US8653461B1 - Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth - Google Patents
Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth Download PDFInfo
- Publication number
- US8653461B1 US8653461B1 US12/415,721 US41572109A US8653461B1 US 8653461 B1 US8653461 B1 US 8653461B1 US 41572109 A US41572109 A US 41572109A US 8653461 B1 US8653461 B1 US 8653461B1
- Authority
- US
- United States
- Prior art keywords
- focal plane
- infrared
- camera system
- infrared radiation
- plane array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 88
- 230000003595 spectral effect Effects 0.000 title claims abstract description 85
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 41
- 238000001931 thermography Methods 0.000 title description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 32
- 230000004044 response Effects 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 19
- 230000004888 barrier function Effects 0.000 claims description 10
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000009877 rendering Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 3
- 239000003574 free electron Substances 0.000 claims description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 37
- 238000002834 transmittance Methods 0.000 description 36
- 150000001875 compounds Chemical class 0.000 description 26
- 239000007789 gas Substances 0.000 description 23
- 239000000758 substrate Substances 0.000 description 19
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 14
- 229910018503 SF6 Inorganic materials 0.000 description 13
- 239000000523 sample Substances 0.000 description 11
- WRQGPGZATPOHHX-UHFFFAOYSA-N ethyl 2-oxohexanoate Chemical compound CCCCC(=O)C(=O)OCC WRQGPGZATPOHHX-UHFFFAOYSA-N 0.000 description 9
- 238000013500 data storage Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 210000003811 finger Anatomy 0.000 description 4
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 4
- 238000005057 refrigeration Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 4
- 229960000909 sulfur hexafluoride Drugs 0.000 description 4
- SANRKQGLYCLAFE-UHFFFAOYSA-H uranium hexafluoride Chemical compound F[U](F)(F)(F)(F)F SANRKQGLYCLAFE-UHFFFAOYSA-H 0.000 description 4
- 229910052770 Uranium Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- -1 nickel metal hydride Chemical class 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 3
- SPSSULHKWOKEEL-UHFFFAOYSA-N 2,4,6-trinitrotoluene Chemical compound CC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O SPSSULHKWOKEEL-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- DYAHQFWOVKZOOW-UHFFFAOYSA-N Sarin Chemical compound CC(C)OP(C)(F)=O DYAHQFWOVKZOOW-UHFFFAOYSA-N 0.000 description 2
- GRXKLBBBQUKJJZ-UHFFFAOYSA-N Soman Chemical compound CC(C)(C)C(C)OP(C)(F)=O GRXKLBBBQUKJJZ-UHFFFAOYSA-N 0.000 description 2
- PJVJTCIRVMBVIA-JTQLQIEISA-N [dimethylamino(ethoxy)phosphoryl]formonitrile Chemical compound CCO[P@@](=O)(C#N)N(C)C PJVJTCIRVMBVIA-JTQLQIEISA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- SNTRKUOVAPUGAY-UHFFFAOYSA-N cyclosarin Chemical compound CP(F)(=O)OC1CCCCC1 SNTRKUOVAPUGAY-UHFFFAOYSA-N 0.000 description 2
- OSVXSBDYLRYLIG-UHFFFAOYSA-N dioxidochlorine(.) Chemical compound O=Cl=O OSVXSBDYLRYLIG-UHFFFAOYSA-N 0.000 description 2
- KCKICANVXIVOLK-UHFFFAOYSA-L dioxouranium(2+);difluoride Chemical compound [F-].[F-].O=[U+2]=O KCKICANVXIVOLK-UHFFFAOYSA-L 0.000 description 2
- RXWCTKVOMOOHCV-UHFFFAOYSA-N dioxouranium;dihydrofluoride Chemical group F.F.O=[U]=O RXWCTKVOMOOHCV-UHFFFAOYSA-N 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 210000003813 thumb Anatomy 0.000 description 2
- 239000000015 trinitrotoluene Substances 0.000 description 2
- XTFIVUDBNACUBN-UHFFFAOYSA-N 1,3,5-trinitro-1,3,5-triazinane Chemical compound [O-][N+](=O)N1CN([N+]([O-])=O)CN([N+]([O-])=O)C1 XTFIVUDBNACUBN-UHFFFAOYSA-N 0.000 description 1
- IHGSAQHSAGRWNI-UHFFFAOYSA-N 1-(4-bromophenyl)-2,2,2-trifluoroethanone Chemical compound FC(F)(F)C(=O)C1=CC=C(Br)C=C1 IHGSAQHSAGRWNI-UHFFFAOYSA-N 0.000 description 1
- QCMKXHXKNIOBBC-UHFFFAOYSA-N 3-fluoroprop-1-ene Chemical compound FCC=C QCMKXHXKNIOBBC-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- OSDWBNJEKMUWAV-UHFFFAOYSA-N Allyl chloride Chemical compound ClCC=C OSDWBNJEKMUWAV-UHFFFAOYSA-N 0.000 description 1
- SVJNGNCCBCRLEV-UHFFFAOYSA-N C(C)C(=O)C.C Chemical compound C(C)C(=O)C.C SVJNGNCCBCRLEV-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000004155 Chlorine dioxide Substances 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 241000124008 Mammalia Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- ZUWZHGIJTPZRAX-UHFFFAOYSA-N S.NN Chemical compound S.NN ZUWZHGIJTPZRAX-UHFFFAOYSA-N 0.000 description 1
- JJIUCEJQJXNMHV-UHFFFAOYSA-N VX nerve agent Chemical compound CCOP(C)(=O)SCCN(C(C)C)C(C)C JJIUCEJQJXNMHV-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 239000012346 acetyl chloride Substances 0.000 description 1
- BHELZAPQIKSEDF-UHFFFAOYSA-N allyl bromide Chemical compound BrCC=C BHELZAPQIKSEDF-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- HRHBQGBPZWNGHV-UHFFFAOYSA-N azane;bromomethane Chemical compound N.BrC HRHBQGBPZWNGHV-UHFFFAOYSA-N 0.000 description 1
- QKSKPIVNLNLAAV-UHFFFAOYSA-N bis(2-chloroethyl) sulfide Chemical compound ClCCSCCCl QKSKPIVNLNLAAV-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- OJIJEKBXJYRIBZ-UHFFFAOYSA-N cadmium nickel Chemical compound [Ni].[Cd] OJIJEKBXJYRIBZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 235000019398 chlorine dioxide Nutrition 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- LEEBUGMRZVUUAE-UHFFFAOYSA-N hexafluoro-lambda6-sulfane sulfur dioxide Chemical compound S(F)(F)(F)(F)(F)F.S(=O)=O LEEBUGMRZVUUAE-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010859 live-cell imaging Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- ZDGGJQMSELMHLK-UHFFFAOYSA-N m-Trifluoromethylhippuric acid Chemical compound OC(=O)CNC(=O)C1=CC=CC(C(F)(F)F)=C1 ZDGGJQMSELMHLK-UHFFFAOYSA-N 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 229910052987 metal hydride Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- OPARCANFMFATKR-UHFFFAOYSA-N nitrobenzene 2,4,6-trinitrophenol Chemical compound C1([N+](=O)[O-])=CC([N+](=O)[O-])=CC([N+](=O)[O-])=C1O.[N+](=O)([O-])C1=CC=CC=C1 OPARCANFMFATKR-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- MLRDQVPGKNANCJ-UHFFFAOYSA-N oxolane;1,1,2-trichloroethene Chemical group C1CCOC1.ClC=C(Cl)Cl MLRDQVPGKNANCJ-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- PBDKKYFZLPVGMK-UHFFFAOYSA-N prop-2-enal;prop-1-ene Chemical compound CC=C.C=CC=O PBDKKYFZLPVGMK-UHFFFAOYSA-N 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000006335 response to radiation Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
- G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
- H04N23/23—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from thermal infrared radiation
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/124—Active materials comprising only Group III-V materials, e.g. GaAs
- H10F77/1243—Active materials comprising only Group III-V materials, e.g. GaAs characterised by the dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/124—Active materials comprising only Group III-V materials, e.g. GaAs
- H10F77/1248—Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/146—Superlattices; Multiple quantum well structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
- G01J2005/123—Thermoelectric array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0801—Means for wavelength selection or discrimination
- G01J5/0802—Optical filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/48—Thermography; Techniques using wholly visual means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1793—Remote sensing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
- G01N2021/3531—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis without instrumental source, i.e. radiometric
Definitions
- the invention relates generally to a camera system configured to detect infrared radiation such as, for example, the identification of various substances. More specifically, the invention relates to a camera system configured to detect a limited spectral bandwidth of infrared radiation.
- leak detection and repair is a common problem in commercial applications where various substances are processed, stored, distributed, and utilized.
- leak detection devices include sniffers, scanners and passive imaging devices configured to identify a petrochemical leak by sensing the absorption of infrared radiation by the leaking compound at one or more predetermined infrared absorption bandwidths.
- methane (CH 4 ) has strong infrared absorption bands approximately centered at the non-visible wavelengths 1.33 ⁇ m, 1.67 ⁇ m, 3.3 ⁇ m and 7.6 ⁇ m, and it is known to construct leak detecting devices to determine if methane is present in a gas sample by determining if the gas sample absorbs radiation at one or more of the methane absorption wavelengths.
- other compounds may be detected by leak detection devices tuned to determine if other compounds are present in a gas sample by determining if the gas sample absorbs radiation at one or more absorption bands associated with the other compounds.
- the sniffer device draws a gas sample into a chamber through a probe, transmits an infrared radiation beam through the gas sample to a photo detector, and a photo detector response signal is used to determine if the gas sample is absorbing infrared radiation at one or more predetermined absorption bands.
- a sniffer device to detect gas leaks is that the probe must take in a gas sample directly from the leak plume in order to detect the leak. Accordingly, in a large facility or along miles of distribution conduits, leak detection by using a sniffer device is often inefficient and unreliable because leaks may be missed. Moreover, a user must be able to place the probe in the leak plume and this may not always be practical.
- a laser methane detector One example of a scanner device, called a laser methane detector, is disclosed in U.S. Pat. No. 7,075,653 to Rutherford.
- the laser methane detector scans a survey area with a tunable IR laser diode emitter and analyzes IR radiation reflected back from the survey area to a photo detector. If the presence of a methane plume is detected in the survey area, the laser methane detector alerts an operator by sounding an audible alarm.
- the tunable IR laser diode emitter is tuned over a range of wavelengths that includes in-band wavelengths, (approximately 1.67 ⁇ m), that are absorbed by methane, and out-of-band wavelengths that are not absorbed by methane and to use the photo detector response to determine if methane is present.
- the laser methane detector provides an advantage over a sniffer because the laser methane detector may detect a methane gas plume from a remote distance.
- Rutherford one problem with the laser methane detector disclosed by Rutherford is that the tunable IR laser emitter is limited to emitting over a wavelength range of about 1.2-2.5 ⁇ m. Accordingly, the laser methane detector is only usable to detect compounds with a strong absorption band within the wavelength range of about 1.2-2.5 ⁇ m.
