US8027087B2

US8027087B2 - Multilayer wire-grid polarizer with off-set wire-grid and dielectric grid

Info

Publication number: US8027087B2
Application number: US12/879,315
Authority: US
Inventors: Raymond T. Perkins; Cheng-Yuan Cheng; Douglas P. Hansen; Eric W. Gardner
Original assignee: Moxtek Inc
Current assignee: Moxtek Inc
Priority date: 2004-12-06
Filing date: 2010-09-10
Publication date: 2011-09-27
Anticipated expiration: 2024-12-06
Also published as: BRPI0518402A2; EP3570081A1; WO2006063049A1; CN101073024A; US20100328770A1; JP4843617B2; EP1820051A1; EP1820051B1; US20090168171A1; KR101234986B1; AU2005314134A1; US20060119937A1; US20120008205A1; EP1820051A4; US7570424B2; KR20070092233A; US7813039B2; JP2008523422A

Abstract

A wire-grid polarizer includes a wire-grid layer disposed over a substrate. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS AND CLAIM OF PRIORITY

This is a continuation of U.S. patent application Ser. No. 12/400,100, filed on Mar. 9, 2009 now U.S. Pat. No. 7,813,039; which is a divisional of U.S. patent application Ser. No. 11/005,927, filed on Dec. 6, 2004, now U.S. Pat. No. 7,570,424; which are herein incorporated by reference.

BACKGROUND

The present invention relates generally to wire-grid polarizers for the visible and near visible spectrum.

A wire grid polarizer (WGP) is an array of parallel wires disposed on the surface of a substrate, such as glass. Usually wire-grid polarizers are a single, periodic array of wires on the substrate. The grid acts as a diffraction grating when the period of the wires is greater than about half of the wavelength of light. The grid acts as a polarizer when the period of the wires is less than about half the wavelength of light.

While it is desirable for a WGP to transmit all of the light of one polarization and reflect all of the other polarization, no polarizer is perfect. Real WGPs will transmit some of the light of both polarizations and will reflect some of the light of both polarizations. When light is incident on the surface of a transparent material, such as a sheet of glass, a small amount of the light is reflected. For example, at normal incidence, about 4% of the incident light is reflected from each surface of the glass.

It has been suggested to dispose a film under a WGP, or between the wires and the substrate, to move the first diffraction order to shorter wavelengths in order to improve performance in part of the visible spectrum, such as blue light. See U.S. Pat. No. 6,122,103. The film has an index of refraction less than that of the substrate. It has also been suggested to etch into either the substrate or underlying layer to further reduce the effective refractive index under the wire grid. See U.S. Pat. No. 6,122,103. It has been further suggested to form each wire as a composite with alternating metal and dielectric layers. See U.S. Pat. No. 6,532,111.

SUMMARY

It has been recognized that it would be advantageous to develop a wire-grid polarizer with improved performance, or a wire-grid polarizer with increased transmission of a desired polarization state, such as p, and decreased transmission (or increased reflection) of another polarization state, such as s. In addition, it has been recognized that a wire-grid polarizer can act as a metal for reflecting one polarization state and act as a thin film of lossy dielectric for the other polarization state. Thus, it has been recognized that form birefringence and effective index of refraction can be applied to a wire-grid polarizer. In addition, it has been recognized that a wire-grid polarizer can be treated as a thin film layer, and incorporated into an optical stack.

Briefly, and in general terms, the invention is directed to multilayer wire-grid polarizers for polarizing light. In accordance with one aspect of the invention, the polarizer includes a wire-grid layer disposed over a substrate. The wire-grid layer includes an array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light and defining gaps between the elements. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. Each dielectric-grid layer includes an array of dielectric material elements. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.

In accordance with another aspect of the present invention, the polarizer includes a stack of thin film layers disposed over a substrate. At least one of the thin film layers is uniform in structure and material. At least one of the thin film layers includes a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light. At least one of the thin film layers includes a dielectric array of dielectric material elements.

