JPS62889Y2 - - Google Patents

Description

[Detailed description of the invention] This invention rotates an ultra-thin peripheral-edged diamond blade (hereinafter simply referred to as the blade) at high speed using an air spindle with a built-in high-frequency motor. Simply grooving the workpiece,
Or, it relates to a device that accurately sets the mutual distance between the blade and the table on which the workpiece is placed in a dicing machine that performs cutting and grooving (hereinafter simply referred to as dicing) for cutting and separation. .

An outline of dicing a workpiece using a dicing machine will be explained with reference to FIG.

The air spindle 1 is held at a constant distance from the casing 2 by an air bearing (not shown), and a blade 3 is attached to the tip of the air spindle 1 so as to be rotatable at high speed by a motor 4. There is. A workpiece 6 is placed on the table 5, and a dicing process is performed on the workpiece 6 by the blade 3 rotating at high speed.

When performing dicing in this way,
In order to keep the uncut thickness of the workpiece constant after processing, dicing is performed with the top surface of the table 5 as a reference surface and the blade 3 separated from it by a predetermined value. However, since the blade 3 is extremely thin, it easily wears out with use.
It is difficult to always keep the uncut thickness of the workpiece constant. Therefore, it is often necessary to correct the distance between the blade 3 and the top surface of the table 5 so as to keep it constant.

Conventionally, a device as shown in FIG. 1 has been employed for this purpose. The first method is such that a carbon brush 8 inserted into the housing 2 through an insulator 7 is always in contact with the side surface of the air spindle 1 which is insulated by an air bearing by means of a spring 9. ing. An electrode 10 is connected to the spring 9. With this structure, the table 5 rises and the moment it comes into contact with the blade 3, the electrode 10 and the table 5 become electrically connected.
The reference positions of the blade 3 and table 5 are set by the conduction signal. Next, the table 5 is lowered from that position by a predetermined amount, and then the workpiece 6 is subjected to dicing.

In a second conventional method, a spring plate 11 is screwed to the rear end of the housing 2, and its tip is always in contact with the rear end surface of the air spindle 1. The electrode 1 is attached to the spring plate 11.
2 are connected. With such a structure, dicing of the workpiece 6 is performed in the same manner as in the first method.

However, these conventional devices have the following drawbacks. Since the air spindle 1 rotates at a high speed of tens of thousands of revolutions per minute, the air spindle 1
Poor contact occurs between the carbon brush 8 or the spring plate 11, which causes malfunction when setting the reference position. Therefore, in order to minimize contact failure, if the carbon brush 8 or the spring plate 11 is strongly pressed against the air spindle 1, the rotational balance of the air spindle 1 will be disrupted.
It was not possible to expect accurate dicing processing.

The present invention provides a device that overcomes these drawbacks of conventional devices. The present invention will be explained below with reference to FIG.

In Figure 2, the blade 3 is the air spindle 1.
The blade 3 is attached to the left end surface of the table 5.
As is conventional, when the air spindle 1 comes into contact with the air spindle 1, it becomes energized and the height of the air spindle 1 is adjusted using this as the zero point. The air spindle is supported in a casing 2 with an air bearing, and an air cylinder 15 is attached to the right end of the casing 2, and the tip (left end) of the left-facing piston rod 16 is attached to the right end of the casing 2.
Attach the plunger 17 to the
8 is installed opposite to the right end surface of the air spindle 1. A conductive wire 19 is connected to the plunger 17, and the plunger 17 and the detector 18 are made of a conductive material. Here, by sending pressurized air into the right chamber of the air cylinder 15, the detector 1
When the plunger 8 lightly contacts the right end surface of the air spindle 1, the supply of pressurized air is stopped, and it is released to the atmosphere, the plunger 17 is moved back by the spring 20, and the right end surface of the air spindle 1 and the detector 18 are separated. The power is turned off. Only when it is necessary to detect the height of the blade 3, air is supplied to the cylinder 15 to make it energized, and when the zero point detection is completed, the air supply is stopped and the relationship between the air spindle 1 and the detector 18 is severed. .

As explained above, in the present invention, the detector 18 is provided between the air spindle 1 and the casing 2, and the detector 18 is brought into contact with the air spindle 1 only when setting the relative position between the blade 3 and the upper surface of the table 5. As a result, unlike conventional equipment, there is no wear and tear on the detector or poor contact, and the air spindle
Since no contact resistance is applied to the air spindle 1, the rotational balance of the air spindle 1 is not disrupted, and it is therefore possible to perform highly accurate machining.

In addition, in the above embodiment, the air cylinder 15
is provided on the right end surface of the casing 2, and its drive brings the detector 18 into contact with the right end surface of the air spindle 1. However, the present invention is not limited to this, for example. The detector 18 may be provided in the air spindle 1 so that the detector 18 is brought into contact with the cylindrical side surface of the air spindle 1. Further, the detector 18 may be a carbon brush or a spring plate as long as it is made of a material with good conductivity. Furthermore, the drive device for bringing the detector 18 into contact with the air spindle 1 is not limited to the air cylinder, but other drive devices such as a cam mechanism or a solenoid can be used as appropriate.

[Brief explanation of the drawing]

FIG. 1 is a side sectional view of a conventional device, and FIG. 2 is a side sectional view of the present invention. 1...Air spindle, 2...Casing, 3
...Blade, 4...Motor, 15...Drive device, 17...Plunger, 18...Detector.

Claims (1)

[Scope of utility model registration request] A blade attached to the tip of a spindle that is supported by an air bearing and rotates.
In a dicing machine that performs a dicing process on a workpiece placed on a table, a detector provided opposite to the spindle and a reference position between the blade and the table are set. A cutting position detection device comprising: a drive device that drives the cutting position so as to bring it into contact with a spindle.