JPS5342689A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5342689A JPS5342689A JP11783776A JP11783776A JPS5342689A JP S5342689 A JPS5342689 A JP S5342689A JP 11783776 A JP11783776 A JP 11783776A JP 11783776 A JP11783776 A JP 11783776A JP S5342689 A JPS5342689 A JP S5342689A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- semiconductor device
- layers
- dinensionally
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE: To make highly three-dinensionally integrated diode matrix devices by alternately forming single crystal alumina layers and single crystal Si layers and selectively changing the single crystal Si to SiO2.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11783776A JPS5342689A (en) | 1976-09-30 | 1976-09-30 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11783776A JPS5342689A (en) | 1976-09-30 | 1976-09-30 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5342689A true JPS5342689A (en) | 1978-04-18 |
JPS5549782B2 JPS5549782B2 (en) | 1980-12-13 |
Family
ID=14721471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11783776A Granted JPS5342689A (en) | 1976-09-30 | 1976-09-30 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5342689A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145365A (en) * | 1981-03-05 | 1982-09-08 | Seiko Epson Corp | Semiconductor fixing circuit device |
JPS6235550A (en) * | 1985-08-09 | 1987-02-16 | Agency Of Ind Science & Technol | Manufacture of semiconductor stereoscopic circuit element |
JPH04115565A (en) * | 1990-09-05 | 1992-04-16 | Mitsubishi Electric Corp | Semiconductor memory device |
-
1976
- 1976-09-30 JP JP11783776A patent/JPS5342689A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145365A (en) * | 1981-03-05 | 1982-09-08 | Seiko Epson Corp | Semiconductor fixing circuit device |
JPS6235550A (en) * | 1985-08-09 | 1987-02-16 | Agency Of Ind Science & Technol | Manufacture of semiconductor stereoscopic circuit element |
JPH0519988B2 (en) * | 1985-08-09 | 1993-03-18 | Kogyo Gijutsuin | |
JPH04115565A (en) * | 1990-09-05 | 1992-04-16 | Mitsubishi Electric Corp | Semiconductor memory device |
Also Published As
Publication number | Publication date |
---|---|
JPS5549782B2 (en) | 1980-12-13 |
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