- a passive imaging device configured to detect the presence of methane and other hydrocarbon gas plumes is a video thermography camera that includes a lens positioned to form an image of a survey scene that may contain an infrared absorbing gas plume.
- the image of the survey scene is focused onto a focal plane array and an optical band pass filter is positioned between the lens and the focal plane array to limit the spectral bandwidth of the image of the survey scene to a desired wavelength range.
- the desired wavelength range corresponds with an absorption band of a compound that it is desired to detect in the image of the survey scene.
- the example thermography camera includes a focal plane array that comprises indium antimonide (InSb) IR photo sensor elements.
- InSb photo sensor elements have a usable responsivity over the approximate spectral range of 1-5.5 ⁇ m, but are more practically limited to a usable range of 3.0-5.0 ⁇ m. Accordingly, the example thermography camera is practically limited to detecting leak plume containing compounds that have absorption bands in the spectral range of 3.0-5.0 ⁇ m. While that range is suitable for detecting methane and other hydrocarbon compound leaks, there is a need for a thermographic leak detector that operates to detect compounds having absorption bands above 5.0 ⁇ m.
- thermographic leak detection systems have a broad spectral responsivity, e.g. 2 ⁇ m, as compared to typical absorption bands, which may have a spectral bandwidth of 0.1-0.3 ⁇ m.
- the problem is that the extra spectral responsivity range of the InSb focal plane arrays contributes dark current signal noise that ultimately reduces the contrast of the leak plume as compared to the background of a video survey image. Accordingly, it is desirable to use a photo sensor that has a spectral responsivity range that is spectrally tuned to the absorption bandwidth of the compound to be imaged in order to increase image contrast.
- thermography camera for detecting leaks of the industrial gas sulfur hexafluoride (SF 6 ).
- SF 6 is commonly used as an electrical insulator and has a strong absorption band at approximately 10.57 ⁇ m.
- Conventional thermography cameras do not have a focal plane array capable of forming an image of a survey scene over a wavelength range that includes 10.57 ⁇ m.
- thermography camera for detecting other gasses associated with other particular wavelength ranges.
- various aspects of conventional thermography cameras described above may similarly limit the ability of such cameras to detect gasses in these other particular wavelength ranges.
- One or more embodiments may be used to provide infrared camera systems configured to detect a limited spectral bandwidth of infrared radiation included in an infrared absorption band of one or more substances, such as gasses. Methods relating to the operation, use, and manufacture of such infrared camera systems are provided in other embodiments.
- an infrared camera system includes a lens adapted to receive infrared radiation from a survey scene comprising one or more gasses.
- the infrared camera system also includes a focal plane array comprising a plurality of quantum well infrared photo detectors (QWIPs).
- QWIPs are tuned to detect a limited spectral bandwidth of the infrared radiation corresponding to at least a portion of an infrared absorption band of the one or more gasses.
- the infrared camera system also includes an optical band pass filter positioned substantially between the lens and the focal plane array. The optical band pass filter is adapted to filter the infrared radiation to a wavelength range substantially corresponding to the limited spectral bandwidth of the QWIPs before the infrared radiation is received by the focal plane array.
- a method of manufacturing an infrared camera system includes selecting a lens adapted to receive infrared radiation from a survey scene comprising one or more gasses. The method also includes forming a plurality of quantum well infrared photo detectors (QWIPs) of a focal plane array such that the QWIPs are tuned to detect a limited spectral bandwidth of the infrared radiation corresponding to at least a portion of an infrared absorption band of the one or more gasses. The method also includes selecting an optical band pass filter adapted to filter the infrared radiation to a wavelength range substantially corresponding to the limited spectral bandwidth of the QWIPs.
- QWIPs quantum well infrared photo detectors
- a camera system 100 e.g., an infrared camera system such as a portable infrared thermography camera
- the camera system 100 includes a lens 104 forming an image of the scene 106 onto a focal plane array, (FPA), 108 .
- the FPA 108 may comprise a two dimensional array of photo sensor elements configured with sufficient resolution to form a viewable image of the scene 106 on a display device, e.g. 320 ⁇ 256 photo sensor elements.
- the photo sensor elements are configured to provide a spectral responsivity profile having a peak responsivity in a desired wavelength range.
- the photo sensor elements are configured to provide a wavelength range 10.4 to 10.8 ⁇ m and a full width half maximum spectral responsivity bandwidth less than 2.0 ⁇ m and preferably less than 0.7 ⁇ m.
- the FPA 108 comprises quantum well infrared photo detectors (QWIPs) tuned to the desired spectral responsivity by constructing quantum well layers alternating with barrier layers having appropriate thickness, spacing, impurity doping and other parameters as may be required.
- the quantum well layers comprise gallium arsenide (GaAs) doped with silicon and the barrier layers comprise aluminum gallium arsenide (AlGaAs) but other III-V semiconductor compounds are usable.
- the camera system 100 includes an optical band pass filter 110 positioned between the lens 104 the FPA 108 for optically filtering radiation collected by the lens to narrow the spectral bandwidth of the focused image formed on the FPA 108 .
- the band pass filter 110 has a peak spectral transmittance in the wavelength range 10.30 ⁇ m to 10.70 ⁇ m and a less than 0.1% of the peak spectral transmittance outside the wavelength range 10.28 ⁇ m to 10.72 ⁇ m. Other peak spectral transmittance wavelength ranges are also contemplated.
- the band pass filter 110 has a full width half maximum transmittance bandwidth of 10.40 to 10.80 ⁇ m. Other full width half maximum transmittance bandwidth values are also contemplated.
- the camera system 100 includes a refrigeration device configured to cool the FPA 108 and the band pass filter 110 to an operating temperature of less than 65° K.
- the camera system 100 is used for detecting a gaseous compound in the scene 106 when radiation from the scene 106 is received by the lens 104 and passed to the band pass filter 110 to limit the wavelength range of survey scene energy focused onto the FPA 108 .
- the wavelength range is limited to 10.3 to 10.8 ⁇ m. Other wavelength ranges are also contemplated.
- Each sensor element of the FPA 108 generates an analog photo current value according to a photo current responsivity profile and other factors in response to an irradiance generated by the spectrally filtered scene image formed by the lens 104 at the sensor element active surface.
- the analog photo current values are read out from each photo sensor element and converted to corresponding digital signal values for rendering a video image frame corresponding to the digital signal values.
- the video image frames are formatted for display on a display device 116 , e.g. at a standard video rate, for a user to view through an eyepiece 114 .
- a user may point the camera system 100 at the scene 106 that may include a gas leak plume comprising compound having an absorption band while observing the display device 116 to determine if there is a gas leak plume visible on the display device 116 .
- the absorption band at least partially falls within the wavelength band 10.3 to 10.8 ⁇ m. Other wavelength bands are also contemplated.
- the camera system 100 is usable to detect an invisible gas plume in a video image of the scene 106 if the gas plume contains a gas that at least partially falls within the wavelength band.
- sulfur hexafluoride (SF 6 ) ammonia, (NH 3 ), uranyl fluoride (U 2 O 2 F 2 ), or any other gas having an absorption band that at least partially falls within the wavelength band 10.3 to 10.8 ⁇ m may be detected.
- Other gasses having absorption bands that at least partially fall within other wavelength bands may also be detected.
- FIG. 1 illustrates a schematic diagram of a camera system in accordance with an embodiment.
- FIG. 2 illustrates an isometric view of a camera system in accordance with an embodiment.
- FIG. 3 illustrates a top view of a focal plane array supported on a support substrate in accordance with an embodiment.
- FIG. 4 illustrates a side view of a focal plane array supported on a support substrate in accordance with an embodiment.
- FIG. 5 illustrates a section view taken through a dewar assembly in accordance with an embodiment.
- irradiance as used herein is defined as the total power including all wavelengths of electromagnetic radiation at a surface per unit surface area, and is generally measured in W/m 2 or equivalent units.
- spectral irradiance as used herein is defined as the power per unit area per unit wavelength of electromagnetic radiation at a surface, and is generally measured in W/m 2 /nm.
- transmittance is defined as a ratio expressed as a percentage of radiation intensity transmitted through a medium (I) to radiation intensity incident on the medium (I 0 ), at a specified wavelength.
- an optical band pass filter may have a transmittance of 99.9% at a wavelength of 10 ⁇ m and a transmittance of less than 2% at wavelengths less than 9 ⁇ m and greater than 11 ⁇ m.
- Other optical band pass filters with other transmittance percentages and/or other wavelengths are also contemplated.
- photo current as used herein is defined as a current generated by a photo sensor in response to irradiance at an active surface of the photo sensor and may be measured in mA.
- spectral responsivity as used herein is defined as the ratio of photo current generated by a photo sensor per unit irradiance at an active surface of the photo sensor per unit wavelength and may be measured in mA/W/nm or other suitable units.
- Group III-V semiconductor compounds refers to semiconductor compounds of group III and/or group V elements of the periodic table of elements and includes aluminum phosphide, aluminum arsenide and gallium arsenide.
- QWIP quantum well infrared photo detector
- a camera system 100 (e.g., an infrared camera system having a plurality of QWIPs tuned to detect a limited spectral bandwidth of infrared radiation corresponding to at least a portion of an infrared absorption band of one or more gasses), in accordance with an embodiment, comprises a housing 102 and a lens 104 (e.g., a lens element) extending out from the housing 102 .
- the lens 104 and housing 102 may be configured with lens mounting hardware for removing the lens and attaching other interchangeable lenses as may be required.
- the lens 104 is configured as an infrared wavelength imaging lens for collecting infrared radiation from a scene 106 over a field of view.
- the field of view is defined by an angle ⁇ (also referred to as a field of view angle, a solid cone angle, and a horizontal scene angle), which may be defined by a round aperture inside the lens 104 .
- the lens 104 is configured to form a focused image of the scene 106 onto an active area of a focal plane array (FPA) 108 , which is positioned coincident with a focal plane of the lens 104 .
- the lens 104 and FPA 108 may be configured such that the lens 104 forms a focused image of the scene that completely fills the FPA active area.
- angle ⁇ corresponds with a particular image magnification with larger angles corresponding with lower image magnification values than smaller angles.
- the camera system 100 is configured to accept a plurality of interchangeable lenses 104 usable for different situations with each lens being configured to position its focal plane coincident with the active area of the focal plane array 108 .
- the camera system 100 may be configured to operate with three different interchangeable lenses 104 with each lens having a different focal length, magnification, and angle ⁇ .
- a first lens has a focal length of 25 mm and projects an angle ⁇ of 22° onto the FPA 108
- a second lens has a focal length of 50 mm and projects an angle ⁇ of 11° onto the FPA 108
- a third lens has a focal length of 100 mm and projects an angle ⁇ of 5.5° onto the FPA 108
- each lens 104 is formed from suitable optical materials and aberration corrected over a wavelength range (e.g., a wavelength range that at least includes 10.4-10.8 ⁇ m or another wavelength range) in order to form a substantially diffraction limited infrared image of the scene 106 onto the FPA active area.