BRIEF DESCRIPTION OF THE DRAWINGS

Additional features and advantages of the invention will be apparent from the detailed description which follows, taken in conjunction with the accompanying drawings, which together illustrate, by way of example, features of the invention; and, wherein:

FIGS. 1 and 2 are cross-sectional side schematic views of multilayer wire grid polarizers in accordance with embodiments of the present invention (the figures are not to scale and features are shown greatly exaggerated for clarity);

FIG. 3 is a cross-sectional side schematic view of a multilayer wire grid polarizer in accordance with an exemplary embodiment of the present invention (the figure is not to scale and features are shown greatly exaggerated for clarity);

FIG. 4 a is a graph of p-polarization reflection versus wavelength for the multilayer wire grid polarizer of FIG. 3 compared to other polarizers;

FIG. 4 b is a graph of s-polarization transmittance versus wavelength for the multilayer wire grid polarizer of FIG. 3 compared to other polarizers;

FIG. 4 c is a graph of p-polarization transmittance versus wavelength for the multilayer wire grid polarizer of FIG. 3 compared to other polarizers;

FIG. 5 is a cross-sectional side schematic view of a multilayer wire grid polarizer in accordance with an exemplary embodiment of the present invention (the figure is not to scale and features are shown greatly exaggerated for clarity);

FIG. 6 a is a graph of s-polarization reflection versus wavelength for the multilayer wire grid polarizer of FIG. 5 compared to another polarizer;

FIG. 6 b is a graph of p-polarization transmittance versus wavelength for the multilayer wire grid polarizer of FIG. 5 compared to another polarizer;

FIG. 7 is a cross-sectional side schematic view of a multilayer wire grid polarizer in accordance with an exemplary embodiment of the present invention (the figure is not to scale and features are shown greatly exaggerated for clarity);

FIG. 8 is a cross-sectional side schematic view of a multilayer wire grid polarizer in accordance with an exemplary embodiment of the present invention (the figure is not to scale and features are shown greatly exaggerated for clarity);

FIG. 9 is a graph of p-polarization reflection versus wavelength for the multilayer wire grid polarizers of FIGS. 7 and 8 compared to another polarizer;

FIGS. 10 a and b are cross-sectional side schematic views of multilayer wire grid polarizers in accordance with exemplary embodiments of the present invention (the figures are not to scale and features are shown greatly exaggerated for clarity);

FIG. 11 is a graph of s-polarization reflection versus wavelength for the multilayer wire grid polarizers of FIGS. 10 a and b compared to another polarizer;

FIG. 12 is a cross-sectional side schematic view of another multilayer wire grid polarizer in accordance with exemplary embodiments of the present invention (the figure is not to scale and features are shown greatly exaggerated for clarity);

FIG. 13 is a graph of s-polarization transmittance versus wavelength for the multilayer wire grid polarizer of FIG. 112 compared to another polarizer;

FIG. 14 is a side cross-sectional view of a wire grid layer with a dielectric material in spaces between metal elements of the wire grid layer in accordance with an exemplary embodiment of the present invention; and

FIG. 15 is a side cross-sectional view of a dielectric grid layer with two dielectric grids with elements of two different materials in accordance with an exemplary embodiment of the present invention.

Reference will now be made to the exemplary embodiments illustrated, and specific language will be used herein to describe the same. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENT(S)

It has been recognized that, for one polarization of light, a wire-grid polarizer substantially acts as a metal that reflects the light (or one polarization thereof), while for the other polarization of the light, the wire-grid polarizer substantially acts as a thin film of lossy dielectric that transmits the light (or another polarization thereof). Thus, it has been recognized that two concepts, namely form birefringence and effective index of refraction, can be applied to improve the performance of the polarizer.

A wire-grid polarizer is not typically considered an example of form birefringence. Generally, birefringence means that a material has a different index of refraction for different polarizations. Birefringence is very common in crystalline materials, such as quartz, and in stretched polymers. Form birefringence refers to birefringence caused by the shape of a material.

When a material has variations in material properties, such as density, with the scale of the variation being smaller than the wavelength of light, the index of refraction is different from the index of uniform bulk material. There is an effective refractive index, which is the index that a uniform thin film would have that causes the same affect on light. The theoretical treatment of this effect is called effective medium theory. This phenomenon is used with dielectric materials to make such things as moth-eye antireflection coatings.

