JPS5383587A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5383587A
JPS5383587A JP16073676A JP16073676A JPS5383587A JP S5383587 A JPS5383587 A JP S5383587A JP 16073676 A JP16073676 A JP 16073676A JP 16073676 A JP16073676 A JP 16073676A JP S5383587 A JPS5383587 A JP S5383587A
Authority
JP
Japan
Prior art keywords
side wall
semiconductor device
semiinsulating
island
avoid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16073676A
Other languages
Japanese (ja)
Inventor
Shotaro Umebachi
Atsushi Nagashima
Kota Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16073676A priority Critical patent/JPS5383587A/en
Publication of JPS5383587A publication Critical patent/JPS5383587A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To avoid the direct contact between the side wall part and the wiring metal as well as to reduce the parasitic capacity, by providing a high-resistance epitaxial growth layer at the top and the side wall areas of the island which is formed on the semiinsulating compound semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP16073676A 1976-12-28 1976-12-28 Semiconductor device Pending JPS5383587A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16073676A JPS5383587A (en) 1976-12-28 1976-12-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16073676A JPS5383587A (en) 1976-12-28 1976-12-28 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5383587A true JPS5383587A (en) 1978-07-24

Family

ID=15721335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16073676A Pending JPS5383587A (en) 1976-12-28 1976-12-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5383587A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481087A (en) * 1977-12-12 1979-06-28 Fujitsu Ltd Seiconductor integrated circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836984A (en) * 1971-09-11 1973-05-31
JPS5167076A (en) * 1974-10-29 1976-06-10 Raytheon Co Denkaikokatoranjisutasochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836984A (en) * 1971-09-11 1973-05-31
JPS5167076A (en) * 1974-10-29 1976-06-10 Raytheon Co Denkaikokatoranjisutasochi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481087A (en) * 1977-12-12 1979-06-28 Fujitsu Ltd Seiconductor integrated circuit

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