- the lens elements may be coated to reduce reflectivity at a wavelength range (e.g., a wavelength range that includes 10.4-10.8 ⁇ m or another wavelength range).
- Each lens 104 may be constructed with baffles, apertures and the like, and with the optical elements treated with surface coatings to prevent stray radiation from reaching the FPA active area.
- Each lens 104 also may be equipped with an operator adjustable or an automatically adjusted focusing mechanism constructed to adjust the sharpness of the scene image formed on the FPA active area.
- the camera system 100 and/or lens 104 may include one or more operator adjustable or automatically adjustable mechanical, electrical or electro-optical devices configured to ensure that radiation reaching the FPA 108 is within irradiance limits suitable for rendering an acceptable digital image of the scene 106 .
- the camera system 100 may be equipped with a digital zoom system for adjusting image magnification and field of view using digital image zooming techniques.
- An optical band pass filter 110 is positioned between the lens 104 and the FPA 108 and functions to limit the spectral band width of radiation reaching the active area of the FPA 108 .
- the band pass filter 110 comprises an optical substrate having two opposing and substantially parallel optical surfaces separated by a substrate thickness and formed with a clear aperture usable for spectrally filtering light entering the lens 104 over angle ⁇ .
- the band pass filter 110 is positioned with its opposing surfaces oriented substantially parallel to the active area of the FPA 108 .
- the optical substrate may comprise optical quality germanium or another suitable substrate with one or both of the opposing surfaces being coated with one or more thin film layers configured to provide a filter spectral transmittance profile that limits the spectral band width of radiation that passes through the band pass filter 110 .
- the band pass filter 110 may comprise a plurality of optical substrates bonded or otherwise sandwiched together with more than two opposing optical surfaces and more than two surfaces coated with thin film layers.
- the band pass filter 110 has a substantially Gaussian shaped spectral transmittance profile having a peak or near peak transmittance over a first wavelength band, a full width half maximum spectral transmittance separated by a second wavelength range and spectral transmittance profile edges separated by a third wavelength range.
- the spectral transmittance profile has a transmittance of less than about 0.1% for wavelengths not included within the third wavelength range defined by the spectral transmittance profile edges.
- the band pass filter 110 has a spectral transmittance profile that includes a peak or near peak transmittance of 85% substantially at 10.57 ⁇ m such that the band pass filter is tuned to an absorption band of the compound SF 6 . Additionally, in a first embodiment of the band pass filter 110 the spectral transmittance profile has a full width half maximum transmittance bandwidth of approximately 10.4-10.8 ⁇ m and spectral transmittance profile edges occurring at 10.38 and 10.82 ⁇ m respectively.
- band pass filter spectral transmittance profile is defined in TABLE 1 which is slightly shifted to ensure that the band pass filter 110 includes portions of the absorption band of SF 6 approximately centered at 10.57 ⁇ m as well as an absorption band of the compound ammonia, (NH 3 ) which has a strong infrared absorption band approximately centered at 10.36 ⁇ m.
- the band pass filter 110 has a full width half maximum transmittance bandwidth that overlaps an absorption band of SF 6 and NH 3 .
- Other band pass filter 110 implementations with other spectral transmittance profiles are also contemplated.
- FIG. 2 depicts an isometric external view of an embodiment of a camera system 100 .
- the lens 104 is shown extending out from a front end of the housing 102 and a view finder assembly 112 extends upward from the housing 102 at a top side thereof.
- the view finder assembly 112 is pivotally supported with respect to the camera housing top side to allow a user to pivot the view finder assembly 112 to a range of viewing positions as may be required.
- the view finder assembly 112 includes an eyepiece opening and eyepiece 114 provided to allow a user to view a display device 116 (e.g., a video display or other appropriate display device), housed inside the camera system 100 , through the eyepiece 114 .
- a display device 116 e.g., a video display or other appropriate display device
- the display device 116 displays a live black and white video image of the scene 106 as formed by the FPA 108 and as processed by an optical signal processor, (OSP) 118 .
- the display device 116 may display a live color video image of the scene 106 .
- a user looking into the view finder assembly 112 views the live video image of the scene 106 and adjusts the camera pointing direction, lens focus, digital zoom, and other user controls to view and analyze elements of the scene image as required.
- the display device 116 and eyepiece 114 viewing are provided to improve image contrast even in direct sunlight to improve the leak plume detection.
- the camera system 100 includes a central processing unit (CPU) 126 interconnected with a digital data storage module 130 , a user interface module (UIM) 128 , a power module 120 , a cooling module 190 (e.g., a refrigeration device), an optical signal processing module (OSP) 118 , a video driver module 132 , and an associated display device 116 .
- the CPU 126 interfaces with the digital data storage module 130 to exchange digital data therewith for receiving operating program steps stored in the digital data storage module 130 and executing the operating programs steps in accordance with preset operating modes and conditions and further in accordance with user input commands received from a user through the UIM 128 .
- the camera system 100 operates to form an image of the scene 106 onto the FPA 108 , render a digital image of the scene 106 in a video image frame format, display the video image frame on the display device 116 , or deliver the video image frame out of the camera system 100 .
- video image frames may be stored on the digital data storage module 130 .
- the camera system 100 is configured to update video image frames at one or more video frames rates ranging from 15-100 cycles per second.
- the CPU 126 may comprise a commercially available integrated circuit microprocessor chip and the microprocessor chip may include digital data processing hardware, memory registers and cache memory for temporary data storage.
- the digital data storage module 130 may comprise one or more permanently installed or removable memory devices using solid state, optical or magnetic memory storage devices including solid state random or dynamic access memory (RAM, DRAM), non-volatile FLASH memory, optical compact disk memory, (CD) digital video disk memory (DVD), magnetic hard or soft disk memory, and the like.
- solid state random or dynamic access memory RAM, DRAM
- non-volatile FLASH memory optical compact disk memory
- CD digital video disk memory
- DVD magnetic hard or soft disk memory
- the UIM 128 comprises a plurality of user interface control elements such as one or more toggle switches, variable position dials, knobs, key pads, or the like, positioned on external surfaces of the housing 102 and ideally positioned for ergonomic operation of the camera system 100 while looking through the eyepiece 114 .
- the user interface control elements allow a user to select various camera operating modes, power modes, lens modes, video display modes, and the like, as may be required. Each user selection includes the actuation of a user input device and a signal generated by the actuation and communicated to the CPU 126 to reconfigure camera operation according to user input commands.
- the UIM 128 may interface with a video driver module 132 to display text and graphics on the display device 116 such as for displaying menus, status indicators, warnings, or the like in a text and graphic form that is easily interpreted by a user viewing the display device 116 through the eyepiece 114 .
- the text and graphics may be displayed on the display device 116 simultaneously with a live or still video image of the scene 106 received from the OSP 118 such that camera operating conditions and the like may be displayed at edges of the display screen during live imaging by the camera system 100 .
- the entire display device 116 may be filled with a menu, or the like, to allow the user to set or review various camera parameters, conditions, or settings. Accordingly, a user may operate the camera system 100 to view a live scene image while simultaneously viewing camera status and mode conditions through the eyepiece 114 and the user may use fingers and thumbs to actuate switches/actuators/keypads and the like disposed on outside surfaces of the housing 102 to adjust or reset camera operating conditions while viewing a live image.
- the camera system 100 includes power module 120 and an input output (I/O) module 134 .
- the power module 120 comprises a battery and other power distributing and conditioning elements.
- the battery is housed in a battery compartment generally indicated by reference numeral 122 .
- the battery compartment 122 also serves as a user handle and includes a flexible strap 124 attached thereto to provide improved user gripping.
- the front side of the battery compartment may include a hinged door, not shown, through which the rechargeable battery may be installed and removed.
- the battery may comprise a commercially available high capacity rechargeable nickel metal hydride (NIMH), nickel cadmium (NiCd), or lithium ion (LiION), battery and the camera system 100 may be sold with a separate battery charger. Alternately, any other self contained power source may be used to provide a source of power to the camera system 100 .
- NIMH nickel metal hydride
- NiCd nickel cadmium
- LiION lithium ion
- the power module includes one or more input terminals, associated with the I/O module 134 , for receiving power inputs from a DC power source, such as a vehicle power system, or from an AC power source such as a conventional building power system.
- the power inputs may be used to operate the camera directly, to recharge a battery installed in the battery compartment 122 , or both.
- the power module 120 may also include control systems such as sensors, switches, power conditioning elements, and the like, all interfacing with the CPU 126 and operable according to power module program operating steps stored in the digital data storage module 130 .
- the power module 120 interfaces with and distributes power to camera systems that require power and may shut off automatically or reduce power consumption when appropriate.
- the I/O module 134 includes various wire connecting ports extending through the housing 102 and interfacing with internal systems and may include a wireless transceiver for communicating with external devices over radio or microwave frequencies.
- the I/O module 134 includes power input ports, a digital video output port 135 (e.g., an I/O module connector) for interfacing with an external video display device and an analog video output port 136 for interfacing with a video storage and/or display device configured to receive separate video, (S-video).
- the camera system 100 may be sold with a separate video recording device usable to store and display video images for remote viewing.
- the FPA 108 is shown mounted on a support substrate 150 .
- the FPA 108 includes an active area 152 comprising a two dimensional array of photo sensor elements.
- the active area is positioned in a focal plane of the lens 104 and receives radiation from the scene 106 through the lens 104 and band pass filter 110 .
- Each photo sensor is constructed to generate a photo current or other electrical photo signal in response to radiation falling thereon.
- the amplitude of the photo current is proportional to the irradiance and wavelength of radiation incident on the sensor surface.
- each sensor in the array has a substantially uniform responsivity profile, e.g. photo current amplitude, generated in response to a given irradiance at a given wavelength.
- the responsivity profile of individual sensor elements varies from element to element and must be corrected using a calibration function.
- Each photo sensor may generate a substantially linear photo current output over a limited range of input irradiance and a non-linear photo current output outside the linear range.
- the camera system 100 may include devices constructed to maintain sensor irradiance within the range that produces a linear photo current output, and/or the camera system 100 may include electronic or digital systems configured to render a corrected image when irradiance levels at the sensor surfaces are outside the desired operating range.
- Sensor elements of the active area 152 are arranged in a two dimensional array of rows and columns.
- the active area 152 comprises and array of 320 ⁇ 256 sensing elements with approximate array dimensions 9.6 ⁇ 7.7 mm and with each sensor element centered within a unit cell having approximate dimensions of 30 ⁇ m ⁇ 30 ⁇ m.
- the FPA 108 further includes a conventional silicon complementary metal-oxide-semiconductor (CMOS) readout integrated circuit 154 positioned between the active area 152 and support substrate 150 and interconnected to each individual sensor element through an indium bump, or other suitable connector, extending between each sensor element and the readout circuit 154 .
- CMOS complementary metal-oxide-semiconductor
- the FPA 108 and readout circuit 154 are bonded or otherwise attached to the support substrate 150 .
