * | 2020-04-17 | 2021-10-21 | 本多電子株式会社 | Sonar |
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JPS5826719B2 (en) * | 1976-10-21 | 1983-06-04 | 古野電気株式会社 | piezoelectric vibrator |
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-
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- 1982-02-16 US US06/349,143 patent/US4460841A/en not_active Expired - Lifetime
-
1983
- 1983-02-11 DE DE3304666A patent/DE3304666C2/en not_active Expired
- 1983-02-15 JP JP58022215A patent/JPS58161492A/en active Granted
- 1983-02-16 GB GB08304240A patent/GB2114857B/en not_active Expired
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US2427062A (en) * | 1944-06-02 | 1947-09-09 | Brush Dev Co | Vibrational energy transmitter or receiver |
US2837728A (en) * | 1945-12-14 | 1958-06-03 | Schuck Oscar Hugo | Means to alter the directivity pattern of energy translating devices |
US2928068A (en) * | 1952-03-25 | 1960-03-08 | Gen Electric | Compressional wave transducer and method of making the same |
US2875355A (en) * | 1954-05-24 | 1959-02-24 | Gulton Ind Inc | Ultrasonic zone plate focusing transducer |
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Cited By (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4518889A (en) * | 1982-09-22 | 1985-05-21 | North American Philips Corporation | Piezoelectric apodized ultrasound transducers |
US4910838A (en) * | 1986-05-07 | 1990-03-27 | Aktieselskabet Bruel & Kjaer | Method for providing a desired sound field as well as an ultrasonic transducer for carrying out the method |
US4868447A (en) * | 1987-09-11 | 1989-09-19 | Cornell Research Foundation, Inc. | Piezoelectric polymer laminates for torsional and bending modal control |
US4961252A (en) * | 1989-12-08 | 1990-10-09 | Iowa State University Research Foundation, Inc. | Means and method for nonuniform poling of piezoelectric transducers |
US5101133A (en) * | 1990-01-09 | 1992-03-31 | Richard Wolf Gmbh | Ultrasonic transducer having piezoelectric transducer elements |
US5350964A (en) * | 1990-02-28 | 1994-09-27 | Fujitsu Limited | Ultrasonic transducer and method of manufacturing the same |
US5250869A (en) * | 1990-03-14 | 1993-10-05 | Fujitsu Limited | Ultrasonic transducer |
US5191796A (en) * | 1990-08-10 | 1993-03-09 | Sekisui Kaseihin Koygo Kabushiki Kaisha | Acoustic-emission sensor |
US5155708A (en) * | 1991-02-26 | 1992-10-13 | Bedi Ram L | Acoustic wave sensor and method of making same |
US5373483A (en) * | 1991-03-29 | 1994-12-13 | The Charles Stark Draper Laboratory, Inc. | Curvilinear wideband, projected derivative-matched, continuous aperture acoustic transducer |
US5327397A (en) * | 1991-03-29 | 1994-07-05 | The Charles Stark Draper Laboratories, Inc. | Wideband, derivative-matched, continuous aperture acoustic transducer |
US5320104A (en) * | 1991-04-17 | 1994-06-14 | Hewlett-Packard Company | Transesophageal ultrasound probe |
US5226422A (en) * | 1991-05-08 | 1993-07-13 | Advanced Technology Laboratories, Inc. | Transesophageal echocardiography scanner with rotating image plane |
US5329202A (en) * | 1991-11-22 | 1994-07-12 | Advanced Imaging Systems | Large area ultrasonic transducer |
US5212667A (en) * | 1992-02-03 | 1993-05-18 | General Electric Company | Light imaging in a scattering medium, using ultrasonic probing and speckle image differencing |
US5283497A (en) * | 1992-02-10 | 1994-02-01 | Rockwell International Corporation | Electrotiltable material (tilter) |
DE4209374A1 (en) * | 1992-03-23 | 1993-09-30 | Siemens Ag | Air ultrasonic transducer |
US5285789A (en) * | 1992-04-21 | 1994-02-15 | Hewlett-Packard Company | Ultrasonic transducer apodization using acoustic blocking layer |
US5381067A (en) * | 1993-03-10 | 1995-01-10 | Hewlett-Packard Company | Electrical impedance normalization for an ultrasonic transducer array |
US5410208A (en) * | 1993-04-12 | 1995-04-25 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
US5542426A (en) * | 1993-06-08 | 1996-08-06 | Fujitsu Limited | Method of fabricating ultrasonic probe |
US5371717A (en) * | 1993-06-15 | 1994-12-06 | Hewlett-Packard Company | Microgrooves for apodization and focussing of wideband clinical ultrasonic transducers |
US5349262A (en) * | 1994-02-22 | 1994-09-20 | Hewlett-Packard Company | Phased array ultrasound imaging system with dynamic elevation focusing |
US5423319A (en) * | 1994-06-15 | 1995-06-13 | Hewlett-Packard Company | Integrated impedance matching layer to acoustic boundary problems for clinical ultrasonic transducers |
US5511550A (en) * | 1994-10-14 | 1996-04-30 | Parallel Design, Inc. | Ultrasonic transducer array with apodized elevation focus |
US6027448A (en) * | 1995-03-02 | 2000-02-22 | Acuson Corporation | Ultrasonic transducer and method for harmonic imaging |
US5706820A (en) * | 1995-06-07 | 1998-01-13 | Acuson Corporation | Ultrasonic transducer with reduced elevation sidelobes and method for the manufacture thereof |
US6929608B1 (en) * | 1995-11-09 | 2005-08-16 | Brigham And Women's Hospital, Inc. | Apparatus for deposition of ultrasound energy in body tissue |