In addition, a wire-grid polarizer is not typically considered a thin film. In optics, both form birefringence and effective index are typically considered only for dielectric materials. It has been recognized, however, that treating a wire-grid polarizer as an equivalent birefringent thin film with effective indices of refraction allows one to consider it as an element in a thin film stack, and to use thin film design techniques with particular performance goals.

The present invention utilizes thin films in combination with a metallic wire grid polarizer to improve performance of the polarizer. Generally this may include films under and on top of the wire grid. Any one of these films may be uniform or a dielectric grid. The wire grid may be a composite grid, or have composite wires. Combining the wire grid with multiple layers of different material, and thus different refractive indices, can reduce reflection of the polarization that is desired to be transmitted. For example, a wire grid can be configured to reflect s polarized light, and transmit p polarized light. As discussed above, while it is desirable to transmit all the p polarized light and reflect all the s polarized light, a typical wire grid will transmit some of both polarizations and reflect some of both polarizations. It has been found, however, that treating the wire grid as a birefringent thin film, and combining the wire grid with multiple thin films, reduces reflection of p polarized light.

As illustrated in FIGS. 1 and 2, multilayer wire-grid polarizer devices, indicated generally at 10 a and 10 b, respectively, are shown as exemplary implementations in accordance with the invention for polarizing light 12, or substantially separating one polarization state from an orthogonal polarization state, and doing so in an improved manner, with less reflection and/or transmission of unwanted polarizations. Such devices are believed to have substantial utility in visible light applications, or for use with visible light in the range of approximately 400-700 nm (nanometers), or 0.4-0.7 μm (micrometers or microns). Such visible light applications can include projection display devices such as projectors. The multilayer wire-grid polarizer devices described herein can be utilized in various different capacities, such as polarizers, beam splitters, analyzers, etc. It is also believed that the devices herein have utility in near-visible applications, such as ultraviolet and/or infrared applications, or for use with light in the range of approximately 250-400 nm or 700-10,000 nm. Thus, the term “light” is used broadly herein to refer to visible light, ultraviolet light and infrared light, or electromagnetic waves in the range of 250-10,000 nm.

The

polarizers

10 a and 10 b include a substrate 14 carrying or supporting a plurality or stack of thin film layers 18, including a wire grid or a wire grid layer 22. The substrate 14 can be transparent to the light being treated. For example, the substrate can be glass (Bk7).

Other substrates can be quartz or plastic. In addition, the substrate 14 can have a substantial thickness t_swith respect to the remaining thin film layers. Furthermore, the substrate can have a refractive index (or index of refraction) n_s. For example, a glass substrate (Bk7) has a refractive index n_sof 1.52 (at 550 nm). (It will be appreciated that the refractive index varies slightly with wavelength.)

The wire grid or wire grid layer 22 includes a wire-grid array of elongated metal elements 26. The elements 26 have lengths longer than a wavelength of the light, and are located in a generally parallel arrangement with a period P less than half the wavelength of the light. Thus, for use with visible light, the elements 26 have a length larger than the wavelength of visible light, or greater than 700 nm (0.7 μm). The length, however, can be much longer. The elements 26 can have a center-to-center spacing, pitch or period P less than half the wavelength of visible light, or less than 200 nm (0.2 μm). The elements 26 can also have a width w in the range of 10 to 90% of the pitch or period. The elements 26 can also have a thickness or a height t less than the wavelength of the light, or less than 400 nm (0.4 μm) for visible light applications. In one aspect, the thickness can be less than 0.2 μm for visible light applications.

The elements 26, or the array, generally interact with the visible light to generally 1) transmit a transmitted beam 30 having a substantially uniform and constant linear polarization state (such as p polarization), and 2) reflect a reflected beam 34 also have a substantially uniform and constant linear polarization state (such as s polarization). The elements generally transmit light with a first polarization state (p polarization), oriented locally orthogonal or transverse to the elements, and reflect light with a second polarization state (s polarization), oriented parallel to the elements. It will be appreciated that the wire-grid polarizer will separate the polarization states of the light with a certain degree of efficiency, or some of both polarization states may be transmitted and/or reflected. It will also be appreciated that a portion of the elements can be configured to transmit or reflect a different polarization state.