- the support substrate 150 comprises an electrically insulating material, such as a sapphire or alumina substrate.
- the support substrate 150 is circular having an outside diameter of approximately 21.1 mm, (0.83 inches) and a thickness of approximately 0.5 mm, (0.197 inches) and supports the active area 152 substantially centered on the support substrate 150 .
- the readout circuit 154 is configured to integrate individual sensor photo current responses over time and to periodically deliver an integrated signal value out from the readout circuit 154 to the optical signal processor (OSP) 118 .
- OSP optical signal processor
- the readout circuit 154 also applies a bias voltage to sensor elements and may include an electrical gain circuit and other circuit elements for amplifying and otherwise modifying sensor photo response signals as may be required.
- parameters of the readout circuit 154 particularly integration time, may be controlled by the CPU 126 and modified according to image conditions, user input commands, or both.
- the signals are delivered out from the readout circuit 154 over wire bonded connections extending between terminal points on the readout circuit 154 and electrical output terminals 156 .
- Each output terminal 156 ( FIG. 5 ) may be associated with a plurality of individual photo sensor elements, e.g. an entire row or column of sensor elements.
- the output terminals 156 extend from inside a dewar assembly, shown in FIG. 5 and described below, to a connector interface suitable for connection with the OSP 118 .
- the OSP 118 includes circuits configured to digitize individual sensor element photo signals by converting each analog signal received from each photo sensor to a digital equivalent black and white grey scale gradation value, or the like.
- Each gradation value is a whole number ranging from a minimum value for white corresponding with a selected minimum photo sensor response signal and a maximum value for black corresponding with a selected maximum photo sensor response signal and with intermediate values corresponding with intermediate grey scale levels according to a substantially linear scale.
- Typical digital grey scale values range from 1 to 256 or 1 to 64K, however other ranges are usable.
- the OSP 118 assigns each sensor element with a grey scale pixel value corresponding with the irradiance generated by the scene 106 at the sensor element and assembles the video frame for storage in a frame buffer or delivery out from the OSP.
- the video image may be rendered with one pixel corresponding to each sensor element or with more than one sensor element being associated with each pixel.
- the OSP 118 is configured to apply biases and/or corrections to individual pixel values to: (a) correct for differences in sensor element to sensor element responsivity profiles; (b) adjust the dynamic range of the image; (c) account for non-scene noise generated by a bias voltage applied to the sensor elements; (d) change the video frame rate; (e) filter out noise or static non-scene image artifacts; and/or (f) make other adjustments as may be required to enhance the video image and to extract as much scene information from the image as may be used. Additionally, the OSP 118 is configured to contour the video image by rendering a video image with a compressed grey scale range for displaying scene energy contours.
- the OSP 118 is configured to assign colors to grey scale gradation values or groups of grey scale values to render a color image of the scene 106 with different colors corresponding to different sensor irradiance values. Moreover, the OSP 118 is configured to reverse gray scale values for generating reverse images and may apply other adjustments to the linearity of gray scale value assignment to extract as much scene information from the image as may be used
- the scene video image is delivered to the video driver module 132 or may be delivered out from the camera system 100 through the I/O module 134 .
- the video driver module 132 formats the scene video image for display on the camera internal display device 116 or for display on an external display device connected to the digital video output port 135 .
- the video driver module 132 is configured to add text and graphics to each video image to display information on the display device 116 simultaneously with the display of a video image of the scene 106 .
- the displayed information may comprise a camera operating mode, high or low irradiance warnings, focus conditions, lens type, imaging mode parameters and other conditions as may be useful.
- the video driver module 132 may be configured to display a cursor or other movable display element over the video image being displayed.
- a cursor may be locked to an image feature, e.g. the brightest pixel in the image, and the cursor may follow the position of the brightest pixel in the image as each video frame is updated.
- the video driver module 132 may be configured to display a menu on the display device 116 and to receive commands from a user interface keypad, or the like, for displaying user entries or for moving a cursor over the displayed menu in response to a users commands.
- the video driver module 132 may be configured to display individual video image frames, to display a plurality of video image frames in a thumb nail display mode, and/or to display a still or video images in other modes as may be required. Additionally, the video driver module 132 may be configured to display date, time, camera global position coordinates, scene names and/or any other information that may be useful. Additionally, the camera system 100 may be configured to store one or more video image frames, including any text or graphic information displayed simultaneously with the video image on the digital data storage module 130 , or to deliver video image frames out of the camera through the I/O module 134 .
- the dewar assembly 158 generally encloses a substantially cylindrical hollow vacuum cavity 160 formed by annular sidewalls 162 and 164 , a base wall 166 and a top wall 168 , all laser welded or otherwise suitably joined together to provided the vacuum tight enclosure 160 which is drawn to a low vacuum pressure, e.g. 10 ⁇ 8 -10 ⁇ 10 Torr.
- the base wall 166 includes a sealed aperture passing there through for receiving a cold finger 170 into the vacuum cavity 160 and the cold finger is formed with a thermally conductive end cap 172 configured to attach to and support the support substrate 150 .
- the dewar assembly top wall 168 includes an aperture passing there through for receiving an IR transparent window 174 therein and supported by the top wall 168 .
- the transparent window 174 admits IR radiation received from the lens 104 into the hollow vacuum cavity 160 .
- a stray light baffle 180 comprises an annular sidewall 176 extending between the support substrate 150 and a light baffle top wall 178 .
- the light baffle top wall 178 includes an aperture passing there through and the band pass filter 110 is supported within the aperture by the light baffle top wall 178 .
- the stray light baffle 180 is formed from a thermally conductive material with the annular side wall 176 formed cone-shaped such that the annular side wall 176 and a clear aperture of the band pass filter 110 work together to limit radiation falling onto the FPA active area 152 to only radiation received from the field of view of the lens 104 . Additionally, surfaces of the stray light baffle 180 are shaped and treated to absorb or otherwise prevent stray radiation, e.g. reflected or emitted from other local surfaces from reaching the active area 152 .
- the cold finger 170 extends from the cooling module 190 of FIG. 1 (e.g., a high performance Stirling cycle refrigeration device housed within the housing 102 ).
- the cooling module 190 operates to cool the end cap 172 to a temperature of approximately 65K or less and preferably 55° K.
- the end cap 172 is positioned in contact with the support substrate 150 , which provides an efficient thermally conductive pathway extending from the end cap 172 to the FPA 108 and to the light baffle annular wall 176 .
- the light baffle annular wall 176 provides an efficient thermally conductive pathway to the band pass filter 110 . After an initial cool down period, e.g.
- the cooling module 190 draws enough thermal energy away from the FPA 108 , stray light baffle 180 and band pass filter 110 to substantially cool each element to an operating temperature of approximately 55° K. This prevents the cooled element from emitting a radiation signal that may be detectable by the active area 152 , and in the case of the FPA 108 from generating a thermally induced electrical signal (dark current) that may contribute unwanted electrical noise to the scene image.
- the FPA 108 , stray light baffle 180 , and band pass filter 110 are cooled to an operating temperature of approximately 55° K.
- the evacuated vacuum cavity 160 acts as a thermal insulator to thermally isolate the cooled elements from the ambient surroundings.
- each individual sensor of the FPA 108 comprises a quantum well infrared photo detector, (QWIP).
- QWIP quantum well infrared photo detector
- each QWIP has a peak spectral responsivity approximately in the range of 10.4-10.8 ⁇ m and a full width half maximum spectral bandwidth of less than 1.0 ⁇ m and preferably less than about 0.7 ⁇ m.
- each QWIP is constructed with a spectral responsivity at 10.6 ⁇ m that is at least 80% of the peak spectral responsivity.
- the QWIPs may be implemented with other spectral responsivity and spectral bandwidth characteristics.
- the QWIP is constructed from III-V compound semiconductors such as gallium arsenide, (GaAs), and aluminum gallium arsenide (AlGaAs) formed in thin alternating layers of GaAs quantum wells, and AlGaAs barriers.
- the well layers are doped with electron donor impurities, e.g. silicon, or other suitable doping materials, to generate a desired flow of free electrons in the well layers.
- electron donor impurities e.g. silicon, or other suitable doping materials
- the peak response wavelength and the spectral band width of the photo response of a QWIP is determined by the thicknesses and compositions of the well and barrier layers.
- the thickness and composition of the QWIP layers are selected to absorb photons with wavelengths in the range of 10.4 to 10.8 ⁇ m to generate a peak photo current in response to absorbing such photons.
- the susceptibility of the QWIP to generate an undesirable dark current is increased as compared to detectors having responsivity at smaller wavelengths such as the 3.0-5.0 ⁇ m range used for methane imaging.
- the thickness and composition of the QWIP layers may be selected to absorb photons with wavelengths in other ranges.
- dark current is the current generated by a photo sensor in response to a substantially negligible irradiance received from a survey scene, (e.g. with the lens cap blocking the camera lens), such that dark current is signal noise.
- Dark current is generated in response to IR radiation that is emitted by the FPA 108 , the support substrate 150 , the stray light baffle 180 and the band pass filter 110 .
- the spectral bandwidth of the IR radiation emitted by local elements depends on the absolute temperature of the local elements. In one embodiment, the local elements are maintained at an absolute temperature of less than 65° K to reduce the amount of IR radiation that the local elements emit in the wavelength range of 10.4 to 10.8 ⁇ m. Ideally, the local elements are maintained at an absolute temperature of less than 55° K. In other embodiments, the local elements may be maintained at other appropriate absolute temperatures to reduce the amount of IR radiation that the local elements emit in other wavelength ranges.
- the camera system 100 operates to render a video image of a scene. While radiation energy received from the scene may have a wide spectral bandwidth, in one embodiment, the FPA 108 is constructed with QWIPs that generate a peak photo current response in the wavelength range of 10.4 to 10.8 ⁇ m and have a full width half maximum spectral bandwidth of less than 2.0 ⁇ m and preferably with a spectral bandwidth of 0.7-1.0 ⁇ m. This reduces signal noise generated by the background of the scene and by elements of the camera itself to increase contrast between a leak plume and the scene background.
- the camera system 100 may include a narrow band pass filter 110 having a peak transmittance within the wavelength range of 10.30 to 10.70 ⁇ m and having considerably less transmittance (e.g., 0.1% of the peak transmittance outside the wavelength range of 10.28 ⁇ m to 10.72 ⁇ m).
- a narrow band pass filter 110 having a peak transmittance within the wavelength range of 10.30 to 10.70 ⁇ m and having considerably less transmittance (e.g., 0.1% of the peak transmittance outside the wavelength range of 10.28 ⁇ m to 10.72 ⁇ m).
- other optical filter spectral transmittance profiles that include the spectral range 10.4-10.8 ⁇ m are also usable.
- the focal plane array 108 , band pass filter 110 and other local support elements are enclosed in a vacuum cavity to thermally isolate them from the camera body and surrounding air and cooled to 65° K or less by the cooling module 190 (e.g., a refrigeration device housed with the camera system 100 ) to further reduce dark current in the FPA 108 and to reduce thermal radiation from elements surrounding the FPA 108 .