US5789846A (en) * | 1995-12-13 | 1998-08-04 | The Whitaker Corporation | Capacitively coupled ground electrode for piezo-electric film |
US6217151B1 (en) * | 1998-06-18 | 2001-04-17 | Xerox Corporation | Controlling AIP print uniformity by adjusting row electrode area and shape |
US6634071B2 (en) * | 1999-10-04 | 2003-10-21 | The United States Of America As Represented By The Secretary Of The Navy | Method of making shaped piezoelectric composite transducer |
US6822374B1 (en) * | 2000-11-15 | 2004-11-23 | General Electric Company | Multilayer piezoelectric structure with uniform electric field |
US7443081B2 (en) * | 2001-04-13 | 2008-10-28 | Furuno Electric Company, Limited | Multi-frequency transmission/reception apparatus |
US20050023934A1 (en) * | 2003-07-08 | 2005-02-03 | Kabushiki Kaisha Toshiba | Piezoelectric transducer including a plurality of piezoelectric members |
US20060186763A1 (en) * | 2003-07-08 | 2006-08-24 | Kabushiki Kaisha Toshiba | Piezoelectric transducer including a plurality of piezoelectric members |
US7276838B2 (en) * | 2003-07-08 | 2007-10-02 | Kabushiki Kaisha Toshiba | Piezoelectric transducer including a plurality of piezoelectric members |
US7309947B2 (en) * | 2003-07-08 | 2007-12-18 | Kabushiki Kaisha Toshiba | Piezoelectric transducer including a plurality of piezoelectric members |
US20050099096A1 (en) * | 2003-11-11 | 2005-05-12 | Baumgartner Charles E. | Method for making multi-layer ceramic acoustic transducer |
US7017245B2 (en) | 2003-11-11 | 2006-03-28 | General Electric Company | Method for making multi-layer ceramic acoustic transducer |
US20060117551A1 (en) * | 2003-11-11 | 2006-06-08 | Baumgartner Charles E | Multi-layer ceramic acoustic transducer |
US20050099097A1 (en) * | 2003-11-11 | 2005-05-12 | Baumgartner Charles E. | Method for making multi-layer ceramic acoustic transducer |
US7148608B2 (en) | 2003-11-11 | 2006-12-12 | General Electric Company | Multi-layer ceramic acoustic transducer |
US7156938B2 (en) | 2003-11-11 | 2007-01-02 | General Electric Company | Method for making multi-layer ceramic acoustic transducer |
US20170133994A1 (en) * | 2005-04-11 | 2017-05-11 | St. Jude Medical, Atrial Fibrillation Division, Inc. | High intensity ultrasound transducers and methods and devices for manufacturing high intensity ultrasound transducers |
US20070049837A1 (en) * | 2005-06-21 | 2007-03-01 | Shertukde Hemchandra M | Acoustic sensor |
DE102005032212B3 (en) * | 2005-07-09 | 2006-10-19 | Atlas Elektronik Gmbh | Antenna for underwater has an electro-acoustic modulator system having a composite body with ceramic elements embedded in a polymer and made from piezoelectric/electrostrictive ceramic material |
US20090256447A1 (en) * | 2006-07-31 | 2009-10-15 | Loki Incorporated | Ferroelectric energy generator, system, and method |
US20100160837A1 (en) * | 2008-12-22 | 2010-06-24 | Cutera, Inc. | Broad-area irradiation of small near-field targets using ultrasound |
US8585618B2 (en) * | 2008-12-22 | 2013-11-19 | Cutera, Inc. | Broad-area irradiation of small near-field targets using ultrasound |
US7999445B2 (en) | 2009-07-13 | 2011-08-16 | Loki Incorporated | Ferroelectric energy generator with voltage-controlled switch |
US20110006642A1 (en) * | 2009-07-13 | 2011-01-13 | Loki Incorporated | Ferroelectric energy generator with voltage-controlled switch |
US20140257145A1 (en) * | 2013-03-08 | 2014-09-11 | Ulthera, Inc. | Devices and methods for multi-focus ultrasound therapy |
US10420960B2 (en) * | 2013-03-08 | 2019-09-24 | Ulthera, Inc. | Devices and methods for multi-focus ultrasound therapy |
US9683971B2 (en) | 2013-04-25 | 2017-06-20 | Canon Kabushiki Kaisha | Object information acquiring apparatus and control method thereof |
US10189049B2 (en) | 2013-04-25 | 2019-01-29 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing same |
US10293374B2 (en) | 2013-04-25 | 2019-05-21 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing same |
US9404782B2 (en) * | 2014-10-21 | 2016-08-02 | Honeywell International, Inc. | Use of transducers with a piezo ceramic array to improve the accuracy of ultra sonic meters |
EP3646956A1 (en) * | 2018-11-02 | 2020-05-06 | IMEC vzw | A phased array ultrasound apparatus, a system for user interaction and a method for forming a combined ultrasonic wave based on a phased array ultrasound apparatus |
CN109782260A (en) * | 2019-03-13 | 2019-05-21 | 海鹰企业集团有限责任公司 | A method of reducing linear array secondary lobe |
CN109782260B (en) * | 2019-03-13 | 2021-07-20 | 海鹰企业集团有限责任公司 | Method for reducing linear array side lobe |
Also Published As
Publication number | Publication date |
---|---|
JPH0124479B2 (en) | 1989-05-11 |
DE3304666C2 (en) | 1986-03-20 |
GB8304240D0 (en) | 1983-03-23 |
DE3304666A1 (en) | 1983-08-25 |
GB2114857A (en) | 1983-08-24 |
JPS58161492A (en) | 1983-09-26 |
GB2114857B (en) | 1986-02-26 |
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