The elements 26 or array can be formed on or over the substrate by photo-lithography. The elements 26 can be conductive, and can be formed of aluminum, silver, gold or copper.

The plurality of thin film layers 18 can include layers under and/or over the wire grid layer 22. Thus, one or more layers 18 a-c can be disposed between the substrate 14 and the wire grid layer 22. In addition, one or more layers can be disposed over the wire grid layer 22. The layers 18 can be formed of different materials, or materials different than the substrate 14, and even from each other. Thus, the layers 18 can have refractive indices n different than the refractive index n_sof the substrate 14. Furthermore, it has been found that at least one of the layers 18 a-c having a refractive index n_1-3greater than the refractive index n_sof the substrate 14 decreases reflection of the p polarized light. Thus, in accordance with one aspect of the invention, the

polarizer

10 a or 10 b has at least one thin film layer 18 a disposed between the substrate 14 and the wire grid layer 22, and the thin film layer 18 a has a refractive index n₁greater than the refractive index n_sof the substrate 14. In accordance with another aspect of the invention, the

polarizer

10 a or 10 b can have at least two thin film layers 18 a and b, or at least three thin film layers 18 a-c.

The thin film layers 18 a-c can extend continuously across the substrate 14, and can be consistent or constant layers, indicated by 18 a and 18 c. The layers 18 a-c can be formed of dielectric material. For example, the layers can be formed of aluminum oxide; antimony trioxide; antimony sulphide; beryllium oxide; bismuth oxide; bismuth triflouride; cadmium sulphide; cadmium telluride; calcium fluoride; ceric oxide; chiolite; cryolite; germanium; hafnium dioxide; lanthanum fluoride; lanthanum oxide; lead chloride; lead fluoride; lead telluride; lithium fluoride; magnesium fluoride; magnesium oxide; neogymium fluoride; neodymium oxide; praseodymium oxide; scandium oxide; silicon; silicon oxide; disilicon trioxide; silicon dioxide; sodium fluoride; tantalum pentoxide; tellurium; titanium dioxide; thallous chloride; yttrium oxide; zinc selenide; zinc sulphide; and zirconium dioxide. The film layers can be deposited on the substrate. In the case of metal oxides, they can be deposited by starting with an oxide evaporant material (with additional oxygen backfill as needed). The material, however, can also be deposited by evaporating a base metal, then oxidizing the deposited material with O2 in the background.

The thicknesses t_1-3and materials (or refractive indices n_1-3) of the thin film layers 18 a-c can be manipulated to reduce reflection of p polarized light, as described in greater detail below.

One or more of the thin film layers 18 a-c can include a dielectric grid including an array of non-metal elements 38. The non-metal and

metal elements

38 and 26 of the arrays can be oriented substantially parallel with one another. In addition, the arrays can have substantially equal periods and/or widths. In one aspect, the non-metal elements 38 of the dielectric grid and the metal elements 26 are aligned, or the non-metal elements 38 are aligned with the metal elements 26 of the wire grid layer, as shown in FIG. 1. In another aspect, the non-metal elements 38 of the dielectric grid and the metal elements 26 are off-set, or the non-metal elements 38 are off-set with respect to the metal elements 26 of the wire grid layer, as shown in FIG. 2.

As stated above, the plurality of thin film layers 18 can include one or more other thin film layers disposed over the wire-grid layer 22. The other thin film layer can include a dielectric material, and can be continuous or constant. In addition, the other thin film layer 42 can include a dielectric grid including an array of non-metal elements 46. The non-metal and

metal elements

46 and 26 of the arrays can be oriented substantially parallel with one another, and can have substantially equal periods. In one aspect, the non-metal elements 46 and metal elements 26 are aligned, or the non-metal elements 46 of the dielectric grid are aligned above or over the metal elements 26 of the wire grid layer 22, as shown in FIG. 1. In another aspect, the non-metal elements 46 and metal elements 26 are off-set, or the non-metal elements 46 of the dielectric grid are off-set above the metal elements 26 of the wire grid layer 22.