- the cooling module 190 e.g., a refrigeration device housed with the camera system 100
- all areas of a scene include some level of radiation in the spectral bandwidth 10.3-10.8 ⁇ m.
- areas of the scene that are absorbing radiation in the spectral bandwidth 10.3-10.8 ⁇ m will have less radiation in that spectral bandwidth range than other areas of the scene. Accordingly, when the scene is imaged onto the FPA 108 and filtered by the band pass filter 110 , areas of the scene having low radiation levels will generate low irradiance levels at corresponding sensor surfaces and will generate low photo currents in the FPA 108 .
- SF 6 sulfur hexafluoride
- SF 6 is a gas used as an electrical insulator in power distribution equipment and the like, as a cover gas over molten magnesium to minimize oxidation, and as an agent for improving process performance in semiconductor manufacture.
- SF 6 is a potent greenhouse gas that may contribute to environmental damage when it is released e.g. by leaks.
- ammonia (NH 3 ) which has a strong infrared absorption band approximately centered at 10.36 ⁇ m.
- NH 3 is used as a reagent to produce nitric acid, as a fertilizer, as a refrigerant, as a disinfectant, a solvent, and has many other uses.
- ammonia is toxic to mammals and may be harmful when released, e.g. by leaks.
- UO 2 F 2 Another example compound that may be imaged using the embodiment of camera system 100 described above is uranyl fluoride (UO 2 F 2 ).
- UO 2 F 2 is created when uranium hexafluoride (UFO leaks into the atmosphere.
- UF 6 is a gaseous compound used in uranium enrichment and is the compound to which most depleted (waste) uranium is converted for long term storage in gas cylinders. It is desirable to detect and repair leaks in UF 6 containers and to look for UF 6 to detect uranium enrichment activity by detecting the local presence of uranyl fluoride (UO 2 F 2 ).
- the QWIPs of FPA 108 may be tuned to detect various limited spectral bandwidths of infrared radiation. These limited spectral bandwidths may correspond to, for example, at least a portion of an infrared absorption band of one or more substances such as gasses present in scene 106 (for example, infrared radiation in portions of the longwave infrared spectrum).
- Band pass filter 110 may be configured to substantially filter out infrared radiation outside of the limited spectral bandwidth to which QWIPs are tuned.
- camera system 100 may be particularly well calibrated to detect many different types of substances present in scene 106 .
- the QWIPs of FPA 108 and the band pass filter 110 may be tuned (e.g., calibrated) based on spectral bandwidths of infrared radiation (e.g., infrared spectra) associated with various substances as identified by the National Institute of Standards and Technology (NIST) and available through the Internet at http://webbook.nist.gov/chemistry/.
- spectral bandwidths of infrared radiation e.g., infrared spectra
- camera system 100 may be used to provide an image of one or more gasses, such as gasses identified in TABLE 2, or other gasses identified herein.
- lens 104 receives infrared radiation from survey scene 106 which includes one or more gasses.
- Band pass filter 110 filters the infrared radiation to a wavelength range including a limited spectral bandwidth of the infrared radiation. This limited spectral bandwidth corresponds to at least a portion of an infrared absorption band of one or more of the gasses.
- FPA 108 receives the filtered infrared radiation and includes a plurality of QWIPs tuned to detect the limited spectral bandwidth of the infrared radiation.
- FPA 108 provides a plurality of signals to OSP 118 in response to the filtered infrared radiation.
- OSP renders an image of one or more of the gasses in response to the signals.
- the image may be provided to digital video output port 135 or analog video output port 136 to pass the image to an external device.
- display device 116 may provide the image to a user for viewing (e.g., through eyepiece 114 ).
- camera system 100 may be operated by a user to detect one or more gasses, such as gasses identified in TABLE 2, or other gasses identified herein.
- a user positions camera system 100 to receive infrared radiation from survey scene 106 which includes one or more gasses.
- a user may orient lens 104 in the direction of scene 106 .
- camera system 100 renders and displays an image of one or more gasses, for example, on display device 116 . The user then views the image, for example, through eyepiece 114 . Through inspection of the displayed image, the user may determine the presence or absence of one or gasses in scene 106 .
- camera system 100 may be manufactured by selecting lens 104 , forming QWIPs of FPA 108 , and selecting band pass filter 110 .
- lens 104 may be selected which is adapted to receive infrared radiation from scene 106 comprising one or more gasses.
- the QWIPs may be formed such that they are tuned to detect a limited spectral bandwidth of the infrared radiation corresponding to at least a portion of an infrared absorption band of the one or more gasses.
- band pass filter 110 may be selected which is adapted to filter the infrared radiation to a wavelength range substantially corresponding to the limited spectral bandwidth of the QWIPs.
- an image of a scene 106 is collected by the lens 104 , spectrally band pass filtered by the band pass filter 110 , focused onto the FPA 108 by the lens 104 , rendered as a video image by the OSP 118 , configured for display by the video driver module 132 and displayed by the display device 116 .
- the image focused onto the FPA 108 has a spectral bandwidth in the range of 10.3-10.7, 10.4-10.8 ⁇ m, or other range depending on the spectral transmittance of the band pass filter 110 .
- the video image is rendered by assigning the lowest grey scale values to the lowest levels of photo current generated by the FPA 108 in response to the image focused onto the FPA 108 , by assigning the highest grey scale values to the highest levels of photo current generated by the FPA 108 in response to the image focused onto the FPA 108 , and by assigning intermediate grey scale values to intermediate levels of photo current generated by the FPA 108 in response to the image focused onto the FPA 108 .
- These assignments are accomplished in a substantially linear distribution of grey scale values.
- the camera system 100 may be operated to reverse the grey scale polarity of video images of the scene by assigning the highest grey scale values to the lowest levels of photocurrent.
- the camera system 100 may be operated to render color video images of the scene by assigning a different color to different levels of photocurrent.
- imaging gas leak plumes for compounds having absorption bands approximately in the spectral bandwidth of 10.3-10.8 ⁇ m or other spectral bandwidths those skilled in the art will recognize that its usefulness is not limited thereto and that one or more embodiments may be beneficially utilized in any number of environments and implementations including but not limited to any other application wherein it would be useful to generate a video image of a compound having an absorption band that may be detected by a QWIP or other narrow spectral bandwidth detector tuned to the absorption band of the compound.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
TABLE 1 |
BAND PASS FILTER TRANSMITTANCE |
Peak Transmittance (at 10.57 μm) | Greater than or equal to 85% |
Transmittance at 10.30 μm to 10.70 μm | 50% of peak transmittance |
Transmittance from UV-10.28 μm | 0.1% |
Transmittance from 10.72 μm-14.0 μm | 0.1% |
Slope | Less than 2% |
TABLE 2 | ||||
acetic acid | ||||
acetyl chloride | ||||
allyl bromide | ||||
allyl chloride | ||||
allyl fluoride | ||||
ammonia | ||||
anhydrous ammonia | ||||
bromomethane | ||||
chlorine dioxide | ||||
cyclosarin (GF) | ||||
cyclotrimethylenetrinitramine (RDX) | ||||
ethyl cyanoacrylate | ||||
ethylene | ||||
freon ® 11 | ||||
freon ® 12 | ||||
furan | ||||
HD (Bis-(2-chloroethyl) sulfide) | ||||
hydrazine | ||||
hydrogen sulfide | ||||
methane | ||||
methyl ethyl ketone | ||||
methyl vinyl ketone | ||||
methylsilane | ||||
nitrobenzene | ||||
picric acid | ||||
propenal | ||||
propene | ||||
sarin (GB) | ||||
soman (GD) | ||||
sulfur dioxide | ||||
sulfur hexafluoride (SF6) | ||||
tabun (GA) | ||||
tetrahydrofuran | ||||
trichloroethylene | ||||
trinitrotoluene (TNT) | ||||
uranyl fluoride | ||||
vinyl chloride | ||||
vinyl cyanide | ||||
vinyl ether | ||||
VX (S-[2-(diisopropylamino)ethyl]- | ||||
O-ethyl methylphosphonothioate) | ||||
Claims (19)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/415,721 US8653461B1 (en) | 2007-03-23 | 2009-03-31 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US14/181,333 US9276161B2 (en) | 2007-03-23 | 2014-02-14 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US15/056,960 US9635284B2 (en) | 2007-03-23 | 2016-02-29 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/726,918 US8659664B2 (en) | 2007-03-23 | 2007-03-23 | Thermography camera configured for leak detection |
US12/415,721 US8653461B1 (en) | 2007-03-23 | 2009-03-31 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/726,918 Continuation-In-Part US8659664B2 (en) | 2007-03-23 | 2007-03-23 | Thermography camera configured for leak detection |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/181,333 Continuation US9276161B2 (en) | 2007-03-23 | 2014-02-14 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
Publications (1)
Publication Number | Publication Date |
---|---|
US8653461B1 true US8653461B1 (en) | 2014-02-18 |
Family
ID=50072134
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/415,721 Active 2028-01-14 US8653461B1 (en) | 2007-03-23 | 2009-03-31 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US14/181,333 Active 2027-06-08 US9276161B2 (en) | 2007-03-23 | 2014-02-14 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US15/056,960 Active US9635284B2 (en) | 2007-03-23 | 2016-02-29 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/181,333 Active 2027-06-08 US9276161B2 (en) | 2007-03-23 | 2014-02-14 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US15/056,960 Active US9635284B2 (en) | 2007-03-23 | 2016-02-29 | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
Country Status (1)
Country | Link |
---|---|
US (3) | US8653461B1 (en) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120281113A1 (en) * | 2011-05-06 | 2012-11-08 | Raytheon Company | USING A MULTI-CHIP SYSTEM IN A PACKAGE (MCSiP) IN IMAGING APPLICATIONS TO YIELD A LOW COST, SMALL SIZE CAMERA ON A CHIP |