As discussed above, the number, thicknesses t, and materials (or refractive indices) of the thin film layers 18 can be varied to reduce reflection of p polarized light (increase transmission of p polarized light) and/or reduce transmission of s polarized light (increase reflection of s polarized light). Some of the layers 18 a and c can be uniform in structure and material, while other layers can include grids, such as metal elements 26 of the wire grid layer 22 or

non-metal elements

38 and 46 of a dielectric grid. Examples of specific configurations are discussed below.

Referring to FIG. 3, an example of a multilayer wire-grid polarizer 10 c is shown. The polarizer includes three uniform thin film layers 50 a-c on a glass (BK7) substrate 14 and between the substrate and the wire grid or wire grid layer 22. The substrate 14 has a refractive index n_sof 1.52. The first thin film layer 50 a is a uniform material of magnesium oxide (MgO) having a thickness t₁of 65 nm. Thus, the first layer 50 a has a refractive index n₁of 1.74 (for a wavelength of 550 nm) greater than the refractive index n_sof the substrate 14. The second thin film layer 50 b is a uniform material of ZrO₂having a thickness t₂of 130 nm, and a refractive index of 2.0. Thus, the second layer 50 b also has a refractive index n₂greater than the refractive index n_sof the substrate 14. The third thin film layer 50 c is a uniform material of magnesium fluoride (MgF2) having a thickness t₃of 70 nm. Thus, the third layer 50 c has a refractive index n₃of 1.38 (for a wavelength of 550 nm).

The wire grid layer 22 or wire grid is disposed on top of the third layer 50 c. The wire grid includes elements made of aluminum. The elements can have a period P of 144 nm, a width w of 39.5% of the period, or 57 nm, and a thickness t_wgor height of 155 nm.

Referring to FIGS. 4 a-c, the performance of the polarizer 10 c of FIG. 3 is compared to a similar polarizer with no thin film layers between the wire grid and substrate, and a similar polarizer with a 30 nm layer of magnesium fluoride (MgF₂) between the wire grid and substrate (and thus has a thin film layer with a lower refractive index than the substrate). Light 12 is incident on the polarizer 10 c at an incidence angle of 45 deg. In this case, the p polarization 30 is primarily transmitted, and the s polarization 34 is primarily reflected. Referring to FIG. 4 a, the transmittance of the p polarization through the polarizer 10 c is greater than the other two polarizers (or the reflectance of p polarization from the polarizer is less), as shown by curve at 54. While it can be seen that the polarizer with a thin layer of lower refractive index performs better than the plain polarizer, the polarizer 10 c with the three thin film layers 50 a-c performs even better. Referring to FIG. 4 b, transmittance (leakage) of s polarization light is less with the polarizer 10 c than with either of the other polarizers (or the transmittance of s polarization through the polarizer is less), as shown by curve 56. Referring to FIG. 4 c, the reflection of the p polarization is generally less with the polarizer 10 c than with the other polarizers (or the transmittance of p polarization is greater), as shown by curve 58. The net result is that there is more transmitted p polarization, and improved contrast in both transmission and reflection, which means the purity of the transmitted and reflected polarizations is greater with the multiplayer polarizer 10 c.

Referring to FIG. 5, another example of a multilayer wire-grid polarizer 10 d is shown. The polarizer 10 d includes two dielectric layers or two

dielectric grids

60 a and 60 b disposed directly on top of a wire grid layer 22 or wire grid with elements of aluminum. The wire grid or wire grid layer 22 is disposed on a glass (BK7) substrate 14. The thickness or height t_wgof the elements 26 of the wire grid is 160 nm. The first dielectric grid 60 a is disposed on the wire grid and has a thickness t₁is 100 nm, and formed of silicon oxide (SiO2), with an index of refraction n₁of 1.45. The second dielectric grid 60 b also has a thickness t₂of 100 nm, and is formed of a material with an index of refraction n₂of 2.5. The period P of the grids is 144 nm. The width of the elements is 45% of the period P, or 57 nm. Light 12 is incident at 45 degrees.