US20140008526A1 (en) * | 2012-07-06 | 2014-01-09 | Providence Photonics, Llc | Calibration and quantification method for gas imaging camera |
US20140132774A1 (en) * | 2012-11-09 | 2014-05-15 | Fluke Corporation | Thermal imaging camera with repositionable active portions of focal plane array |
US20150042820A1 (en) * | 2013-08-06 | 2015-02-12 | Daylight Solutions Inc. | Sensor system for detecting fugitive gas |
EP2955496A3 (en) * | 2014-05-01 | 2015-12-23 | Rebellion Photonics, Inc. | Dual band divided aperture infrared spectral imager (daisi) for chemical detection |
US9276161B2 (en) | 2007-03-23 | 2016-03-01 | Flir Systems, Inc. | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US20160131576A1 (en) * | 2014-11-10 | 2016-05-12 | Ci Systems (Israel) Ltd. | Infrared Detection and Imaging Device With No Moving Parts |
US9488629B2 (en) | 2014-04-10 | 2016-11-08 | General Electric Company | Method for detecting coolant leaks in generators |
US9562849B2 (en) | 2013-11-12 | 2017-02-07 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US9599508B2 (en) | 2012-05-18 | 2017-03-21 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US9625318B2 (en) | 2012-05-18 | 2017-04-18 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US9756263B2 (en) | 2014-05-01 | 2017-09-05 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
EP3304014A4 (en) * | 2015-05-29 | 2019-02-06 | Rebellion Photonics, Inc. | HYDROGEN SULFIDE IMAGING SYSTEM |
US10375327B2 (en) | 2016-10-21 | 2019-08-06 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US10458905B2 (en) | 2014-07-07 | 2019-10-29 | Rebellion Photonics, Inc. | Gas leak emission quantification with a gas cloud imager |
US20200025679A1 (en) * | 2017-03-31 | 2020-01-23 | Flir Systems Ab | Gas imaging systems and methods |
US10605725B2 (en) | 2017-11-09 | 2020-03-31 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US10948404B2 (en) | 2016-10-21 | 2021-03-16 | Rebellion Photonics, Inc. | Gas imaging system |
US10955355B2 (en) | 2017-02-22 | 2021-03-23 | Rebellion Photonics, Inc. | Systems and methods for monitoring remote installations |
US11290662B2 (en) | 2014-05-01 | 2022-03-29 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6529214B2 (en) * | 2013-10-30 | 2019-06-12 | キヤノン株式会社 | Imaging device |
CN104316200A (en) * | 2014-10-30 | 2015-01-28 | 浙江雷邦光电技术有限公司 | Single lens reflex type thermal infrared imager and imaging method |
US20180104742A1 (en) * | 2016-10-18 | 2018-04-19 | General Electric Company | Method and system for thermographic inspection of additive manufactured parts |
US11519602B2 (en) | 2019-06-07 | 2022-12-06 | Honeywell International Inc. | Processes and systems for analyzing images of a flare burner |
US12207022B2 (en) | 2023-04-03 | 2025-01-21 | Championx Llc | Optical gas imaging camera with navigation and targeting control, learning and operating methods for the camera, and compliance auditing system |
Citations (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3662171A (en) | 1970-09-21 | 1972-05-09 | Textron Inc | Methane gas detection system using infrared |
US4390785A (en) | 1980-12-29 | 1983-06-28 | E. I. Du Pont De Nemours & Co. | Method and apparatus for remotely detecting gases in the atmosphere |
US4496840A (en) | 1980-08-08 | 1985-01-29 | Hartmann & Braun Ag | Nondispersive infrared gas analyzer |
US4520265A (en) | 1983-09-06 | 1985-05-28 | Southern California Gas Co. | Method and apparatus for accurate remote monitoring of gases |
US4535639A (en) | 1983-06-23 | 1985-08-20 | The United States Of America As Represented By The United States Department Of Energy | Vapor spill monitoring method |
US4543481A (en) | 1983-12-08 | 1985-09-24 | Moniteq Ltd. | Leak detection in pipelines |
US4555627A (en) | 1983-04-05 | 1985-11-26 | The United States Of America As Represented By The United States Department Of Energy | Backscatter absorption gas imaging system |
US4745276A (en) | 1985-03-08 | 1988-05-17 | Preussag Aktiengesellschaft Metall | Device for the detection of fluorescent substances on the surface of the earth |
US4772789A (en) * | 1987-12-28 | 1988-09-20 | Rockwell International Corporation | Leak imaging using differential absorption |
US4871916A (en) | 1987-05-08 | 1989-10-03 | The Broken Hill Proprietary Company Limited | Sensing of methane |
US4894526A (en) | 1987-01-15 | 1990-01-16 | American Telephone And Telegraph Company, At&T Bell Laboratories | Infrared-radiation detector device |
US5001346A (en) | 1990-02-26 | 1991-03-19 | Rockwell International Corporation | Leak detection system with background compensation |
US5023685A (en) | 1988-06-06 | 1991-06-11 | Bethea Clyde G | Quantum-well radiation-interactive device, and methods of radiation detection and modulation |
US5161408A (en) | 1991-08-26 | 1992-11-10 | Mcrae Thomas G | Photo-acoustic leak detection system and method |
US5225679A (en) | 1992-01-24 | 1993-07-06 | Boston Advanced Technologies, Inc. | Methods and apparatus for determining hydrocarbon fuel properties |
US5255073A (en) | 1989-05-19 | 1993-10-19 | Opsis Ab | Apparatus for emitting and receiving light |
US5264368A (en) | 1990-10-10 | 1993-11-23 | Boston Advanced Technologies, Inc. | Hydrocarbon leak sensor |
US5317897A (en) | 1989-12-28 | 1994-06-07 | Siemens Corporate Research, Inc. | Method for detecting the presence of a gas with an opto-electronic gas sensor |
US5386117A (en) | 1993-06-07 | 1995-01-31 | Computational Systems Incorporated | Infrared thermography system including mobile unit |
US5430293A (en) | 1991-10-08 | 1995-07-04 | Osaka Gas Co., Ltd. | Gas visualizing apparatus and method for detecting gas leakage from tanks or piping |
US5479258A (en) | 1992-12-28 | 1995-12-26 | Pat Industries | Image multispectral sensing |
US5523569A (en) | 1993-06-30 | 1996-06-04 | Stn Atlas Electronik Gmbh | Apparatus for detecting leakages in structural members |
US5637871A (en) | 1993-06-07 | 1997-06-10 | Computational Systems, Inc. | Portable digital infrared thermography system |
US5656813A (en) | 1995-04-04 | 1997-08-12 | Gmd Systems, Inc. | Apparatus for imaging gas |
US5661590A (en) | 1995-06-05 | 1997-08-26 | California Institute Of Technology | Quantum well infrared photo detector and monolithic chopper |
US5780724A (en) | 1997-03-27 | 1998-07-14 | United Technologies Corp | Photo-acoustic leak detector with improved signal-to-noise response |
US5824884A (en) | 1997-03-27 | 1998-10-20 | United Technologies Corporation | Photo-acoustic leak detector with baseline measuring |
US5854422A (en) | 1996-07-10 | 1998-12-29 | K-Line Industries, Inc. | Ultrasonic detector |
US5866073A (en) | 1997-02-28 | 1999-02-02 | The United States Of America As Represented By The Secretary Of The Army | Detector of halogenated compounds based on laser photofragmentation/fragment stimulated emission |
US5867264A (en) | 1997-10-15 | 1999-02-02 | Pacific Advanced Technology | Apparatus for image multispectral sensing employing addressable spatial mask |
US5965899A (en) | 1990-10-31 | 1999-10-12 | Lockheed Martin Corp. | Miniband transport quantum well detector |
US6089076A (en) | 1998-09-18 | 2000-07-18 | United Technologies Corporation | System to control the power of a beam |
US6154307A (en) | 1998-09-18 | 2000-11-28 | United Technologies Corporation | Method and apparatus to diffract multiple beams |
US6157033A (en) | 1998-05-18 | 2000-12-05 | Power Distribution Services, Inc. | Leak detection system |
US6355939B1 (en) | 1998-11-03 | 2002-03-12 | Lockheed Martin Corporation | Multi-band infrared photodetector |
US20020074542A1 (en) * | 2000-09-26 | 2002-06-20 | Gunapala Sarath D. | Multi-quantum-well detector for low-background applications |
US20020098593A1 (en) * | 2000-11-17 | 2002-07-25 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US20020098592A1 (en) * | 2000-11-17 | 2002-07-25 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US20030025081A1 (en) * | 1999-12-28 | 2003-02-06 | Hans Edner | Quantitative imaging of gas emissions utilizing optical techniques |
US6642537B1 (en) | 1996-08-27 | 2003-11-04 | California Institute Of Technology | Dual band QWIP focal plane array |
US6657195B1 (en) | 2000-09-21 | 2003-12-02 | Lockheed Martin Corporation | Clutter discriminating focal plane arrays |
US6680778B2 (en) | 2001-11-08 | 2004-01-20 | Michele Hinnrichs | Gas leak detector |
US6690472B2 (en) | 2000-09-28 | 2004-02-10 | Sandia National Laboratories | Pulsed laser linescanner for a backscatter absorption gas imaging system |
US6734452B2 (en) | 1996-08-27 | 2004-05-11 | California Institute Of Technology | Infrared radiation-detecting device |
US20040108564A1 (en) * | 2002-12-05 | 2004-06-10 | Lockheed Martin Corporation | Multi-spectral infrared super-pixel photodetector and imager |
US6822742B1 (en) | 2003-12-19 | 2004-11-23 | Eastman Kodak Company | System and method for remote quantitative detection of fluid leaks from a natural gas or oil pipeline |
WO2005001409A2 (en) * | 2003-06-11 | 2005-01-06 | Furry Brothers, Llc | Infrared imaging of chemical leaks |
US20050017176A1 (en) * | 2003-07-25 | 2005-01-27 | Koch Frederick E. | Quantum dot infrared photodetector focal plane array |
US6866089B2 (en) | 2002-07-02 | 2005-03-15 | Carrier Corporation | Leak detection with thermal imaging |
US20050082520A1 (en) | 2003-10-06 | 2005-04-21 | Fathimulla Ayub M. | Monolithic two color quantum-well photodetector |
US6885965B2 (en) | 2002-05-22 | 2005-04-26 | First Responder Systems Technologies, Llc | Processing system for remote chemical identification |
US20060049352A1 (en) | 2004-02-02 | 2006-03-09 | Keikhosrow Irani | Apparatus for thermal imaging |
US7022993B1 (en) | 2001-05-04 | 2006-04-04 | Twin Rivers Engineering, Inc. | Infrared leak detector |
US7030381B2 (en) | 2000-12-13 | 2006-04-18 | Inficon Gmbh | Method for detecting a gas using an infrared gas analyser and gas analyser suitable for carrying out said method |
US7075653B1 (en) | 2005-04-29 | 2006-07-11 | Heath Consultants Incorporated | Method and apparatus for laser-based remote methane leak detection |
US7134322B1 (en) | 2004-09-02 | 2006-11-14 | Equipment Imaging And Solutions, Inc. | Locating one or more leaks in a power generating system while the power generating system is online |
US7151787B2 (en) | 2003-09-10 | 2006-12-19 | Sandia National Laboratories | Backscatter absorption gas imaging systems and light sources therefore |
US20080231719A1 (en) * | 2007-03-23 | 2008-09-25 | Flir Systems Inc. | Thermography camera configured for leak detection |
US20090200466A1 (en) * | 2008-02-11 | 2009-08-13 | Flir Systems Inc. | Thermography camera configured for gas leak detection |
US7679046B1 (en) * | 2007-10-08 | 2010-03-16 | Flir Systems, Inc. | Infrared camera calibration systems and methods |
US20100231722A1 (en) * | 2009-03-16 | 2010-09-16 | Southwest Research Institute | Compact handheld detector for greenhouse gasses |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8653461B1 (en) | 2007-03-23 | 2014-02-18 | Flir Systems, Inc. | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
WO2013129677A1 (en) * | 2012-03-02 | 2013-09-06 | 荒川化学工業株式会社 | Heat dissipating coating composition and heat dissipating coating film |
-
2009
- 2009-03-31 US US12/415,721 patent/US8653461B1/en active Active
-
2014
- 2014-02-14 US US14/181,333 patent/US9276161B2/en active Active
-
2016
- 2016-02-29 US US15/056,960 patent/US9635284B2/en active Active
Patent Citations (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3662171A (en) | 1970-09-21 | 1972-05-09 | Textron Inc | Methane gas detection system using infrared |
US4496840A (en) | 1980-08-08 | 1985-01-29 | Hartmann & Braun Ag | Nondispersive infrared gas analyzer |
US4390785A (en) | 1980-12-29 | 1983-06-28 | E. I. Du Pont De Nemours & Co. | Method and apparatus for remotely detecting gases in the atmosphere |
US4555627A (en) | 1983-04-05 | 1985-11-26 | The United States Of America As Represented By The United States Department Of Energy | Backscatter absorption gas imaging system |
US4535639A (en) | 1983-06-23 | 1985-08-20 | The United States Of America As Represented By The United States Department Of Energy | Vapor spill monitoring method |
US4520265A (en) | 1983-09-06 | 1985-05-28 | Southern California Gas Co. | Method and apparatus for accurate remote monitoring of gases |
US4543481A (en) | 1983-12-08 | 1985-09-24 | Moniteq Ltd. | Leak detection in pipelines |
US4745276A (en) | 1985-03-08 | 1988-05-17 | Preussag Aktiengesellschaft Metall | Device for the detection of fluorescent substances on the surface of the earth |
US4894526A (en) | 1987-01-15 | 1990-01-16 | American Telephone And Telegraph Company, At&T Bell Laboratories | Infrared-radiation detector device |
US4871916A (en) | 1987-05-08 | 1989-10-03 | The Broken Hill Proprietary Company Limited | Sensing of methane |
US4772789A (en) * | 1987-12-28 | 1988-09-20 | Rockwell International Corporation | Leak imaging using differential absorption |
US5023685A (en) | 1988-06-06 | 1991-06-11 | Bethea Clyde G | Quantum-well radiation-interactive device, and methods of radiation detection and modulation |
US5255073A (en) | 1989-05-19 | 1993-10-19 | Opsis Ab | Apparatus for emitting and receiving light |
US5317897A (en) | 1989-12-28 | 1994-06-07 | Siemens Corporate Research, Inc. | Method for detecting the presence of a gas with an opto-electronic gas sensor |
US5001346A (en) | 1990-02-26 | 1991-03-19 | Rockwell International Corporation | Leak detection system with background compensation |
US5264368A (en) | 1990-10-10 | 1993-11-23 | Boston Advanced Technologies, Inc. | Hydrocarbon leak sensor |
US5965899A (en) | 1990-10-31 | 1999-10-12 | Lockheed Martin Corp. | Miniband transport quantum well detector |
US5161408A (en) | 1991-08-26 | 1992-11-10 | Mcrae Thomas G | Photo-acoustic leak detection system and method |
US5430293A (en) | 1991-10-08 | 1995-07-04 | Osaka Gas Co., Ltd. | Gas visualizing apparatus and method for detecting gas leakage from tanks or piping |
US5225679A (en) | 1992-01-24 | 1993-07-06 | Boston Advanced Technologies, Inc. | Methods and apparatus for determining hydrocarbon fuel properties |
US5479258A (en) | 1992-12-28 | 1995-12-26 | Pat Industries | Image multispectral sensing |
US5386117A (en) | 1993-06-07 | 1995-01-31 | Computational Systems Incorporated | Infrared thermography system including mobile unit |
US5637871A (en) | 1993-06-07 | 1997-06-10 | Computational Systems, Inc. | Portable digital infrared thermography system |
US5386117B1 (en) | 1993-06-07 | 1997-06-10 | Computational Systems Inc | Infrared thermography system including mobile unit |
US5523569A (en) | 1993-06-30 | 1996-06-04 | Stn Atlas Electronik Gmbh | Apparatus for detecting leakages in structural members |
US5656813A (en) | 1995-04-04 | 1997-08-12 | Gmd Systems, Inc. | Apparatus for imaging gas |
US5661590A (en) | 1995-06-05 | 1997-08-26 | California Institute Of Technology | Quantum well infrared photo detector and monolithic chopper |
US5854422A (en) | 1996-07-10 | 1998-12-29 | K-Line Industries, Inc. | Ultrasonic detector |
US6734452B2 (en) | 1996-08-27 | 2004-05-11 | California Institute Of Technology | Infrared radiation-detecting device |
US6642537B1 (en) | 1996-08-27 | 2003-11-04 | California Institute Of Technology | Dual band QWIP focal plane array |
US5866073A (en) | 1997-02-28 | 1999-02-02 | The United States Of America As Represented By The Secretary Of The Army | Detector of halogenated compounds based on laser photofragmentation/fragment stimulated emission |
US5834632A (en) | 1997-03-27 | 1998-11-10 | United Technologies Corporation | Photo-acoustic leak detector with multiple beams |
US5824884A (en) | 1997-03-27 | 1998-10-20 | United Technologies Corporation | Photo-acoustic leak detector with baseline measuring |
US5780724A (en) | 1997-03-27 | 1998-07-14 | United Technologies Corp | Photo-acoustic leak detector with improved signal-to-noise response |
US5867264A (en) | 1997-10-15 | 1999-02-02 | Pacific Advanced Technology | Apparatus for image multispectral sensing employing addressable spatial mask |
US6157033A (en) | 1998-05-18 | 2000-12-05 | Power Distribution Services, Inc. | Leak detection system |
US6089076A (en) | 1998-09-18 | 2000-07-18 | United Technologies Corporation | System to control the power of a beam |
US6154307A (en) | 1998-09-18 | 2000-11-28 | United Technologies Corporation | Method and apparatus to diffract multiple beams |
US6327896B1 (en) | 1998-09-18 | 2001-12-11 | United Technologies Corporation | Photo-acoustic leak detection system |
US6355939B1 (en) | 1998-11-03 | 2002-03-12 | Lockheed Martin Corporation | Multi-band infrared photodetector |
US6803577B2 (en) | 1999-12-28 | 2004-10-12 | Gas Optics Sweden Ab | Quantitative imaging of gas emissions utilizing optical techniques |
US20030025081A1 (en) * | 1999-12-28 | 2003-02-06 | Hans Edner | Quantitative imaging of gas emissions utilizing optical techniques |
US6657195B1 (en) | 2000-09-21 | 2003-12-02 | Lockheed Martin Corporation | Clutter discriminating focal plane arrays |
US20020074542A1 (en) * | 2000-09-26 | 2002-06-20 | Gunapala Sarath D. | Multi-quantum-well detector for low-background applications |
US6690472B2 (en) | 2000-09-28 | 2004-02-10 | Sandia National Laboratories | Pulsed laser linescanner for a backscatter absorption gas imaging system |
US20020132360A1 (en) * | 2000-11-17 | 2002-09-19 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US20020146836A1 (en) * | 2000-11-17 | 2002-10-10 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US20020098592A1 (en) * | 2000-11-17 | 2002-07-25 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US20020098593A1 (en) * | 2000-11-17 | 2002-07-25 | Flir Systems Boston, Inc. | Apparatus and methods for infrared calorimetric measurements |
US7030381B2 (en) | 2000-12-13 | 2006-04-18 | Inficon Gmbh | Method for detecting a gas using an infrared gas analyser and gas analyser suitable for carrying out said method |
US7022993B1 (en) | 2001-05-04 | 2006-04-04 | Twin Rivers Engineering, Inc. | Infrared leak detector |
US6680778B2 (en) | 2001-11-08 | 2004-01-20 | Michele Hinnrichs | Gas leak detector |
US6885965B2 (en) | 2002-05-22 | 2005-04-26 | First Responder Systems Technologies, Llc | Processing system for remote chemical identification |
US6866089B2 (en) | 2002-07-02 | 2005-03-15 | Carrier Corporation | Leak detection with thermal imaging |
US20040108564A1 (en) * | 2002-12-05 | 2004-06-10 | Lockheed Martin Corporation | Multi-spectral infrared super-pixel photodetector and imager |
US20060091310A1 (en) * | 2003-06-11 | 2006-05-04 | Furry David W | Methods for performing inspections and detecting chemical leaks using an infrared camera system |
WO2005001409A2 (en) * | 2003-06-11 | 2005-01-06 | Furry Brothers, Llc | Infrared imaging of chemical leaks |
US20050017176A1 (en) * | 2003-07-25 | 2005-01-27 | Koch Frederick E. | Quantum dot infrared photodetector focal plane array |
US7151787B2 (en) | 2003-09-10 | 2006-12-19 | Sandia National Laboratories | Backscatter absorption gas imaging systems and light sources therefore |
US20050082520A1 (en) | 2003-10-06 | 2005-04-21 | Fathimulla Ayub M. | Monolithic two color quantum-well photodetector |
US6995846B2 (en) | 2003-12-19 | 2006-02-07 | Itt Manufacturing Enterprises, Inc. | System and method for remote quantitative detection of fluid leaks from a natural gas or oil pipeline |
US6822742B1 (en) | 2003-12-19 | 2004-11-23 | Eastman Kodak Company | System and method for remote quantitative detection of fluid leaks from a natural gas or oil pipeline |
US20060049352A1 (en) | 2004-02-02 | 2006-03-09 | Keikhosrow Irani | Apparatus for thermal imaging |
US7134322B1 (en) | 2004-09-02 | 2006-11-14 | Equipment Imaging And Solutions, Inc. | Locating one or more leaks in a power generating system while the power generating system is online |
US7075653B1 (en) | 2005-04-29 | 2006-07-11 | Heath Consultants Incorporated | Method and apparatus for laser-based remote methane leak detection |
US20080231719A1 (en) * | 2007-03-23 | 2008-09-25 | Flir Systems Inc. | Thermography camera configured for leak detection |
US7679046B1 (en) * | 2007-10-08 | 2010-03-16 | Flir Systems, Inc. | Infrared camera calibration systems and methods |
US20090200466A1 (en) * | 2008-02-11 | 2009-08-13 | Flir Systems Inc. | Thermography camera configured for gas leak detection |
US7649174B2 (en) | 2008-02-11 | 2010-01-19 | Flir Systems, Inc. | Thermography camera configured for gas leak detection |
US20100231722A1 (en) * | 2009-03-16 | 2010-09-16 | Southwest Research Institute | Compact handheld detector for greenhouse gasses |
Non-Patent Citations (6)
Title |
---|
Brochure, Ion Science "SF6 Gascheck P1", published by Ion Science, Cambridge, UK, no date, (www.ionscience.com). |
Brochure, Sherlock "Remote gas leak imaging and qualification", published by Gas Imaging Technology, Buellton, CA, USA, no date (www.gitint.com). |
User Manual (related pages); ThermaCam GasFind IR published by FLIR Systems, Inc., North Billerica, MA, USA, publication No. 230438-000, Rev B, issue date Jul. 14, 2006. |