Referring to FIGS. 6 a and b, the performance of the polarizer 10 d of FIG. 5 is compared to a similar polarizer without dielectric grids on top. Because the period P of the grids is less than the wavelength of visible light, they all essentially behave as thin films. In FIG. 6 a it is seen that the reflected s polarization is substantially greater with the polarizer 10 d, as shown by curve at 62. In FIG. 6 b it is seen that the transmitted p polarization is also greater with the polarizer 10 d, as shown by curve at 64.

Referring to FIG. 7, another example of a multilayer wire-grid polarizer 10 e is shown. The polarizer 10 e includes three uniform thin film layers 70 a-c between a wire grid or wire grid layer 22 and a glass (BK7) substrate 14. The first layer 70 a is disposed on the substrate 14, has a thickness t₁of 33 nm thick, and has a refractive index n₁of 1.8. The second layer 70 b is a material of magnesium fluoride (MgF₂) with a refractive index n₂of 1.38, and a thickness t₂of 30 nm. The third layer 70 c has a thickness t₃of 20 nm, and has a refractive index n₃of 1.8. Thus, the first and third layers 70 a and c have refractive indices n₁and n₃greater than the refractive index n_sof the substrate 14. The wire grid or wire grid layer 22 includes elements of aluminum with a period P of 144 nm. The element height t_wgis 160 nm, and the element width w is 45% of the period, or 57 nm. Light 12 is normally incident (0 deg.).

Referring to FIG. 8, another example of a multilayer wire-grid polarizer 10 f is shown. The polarizer 10 e includes three thin film layers 80 a-c, similar to those described above for FIG. 7, except that the first layer 80 a has a thickness t₁of 28 nm; the second layer 80 b has a thickness t₂of 25 nm; and the third layer 80 c has a thickness t₃of 17 nm. In addition, the polarizer 10 f includes a thin film layer 84 above the wire grid layer 22. The thin film layer 84 includes a dielectric grid with non-metal elements disposed on the metal elements of the wire grid. The wire grid or wire grid layer 22 is similar to the wire grid described above for FIG. 7. The elements of the dielectric layer 84 have a thicknesses t₄of 100 nm. The elements of the dielectric layer 84 are formed of silicon dioxide (SiO₂).

Referring to FIG. 9, the performance of the polarizers 10 e and f is compared with a similar wire grid polarizer without the thin film layers. Both polarizers 10 e and f reflect less p polarization (pass more p polarization), as shown by curves at 86 and 88. The polarizer 10 f with thin film layers under the wire grid layer and dielectric grids above the wire grid shows significant improvement, as shown by curve at 88.

Referring to FIGS. 10 a and b, examples of multilayer wire-grid polarizers 10 g and h are shown. Both polarizers 10 g and h include a wire grid or wire grid layer 22 disposed on a substrate 14. The wire grid can include elements of aluminum and the substrate can be glass (BK7). The period P of the wire grid is 144 nm, and the elements have a thickness t_wgof 150 nm. The width w of the elements is 45% of the period, or 65 nm. In addition, the elements 26 define spaces 92 therebetween that include a material with a refractive index n₁of 1.17. A second uniform layer 96 is disposed on top of the elements 26 and spaces 92, or the wire grid layer 22, that has a thickness t₂of 100 nm and a refractive index n₂of 1.17. A third thin film layer 100 is disposed over the second layer 96. The third layer 100 has uniform layer of silicon dioxide (SiO₂) and a thickness t₃of 60 nm. Thus, the third layer 100 has an index of refraction n₃of 1.45. A fourth layer 104 is disposed on the third layer 100, and includes a dielectric grid with non-metal elements. The elements of the dielectric grid have a thickness t₄of 50 nm. The elements of the dielectric grid are formed of silicon dioxide (SiO2) and have a refractive index n₄of 2.0. The width w of the elements of the dielectric layer is 50% of the period. The elements of the dielectric layer are disposed substantially directly above the elements of the wire grid, as shown in FIG. 10 a. Alternatively, the elements of the dielectric layer can be off-set with respect to the elements of the wire grid, or are shifted one half period so that they are substantially above the spaces between the elements of the wire grid, as shown in FIG. 10 b. The light 12 is incident at 45 degrees.

Referring to FIG. 11, the performance of the polarizers 10 g and h are compared with a similar polarizer with only a wire grid on a glass substrate. The polarizers 10 g and h have improved reflectance of s polarization, as shown by curves at 104 (which overlap each other). In addition, it appears that the alignment of the dielectric grid to the wire grid is not relevant when the conditions for effective medium theory apply. These examples also show that uniform layers and dielectric layers may be combined and used to advantage. In addition, these examples demonstrate the principle of the effective medium theory.

Referring to FIG. 12, another example of a multilayer wire-grid polarizer 10 i is shown. The polarizer 10 i is similar to the polarizer 10 c of FIG. 3, but includes a wire grid or wire grid layer 112 with composite elements. The composite elements can include alternating layers of metal and non-metal layers. Examples of such composite elements are found in U.S. Pat. No. 6,532,111, which is herein incorporated by reference. For example, each element can include of alternating layers of aluminum and magnesium fluoride.

Referring to FIG. 13, the performance of the polarizer 10 i is compared to a similar polarizer with composite elements, but without the thin film layers between the substrate and the wire grid layer. The polarizer 10 i has less leakage or transmittance of s polarization, as shown by curve at 116.

Referring to FIG. 14, a wire grid layer 22 similar to those described above but with a dielectric material 120 in spaces between metal elements of the wire grid layer. Such a wire grid or wire grid layer can be substituted for any of those described above.

Referring to FIG. 15 a dielectric grid layer is shown with two

dielectric grids

124 and 128 with elements of two different materials having two different indices of refraction n₁and n₂respectively. Thus, the dielectric layer or grid has alternating elements of different material, or elements of one grid disposed in the spaces of another grid. Such a dielectric grid or layer can be substituted for any of those described above.

The examples presented here are but a few of the many possibilities that may be realized from this invention. In general, a combination for uniform layers and dielectric grids may be combined for specific applications such as optimizing transmittance or reflectance over a given range of angles of incident of a given band of light. Optimization may be made for transmittance or reflectance or for both together. Optimization may be made for incidence from the air side on the polarizer or from the substrate side or both.

Various aspects of wire-grid polarizers, optical trains and/or projection/display systems are shown in U.S. Pat. Nos. 5,986,730; 6,081,376; 6,122,103; 6,208,463; 6,243,199; 6,288,840; 6,348,995; 6,108,131; 6,452,724; 6,710,921; 6,234,634; 6,447,120; and 6,666,556, which are herein incorporated by reference.

Although the wire-grid polarizers have been illustrated as facing the light source, or with the elongated elements facing towards the light source, it is understood that this is for illustrational purposes only. Those skilled in the art will appreciate that the wire-grid polarizers can be oriented to face towards imaging bearing beams, such as from a liquid crystal array, for the simple purpose of avoiding passing the image bearing beam through the substrate, and thus avoiding ghost images or multiple reflections associated with light passing through mediums, such as the substrate. Such configurations may result in the wire-grid polarizer facing away from the light source.

While the forgoing examples are illustrative of the principles of the present invention in one or more particular applications, it will be apparent to those of ordinary skill in the art that numerous modifications in form, usage and details of implementation can be made without the exercise of inventive faculty, and without departing from the principles and concepts of the invention. Accordingly, it is not intended that the invention be limited, except as by the claims set forth below.

Claims

1. A wire-grid polarizer device for polarizing light, comprising:

a) a substrate;

b) a wire-grid layer, disposed over the substrate, the wire-grid layer including an array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light and defining gaps between the elements; and

c) a plurality of contiguous dielectric-grid layers contiguous with one another, disposed directly on top of the wire-grid layer, each dielectric-grid layer including an array of dielectric material elements, the plurality of contiguous dielectric-grid layers including different materials with different indices of refraction; and

d) the array of dielectric material elements and the array of metal elements being oriented substantially parallel with one another, and the arrays having substantially equal periods.