Valenti, Spotting substation gas leaks, Mechanical Engineering, May 2000, pp. 18-22, 29-31, (http://www.memagazine.org/supparch/mepower00/gas/gas.html). |
Wimmers et al., "Better, Smaller IR Imagers Lead the Way to New Applications", Photonics Spectra, Dec. 1994, pp. 113-118. |
Wimmers et al., Focal Plane Arrays: Better, Smaller IR Imagers for New Applications, The Photonics Design and Applications Handbook, H-212-217, 1997. |
Cited By (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9276161B2 (en) | 2007-03-23 | 2016-03-01 | Flir Systems, Inc. | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US9635284B2 (en) | 2007-03-23 | 2017-04-25 | Flir Systems, Inc. | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth |
US20120281113A1 (en) * | 2011-05-06 | 2012-11-08 | Raytheon Company | USING A MULTI-CHIP SYSTEM IN A PACKAGE (MCSiP) IN IMAGING APPLICATIONS TO YIELD A LOW COST, SMALL SIZE CAMERA ON A CHIP |
US11821792B2 (en) | 2012-05-18 | 2023-11-21 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US10989597B2 (en) | 2012-05-18 | 2021-04-27 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US10444070B2 (en) | 2012-05-18 | 2019-10-15 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US10914632B2 (en) | 2012-05-18 | 2021-02-09 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US10254166B2 (en) | 2012-05-18 | 2019-04-09 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US11879775B2 (en) | 2012-05-18 | 2024-01-23 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US11313724B2 (en) | 2012-05-18 | 2022-04-26 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US9625318B2 (en) | 2012-05-18 | 2017-04-18 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system for chemical detection |
US9599508B2 (en) | 2012-05-18 | 2017-03-21 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US20140008526A1 (en) * | 2012-07-06 | 2014-01-09 | Providence Photonics, Llc | Calibration and quantification method for gas imaging camera |
US9225915B2 (en) * | 2012-07-06 | 2015-12-29 | Providence Photonics, Llc | Calibration and quantification method for gas imaging camera |
US9325915B2 (en) | 2012-07-06 | 2016-04-26 | Providence Photonics, Llc | Calibration and quantification method for gas imaging camera |
US9277143B2 (en) * | 2012-11-09 | 2016-03-01 | Fluke Corporation | Thermal imaging camera with repositionable active portions of focal plane array |
US20140132774A1 (en) * | 2012-11-09 | 2014-05-15 | Fluke Corporation | Thermal imaging camera with repositionable active portions of focal plane array |
US20150042820A1 (en) * | 2013-08-06 | 2015-02-12 | Daylight Solutions Inc. | Sensor system for detecting fugitive gas |
US20170205290A1 (en) | 2013-11-12 | 2017-07-20 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US11326957B2 (en) | 2013-11-12 | 2022-05-10 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US11867564B2 (en) | 2013-11-12 | 2024-01-09 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US10914639B2 (en) | 2013-11-12 | 2021-02-09 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US10267686B2 (en) | 2013-11-12 | 2019-04-23 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US9562849B2 (en) | 2013-11-12 | 2017-02-07 | Rebellion Photonics, Inc. | Divided-aperture infra-red spectral imaging system |
US9488629B2 (en) | 2014-04-10 | 2016-11-08 | General Electric Company | Method for detecting coolant leaks in generators |
US10893220B2 (en) | 2014-05-01 | 2021-01-12 | Rebellion Photonics, Inc. | Dual-band divided-aperture infra-red spectral imaging system |
US11805221B2 (en) | 2014-05-01 | 2023-10-31 | Rebellion Photonics, Inc. | Dual-band divided-aperture infra-red spectral imaging system |
US11917321B2 (en) | 2014-05-01 | 2024-02-27 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
EP2955496A3 (en) * | 2014-05-01 | 2015-12-23 | Rebellion Photonics, Inc. | Dual band divided aperture infrared spectral imager (daisi) for chemical detection |
US9756263B2 (en) | 2014-05-01 | 2017-09-05 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US10834338B2 (en) | 2014-05-01 | 2020-11-10 | Rebllion Photonics, Inc. | Mobile gas and chemical imaging camera |
US11290662B2 (en) | 2014-05-01 | 2022-03-29 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US10084975B2 (en) | 2014-05-01 | 2018-09-25 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US10458905B2 (en) | 2014-07-07 | 2019-10-29 | Rebellion Photonics, Inc. | Gas leak emission quantification with a gas cloud imager |
US11796454B2 (en) | 2014-07-07 | 2023-10-24 | Rebellion Photonics, Inc. | Gas leak emission quantification with a gas cloud imager |
US20160131576A1 (en) * | 2014-11-10 | 2016-05-12 | Ci Systems (Israel) Ltd. | Infrared Detection and Imaging Device With No Moving Parts |
US9581543B2 (en) * | 2014-11-10 | 2017-02-28 | Ci Systems (Israel) Ltd. | Infrared detection and imaging device with no moving parts |
US9880094B2 (en) | 2014-11-10 | 2018-01-30 | Ci Systems Israel Ltd | Infrared detection and imaging device with no moving parts |
US11287409B2 (en) | 2015-05-29 | 2022-03-29 | Rebellion Photonics, Inc. | Hydrogen sulfide imaging system |
US10648960B2 (en) | 2015-05-29 | 2020-05-12 | Rebellion Photonics, Inc. | Hydrogen sulfide imaging system |
EP4375631A3 (en) * | 2015-05-29 | 2024-07-31 | Rebellion Photonics, Inc. | Hydrogen sulfide imaging system |
EP3304014A4 (en) * | 2015-05-29 | 2019-02-06 | Rebellion Photonics, Inc. | HYDROGEN SULFIDE IMAGING SYSTEM |
US11846619B2 (en) | 2015-05-29 | 2023-12-19 | Rebellion Photonics, Inc. | Hydrogen sulfide imaging system |
US11733158B2 (en) | 2016-10-21 | 2023-08-22 | Rebellion Photonics, Inc. | Gas imaging system |
US11044423B2 (en) | 2016-10-21 | 2021-06-22 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US12174067B2 (en) | 2016-10-21 | 2024-12-24 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US10948404B2 (en) | 2016-10-21 | 2021-03-16 | Rebellion Photonics, Inc. | Gas imaging system |
US10375327B2 (en) | 2016-10-21 | 2019-08-06 | Rebellion Photonics, Inc. | Mobile gas and chemical imaging camera |
US11467098B2 (en) | 2017-02-22 | 2022-10-11 | Rebellion Photonics, Inc. | Systems and methods for monitoring remote installations |
US10955355B2 (en) | 2017-02-22 | 2021-03-23 | Rebellion Photonics, Inc. | Systems and methods for monitoring remote installations |
US20200025679A1 (en) * | 2017-03-31 | 2020-01-23 | Flir Systems Ab | Gas imaging systems and methods |
US11635370B2 (en) * | 2017-03-31 | 2023-04-25 | Flir Systems Ab | Gas imaging systems and methods |
CN110914670A (en) * | 2017-03-31 | 2020-03-24 | 前视红外系统股份公司 | Gas imaging systems and methods |
US11698339B2 (en) | 2017-11-09 | 2023-07-11 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US11624705B2 (en) | 2017-11-09 | 2023-04-11 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US10605725B2 (en) | 2017-11-09 | 2020-03-31 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US11933723B2 (en) | 2017-11-09 | 2024-03-19 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US12000776B2 (en) | 2017-11-09 | 2024-06-04 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US11391671B2 (en) | 2017-11-09 | 2022-07-19 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
US11313791B2 (en) | 2017-11-09 | 2022-04-26 | Rebellion Photonics, Inc. | Window obscuration sensors for mobile gas and chemical imaging cameras |
Also Published As
Publication number | Publication date |
---|---|
US20160255284A1 (en) | 2016-09-01 |
US9635284B2 (en) | 2017-04-25 |
US9276161B2 (en) | 2016-03-01 |
US20140160278A1 (en) | 2014-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9635284B2 (en) | Thermography camera tuned to detect absorption of infrared radiation in a selected spectral bandwidth | |
US8659664B2 (en) | Thermography camera configured for leak detection | |
US7649174B2 (en) | Thermography camera configured for gas leak detection | |
CN204795370U (en) | Monitoring system and contain its vehicle | |
US7495220B2 (en) | Uncooled infrared sensor | |
Nikzad et al. | High-efficiency UV/optical/NIR detectors for large aperture telescopes and UV explorer missions: development of and field observations with delta-doped arrays | |
US6515285B1 (en) | Method and apparatus for compensating a radiation sensor for ambient temperature variations | |
US20160079293A1 (en) | Infrared sensor | |
Hood et al. | Large-format InGaAs focal plane arrays for SWIR imaging | |
US6034371A (en) | Semi-opaque chopper for thermal imaging system and method | |
Barton et al. | InGaAs NIR focal plane arrays for imaging and DWDM applications | |
Finger et al. | Development of HgCdTe large format MBE arrays and noise-free high speed MOVPE EAPD arrays for ground based NIR astronomy | |
EP4261591A1 (en) | Smart illumination for nighvision using semi-transparent detector array | |
EP4160308A1 (en) | Semi-transparent detector array for auto-focused nightvision systems | |
Breiter et al. | MCT SWIR modules for passive and active imaging applications | |
Hanold et al. | Large format MBE HgCdTe on silicon detector development for astronomy | |
Wiegleb et al. | Improved MCT eSWIR modules for various demands of imaging applications | |
Breiter et al. | Progress on MCT SWIR modules for passive and active imaging applications | |
Forster et al. | Ice crystal characterization in cirrus clouds II: radiometric characterization of HaloCam for the quantitative analysis of halo displays | |
Rigaut et al. | Visible and infrared wavefront sensing for astronomical adaptive optics | |
Chorier et al. | Application needs and trade-offs for short-wave infrared detectors | |
de Vries et al. | TROPOMI: Solar backscatter satellite instrument for air quality and climate | |
Bergeron et al. | Lightweight uncooled TWS equipped with catadioptric optics and microscan mechanism | |
Höhnemann et al. | VIS/SWIR IR detectors for space applications at AIM: models and qualification status | |
Stephan et al. | Spectroscopy applied to observations of terrestrial light sources of uncertain origin |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: FLIR SYSTEMS, INC., OREGON Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BENSON, ROBERT G.;SCANLON, THOMAS J.;CZEREPUSZKO, PAUL A.;REEL/FRAME:022548/0922 Effective date: 20090407 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |
|
AS | Assignment |
Owner name: TELEDYNE FLIR, LLC, CALIFORNIA Free format text: MERGER AND CHANGE OF NAME;ASSIGNORS:FLIR SYSTEMS, INC.;FIREWORK MERGER SUB II, LLC;REEL/FRAME:058832/0915 Effective date: 20210514 |