2. A device in accordance with claim 1, further comprising:

at least one continuous thin film layer disposed between the wire-grid layer and the substrate and extending between the gaps.

3. A device in accordance with claim 2, wherein the at least one continuous thin film layer comprises a plurality of continuous thin film layers with different refractive indices with respect to one another, disposed between the wire-grid layer and the substrate and extending between the gaps.

4. A device in accordance with claim 3, wherein at least one of the continuous thin film layers includes a dielectric grid including an array of dielectric material elements.

5. A device in accordance with claim 2, further comprising at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers.

6. A device in accordance with claim 5, wherein the at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers comprises a plurality of continuous thin film layers with different refractive indices with respect to one another.

7. A device in accordance with claim 5, wherein the at least one continuous thin film layer disposed over the plurality of contiguous dielectric-grid layers includes a dielectric grid including an array of dielectric material elements.

8. A device in accordance with claim 1, wherein an index of refraction of a lower of the plurality of contiguous dielectric-grid layers is less than an index of refraction of an upper of the plurality of contiguous dielectric-grid layers.

9. A device in accordance with claim 1, further comprising grooves etched in the substrate to form ribs extending therefrom, wherein the wire-grid layer is supported on the ribs.

10. A device in accordance with claim 1, wherein:

the elongated metal elements comprise aluminum;

at least two of the at least two film layers comprises silicon.

11. A device in accordance with claim 10, wherein at least one of the at least two film layers comprises silicon dioxide.

12. A device in accordance with claim 1, wherein the wire grid layer and the at least two film layers in combination define an array of ribs, wherein a width of an individual rib is approximately the same at a base of the individual rib as at a top of the individual rib.

13. A device in accordance with claim 1, wherein the wire grid layer and the at least two film layers in combination define an array of ribs with gaps therebetween, wherein a distance between ribs at a base of the ribs is approximately the same as a distance between the ribs at a top of the ribs.

14. A device in accordance with claim 1, wherein the elongated metal elements comprise aluminum; the at least two film layers comprise at least three film layers; at least one of the at least three film layers comprises silicon dioxide; another at least one of the at least three film layers comprises silicon; and another at least one of the at least three film layers comprises tantalum.

15. A wire-grid polarizer device for polarizing light, comprising:

a) a substrate;

b) a stack of thin film layers, disposed over the substrate, and extending continuously across the substrate;

c) at least one of the thin film layers being uniform in structure and material;

d) at least one of the thin film layers including a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light and a period less than half the wavelength of the light and defining gaps between the elements; and

e) at least two of the thin film layers including contiguous dielectric arrays of dielectric material elements disposed directly on top of the wire-grid array, wherein the dielectric array of dielectric material elements and the wire-grid array of elongated metal elements are oriented substantially parallel with one another and the arrays have substantially equal periods, and wherein, the contiguous dielectric arrays include different materials with different indices of refraction.

16. A device in accordance with claim 15, wherein the dielectric material and metal elements of the arrays are oriented substantially parallel with one another, and the arrays having substantially equal periods.

17. A device in accordance with claim 16, wherein dielectric material elements of the dielectric grid are aligned above the metal elements of the wire grid layer.

18. A device in accordance with claim 16, wherein dielectric material elements of the dielectric grid are off-set above the metal elements of the wire grid layer.

19. A device in accordance with claim 15, further comprising:

at least one thin film layer, disposed between the substrate and the wire-grid layer.

20. A device in accordance with claim 19, wherein the at least one thin film layer includes a plurality of thin film layers with different refractive indices with respect to one another.

21. A device in accordance with claim 19, wherein at least one of the thin film layers between the substrate and the wire-grid layer has a refractive index greater than a refractive index of the substrate.

22. A device in accordance with claim 19, wherein the at least one thin film layer extends continuously across the substrate.

23. A device in accordance with claim 19, further comprising:

at least one other thin film layer, disposed over the dielectric layer.